CN201156159Y - Light shielding kit and positioning fiece - Google Patents
Light shielding kit and positioning fiece Download PDFInfo
- Publication number
- CN201156159Y CN201156159Y CNU2008200067340U CN200820006734U CN201156159Y CN 201156159 Y CN201156159 Y CN 201156159Y CN U2008200067340 U CNU2008200067340 U CN U2008200067340U CN 200820006734 U CN200820006734 U CN 200820006734U CN 201156159 Y CN201156159 Y CN 201156159Y
- Authority
- CN
- China
- Prior art keywords
- photomask
- box
- pedestal
- face
- keeper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a photomask box, in particular to a photomask box with positioning parts. An upper cover body and a lower cover body are combined together to form the photomask box, in which an internal space is formed to contain a photomask; at least one positioning part is arranged at the corner inside the upper or the lower cover body of the photomask box; wherein, the structure of the positioning part comprises a pedestal body and a fixing component; the pedestal body, which is approximately L-shaped, is fixed on each corner inside the upper or the lower cover body of the photomask box by a plurality of supporting points, and the fixing component is arranged on the pedestal body; wherein, the structure of the fixing component comprises an upholding surface and a pressing surface, and when the photomask box bears a photomask and is closed, the upholding surface and pressing surface of the fixing component can be contacted with the photomask and fix the photomask after being closed.
Description
Technical field
The utility model relates to a kind of box for photomask, particularly relevant for a kind of box for photomask with keeper.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to Silicon Wafer (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organism) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, and wherein the purpose of SMIF system is for the storage that reduces semiconductor technology and to transport particulate suffered in the process excessive.
As shown in Figure 1, it is a known box for photomask 1, it is combined by upper cover body 11 and lower cover 12, the position in each corner in upper cover body 11 and lower cover 12 wherein, be provided with a plurality of keepers 13, the mode that this keeper 13 is provided with is for a pair of in twos, and roughly at right angles shape dispose, and the keeper 13 that is disposed at upper cover body 11 and the keeper 13 that is disposed at lower cover 12 also roughly be located at can be corresponding relative position.In the time of in light shield places lower cover 12, the upper cover body 11 and the lower cover 12 of box for photomask 1 cover, and the keeper 13 that is disposed in the box for photomask 1 can hold and withhold light shield, and light shield is fixed in the box for photomask 1, produce vibrations when avoiding mobile box for photomask 1, and cause the light shield in the box for photomask 1 to damage.Wherein, because keeper 13 is to be arranged in the box for photomask 1 in indivedual modes, therefore setting firmly keeper 13 in the upper cover body 11 of box for photomask 1 during with lower cover 12, not only when disposing in twos, easily produce the error of contraposition, dispose on the relative position of keepers 13 at upper cover body 11 and lower cover 12 even, also be easy to generate error, therefore when upper cover body 11 and lower cover 12 cover, easy bit errors because of keeper 13, and cause the light shield compression failure or produce wearing and tearing, and then influence the serviceable life of light shield.
The utility model content
The purpose of this utility model is to provide a kind of box for photomask and keeper thereof, to overcome the defective that exists in the known technology.
For achieving the above object, the box for photomask that the utility model provides, it comprises:
One upper cover body;
One lower cover in order to make up with this upper cover body, forms an inner space and can hold light shield; And at least one keeper, be located at the corner in this upper cover body or this lower cover, in order to fix this light shield, wherein, this keeper comprises:
One pedestal is fixed in the position in each corner in the upper cover body of this box for photomask and the lower cover with at least one strong point, and wherein this pedestal roughly is the L shape; And
One fixation kit is arranged on this pedestal, and this fixation kit comprises that one holds face and and withholds face;
Wherein, when this box for photomask carried a light shield and covers, this of this fixation kit holds face and this withholds face in covering this light shield contact and fixing of Shi Huiyu.
Described box for photomask, wherein this fixation kit can be an elasticity of flexure structure, and the end of one bending is incorporated on this pedestal, and another crooked end then is the elasticity suspended state between this list or a plurality of strong point.
Described box for photomask, wherein this fixation kit can be an elasticity of flexure structure, and the end of its first bending is incorporated on this pedestal, and the end of second bending has one and holds face, and the end of the 3rd bending has the face of withholding.
Described box for photomask, wherein this keeper has at least one fixation kit.
Described box for photomask, wherein this keeper is formed by a macromolecular material.
