JP2001154341A - Mask transporting case - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mask transporting case which has hermeticity capable of preventing the infiltration of dust, facilitates the work to remove a covering cap and is good in workability. SOLUTION: This mask transporting case has a case body 1 which has an opening 2 to house masks 5 in an upper part and the covering cap 3 which is put in the case body and closes the opening. Engaging holes 9 formed at engaging pieces 8 which extend downward from lower edges 7 of the cap and have elasticity are engaged with projections 10 disposed at the peripheral surface of the case body, by which the cap is locked. Recessed parts 12 which are notched from above and into which the engaging pieces are fitted are formed at an outer peripheral surface 11 connecting to the opening edge 6 of the case body. The outer peripheral surface 1 connecting to the opening edge of the case body, the outer peripheral surface 13 connecting to the lower edge of the covering cap and the outer peripheral surface 14 of the engaging pieces are formed flush with each other. The recessed parts are provided with the projections engaging with the engaging holes of the engaging pieces and the side parts of the engaging pieces are provided with notches 16 which can raise the engaging pieces in the transverse direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a case for transporting a mask such as a photomask or a mask blank used for manufacturing a semiconductor such as forming a semiconductor pattern.

[0002]

2. Description of the Related Art Conventionally, this type of mask is made of a synthetic resin case body a having an opening for accommodating the mask as shown in FIG. 1 and a synthetic resin cover for covering the opening. Is carried by a mask carrying case c having a cover b. A resilient engagement piece d is formed integrally with the lower edge of the cover lid b, and a projection f provided on the peripheral surface of the case body a is engaged with the engagement hole e for locking. ,
As shown in FIG. 2, a tape g is attached so as to cover the joint between the case body a and the cover b. The external dimensions of the case c are about 19 cm in length, 20 cm in width, and about 18 cm in height.

[0003]

The above-mentioned mask is housed in a mask carrying case after being housed in a basket-shaped carrier. In a conventional carrying case, however, the engaging piece d is at least slightly around the case body a. A gap is apt to be generated due to a height difference from the surface, and a gap is easily generated. In particular, a large gap is formed between the lower side of the engagement piece d and the peripheral surface, and dust entering from the outside adheres to the mask and is directly attached to the semiconductor manufacturing chamber. There was an inconvenience of being carried up to. Also, the removal of the mask is performed on a desk such as a clean bench. However, the engagement piece d needs to be pulled up with its finger on the lower side to release the engagement with the projection f. It is not preferable because the workability is poor and the worker is tired.

SUMMARY OF THE INVENTION An object of the present invention is to provide a mask carrying case which has a sealing property capable of preventing intrusion of dust, facilitates the work of removing a cover, and has good workability.

[0005]

According to the present invention, in order to achieve the above object, a synthetic resin case main body having an opening for accommodating a mask thereon, and the case main body is covered with the case main body to close the opening. A locking cover having a cover made of synthetic resin and engaging a projection formed on the peripheral surface of the case body with an engagement hole formed in a resilient engagement piece extending downward from a lower edge of the lid. In the mask carrying case described above, a recess cut from above is formed on the outer peripheral surface following the opening edge of the case main body so that the engaging piece fits therein, and the outer peripheral surface following the opening edge of the case main body is formed. An outer peripheral surface following a lower edge of the cover and an outer peripheral surface of the engaging piece are formed on the same surface, and the recess is provided with the projection for engaging with an engaging hole of the engaging piece; There is a notch on the side of the tape that allows this to be caused in the lateral direction, and there is no gap by sticking the tape It was to allow the opening work sealed can and sitting still. The area of the concave portion is formed in a size having a space on the side of the engaging piece so that a finger for causing this can be inserted, and the engaging hole of the engaging piece is located below the notch. With such a configuration, the engagement with the projection can be released regardless of whether the engagement piece is raised upward or in the lateral direction. By disposing the finger hooks extending in the vertical direction on the peripheral surfaces of the case body and the cover, the release thereof is further facilitated.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the accompanying drawings. In FIG. 3, reference numeral 1 denotes a synthetic resin case main body having an opening 2 above, and the opening 2 is a synthetic resin case. It is closed by the cover 3 made of resin. The opening 2 accommodates a mask 5 such as a photomask or a mask blank housed in alignment with the carrier 4. An opening edge 6 of the case body 1 is provided with a rising edge 6a for preventing the cover 3 fitted to the cover body 3 from being displaced, and the cover 3 is opposed to the cover 3 to lock the cover 3 on the case body 1. The respective engaging holes 9 of the elastic engaging pieces 8, 8 extending from the lower edge 7 to be fitted are respectively fitted to the projections 10 provided on the opposing peripheral surface of the case body 1.

Although such a structure is the same as that of the conventional one, in the present invention, the concave portion 12 cut from the upper side where the engaging piece 8 fits into the outer peripheral surface 11 following the opening edge 6 of the case body 1. And an outer peripheral surface 11 continuing to the opening edge 6, an outer peripheral surface 13 continuing to the lower edge 7 of the cover 3, and an engagement piece 8.
Are formed on the same surface, and the side 8a of the engagement piece 8 is formed.
A notch 15 for causing this in the lateral direction is provided, so that the sealing property when the adhesive tape is wound and the cover 3 can be easily opened.

