CN217199677U - Light shield box - Google Patents

Abstract

The application discloses light shield box, this light shield box includes bottom plate, curb plate and apron. The side plate is arranged around the periphery of the bottom plate, an installation area used for placing the light cover is formed between the side plate and the bottom plate, and the installation area is provided with a first port. The cover plate and the bottom plate are distributed at intervals along a first straight line direction and are covered at the first port, the cover plate and the side plates are connected in a sliding mode along a second straight line direction, and the second straight line direction is intersected with the first straight line direction. When the cover plate slides on the side plate, dust or particles outside the photomask box can enter the photomask box from the right above the first port along with air, so that the dust or particles are prevented from entering the bottom end of the installation section from the inner side of the photomask box, the pollution of the dust or particles to the photomask is reduced, and the quality of the photomask in the photomask box is ensured.

Description

Light shield box

Technical Field

The application relates to the technical field of photomask auxiliary equipment, in particular to a photomask box.

Background

In a semiconductor manufacturing process, photolithography is one of the important steps, and mainly uses photolithography to copy a pattern on a photomask onto a wafer. Therefore, the cleanliness of the mask is an important factor for ensuring the quality of the lithography. The mask is usually clamped in a mask box during the transportation process to prevent the mask from being contaminated by dust, particles and the like from the outside.

However, when the mask box is opened to clamp the mask, dust or particles outside the box are carried into the mask box due to the disturbance of the air flow, thereby contaminating the mask in the mask box.

Disclosure of Invention

The embodiment of the application provides a photomask box, which is used for solving the problem that particles pollute a photomask when the photomask box is opened. The technical scheme is as follows:

the embodiment of the application provides a light cover box, and this light cover box includes:

a base plate;

the side plate is wound on the periphery of the bottom plate, an installation area for placing the light cover is formed between the side plate and the bottom plate, and the installation area is provided with a first port;

the cover plate and the bottom plate are distributed at intervals along a first straight line direction and are covered at the first port, the cover plate and the side plates are connected in a sliding mode along a second straight line direction, and the second straight line direction is intersected with the first straight line direction.

In the above technical scheme, when the photomask is placed in the photomask box, the film surface of the photomask can be placed at the bottom of the installation interval, and the glass surface of the photomask can be placed above the installation interval and close to the first port, so that the cover plate on the photomask box is arranged to be in sliding connection on the side plate along the second linear direction, when the photomask box is opened, dust or particles can be prevented from entering the photomask box from the side along with air flow and polluting the film surface at the position below the installation interval, the particles can enter the photomask box from the front direction of the first port in the photomask box and be intensively attached to the glass surface of the photomask, and therefore the film surface of the photomask is prevented from being polluted by the dust or the particles, and the quality of the photomask is ensured. Through the design, the possibility that the light cover is polluted by dust or particles can be effectively reduced, and the protection effect of the light cover box is improved.

In some embodiments, the cover plate includes a first cover and a second cover, and the first cover and the second cover are distributed along the second linear direction and are slidably connected with the side plate along the second linear direction.

In the above technical solution, the cover plate of the mask box is divided into two sub-covers, and the two sub-covers can slide on the side plate along the second linear direction. When the mask box needs to be opened, the first cover body and the second cover body slide on the side plates along the direction parallel to the second linear direction and far away from each other, namely the opening of the mask box is gradually enlarged from the middle to two sides, and at the moment, dust or particles outside the mask box enter the mask box along with air from the middle area of the first port of the mask box and are attached to the middle area of the glass surface of the mask in a concentrated mode. Through the design, the condition that dust or particles enter the bottom of the installation area along with air from the side surface of the photomask box to pollute the film surface of the photomask can be prevented, so that the quality of the photomask is ensured.

In some embodiments, the first cover body is provided with one of a first sliding block and first sliding grooves distributed along a second linear direction, the side plate is provided with the other one of the first sliding block and the first sliding grooves, and the first sliding block is located in the first sliding grooves and can slide in the first sliding grooves; or the second cover body is provided with one of a second sliding block and second sliding grooves distributed along a second linear direction, the side plate is provided with the other one of the second sliding block and the second sliding grooves, and the second sliding block is located in the second sliding grooves and can slide in the second sliding grooves.