Described box for photomask, wherein the pedestal of this keeper is fixed on the anchor point set in upper cover body or the lower cover by positioning means.
Described box for photomask, wherein the material of this box for photomask upper cover body or lower cover roughly can be metal material or macromolecular material forms.
Described box for photomask, wherein the metal material of this box for photomask roughly can be stainless steel, aluminium alloy or magnesium alloy.
Described box for photomask, it can be light shield and transmits box or light shield conserving case.
The keeper that is used for above-mentioned box for photomask that the utility model provides, its structure comprises:
One pedestal is fixed in the position in each corner in the upper cover body of this box for photomask and the lower cover with at least one strong point, and wherein this pedestal roughly is the L shape; And
One fixation kit is arranged on this pedestal, and this fixation kit comprises that one holds face and and withholds face; Wherein, when this box for photomask carried a light shield and covers, this of this fixation kit holds face and this withholds face in covering this light shield contact and fixing of Shi Huiyu.
Effect of the present utility model is as follows:
1) its keeper can reduce the difficulty of contraposition in the manufacture process.
2) its keeper can reduce the error of contraposition.
3) its keeper can improve the easness that light shield imports box for photomask.
4) the effectively fixing light shield of its keeper reducing the friction of light shield and box for photomask, and then reduces grit formation and influences yield.
Description of drawings
Fig. 1 is the synoptic diagram of known technology box for photomask.
Fig. 2 is an embodiment synoptic diagram of the utility model box for photomask.
Fig. 3 A to Fig. 3 D is an embodiment synoptic diagram of the utility model keeper.
Fig. 4 A to Fig. 3 C is an embodiment synoptic diagram of the utility model keeper pedestal fixed form.
Primary clustering symbol description in the accompanying drawing:
1 light shield transmits box
11 upper cover body
12 lower covers
13 keepers
2 box for photomask
21 upper cover body
22 lower covers
3 keepers
31 pedestals
311 strong points
312 fasten ring
313 sleeve joint holes
314 pilot holes
3141 locking parts
The 32a fixation kit
The 32b fixation kit
The 32c fixation kit
The 32d fixation kit
321a holds face
321b holds face
321d holds face
322a withholds face
322b withholds face
322d withholds face
33c elasticity of flexure structure
33d elasticity of flexure structure
The 331c crooked end
331d first crooked end
The 332c crooked end
332d second crooked end
333d the 3rd crooked end
Embodiment
The box for photomask that the utility model provides with keeper, its box for photomask is to be combined by upper cover body and lower cover, form an inner space and can hold light shield, corner in the upper cover body of this box for photomask or the lower cover is provided with at least one keeper, wherein the structure of this keeper comprises pedestal and fixation kit, this pedestal is the position that is fixed in each corner in the upper cover body of box for photomask and the lower cover with a plurality of strong points, and roughly be the L shape, this fixation kit then is arranged on the pedestal, wherein the structure of fixation kit comprises that one holds face and and withholds face, when box for photomask carried a light shield and covers, the face that holds of this fixation kit and the face of withholding were in covering this light shield contact and fixing of Shi Huiyu.
Because the box for photomask with keeper that the utility model provides, some light shields that wherein used or the detailed manufacturing or the processing procedure of box for photomask are to utilize existing techniques in realizing, so in following explanation, do not do complete description.And in the accompanying drawing, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with the utility model feature.
Fig. 2 is a preferred embodiment synoptic diagram of the utility model box for photomask, box for photomask 2 is combined by upper cover body 21 and lower cover 22, form an inner space and can hold light shield, corners in the upper cover body 21 of this box for photomask 2 or the lower cover 22 are provided with at least one keeper 3 in order to fixing light shield, and this keeper 3 is formed by macromolecular material, the material of box for photomask 2 then roughly can be metal material or macromolecular material institute shape, wherein metal material roughly can be stainless steel, aluminium alloy or magnesium alloy, and above-mentioned box for photomask 2 can be light shield transmission box or light shield conserving case.
Fig. 3 A is a preferred embodiment synoptic diagram of the utility model keeper, the structure of keeper 3 comprises pedestal 31 and fixation kit 32a, the fixed form of this pedestal 31 is to be fixed in the upper cover body 21 of box for photomask 2 and the position in lower cover 22 interior each corner with a plurality of strong points 311, and this pedestal 31 roughly is the L shape, therefore can increase the symmetry of keeper 3, reduce the difficulty of contraposition in the manufacture process, or the error of reduction contraposition, this fixation kit 32a then is arranged on the pedestal 31, wherein the structure of fixation kit 32a comprises that one holds face 321a and and withholds face 322a, when box for photomask 2 carries light shields and covers, the face that the holds 321a of this fixation kit 32a has the function with light shield correcting and location, and withhold face 322a in covering this light shield contact and fixing of Shi Huiyu, in the process of transporting, produce collision and the infringement light shield to avoid light shield.