To explain this further, the thickness of the opening edge 6 of the case body 1 is formed to be thicker than the lower peripheral surface, and the continuous portion 16 is left below the thick outer peripheral surface 11 and the rising edge 6 is formed halfway. By reducing the thickness up to the edge 6a, a recess 12 cut from above is formed, and the thickness of the lower edge 7 and the engagement piece 8 of the cover 3 and the height of the projection 10 are reduced. When the cover 3 is closed and locked as shown in FIG.
Were made the same side. After locking, a tape 17 is wound and adhered to the joint between the case body 1 and the cover 3 as shown in FIG. And three lower side surfaces are surrounded by the side wall of the concave portion 12, and each outer peripheral surface 1
Since the tapes 1, 13, and 14 are on the same surface, the tape 17 can be adhered so as to wrap the engaging piece 8 so that there is no gap extending to the outside, so that dust from the outside does not enter the inside of the case. Can be sealed.

Since the engaging piece 8 can be raised not only upward but also laterally due to the cut 15 provided from the side 8a, the cover 3 can be opened while sitting on a chair on a clean bench or the like. But it can be done and the work becomes easier. In order to facilitate the raising of the engaging piece 8, a recess 18 is formed below and below the engaging piece 8 by providing a space 18 into which a fingertip can be inserted. Further, the engaging hole 9 is formed at a position below the notch 15 that can cause the engaging piece 8 to move upward and laterally, so that the engaging and disengaging can be easily performed. Further, in order to stabilize the engaging piece 8 so that it does not rotate over the entire case when the engaging piece 8 is disengaged in the lateral direction, a finger hook 19 extending in the vertical direction is provided at an appropriate position on the peripheral surface of the case body 1 and the cover 3. Was provided. The shape of the engagement hole 9 and the projection 10 may be any shape as long as reliable engagement can be obtained.

The mask 5 is housed in the case main body 1 together with the carrier 4 in a clean atmosphere such as a clean bench, and the opening 2 is closed with the cover 3, then sealed with tape 17 and transported. The tape 17 has an outer peripheral surface 11, 13,
14 does not rise on the same surface, and three sides of the engagement piece 8 are surrounded by the wall surface of the concave portion 12, so that the inside of the case can be sealed and adhered, and dust enters the case during transportation. Disappears. At the transport destination, the tape 17 is peeled off and opened on the clean bench. The unlocking operation can be performed by raising the engaging piece 8 in the lateral direction with a finger in a working posture while sitting. The release operation can be performed stably so that the whole case does not turn by putting a finger on it.

[0011]

As described above, according to the present invention, a recess cut from above is formed in the outer peripheral surface of the case body of the mask carrying case so as to surround three sides of the engaging piece at the time of locking. The outer peripheral surfaces of the case body, the cover and the engaging piece are formed on the same surface, and a cut is provided on a side portion of the engaging piece. Sealing can be performed without gaps, and the inconvenience of dust adhering to the mask during transportation can be eliminated. The lock can be released by raising the engaging piece in the lateral direction, so that opening work can be performed by sitting work, thereby reducing operator fatigue. The concave portion is formed on the side of the engaging piece with a space large enough to insert a finger for causing the concave portion on the side of the engaging piece. To unlock the engagement piece The operation can be easily performed, the engagement holes of the engagement pieces are formed below the cuts, and furthermore, the finger hooks extending in the vertical direction on the peripheral surfaces of the case body and the cover are more easily provided. Unlock operation can be performed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a conventional mask carrying case.

FIG. 2 is a perspective view of a conventional mask carrying case in a sealed state.

FIG. 3 is a perspective view showing an embodiment of the present invention.

FIG. 4 is a perspective view showing a locked state of FIG. 1;

FIG. 5 is a perspective view showing the sealed state of FIG. 4;

[Explanation of symbols]

1 case body, 2 opening, 3 cover, 5 mask,
6 opening edge, 7 lower edge, 8 engagement piece, 9 engagement hole, 10
Projection, 11, 13, 14 Outer peripheral surface, 12 Recess, 15
Notch, 17 tape, 18 space, 19 finger rest,

Continued on the front page (72) Inventor Hideo Negishi 2804 Terao, Oji, Chichibu City, Saitama Pref. Inside Albac Film Co., Ltd. (72) Inventor Tetsuya Nemoto 2804, Terao, Oji, Chichibu City, Saitama Pref. (Reference) 2H095 BB29 BB30 BE12 3E062 AA01 AB10 AC02 BA20 BB06 FA02 FB01 FC03 5F046 AA21 CB17 CD02

Claims (4)

[Claims] 1. A synthetic resin case main body having an opening for accommodating a mask thereon, and a synthetic resin cover for covering the case main body and closing the opening, the peripheral surface of the case main body. In a mask carrying case that is locked by engaging an engaging hole formed in a resilient engaging piece extending downward from a lower edge of the lid with a projection provided on the cover body, the opening edge of the case body is A concave portion cut from above where the engaging piece fits into the following outer peripheral surface, an outer peripheral surface continuing to an opening edge of the case body, an outer peripheral surface continuing to a lower edge of the cover, and the engaging piece; Are formed on the same surface, and the recess is provided with the projection which engages with the engagement hole of the engagement piece, and the side of the engagement piece is provided with a notch which can be caused to be caused laterally. A case for carrying a mask. 2. The mask according to claim 1, wherein an area of the concave portion is formed to have a space on a side of the engaging piece for inserting a finger for causing the recess. Transport case. 3. The mask carrying case according to claim 1, wherein the engaging hole of the engaging piece is formed below the cut. 4. A vertically extending finger-hanging piece is provided on a peripheral surface of the case body and the cover.
The case for carrying a mask according to 1.