In the above technical solution, the purpose of sliding the first cover body on the side plate is achieved by the first slide block being located in the first slide groove and being slidable in the first slide groove, specifically, if the first slide block is disposed on the first cover body, the first slide groove is disposed on the side plate, and if the first slide block is disposed on the side plate, the first slide groove is disposed on the first cover body; or, the second sliding block is located in the second sliding groove and can slide in the second sliding groove, so as to achieve the purpose of sliding the second cover body on the side plate.

In some embodiments, the first cover is provided with a first sliding block and the second cover is provided with a second sliding block, the side plate is provided with a first sliding groove and a second sliding groove, and the first sliding groove is communicated with the second sliding groove.

In above-mentioned technical scheme, all set up first spout and second spout on the curb plate and make first spout and second spout connect, can reduce the process of curb plate processing, improve the manufacturing efficiency of curb plate, the equipment of light cover box also can be convenient for simultaneously provides the packaging efficiency of light cover box.

In some embodiments, the first sliding block comprises a first structure part and a second structure part, one end of the second structure part is connected with the middle part of the first structure part, the other end of the second structure part is connected with the first cover body, the first sliding groove comprises a first groove body and a second groove body communicated with the first groove body, the first groove body is matched with the first structure part, the first structure part is positioned in the first groove body and can slide in the first groove body, the second groove body is matched with the second structure part, and the second structure part is positioned in the second groove body and can slide in the second groove body;

the second slider includes third structural part and fourth structural part, the one end of fourth structural part is connected with the middle part of third structural part, the other end and the second lid of fourth structural part are connected, the second spout includes third cell body and the fourth cell body that communicates with the third cell body, third cell body and third structural part adaptation, third structural part is located the third cell body and can slides in the third cell body, fourth cell body and fourth structural part adaptation, the fourth structural part is located the fourth cell body and can slide in the fourth cell body.

In the above technical scheme, the first sliding block and the second sliding block are both arranged to be T-shaped sliding blocks, the first sliding groove is a T-shaped groove matched with the first sliding block, and the second sliding groove is a T-shaped groove matched with the second sliding block. When the first sliding block and the second sliding block are respectively positioned in the first sliding groove and the second sliding groove, the first sliding block and the second sliding block cannot easily fall off, the stability of the sliding connection of the first cover body and the second cover body on the side plate is improved, and the function of preventing dust or particles from polluting the photomask of the photomask box is realized.

In some embodiments, a first groove is formed in one side of the first cover body facing the second cover body, the inner wall surface of the first groove comprises a first inner wall surface, a second inner wall surface arranged at an interval with the first inner wall surface, and a third inner wall surface connected between the first inner wall surface and the second inner wall surface, an installation part is arranged on one side of the second cover body facing the first cover body, the installation part is located in the first groove, the installation part is attached to the first inner wall surface and the second inner wall surface, and a gap is formed between the installation part and the third inner wall surface.

In the technical scheme, the installation part arranged on the second cover body is matched with the first groove arranged on the first cover body, and a gap exists between the installation part and the third inner wall of the first groove, so that when the photomask box is closed, partial dust or particles outside the photomask box can be blocked and accumulated in the gap between the installation part and the third inner wall surface along with the process that air passes through the installation part and the third inner wall surface, and cannot enter the photomask box. Through the design, when the photomask box is closed, dust or particles outside the box can be effectively prevented from entering the photomask box through a gap above the photomask box to pollute the photomask, and the dustproof effect of the photomask box can be improved.

In some of these embodiments, the reticle pod further comprises:

the lock catch is provided with a first lock body and a second lock body, the first lock body is connected with the first cover body, the second lock body is connected with the second cover body, and the second lock body is detachably connected with the first lock body.

