CN201107546Y - Metal light shield box and filtration apparatus thereof - Google Patents
Metal light shield box and filtration apparatus thereof Download PDFInfo
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- CN201107546Y CN201107546Y CNU2007201255889U CN200720125588U CN201107546Y CN 201107546 Y CN201107546 Y CN 201107546Y CN U2007201255889 U CNU2007201255889 U CN U2007201255889U CN 200720125588 U CN200720125588 U CN 200720125588U CN 201107546 Y CN201107546 Y CN 201107546Y
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- photomask
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Abstract
The utility model provides a metal photomask box with a filtering device and airtight effect. The photomask box is combined by an upper metal cover body and a lower metal cover body to form an inside space to be able to hold the photomask. The side of the upper metal cover body or the lower metal cover body of the photomask box is provided with at least one through hole used for connecting the inside space and the outside space of the photomask box and a filtering device used for covering the through hole.
Description
Technical field
The utility model relates to a kind of box for photomask, particularly relevant for a kind of metal box for photomask and filtration unit thereof.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to Silicon Wafer (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organism) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, therefore in general wafer preparation process, the environment that dust free room (cleanroom) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.
Therefore, modern semiconductor fabrication process all utilizes resistant to pollution box for photomask (reticle pod) to carry out the preservation and the transportation of light shield, so that light shield remaining clean.Box for photomask is to be used to deposit light shield in the semiconductor fabrication process, in order to carrying and the transmission of light shield between board, and the contacting of isolated light shield and atmosphere, avoid light shield to be changed by contaminating impurity.Therefore, in advanced person's semiconductor factory, the cleanliness factor that can require light shield to transmit box usually will meet machinery standard interface (Standard MechanicalInterface; SMIF), that is to say that the maintenance cleanliness factor is below Class1.So charging into gas in box for photomask is one of means that solve at present.
Yet, for the yield that further promotes product and reduce the cost of making, except the standard-required that reaches cleanliness factor, also to overcome because external gas for the pollution of light shield.External gas like this is except atmosphere, also have two sources, the first stems from the made light shield of macromolecular material and transmits the gas (outgasing) that box itself is disengaged, and it two is to stem from the volatilization gas that the microchemistry solution that remains in the light shield surface is produced.These non-expectation gases can produce atomizing to the surface of light shield, make light shield to re-use and beyond economic repair awkward situation, make manufacturing cost increase.Charging into gas in light shield transmission box is one of means that solve at present the light shield atomizing, wherein how to keep charging into the cleanliness factor of gas, is an important subject under discussion.
Moreover, being constituted with macromolecule material because known box for photomask is many, this kind macromolecule material has the advantage that moulding is easy, cheap and can form the transparent body.The high macromolecule material of this kind insulation resistance easily because friction or dial from and the operating environment that produces static, especially dust free room need keep than low humidity, make the box for photomask of macromolecule material be very easy to produce and stored charge.The static on light shield surface attracts airborne contaminate particulate easily, also can cause the metal wire on the light shield static discharge (electrostatic discharge, ESD) effect to occur what is more.The immediate current that static discharge produced can cause spark (spark) or electric arc (arc), and in spark and electric arc generation, powerful electric current is accompanied by high temperature, causes the oxidation and the dissolving of metal wire, thereby has changed the pattern of light shield.
Having at present manyly at the method that static discharge solved, at first is to improve operating environment, makes to keep suitable humidity, operating personnel in the air and wear the clothing of tool ground connection effect or use the ion fan to eliminate static in the environment.But change operating environment have many unpredictable changes because of, have no idea to solve fully the injury of static to light shield.
The utility model content
The purpose of this utility model is to provide a kind of metal box for photomask and filtration unit thereof, so that known technology is improved.
Be last realization above-mentioned purpose, the utility model provides the metal box for photomask, and it comprises:
One metal top cover body;
One metal lower cover forms an inner space and can hold light shield in order to make up with this metal top cover body;
At least one through hole is located at the side of this metal top cover body or this metal lower cover, in order to be communicated with the space outerpace of this inner space and box for photomask; And
At least one filtration unit covers this through hole.
Described metal box for photomask, wherein this filtration unit comprises:
One elastic external member, in order to be arranged in this through hole, this elastic external member has one first opening corresponding to this through hole;
One holder is arranged in this elastic external member, and wherein this holder has at least one hole, and this hole is located at the position corresponding to first opening of this elastic external member; And
One filtration membrane is located in the position that has this hole on this holder.
