JP4355070B2 - Mask carrying case - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a case for carrying a mask such as a photomask or a mask blank used for manufacturing a semiconductor such as formation of a semiconductor pattern.
[0002]
[Prior art]
Conventionally, this type of mask includes, for example, a synthetic resin case body a having an opening for accommodating the mask in the upper direction as shown in FIG. 1 and a synthetic resin covering lid b that covers the opening to cover the opening. It is conveyed by the mask conveyance case c which has. A resilient engagement piece d is formed integrally with the lower edge of the cover b, and a projection f provided on the peripheral surface of the case body a is engaged with the engagement hole e and locked. As shown in FIG. 2, a tape g is applied so as to close the joint between the case main body a and the cover lid b. The outer dimensions of the case c are about 19 cm in length, 20 cm in width, and about 18 cm in height.
[0003]
[Problems to be solved by the invention]
The mask is housed in a mask carrying case after being housed in a saddle-shaped carrier. However, in the conventional carrying case, the engagement piece d is slightly lifted from the peripheral surface of the case body a to form a step and a gap. In particular, a large gap is formed between the lower side of the engagement piece d and the peripheral surface, and there is a problem that dust entering from the outside adheres to the mask and is carried directly into the semiconductor manufacturing chamber. . Further, the mask is taken out on a desk such as a clean bench, but the engaging piece d needs to be lifted upward with a finger to release the engagement with the protrusion f, and the work is a standing work. It is not preferable because workability is poor and workers are fatigued.
[0004]
SUMMARY OF THE INVENTION An object of the present invention is to provide a mask carrying case that has airtightness that can prevent dust intrusion and that is easy to remove a cover lid and that has good workability.
[0005]
[Means to solve the problem]
In order to achieve the above object, the present invention has a synthetic resin case main body provided with an opening for accommodating a mask above, and a synthetic resin covering lid that covers the case main body and closes the opening. A mask carrying case that engages and locks an engagement hole formed in an elastic engagement piece extending downward from the lower edge of the lid to a protrusion provided on the peripheral surface of the case body, A concave portion cut from above into which the engaging piece fits is formed on the outer peripheral surface following the opening edge of the case body, and the outer peripheral surface continuing from the opening edge of the case body and the lower edge of the cover lid. The outer peripheral surface and the outer peripheral surface of the engagement piece are formed on the same surface, and the protrusion is provided in the concave portion to be engaged with the engagement hole of the engagement piece. A cut is made that can be raised, and the tape can be sealed without gaps and opened while sitting. It was to allow. The area of the recess is sized to have a space enough to insert a finger for causing this into the side of the engagement piece, and the engagement hole of the engagement piece is located below the notch. Thus, the engagement with the protrusion can be released regardless of whether the engaging piece is raised upward or laterally. By providing finger-hanging pieces extending in the vertical direction on the peripheral surfaces of the case main body and the cover lid, the release thereof becomes easier.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described with reference to the drawings. In FIG. 3, reference numeral 1 denotes a synthetic resin case body provided with an opening 2 above, and the opening 2 is covered with a synthetic resin cover 3. It is blocked. The opening 2 accommodates a mask 5 such as a photomask or mask blank accommodated in alignment with the carrier 4. The opening edge 6 of the case body 1 is provided with a rising edge 6a for preventing the cover 3 fitted to the opening edge 6 from being displaced, and the cover body 3 is opposed to the case body 1 in order to lock the cover 3. Each of the engagement holes 9 of the elastic engagement pieces 8 and 8 extended from the lower edge 7 is fitted into a protrusion 10 provided on the opposing peripheral surface of the case body 1.
[0007]
Although such a configuration is not different from the conventional one, in the present invention, a recess 12 cut from the upper side into which the engagement piece 8 fits is formed on the outer peripheral surface 11 following the opening edge 6 of the case body 1. At the same time, the outer peripheral surface 11 following the opening edge 6, the outer peripheral surface 13 following the lower edge 7 of the cover 3 and the outer peripheral surface 14 of the engaging piece 8 are formed on the same surface, and the side 8a of the engaging piece 8 is formed. An incision 15 for causing this in the lateral direction is provided so that the sealing performance when the adhesive tape is wound and the opening operation of the cover lid 3 can be easily performed.
[0008]
This will be further described. The thickness of the opening edge 6 of the case body 1 is formed to be thicker than the lower peripheral surface, and the continuous portion 16 is left below the thick outer peripheral surface 11 until the rising edge 6a. A recess 12 cut from above is formed by reducing the thickness of the cover, and the thickness of the lower edge 7 and the engagement piece 8 of the cover lid 3 and the height of the protrusion 10 are set to the depth of the recess 12. Accordingly, when the cover lid 3 is closed and locked as shown in FIG. 4, the outer peripheral surfaces 11, 13, and 14 are made to be the same surface. After locking, the tape 17 is wound and stuck to the joint between the case main body 1 and the cover lid 3 as shown in FIG. 5, but when locked with the engagement piece 8, the left and right side surfaces of the engagement piece 8 And the three side surfaces of the lower side surface are surrounded by the side walls of the recess 12 and the outer peripheral surfaces 11, 13, and 14 are on the same surface, so that there is no gap between the engagement piece 8 and the outside. 17 can be affixed, and the case can be sealed so that dust from the outside does not enter.