In the above technical solution, the connection between the first cover and the second cover is realized by the detachable connection between the first lock body and the second lock body. When the photomask box is closed, the first lock body and the second lock body can be connected to ensure that the first cover body and the second cover body are locked and cannot move respectively in the transportation process of the photomask to influence the normal function of the photomask box; when the photomask box is opened, the first lock body and the second lock body can be unlocked, so that the first cover body and the second cover body slide on the side plates along the direction of mutual separation, and the photomask in the photomask box can be taken out conveniently.

In some of these embodiments, the reticle pod further comprises:

the protection piece is positioned in the mounting area and covers the first port, and a light shield is placed between the protection piece and the base plate.

In the technical scheme, the first port of the installation area is covered by the protection part, so that dust or particles entering the box can be blocked by the protection part and attached to the protection part when the photomask box is opened, the dust or particles are prevented from further entering the installation area to pollute the photomask placed in the installation area, and the quality of the photomask is ensured. Through above-mentioned design, can further improve the dustproof effect of light cover box.

In some embodiments, the side plate has a first end surface facing away from the bottom plate, the first end surface includes an inner area and an outer area surrounding the inner area, the inner area is located between the outer area and the bottom plate, so that a step groove communicated with the mounting area is formed between the inner area and the outer area, and the protection piece is located in the step groove and attached to the inner area.

In above-mentioned technical scheme, the one end that the bottom plate was kept away from to the curb plate inner wall sets up to the step form to form the step groove with the interval intercommunication of installation, the protection piece is placed in the step groove, can reach the effect of restriction protection piece's position, and prevent rocking that the protection piece appears in the transportation of photomask box, hinder the effect that the particle got into the interval of installation in order to improve the protection piece.

In some of these embodiments, the reticle pod further comprises:

the first positioning piece is connected with the cover plate;

and the second positioning piece is positioned in the installation area and is connected with the bottom plate, and the second positioning piece is used for placing the photomask.

In the technical scheme, the first positioning piece acts on the position of the photomask limited from the upper part when the photomask box is closed, so that the vertical shaking of the photomask in the photomask box caused by bumping in the transportation process is prevented; the second positioning piece is used for fixing the light cover in the installation interval, so that the light cover in the light cover box is prevented from shaking left and right due to bumping in the transportation process.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a perspective view of a first mask box provided in an embodiment of the present application when a mask is placed and a cover is opened;

FIG. 2 is a cross-sectional view of the reticle pod shown in FIG. 1 taken along direction A-A;

FIG. 3 is a cross-sectional view of the reticle pod shown in FIG. 1 taken along the direction B-B;

FIG. 4 is a cross-sectional view of a second reticle pod in which a first chute and a second chute of the second reticle pod are in communication according to an embodiment of the present application;

FIG. 5 is a sectional view of a first slider and a first runner provided in an embodiment of the present application;

FIG. 6 is a sectional view of a second slider and a second runner provided in an embodiment of the present application;

FIG. 7 is an enlarged view of FIG. 4 at area E;

FIG. 8 is an enlarged view of FIG. 2 at area F;

FIG. 9 is a perspective view of a second reticle pod provided by an embodiment of the present application;

FIG. 10 is a cross-sectional view of the reticle pod shown in FIG. 9 taken along the direction G-G.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more clear, embodiments of the present application will be described in further detail below with reference to the accompanying drawings.

The following description refers to the accompanying drawings in which the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the application, as detailed in the claims that follow.