Described metal box for photomask, wherein this holder partly is made up of one first part and one second.
Described metal box for photomask is characterized in that, wherein this filtration membrane is that clamping (sandwiched) is between this first part and second part.
Described metal box for photomask, wherein partly one of them has a depressed part towards between this first and second part, in order to form ccontaining this filtration membrane in a space to first of this holder part and second at least.
Described metal box for photomask, wherein partly one of them has a depressed part to first of this holder part and second at least, another then has a protuberance, and this depressed part and this protuberance are towards between this first and second part, and this depressed part is greater than this protuberance.
Described metal box for photomask, wherein this first part and second portion are symmetry and one-body molded.
Described metal box for photomask, wherein this first part and second portion are the assembly of two separation.
Described metal box for photomask, wherein this first part and second portion are two identical assemblies.
Described metal box for photomask, wherein this first part and second portion respectively have this hole.
Described metal box for photomask, wherein this elastic external member first opening around have a teat.
Described metal box for photomask, this elastic external member are the through holes that is arranged in this box for photomask with this teat.
Described metal box for photomask, wherein the teat of this elastic external member comprises a groove in addition, and this teat is the through hole that is arranged in this box for photomask with this groove.
Described metal box for photomask wherein comprises at least one abutment wall in addition and is located at around this through hole, and wherein this elastic external member is arranged in this abutment wall.
Described metal box for photomask wherein comprises at least one abutment wall in addition and is located at around this through hole, and wherein this elastic external member is the abutment wall that is arranged in this box for photomask with this teat.
Described metal box for photomask, wherein this abutment wall is one-body molded with this upper cover body or lower cover.
Described metal box for photomask wherein comprises at least one abutment wall in addition and is located at around this through hole, and wherein this abutment wall can be welded in upper cover body or lower cover.
Described metal box for photomask, wherein this filtration unit comprises a filter and a hollow frame is arranged in this abutment wall, makes this filter be located between this framework and this box for photomask.
Described metal box for photomask, wherein this abutment wall is to extend towards this inner space.
Described metal box for photomask, wherein this abutment wall is to extend towards this space outerpace.
Described metal box for photomask, wherein this elastic external member comprises second opening greater than this first opening in addition, and this second around openings is provided with the holding section, in order to hold this holder.
Described metal box for photomask, wherein this elastic external member is formed by a macromolecular material.
Described metal box for photomask, wherein this holder is a metal material.
Described metal box for photomask, wherein this filtration membrane is that composite fibre is made.
The filtration unit that the utility model provides, in order to covering the through hole of a box for photomask, this through hole is in order to the inner space that is communicated with this box for photomask and the space outerpace of box for photomask, and wherein, this filtration unit comprises:
One elastic external member, in order to be arranged in this through hole, this elastic external member has one first opening corresponding to this through hole;
One holder is arranged in this elastic external member, and wherein this holder has at least one hole, and this hole is located at the position corresponding to first opening of this elastic external member; And
One filtration membrane is located in the position that has this hole on this holder.
The metal box for photomask that the utility model provides also comprises:
One metal top cover body has an edge and defines an opening;
One metal lower cover form an inner space and can hold light shield, and this lower cover also has an edge and defines an opening relative with the opening of this upper cover body in order to make up with this metal top cover body;
At least one Airtight gasket comprises a groove, and this Airtight gasket is arranged on this upper cover body or the edge of lower cover by this groove and makes this inner space become the space of sealing.
Described metal box for photomask, wherein this groove has openend and bottom, and the width of openend is narrow than the bottom.
Described metal box for photomask, wherein this Airtight gasket is to be fixed on this upper cover body or the edge of lower cover by a binder.
Described metal box for photomask, wherein this Airtight gasket is to be fixed on this upper cover body or the edge of lower cover by an adhesive tape.
Described metal box for photomask, wherein this Airtight gasket is roughly made by macromolecule resin.
Described metal box for photomask, wherein this Airtight gasket is roughly made by conducting resinl.
Described metal box for photomask, wherein the material of this metal box for photomask is roughly stainless steel series or aluminium alloy, magnesium alloy.