Fig. 3 B is another preferred embodiment synoptic diagram of the utility model keeper, the structure of this fixation kit 32b comprises that one holds face 321b and and withholds face 322b, wherein holding face 321b is the plane that is connected with the face 322b of withholding, and hold face 321b and be about 0 degree to about 180 degree with the angle of withholding face 322b, when box for photomask 2 carries light shields and covers, the face that the holds 321b of this fixation kit 32b has the function with light shield correcting and location, and withholds face 322b in covering this light shield contact and fixing of Shi Huiyu.
Fig. 3 C is the another preferred embodiment synoptic diagram of the utility model keeper, this fixation kit 32c can be an elasticity of flexure structure 33c, the end 331c of one bending is incorporated on this pedestal 31, and another crooked end 332c then is the elasticity suspended state between this list or a plurality of strong point 311.
Fig. 3 D is a preferred embodiment synoptic diagram again of the utility model keeper, its fixation kit 32d can be an elasticity of flexure structure 33d, the end 331d of its first bending is incorporated on this pedestal 31, the end 332d of second bending has one and holds face 321d, and the end 333d of the 3rd bending has the face of withholding 322d.
Fig. 4 A is another preferred embodiment synoptic diagram of pedestal fixed form of the utility model keeper, the pedestal 31 of this keeper 3 is to pass through positioning means, be fixed on the anchor point set in upper cover body 21 or the lower cover 22, the positioning means of its pedestal 31 is the fastening ring 312 that is arranged at this pedestal 31, to be fixedly clamped on anchor point, make this keeper 3 be stationary state.
Fig. 4 B is the another preferred embodiment synoptic diagram of the pedestal fixed form of the utility model keeper, the pedestal 31 of this keeper 3 is to pass through positioning means, be fixed on the anchor point set in upper cover body 21 or the lower cover 22, the positioning means of its pedestal 31 is the location division of tool sleeve joint hole 313, with the sleeve joint hole 313 socket anchor points that utilize the location division.
Fig. 4 C is the pedestal fixed form preferred embodiment synoptic diagram again of the utility model keeper, the pedestal 31 of this keeper 3 passes through positioning means, be fixed on the anchor point set in upper cover body 21 or the lower cover 22, the positioning means of its pedestal 31 is the pilot hole 314 that is arranged at this pedestal 31, wears attached being locked on the anchor point for fixation kit 32; The positioning means of its pedestal 31 also can be locking part 3141 is penetrated pilot hole 314 by the end face of base portion, so that keeper 3 is locked on the anchor point; The positioning means of its pedestal 31 also can be locking part 3141 is penetrated pilot hole 314 by the bottom surface of base portion, so that keeper 3 is locked on the anchor point.Wherein above-mentioned locking part 3141 can be rivet, screw, also or roughly made by metal material.
Pedestal fixed form preferred embodiment (not being shown among the figure) again according to the utility model keeper, the pedestal 31 of this keeper 3 passes through positioning means, be fixed on the anchor point set in upper cover body 21 or the lower cover 22, the positioning means of its pedestal 31 is by adhesive agent that keeper 3 is cemented on anchor point.
In sum, the utility model is improved at known technology.The pedestal of its box for photomask keeper roughly is the L shape, except increasing the symmetry of buckling piece, reduce the difficulty of contraposition in the manufacture process, or reduce outside the error of contraposition, also can improve the easness that light shield imports box for photomask, and effectively fixing light shield, to reduce the friction of light shield and box for photomask, and then reduce grit and form and influence yield, make the light shield life-span be improved.
The above is preferred embodiment of the present utility model only, is not in order to limit claim scope of the present utility model; The equivalence that those skilled in the art are finished under the spirit that the utility model disclosed changes or modifies, and all should be included in the claim scope of application.