In a semiconductor manufacturing process, a photolithography technique can copy a pattern on a mask onto a surface of a wafer to complete processing of the wafer, and thus the degree of cleaning of the mask determines the quality of the wafer after photolithography. In the related art, the photomask includes glass and a pellicle, and both end surfaces of the photomask are formed by a glass surface of the glass and a pellicle surface of the pellicle, respectively, wherein the glass surface and the pellicle surface of the photomask are connected by a protection frame. Since the cleaning ability of the pellicle surface of the photomask is poor, when dust or particles adhere to the pellicle surface of the photomask, it is difficult to clean the dust or particles on the pellicle surface of the photomask, thereby causing contamination of the photomask. Since the glass surface of the photomask can be cleaned well, when the photomask is transported by using the photomask box, the thin film surface of the photomask is usually placed at the bottom of the photomask box, and the glass surface of the photomask is located above the thin film surface, so that as much dust or particles as possible are attached to the glass surface of the photomask, thereby protecting the thin film surface of the photomask. However, when the conventional flip-type reticle pod is opened to take out the reticle, dust or particles outside the reticle pod enter the pod by the action of air flow, wherein a part of the dust or particles enter the pod from the inner side of the reticle pod and contaminate the film surface of the reticle at the bottom of the pod, thereby contaminating the reticle. Therefore, a mask box is designed to prevent dust or particles from entering from the inside of the mask box and contaminating the mask.

Referring to fig. 1 and fig. 2, to solve the above technical problem, an embodiment of the present invention provides a mask box 1 for placing a mask 2 and having better dust-proof and protection effects on the mask 2. The reticle pod 1 includes a base plate 3, side plates 4, and a cover plate 5.

The side plate 4 is wound around the outer periphery of the bottom plate 3, and a mounting section 6 for placing the mask 2 is formed between the side plate 4 and the bottom plate 3, and the mounting section 6 has a first port 61. The film surface 21 of the mask 2 is disposed at the bottom of the mounting region 6 near the bottom plate 3, and the glass surface 22 of the mask 2 is disposed at the first port 61 in the mounting region 6. The cover plate 5 and the bottom plate 3 are spaced apart along the first straight line C and are located at the first port 61 to cover the first port 61. The first straight line C may be perpendicular to the surface of the base plate 3 forming the mounting section 6. The cover plate 5 is also slidably connected to the side plate 4 and can be slid in the direction of a second line D, intersecting the first line C, to effect opening of the reticle pod 1. When the cover plate 5 slides along the second straight line D relative to the side plate 4 to open the mask box 1, in the process that the cover plate 5 slides relative to the side plate 4, dust or particles outside the mask box 1 can enter from the right above the first port 61 along with air, so that the dust or particles entering the mask box 1 are attached to the glass surface 22 as much as possible, and compared with the film surface 21 of the mask 2, the glass surface 22 of the mask 2 is easier to clean, so that the cover opening mode can effectively reduce the pollution of the dust or particles to the film surface 21 of the mask 2, and the quality of the mask 2 is ensured.

The cover plate 5 may be a separate plate to simplify the opening and closing operation of the mask box 1. Referring to fig. 3, the cover plate 5 may also include two sub-cover plates, a first cover 51 and a second cover 52. The first cover 51 and the second cover 52 may be distributed on the side plate 4 along the second straight line D, and both the first cover 51 and the second cover 52 are slidably connected to the side plate 4. With this design, when the first cover 51 and the second cover 52 slide on the side plate 4 in the direction parallel to the second straight line D and in the direction away from each other, the middle area of the mask box 1 is preferentially opened, so that dust or particles outside the mask box 1 are urged to enter from the middle area of the mask box 1 along with air, and the possibility that dust or particles enter the bottom of the installation section 6 from the inside of the mask box 1 is reduced.

Wherein, sliding connection between the cover plate 5 and the side plate 4 can be realized through the cooperation of a sliding block and a sliding groove, the transmission of a belt and the like. In some application embodiments, when the cover plate 5 includes the first cover body 51 and the second cover body 52, the first cover body 51 may be provided with a first sliding block 511, the side plate 4 may be provided with a first sliding slot 41 arranged along the second straight line D, and the first sliding block 511 is located in the first sliding slot 41 and is movable in the first sliding slot 41 to realize the sliding of the first cover body 51 on the side plate 4. Similarly, the second cover 52 is provided with a second slider 521, the side plate 4 is provided with a second sliding slot 42 arranged along the second straight line D, and the second slider 521 is located in the second sliding slot 42 and can move in the second sliding slot 42, so as to realize the sliding of the second cover 52 on the side plate 4. Through the above design, when the mask box 1 is opened, the first cover 51 and the second cover 52 can slide on the side plate 4 along the direction parallel to the second straight line D and away from each other, so that the middle area of the first port 61 of the mask box 1 is preferentially opened, dust or particles outside the mask box 1 can enter the box along with air from the middle area of the mask box 1, and the dust or particles entering the mask box 1 can be intensively attached to the glass surface 22 of the mask 2 in this way, thereby effectively preventing the dust or particles from entering the box bottom along the inner side of the mask box 1 to contaminate the film surface 21 of the mask 2.