Described metal box for photomask wherein comprises a buckling piece in addition and is located in this upper cover body or the lower cover.
Described metal box for photomask, wherein this buckling piece structure comprises:
One pedestal is fixed in the position in each corner in the metal top cover body of this box for photomask and the metal lower cover with a plurality of strong points;
One elasticity of flexure assembly, the end of one bending are incorporated on this pedestal, and another crooked end then is the elasticity suspended state between this list or a plurality of strong point, and comprise that further one holds face and and withholds face;
Wherein, when this box for photomask carried a light shield and covers, this of this elasticity of flexure assembly holds face and this withholds face in covering this light shield contact and fixing of Shi Huiyu.
By enforcement of the present utility model, can avoid designing problems such as complexity, and preferable rate of pressurization can be provided again, make box for photomask both have the advantage that prevents static discharge, it is good and do not worry problem with high costs to have airtight effect again.
Description of drawings
Figure 1A and Figure 1B are known technologies, are a kind of synoptic diagram of metal box for photomask.
Fig. 1 C is preferred embodiment of the present utility model, is the synoptic diagram of the protruding pin of a kind of metal box for photomask.
Fig. 2 A is preferred embodiment of the present utility model, is a kind of synoptic diagram of filtration unit.
Fig. 2 B is preferred embodiment of the present utility model, is a kind of synoptic diagram of elastic external member.
Fig. 2 C is preferred embodiment of the present utility model, is a kind of synoptic diagram of holder.
Fig. 3 A to Fig. 3 C is preferred embodiment of the present utility model, the synoptic diagram of establishing for box for photomask and filtration unit card.
Fig. 4 A is preferred embodiment of the present utility model, is the synoptic diagram of a kind of box for photomask and Airtight gasket.
Fig. 4 B is the sectional view of preferred embodiment of the present utility model, is a kind of synoptic diagram of Airtight gasket.
Fig. 4 C is preferred embodiment of the present utility model, is the synoptic diagram of a kind of box for photomask and Airtight gasket.
Fig. 5 A to Fig. 5 C is preferred embodiment of the present utility model, is a kind of synoptic diagram of buckling piece.
Primary clustering description of symbols in the accompanying drawing:
1 box for photomask
11 metal top cover bodies
111 metal top cover body edges
112 locking holes
12 metal lower covers
121 metal lower cover edges
122 locking holes
13 through holes
131 abutment walls
14 engaging mechanisms
15 snap close pieces
16 planks
17 protruding pin
18 Airtight gaskets
181 grooves
1811 openends
1812 bottoms
182 air packing ring support ears
2 filtration units
21 elastic external members
211 first openings
212 second openings
213 teats
The 213a groove
214 holding sections
22 holders
221 holes
222 first partly
223 second partly
224 depressed parts
225 protuberances
23 filtration membranes
3 clinching parts
31 pedestals
311 strong points
312 hold face
313 withhold face
32 elasticity of flexure assemblies
Embodiment
The utility model is a kind of metal box for photomask that has filtration unit and have airtight effect.Box for photomask is to be combined by metal top cover body and metal lower cover, form an inner space and can hold light shield, the metal top cover body of this box for photomask or this metal lower cover side are provided with at least one through hole, in order to the inner space and the space outerpace of connection box for photomask, and a filtration unit covers this through hole.This filtration unit can be one of the forming, or is made of a plurality of parts.According to a preferred embodiment of the present invention, this filtration unit can comprise elastic external member, holder and filtration membrane, elastic external member is in order to be arranged on this through hole, this elastic external member has first opening corresponding to through hole, holder is arranged in the elastic external member, and have at least one hole, this hole is located at the position corresponding to first opening of elastic external member, and filtration membrane is located in the position that has this hole on this holder.
In addition, the metal top cover body of metal box for photomask has an edge and defines an opening, the metal lower cover also has an edge and defines an opening relative with the opening of metal top cover body, and be provided with an Airtight gasket in the edge of upper cover body or the edge of lower cover, make this inner space become the space of sealing, and Airtight gasket be with the mode that card is established be fixed on upper cover body or the edge of lower cover or on.Therefore, the metal box for photomask that the utility model provides can reduce electric charge accumulation, and prevents that static is to injury that light shield caused.
Box for photomask of the present utility model can produce collision and the infringement light shield to avoid light shield by withholding fixedly light shield of device in the process of transporting.