Claims (10)
1, a kind of box for photomask comprises:
One upper cover body;
One lower cover with this upper cover body combination, forms an inner space and can hold light shield; And
At least one keeper is located at the corner in this upper cover body or this lower cover, fixes this light shield, and wherein, this keeper comprises:
One pedestal is fixed in the position in each corner in the upper cover body of this box for photomask and the lower cover with at least one strong point, it is characterized in that this pedestal roughly is the L shape; And
One fixation kit is arranged on this pedestal, and this fixation kit comprises that one holds face and and withholds face;
Wherein, this box for photomask carries a light shield and when covering, and this of this fixation kit holds that face and this withhold that face contacts with this light shield when covering and be fixing.
2, box for photomask as claimed in claim 1 is characterized in that, wherein this fixation kit is an elasticity of flexure structure, and the end of one bending is incorporated on this pedestal, and another crooked end then is the elasticity suspended state between this list or a plurality of strong point.
3, box for photomask as claimed in claim 1 is characterized in that, wherein this fixation kit is an elasticity of flexure structure, and the end of its first bending is incorporated on this pedestal, and the end of second bending has one and holds face, and the end of the 3rd bending has the face of withholding.
4, box for photomask as claimed in claim 1 is characterized in that, wherein this keeper has at least one fixation kit.
5, box for photomask as claimed in claim 1 is characterized in that, wherein this keeper is formed by a macromolecular material.
6, box for photomask as claimed in claim 1 is characterized in that, wherein the pedestal of this keeper sees through positioning means, is fixed on the anchor point set in upper cover body or the lower cover.
7, box for photomask as claimed in claim 1 is characterized in that, wherein the material of this box for photomask upper cover body or lower cover is roughly metal material or macromolecular material.
8, box for photomask as claimed in claim 7 is characterized in that, wherein the metal material of this box for photomask is roughly stainless steel, aluminium alloy or magnesium alloy.
9, box for photomask as claimed in claim 1 is characterized in that, for light shield transmits box or light shield conserving case.
10, a kind of keeper that is used for box for photomask, its structure comprises:
One pedestal is fixed in the position in each corner in the upper cover body of this box for photomask and the lower cover with at least one strong point, and this pedestal roughly is the L shape; And
One fixation kit is arranged on this pedestal, and this fixation kit comprises that one holds face and and withholds face; Wherein, this box for photomask carries a light shield and when covering, and this of this fixation kit holds that face and this withhold that face contacts with this light shield when covering and be fixing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200067340U CN201156159Y (en) | 2008-02-18 | 2008-02-18 | Light shielding kit and positioning fiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200067340U CN201156159Y (en) | 2008-02-18 | 2008-02-18 | Light shielding kit and positioning fiece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201156159Y true CN201156159Y (en) | 2008-11-26 |
Family
ID=40103939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200067340U Expired - Lifetime CN201156159Y (en) | 2008-02-18 | 2008-02-18 | Light shielding kit and positioning fiece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201156159Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101927877A (en) * | 2009-06-23 | 2010-12-29 | 信越聚合物株式会社 | Large precision member storage container |
| CN102789132A (en) * | 2011-01-28 | 2012-11-21 | 家登精密工业股份有限公司 | Extreme ultraviolet light photo mask storage delivery box having fixation structure |
| CN102854739A (en) * | 2011-06-29 | 2013-01-02 | 株式会社荒川树脂 | Photomask clamp of photomask box |
| CN103982587A (en) * | 2013-02-07 | 2014-08-13 | 上海微电子装备有限公司 | Flexible supporting device and flexible supporting pieces of photoetching machine |
-
2008
- 2008-02-18 CN CNU2008200067340U patent/CN201156159Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101927877A (en) * | 2009-06-23 | 2010-12-29 | 信越聚合物株式会社 | Large precision member storage container |
| CN102789132A (en) * | 2011-01-28 | 2012-11-21 | 家登精密工业股份有限公司 | Extreme ultraviolet light photo mask storage delivery box having fixation structure |
| CN102789132B (en) * | 2011-01-28 | 2014-07-16 | 家登精密工业股份有限公司 | Extreme ultraviolet light photo mask storage delivery box having fixation structure |
| CN102854739A (en) * | 2011-06-29 | 2013-01-02 | 株式会社荒川树脂 | Photomask clamp of photomask box |
| CN103982587A (en) * | 2013-02-07 | 2014-08-13 | 上海微电子装备有限公司 | Flexible supporting device and flexible supporting pieces of photoetching machine |
| CN103982587B (en) * | 2013-02-07 | 2016-06-01 | 上海微电子装备有限公司 | The flexible supporting device of lithography machine and flexible strutting piece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20081126 |
|
| CX01 | Expiry of patent term |