In other embodiments, the first cover 51 and the second cover 52 may have sliding grooves, and the side plate 4 may have sliding blocks, which are located in the sliding grooves. It can be understood that the above design can still achieve the sliding of the first cover 51 and the second cover 52 on the side plate 4, and can preferentially open the middle area of the first port 61 of the mask box 1, so that the dust or particles entering the box from the outside of the mask box 1 can be intensively attached to the glass surface 22 of the mask 2, thereby playing a role of preventing the mask 2 from being polluted.

In some exemplary aspects, the first sliding groove 41 and the second sliding groove may be spaced apart on the side plate. Referring to fig. 4, the first sliding slot 41 and the second sliding slot 42 may also be communicated, in which case the first cover 51 is provided with a first sliding block 511, and the second cover 52 is provided with a second sliding block 521. By such a design, the number of processes for processing the side plate 4 can be reduced, and the assembly of the mask box 1 is facilitated, thereby improving the uniform manufacturing and assembling efficiency of the mask box 1.

In some application embodiments, referring to fig. 5, the first slider 511 may include a first structure portion 5111 and a second structure portion 5112. One end of the second structure portion 5112 may be connected to the middle of the first structure portion 5111, and the other end of the second structure portion 5112 may be connected to the first cover 51, i.e., the first slider 511 is a substantially T-shaped block. At this time, the first sliding groove 41 may include a first groove 411 and a second groove 412 communicated with the first groove 411, the first groove 411 is adapted to the first structure portion 5111, the first structure portion 5111 is located in the first groove 411 and can slide in the first groove 411, the second groove 412 is adapted to the second structure portion 5112, and the second structure portion 5112 is located in the second groove 412 and can slide in the second groove 412. The first sliding block 511 is a T-shaped block, and the first sliding slot 41 is a T-shaped slot matching with the first sliding block 511, so that when the first sliding block 511 is located in the first sliding slot 41, the sliding block cannot be separated from the sliding slot, and the stability of the first cover body 51 sliding on the side plate 4 can be enhanced, so as to ensure that the mask box 1 plays a dustproof role.

Similarly, referring to fig. 6, when the second cover 52 is provided with the second slider 521, the second slider 521 may include a third structure portion 5211 and a fourth structure portion 5212, one end of the fourth structure portion 5212 may be connected to a middle portion of the third structure portion 5211, and the other end of the fourth structure portion 5212 may be connected to the second cover 52, that is, the second slider 521 is substantially a T-shaped block. At this time, the second chute 42 may include a third chute body 421 and a fourth chute body 422 communicated with the third chute body 421, the third chute body 421 is adapted to the third structure portion 5211, the third structure portion 5211 is located in the third chute body 421 and can slide in the third chute body 421, the fourth chute body 422 is adapted to the fourth structure portion 5212, and the fourth structure portion 5212 is located in the fourth chute body 422 and can slide in the fourth chute body 422. The second sliding block 521 is a T-shaped block, the second sliding groove 42 is a T-shaped groove matched with the second sliding block 521, and when the second sliding block 521 is in the second sliding groove 42, the sliding block is prevented from separating from the sliding groove, and the stability of the second cover 52 sliding on the side plate 4 can be enhanced, so as to ensure that the mask box 1 plays a dustproof role.