Filtration unit of the present utility model can be used to the micronic dust in the filtered air, is polluted to avoid light shield.
Filtration unit of the present utility model can be used to the micronic dust in the filtered air, to keep the cleanliness factor in the box for photomask box.
Filtration unit of the present utility model utilizes the card mode of establishing to be located in the box for photomask, produces to avoid particulate, reduces pollution source.
Gas check of the present utility model, make the metal box for photomask lid covers up and down the time, have preferable sealing property.
Gas check of the present utility model can keep the cleanliness factor of gas in the box for photomask, is polluted to avoid light shield.
Because the utility model is to disclose a kind of structure with box for photomask of filtration unit, some light shields that wherein used or the detailed manufacturing or the processing procedure of box for photomask are to utilize known technology to reach, so in following explanation, do not do complete description.And the accompanying drawing in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with the utility model feature.
The utility model provides a kind of metal box for photomask, in order to solving the problem of static discharge, yet, make with macromolecular material because general box for photomask is many, therefore box for photomask lid covers up and down the time, box for photomask has elasticity, easily makes lid driving fit up and down.When using metal material to make box body, the upper and lower covers driving fit is difficult for, and needs to do special processing at the edge of lid, makes lid have the part of interlock, to reach the driving fit of upper and lower covers.Yet, on the lid of metal box for photomask, do special processing, comparatively the complexity, the cost of required cost is also higher in design.
Figure 1A and Figure 1B are preferred embodiment synoptic diagram of the utility model metal box for photomask, metal box for photomask 1 is to be combined by metal top cover body 11 and metal lower cover 12, form the inner space that can hold light shield, and the metal material of this box for photomask 1 can be for example stainless steel, aluminium alloy or magnesium alloy.The metal top cover body 11 of box for photomask 1 or the side of metal lower cover 12 are provided with at least one through hole 13, in order to being communicated with the inner space and the space outerpace of box for photomask 1, and cover on the through hole 13 with filtration unit 2.In addition, on the side of metal box for photomask 1, comprise at least one engaging mechanism 14, at least one snap close piece 15, at least one plank 16 or at least one protruding pin 17 (please refer to Fig. 1 C) in addition, and in the upper cover body 11 or lower cover 12 of metal box for photomask 1, other is provided with a buckling piece 3.Engaging mechanism 14 is in order to connect metal top cover body 11 and metal lower cover 12; Snap close piece 15 is in order to fastening metal top cover body 11 and metal lower cover 12, and is formed by a macromolecular material; Plank 16 and protruding pin 17 usefulness in addition, also can be pasted label, so that the content of identification box for photomask 1 so that but box for photomask 1 vertical type is put on plank 16.
Fig. 2 A is a preferred embodiment synoptic diagram of the utility model filtration unit, and filtration unit 2 comprises elastic external member 21, holder 22 and filtration membrane 23.Elastic external member 21 (please refer to Fig. 2 B) is in order on the through hole 13 that is arranged in box for photomask 1, this elastic external member 21 has first opening 211 and second opening 212, and first opening 211 is less than second opening 212, it is corresponding and be arranged on the through hole 13 to be provided with a teat 213 around first opening 211, be provided with a holding section 214 around second opening 212, in order to holding holder 22, and elastic external member 21 is formed by a macromolecular material.Holder 22 (please refer to Fig. 2 C) is arranged in the elastic external member 21 and has at least one hole 221, this hole 221 is located at the position corresponding to elastic external member 21 first openings 211, holder 22 is made up of one first part, 222 and 1 second 223 of parts, its first part 222 and second portion 223 respectively have hole 221, its first part 222 and second portion 223 can be the assembly of symmetry and integrated assembly or two separation, also can be two identical assemblies, at least one of them has a depressed part 224 to first part, 222 and second part 223 of holder 22, another then has a protuberance 225, and holder 22 is that metal material is made.Filtration membrane 23 clampings (sandwiched) in holder 22 first partly 222 and second portion 223 between, and be located in the position that has this hole 221 on the holder 22, and filtration membrane 23 is that composite fibre is made.