[0009]
Since the engagement piece 8 can be caused not only in the upward direction but also in the lateral direction due to the cut 15 provided from the side portion 8a, the opening operation of the cover 3 can be performed while sitting on a chair with a clean bench or the like, Work becomes easy. In order to facilitate the engagement piece 8, the recess 12 is formed with a space 18 into which the fingertip can be inserted below and to the side of the engagement piece 8. The engagement hole 9 is formed at a position below the notch 15 that can cause the engagement piece 8 in the upward and lateral directions so that the engagement and disengagement can be easily performed. Furthermore, in order to stabilize the engagement piece 8 so as not to be swung over the entire case when the engagement is released in the lateral direction, the finger-hanging piece 19 extending in the vertical direction at appropriate positions on the peripheral surfaces of the case main body 1 and the cover lid 3. Was established. In addition, the shape of the engagement hole 9 and the protrusion 10 should just be a shape from which reliable engagement is obtained.
[0010]
The mask 5 is housed in the case main body 1 together with the carrier 4 in a clean atmosphere such as a clean bench, and after the opening 2 is closed with the cover 3, the mask 5 is sealed and transported with the tape 17. The tape 17 has the outer peripheral surfaces 11, 13, and 14 that are not lifted on the same surface, and since the three sides of the engagement piece 8 are surrounded by the wall surface of the recess 12, the sealing inside the case can be performed, Dust does not enter the case during transportation. At the transport destination, the tape 17 is peeled off and opened on the clean bench. However, the unlocking operation can be performed by causing the engaging piece 8 to move laterally with a finger in a working posture while sitting. By holding your finger, you can perform the release work stably so that the entire case does not rotate.
[0011]
【The invention's effect】
As described above, according to the present invention, a concave portion cut from above is formed on the outer peripheral surface of the case main body of the mask carrying case so as to surround the three sides of the engagement piece when locked, and the case main body and the cover lid And the outer peripheral surface of the engagement piece is formed on the same surface, and a cut is provided on the side of the engagement piece, so that the joint between the case main body and the cover lid can be sealed without wrapping by tape winding, The inconvenience of dust adhering to the mask during transportation is eliminated, and the engagement piece can be raised in the lateral direction to release the lock, so that the unsealing work can be done in a sitting work, reducing operator fatigue, The structure is simple and can be manufactured at low cost, and the concave portion is formed in a size having a space enough to insert a finger to cause the concave portion to the side of the engaging piece. Easy unlock operation Further, the engagement hole of the engagement piece is formed below the notch, and furthermore, a finger-hanging piece extending in the vertical direction is provided on the peripheral surface of the case body and the cover lid, so that the unlocking operation can be performed more easily. .
[Brief description of the drawings]
FIG. 1 is a perspective view of a conventional mask carrying case. FIG. 2 is a perspective view of a conventional mask carrying case in a sealed state. FIG. 3 is a perspective view showing an embodiment of the present invention. FIG. 5 is a perspective view showing a locked state. FIG. 5 is a perspective view showing a sealed state of FIG.
DESCRIPTION OF SYMBOLS 1 Case main body, 2 opening, 3 Cover lid, 5 Mask, 6 Open edge, 7 Lower edge, 8 Engagement piece, 9 Engagement hole, 10 Protrusion, 11,13,14 Outer peripheral surface, 12 Recessed part, 15 Notch, 17 Tape, 18 spaces, 19 finger pieces,

Claims (4)

A synthetic resin case main body having an opening for accommodating a mask above, and a synthetic resin covering lid that covers the case main body and closes the opening, and a protrusion provided on the peripheral surface of the case main body In a mask carrying case that engages and locks an engagement hole formed in an elastic engagement piece extending downward from a lower edge of the lid, the outer peripheral surface following the opening edge of the case body A recess cut from the upper side into which the engagement piece fits is formed, and the outer peripheral surface following the opening edge of the case body is the same as the outer peripheral surface following the lower edge of the cover lid and the outer peripheral surface of the engagement piece. The projection is formed on the surface, and the recess is provided with the engagement hole to be engaged with the engagement hole of the engagement piece, and the side portion of the engagement piece is provided with a notch that can cause the protrusion to be caused in a lateral direction. A mask carrying case. 2. The mask carrying case according to claim 1, wherein the area of the concave portion is formed to have a size enough to allow a finger to be inserted to the side of the engagement piece. The mask carrying case according to claim 1, wherein the engaging hole of the engaging piece is formed below the notch. The mask carrying case according to claim 1, wherein a finger-hanging piece extending in a vertical direction is provided on a peripheral surface of the case main body and the covering lid.

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