Referring to fig. 7, a first groove 512 is formed on a side of the first cover 51 facing the second cover 52, and a mounting portion 522 is formed on a side of the second cover 52 facing the first cover 51, wherein the mounting portion 522 is located in the first groove 512. The inner wall of the first groove 512 may include a first inner wall surface 5121, a second inner wall surface 5122 spaced apart from the first inner wall surface 5121, and a third inner wall surface 5123 connected between the first inner wall surface 5121 and the second inner wall surface 5122. When the mask case 1 is closed, the attachment portion 522 may be in contact with both the first inner wall surface 5121 and the second inner wall surface 5122 with a gap between the attachment portion and the third inner wall surface 5123. In this manner, even if part of the dust or particles enters with the air from between the mounting portion 522 and the first inner wall surface 5121, the entering dust or particles are accumulated at the gap to reduce or avoid entering into the light housing box 1. Through the design, the dustproof effect of the mask box 1 can be enhanced, and the quality of the mask 2 in the mask box 1 is ensured.

In some embodiments, the first inner wall face 5121 is located on a side of the second inner wall face 5122 facing away from the bottom plate 3, and a side of the mounting portion 522 facing the first inner wall face 5121 may be provided with a groove, which may collect dust or particles from outside the reticle box 1 and entering between the mounting portion 522 and the first inner wall face 5121, so as to prevent the dust or particles from further entering into a gap between the mounting portion 522 and the third inner wall face 5123, and thus the dust-proof effect of the reticle box 1 may be enhanced by such a design. In other application embodiments, the first inner wall surface 5121 is located on a side of the second inner wall surface 5122 facing away from the bottom plate 3, and the second inner wall surface 5122 is provided with a groove, so that when dust or particles outside the light shield box 1 enter a gap between the mounting portion 522 and the third inner wall 5123, the groove can collect the passing dust or particles, and prevent the dust or particles from further entering between the mounting portion 522 and the second inner wall surface 5122, so as to prevent the dust or particles from entering the light shield box 1. By the above design, the dustproof effect of the reticle pod 1 can be further enhanced.

Referring to fig. 7, in some exemplary aspects, the reticle pod 1 further includes a latch 7. The lock catch has a first lock body 71 and a second lock body 72, the first lock body 71 is disposed on the first cover body 51 and connected with the first cover body 51, the second lock body 72 is disposed on the second cover body 52 and connected with the second cover body 52, and the first lock body 71 and the second lock body 72 are detachably connected. When the reticle pod 1 needs to close the transportation reticle 2, the first lock 71 and the second lock 72 can be connected to lock the first cover 51 and the second cover 52, so as to prevent the first cover 51 and the second cover 52 from sliding during transportation of the reticle 2, thereby preventing the reticle 2 in the reticle pod 1 from falling off; when the reticle pod 1 needs to open the reticle 2 in the extraction pod, the first lock 71 and the second lock 72 may be unlocked, so that the first cover 51 and the second cover 52 may slide on the side plate 4 in opposite directions, thereby providing sufficient space for extracting the reticle 2 from the reticle pod 1.

In the process that the first cover 51 and the second cover 52 on the mask box 1 slide on the side plate 4 in the opposite directions, dust or particles outside the mask box 1 enter the box along with the flow of air and adhere to the glass surface 22 of the mask 2, however, a very small amount of dust or particles inevitably enter the box bottom from the inside of the mask box 1 and contaminate the film surface 21 of the mask box 1. Therefore, referring to fig. 2 again, in order to further reduce the accumulation of dust or particles in the air on the glass surface 22 of the mask 2 and the contamination of the film surface 21 of the mask 2, the mask box 1 further includes a shielding member 8. The protection member 8 is located in the mounting space 6 and covers the first port 61, the mask 2 is placed between the protection member 8 and the bottom plate 3, and when the mask box 1 is opened, dust or particles outside the mask box 1 are blocked by the protection member 8 and do not contact with the mask 2, thereby further protecting the mask 2.