One preferred embodiment of holder clamping (sandwiched) filtration membrane that the utility model provides, holder 22 first partly 222 and second portion 223 all have depressed part 224 or one of them and have depressed part 224 towards between first 222 and second part 223, in order to form one can ccontaining filtration membrane 23 the space.The utility model provides another preferred embodiment of holder clamping (sandwiched) filtration membrane in addition, one of them has a depressed part 224 at least for first part 222 of holder 22 and second portion 223, another then has a protuberance 225, depressed part 224 and protuberance 225 are all towards between first 222 and the second portion 223, and depressed part 224 is greater than protuberance 225, in order to clamping and fixedly filtration membrane 23 in wherein.
Fig. 3 A is the preferred embodiment synoptic diagram that the utility model box for photomask and filtration unit card are established, the elastic external member 21 of filtration unit 2 is arranged on the through hole 13 of box for photomask 1 with its teat 213, and its teat 213 has a groove 213a, this teat 213 is to be arranged on the through hole 13 of this box for photomask with this groove 213a, in this way filtration unit 2 is arranged on the box for photomask 1.Fig. 3 B is another preferred embodiment synoptic diagram that the utility model box for photomask and filtration unit card are established, be provided with at least one abutment wall 131 around the through hole 13 of box for photomask 1, elastic external member 21 is arranged on the abutment wall 131 of box for photomask 1 with teat 213, wherein, abutment wall 131 is one-body molded with the upper cover body 21 or the lower cover 22 of box for photomask 1, or can be welded in addition on the box for photomask 1, and abutment wall 131 can extend towards the inner space of box for photomask 1.Fig. 3 C is the another preferred embodiment synoptic diagram that the utility model box for photomask and filtration unit card are established, and abutment wall 131 can extend towards the space outerpace of box for photomask 1.
Another preferred embodiment (not being shown among the figure) according to the present invention, the filtration fraction of this filtration unit and be arranged in the part of this box for photomask also can be integrally formed.The another preferred embodiment (not being shown among the figure) according to the present invention, this filtration unit comprises a filter and a hollow frame, this filter and this framework can be arranged in this through hole 13 abutment wall 131 on every side, make this filter be located between this framework and this box for photomask, cover this through hole 13 with this, reach the effect of filtration.
Fig. 4 A is another preferred embodiment synoptic diagram of the utility model metal box for photomask, the metal top cover body 11 of metal box for photomask 1 has an edge 111 and defines an opening, metal lower cover 12 also has an edge 121 and defines an opening relative with the opening of metal top cover body 11, and be provided with an Airtight gasket 18 in the edge 111 of upper cover body 11 or the edge 121 of lower cover 12, make this inner space become the space of sealing, and this Airtight gasket 18 is roughly made by macromolecule resin or conducting resinl, and wherein Airtight gasket 18 mode of establishing with card is fixed on the upper cover body 11 or the edge 111 or 121 of lower cover 12.According to another preferred embodiment of the utility model, this Airtight gasket 18 also can directly be located on the edge 111 or the edge 121 of lower cover 12 of this metal top cover body 11.
Wherein, this Airtight gasket 18 includes a groove 181, Airtight gasket 18 is to be arranged on the upper cover body 11 or the edge 111 or 121 of lower cover 12 by groove 181, wherein, groove 181 has openend 1811 and bottom 1812, and the width of openend 1811 is narrow (please refer to Fig. 4 B) than bottom 1812, this Airtight gasket 18 can be directly by above structure with edge 111 or 121 fluid-tight engagement.
The utility model provides an Airtight gasket to be fixed in another preferred embodiment on upper cover body or the lower cover edge, and this Airtight gasket 18 is to be fixed on the upper cover body 11 or the edge 111 or 121 of lower cover 12 by a binder.
The utility model provides an Airtight gasket to be fixed in a preferred embodiment again on upper cover body or the lower cover edge, please refer to Fig. 4 C, wherein the side of upper cover body 11 or lower cover 12 has several locking holes 112 or 122, then have several ears 182 on the Airtight gasket 18, and locking hole 112 or 122 can be corresponding with seat ear 182, and this Airtight gasket 18 is by a locking part this Airtight gasket 18 to be fixedly arranged on the upper cover body 11 or the edge 111 or 121 of lower cover 12.
Fig. 5 A, Fig. 5 B and Fig. 5 C are preferred embodiment synoptic diagram of the utility model buckling piece, and the feature of buckling piece 3 structures comprises a pedestal 31 and at least one elasticity of flexure assembly 32, and this buckling piece 3 is formed by macromolecular material.Pedestal 31 is to be fixed in the metal top cover body 11 of this box for photomask 1 and the position in metal lower cover 12 interior each corner with a plurality of strong points 311, and its pedestal 31 is roughly a pair of in twos (please refer to Fig. 5 A).The end of elasticity of flexure assembly 32 one bendings is incorporated on the pedestal 31, and another crooked end then is the elasticity suspended state between odd number or a plurality of strong points 311, and elasticity of flexure assembly 32 comprises that further one holds face 312 and and withholds face 313.Wherein, when box for photomask 1 carries a light shield and covers, the face that holds 312 of this elasticity of flexure assembly 32 has the function with light shield correcting and location, and withholds that face 313 can contact with light shield and fixing when covering, and damages light shield to avoid light shield to produce collision in the process of transporting.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description should be understood and be implemented for those skilled in the art, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the application's the claim scope.
Claims (33)
1, a kind of metal box for photomask is characterized in that, comprises:
One metal top cover body;
One metal lower cover in order to make up with this metal top cover body, forms an inner space and can hold light shield;
At least one through hole is located at the side of this metal top cover body or this metal lower cover, is communicated with the space outerpace of this inner space and box for photomask; And
At least one filtration unit covers this through hole.
2, metal box for photomask according to claim 1 is characterized in that, wherein this filtration unit comprises:
One elastic external member is arranged in this through hole, and this elastic external member has one first opening corresponding to this through hole;
One holder is arranged in this elastic external member, and wherein this holder has at least one hole, and this hole is located at the position corresponding to first opening of this elastic external member; And
One filtration membrane is located in the position that has this hole on this holder.
3, metal box for photomask according to claim 2 is characterized in that, wherein this holder partly is made up of one first part and one second.
4, metal box for photomask according to claim 3 is characterized in that, wherein this filtration membrane is held between this first part and second part.
5, metal box for photomask according to claim 4 is characterized in that, wherein partly one of them has a depressed part towards between this first and second part to first of this holder part and second at least, forms ccontaining this filtration membrane in a space.
6, metal box for photomask according to claim 4, it is characterized in that, wherein partly one of them has a depressed part to first of this holder part and second at least, another then has a protuberance, this depressed part and this protuberance are towards between this first and second part, and this depressed part is greater than this protuberance.
7, metal box for photomask according to claim 3 is characterized in that, wherein this first part and second portion are symmetry and one-body molded.
8, metal box for photomask according to claim 3 is characterized in that, wherein this first part and second portion are the assembly of two separation.
9, metal box for photomask according to claim 3 is characterized in that, wherein this first part and second portion are two identical assemblies.
10, metal box for photomask according to claim 3 is characterized in that, wherein this first part and second portion respectively have this hole.
11, metal box for photomask according to claim 2 is characterized in that, wherein this elastic external member first opening around have a teat.
12, metal box for photomask according to claim 11 is characterized in that, this elastic external member is arranged in the through hole of this box for photomask with this teat.
13, metal box for photomask according to claim 11 is characterized in that, the teat of this elastic external member comprises a groove in addition, and this teat is arranged in the through hole of this box for photomask with this groove.
14, metal box for photomask according to claim 2 is characterized in that, other comprises at least one abutment wall and is located at around this through hole, and wherein this elastic external member is arranged in this abutment wall.
15, metal box for photomask according to claim 11 is characterized in that, other comprises at least one abutment wall and is located at around this through hole, and wherein this elastic external member is arranged in the abutment wall of this box for photomask with this teat.
16, according to claim 14 or 15 described metal box for photomask, it is characterized in that wherein this abutment wall is one-body molded with this upper cover body or lower cover.
17, metal box for photomask according to claim 1 is characterized in that, other comprises at least one abutment wall and is located at around this through hole, and wherein this abutment wall is welded in upper cover body or lower cover.
18, metal box for photomask according to claim 1 is characterized in that, wherein this filtration unit comprises a filter and a hollow frame is arranged in this abutment wall, and this filter is located between this framework and this box for photomask.
According to claim 14,15 or 17 described metal box for photomask, it is characterized in that 19, wherein this abutment wall extends towards this inner space.