Alternatively, referring to fig. 8, fig. 8 is an enlarged view of the area D in fig. 2, the side plate 4 has a first end surface 43 facing away from the bottom plate 3, and the first end surface 43 may include an inner area 431 and an outer area 432 surrounding the inner area 431. Specifically, the inner area 431 may be located between the outer area 432 and the base plate 3 such that the inner area 431 and the outer area 432 form a stepped groove 44 therebetween that communicates with the mounting region 6, and the stepped groove 44 may be used to seat the protective member 8 such that the protective member 8 is fitted to the inner area 431. The position of the protection member 8 can be fixed by placing the protection member 8 in the step groove 44, so that the protection effect of the protection member 8 can be prevented from being poor due to the left and right shaking of the protection member 8 in the mask box 1, and the installation and the removal of the protection member 8 can be facilitated.

Referring again to fig. 2, the reticle pod 1 may further include at least one first positioning member 9 and at least one second positioning member 10. The first positioning element 9 can be connected to the cover plate 5, and the second positioning element 10 can be located in the installation space 6 and connected to the base plate 3. In the embodiment of the present application, the number of the first positioning elements 9 is preferably two, two first positioning elements 9 are respectively located on the first cover 51 and the second cover 52, a small gap exists between each of the two first positioning elements 9 and the protection member 8, and when the reticle pod 1 closes the transportation reticle 2, the two first positioning elements 9 can prevent the protection member 8 from shaking up and down, thereby ensuring the dust-proof effect of the protection member 8.

In some application embodiments, the number of the second positioning members 10 is plural, so as to fix the periphery of the mask 2, prevent the mask 2 from shaking left and right in the transportation process, and ensure the quality of the mask 2. In the embodiment of the present application, the number of the second positioning elements 10 is preferably four, four second positioning elements 10 are distributed on the bottom plate 3 at intervals, and correspond to one corner of the mask 2, respectively, so that the second positioning elements 10 can be fully fixed, thereby avoiding over-definition fixation caused by too many second positioning elements 10, and reducing consumption of resources for manufacturing the second positioning elements 10, and compared with the second positioning elements 10 with less number, the positioning effect achieved by the four second positioning elements 10 is better.

Referring to fig. 9, in some exemplary embodiments, the cover plate 5 may cover a portion of the side plate 4 to enhance the dust-proof effect of the mask case 1. Specifically, referring to fig. 10, the side panel 4 may include a first portion 45, a second portion 46, and a third portion 47, the first portion 45 being connected with the bottom panel 3 and extending in a direction away from the bottom panel 3. One end of the second portion 46 is connected to an end of the first portion 45 remote from the base plate 3. One end of the third portion 47 is connected to an end of the second portion 46 remote from the first portion 45, and the other end of the third portion 47 extends away from the base plate 3. And the cap plate 5 may include a fourth portion 53, a fifth portion 54, and a sixth portion 55. In particular, the fourth portion 53 is located on a side of the third portion 47 facing away from the bottom plate 3 and abuts the third portion 47. One end of the fifth portion 54 is connected to the fourth portion 53, and the other end of the fifth portion 54 extends away from the fourth portion 53. One end of the sixth portion 55 is connected to one end of the fifth portion 54 away from the fourth portion 53, and the other end of the sixth portion 55 is slidably connected to the second portion 46, wherein the sixth portion 55 has a third slide block 551, the second portion 46 has a third slide slot 441, the third slide block 551 is located in the third slide slot 441 and can move in the third slide slot 441, optionally, the third slide block 551 is a T-shaped block, and the third slide slot 441 is a T-shaped slide slot matched with the third slide block 551, so as to prevent the third slide block 551 from falling off from the third slide slot 441, and to enhance the stability of the cover plate 5 sliding on the side plate 4. Through the above design, when the mask box 1 is closed, the protection member 8 can be placed on the second portion 46, so as to limit the position of the protection member 8, and prevent the protection member 8 from shaking left and right to cause poor dustproof effect, and in addition, dust or particles outside the mask box 1 can be blocked by the third slider 551 in the process of entering between the sixth portion 55 and the second portion 46, so that the entering of dust or particles is reduced, and the dustproof effect of the mask box 1 is increased.