According to claim 14,15 or 17 described metal box for photomask, it is characterized in that 20, wherein this abutment wall extends towards this space outerpace.
21, metal box for photomask according to claim 2 is characterized in that, wherein this elastic external member comprises second opening greater than this first opening, and this second around openings is provided with the holding section, holds this holder.
22, metal box for photomask according to claim 2 is characterized in that, wherein this elastic external member is a macromolecular material.
23, metal box for photomask according to claim 2 is characterized in that, wherein this holder is a metal material.
24, metal box for photomask according to claim 2 is characterized in that, wherein this filtration membrane is a composite fibre.
25, a kind of filtration unit covers the through hole of a box for photomask, and this through hole is communicated with the inner space of this box for photomask and the space outerpace of box for photomask, it is characterized in that, this filtration unit comprises:
One elastic external member is arranged in this through hole, and this elastic external member has one first opening corresponding to this through hole;
One holder is arranged in this elastic external member, and wherein this holder has at least one hole, and this hole is located at the position corresponding to first opening of this elastic external member; And
One filtration membrane is located in the position that has this hole on this holder.
26, a kind of metal box for photomask is characterized in that, comprises:
One metal top cover body has an edge and defines an opening;
One metal lower cover with this metal top cover body combination, form an inner space and can hold light shield, and this lower cover also has an edge and defines an opening relative with the opening of this upper cover body;
At least one Airtight gasket comprises a groove, and this Airtight gasket is arranged on this upper cover body or the edge of lower cover by this groove and makes this inner space become the space of sealing.
27, metal box for photomask according to claim 26 is characterized in that, wherein this groove has openend and bottom, and the width of openend is narrow than the bottom.
28, metal box for photomask according to claim 26 is characterized in that, wherein this Airtight gasket is fixed on the edge of this upper cover body or lower cover by a binder.
29, metal box for photomask according to claim 26 is characterized in that, wherein this Airtight gasket is a macromolecule resin material.
30, metal box for photomask according to claim 26 is characterized in that, wherein this Airtight gasket is the conducting resinl material.
According to claim 1 or 26 described metal box for photomask, it is characterized in that 31, wherein the material of this metal box for photomask is stainless steel series or aluminium alloy, magnesium alloy.
32, according to claim 1 or 26 described metal box for photomask, it is characterized in that other comprises a buckling piece and is located in this upper cover body or the lower cover.
33, metal box for photomask according to claim 32 is characterized in that, wherein this buckling piece structure comprises:
One pedestal is fixed in the position in each corner in the metal top cover body of this box for photomask and the metal lower cover with a plurality of strong points;
One elasticity of flexure assembly, the end of one bending are incorporated on this pedestal, and another crooked end then is the elasticity suspended state between this list or a plurality of strong point, and comprise that further one holds face and and withholds face;
Wherein, when this box for photomask carried a light shield and covers, this of this elasticity of flexure assembly holds face and this withholds face in covering this light shield contact and fixing of Shi Huiyu.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201255889U CN201107546Y (en) | 2007-10-09 | 2007-10-09 | Metal light shield box and filtration apparatus thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201255889U CN201107546Y (en) | 2007-10-09 | 2007-10-09 | Metal light shield box and filtration apparatus thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201107546Y true CN201107546Y (en) | 2008-08-27 |
Family
ID=39959357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201255889U Expired - Lifetime CN201107546Y (en) | 2007-10-09 | 2007-10-09 | Metal light shield box and filtration apparatus thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201107546Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666982B (en) * | 2008-09-04 | 2011-05-18 | 家登精密工业股份有限公司 | Bearing box for photomask box and buffering and positioning device thereof |
| CN104888551A (en) * | 2014-03-05 | 2015-09-09 | 耀连科技有限公司 | Filtration membrane assembly of separation type transportation box |
-
2007
- 2007-10-09 CN CNU2007201255889U patent/CN201107546Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666982B (en) * | 2008-09-04 | 2011-05-18 | 家登精密工业股份有限公司 | Bearing box for photomask box and buffering and positioning device thereof |
| CN104888551A (en) * | 2014-03-05 | 2015-09-09 | 耀连科技有限公司 | Filtration membrane assembly of separation type transportation box |
| CN104888551B (en) * | 2014-03-05 | 2016-08-24 | 耀连科技有限公司 | The filter membrane component of isolated carrier box |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20080827 |