In the description of the present application, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art. In addition, in the description of the present application, "a plurality" means two or more unless otherwise specified. "and/or" describes the association relationship of the associated object, indicating that there may be three relationships, for example, a and/or b, which may indicate: the three cases of a exists alone, a and b exist simultaneously, and b exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present application and should not be taken as limiting the scope of the present application, so that the present application will be covered by the appended claims.

Claims (10)

1. A reticle pod comprising:

a base plate;

the side plate is wound on the periphery of the bottom plate, an installation area for placing a light cover is formed between the side plate and the bottom plate, and the installation area is provided with a first port;

the cover plate and the bottom plate are distributed at intervals along a first straight line direction and are covered at the first port, the cover plate and the side plates are connected in a sliding mode along a second straight line direction, and the second straight line direction is intersected with the first straight line direction.

2. The reticle pod of claim 1, wherein the cover plate comprises a first cover and a second cover, the first cover and the second cover distributed along the second linear direction and both slidably coupled to the side plate along the second linear direction.

3. The mask box according to claim 2, wherein the first cover has a first slide block and a first slide slot distributed along the second linear direction, the side plate has another slide block and a second slide slot, and the first slide block is located in the first slide slot and can slide in the first slide slot; and/or

The second cover body is provided with one of a second sliding block and second sliding grooves distributed along the second linear direction, the side plate is provided with the other one of the second sliding block and the second sliding grooves, and the second sliding block is located in the second sliding grooves and can slide in the second sliding grooves.

4. The reticle pod of claim 3, wherein the first cover is provided with the first slider and the second cover is provided with the second slider, the side plate is provided with the first runner and the second runner, and the first runner is in communication with the second runner.

5. The reticle pod of claim 4,

the first sliding block comprises a first structure part and a second structure part, one end of the second structure part is connected with the middle part of the first structure part, the other end of the second structure part is connected with the first cover body, the first sliding groove comprises a first groove body and a second groove body communicated with the first groove body, the first groove body is matched with the first structure part, the first structure part is positioned in the first groove body and can slide in the first groove body, the second groove body is matched with the second structure part, and the second structure part is positioned in the second groove body and can slide in the second groove body; or the like, or, alternatively,

the second slider includes third structure portion and fourth structure portion, the one end of fourth structure portion with the middle part of third structure portion is connected, the other end of fourth structure portion with the second lid is connected, the second spout include the third cell body and with the fourth cell body of third cell body intercommunication, the third cell body with third structure portion adaptation, third structure portion is located in the third cell body and can slide in the third cell body, the fourth cell body with fourth structure portion adaptation, fourth structure portion is located in the fourth cell body and can slide in the fourth cell body.

6. The mask box according to claim 2, wherein a first groove is formed in a side of the first cover facing the second cover, inner wall surfaces of the first groove include a first inner wall surface, a second inner wall surface spaced from the first inner wall surface, and a third inner wall surface connected between the first inner wall surface and the second inner wall surface, a mounting portion is formed in a side of the second cover facing the first cover, the mounting portion is located in the first groove, the mounting portion is attached to the first inner wall surface and the second inner wall surface, and a gap is formed between the mounting portion and the third inner wall surface.

7. The reticle pod of claim 2, further comprising:

the lock catch is provided with a first lock body and a second lock body, the first lock body is connected with the first cover body, the second lock body is connected with the second cover body, and the second lock body is detachably connected with the first lock body.

8. The reticle pod of claim 1, further comprising:

a shield positioned within the mounting region and covering the first port, the shield and the base plate for placement of the reticle.

9. The mask box of claim 8 wherein the side panel has a first end facing away from the bottom panel, the first end including an inner region and an outer region surrounding a periphery of the inner region, the inner region being positioned between the outer region and the bottom panel such that a stepped recess is formed between the inner region and the outer region and communicates with the mounting area, and the shield member is positioned in the stepped recess and engages the inner region.

10. The reticle pod of claim 1, further comprising:

the first positioning piece is connected with the cover plate;

the second positioning piece is positioned in the installation interval and connected with the bottom plate, and the second positioning piece is used for placing the light cover.

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