CN109782532B - Version library device and mask access method - Google Patents
Version library device and mask access method Download PDFInfo
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- CN109782532B CN109782532B CN201711125166.6A CN201711125166A CN109782532B CN 109782532 B CN109782532 B CN 109782532B CN 201711125166 A CN201711125166 A CN 201711125166A CN 109782532 B CN109782532 B CN 109782532B
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- plate
- module
- unlocking
- box
- library
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
Abstract
The invention discloses a plate library device which is used for storing and unlocking a plate box and comprises a supporting seat, a positioning supporting plate, an unlocking module and a lifting driving module; the positioning support plate is fixed on the support seat; the unlocking module is slidably arranged on the supporting seat; the lifting driving module is fixed on the supporting seat and is offset on one side of the positioning supporting plate, and the lifting driving module drives the unlocking module to vertically lift relative to the positioning supporting plate to drive the plate box housing to move after unlocking, so that the bottom plate of the publishing box and the plate frame are exposed. By combining the means of adjusting the vertical height of the transmission manipulator in the mask access method disclosed by the invention, different layers of masks on the mask frame of the mask box can be picked and placed, and the design precision requirement of the mask structure is greatly reduced by adjusting the transmission manipulator to adapt to the lifting module of the mask library device, the design and production efficiency of the mask library device is improved, and the large-scale mass production of the mask library device is facilitated.
Description
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a mask library device and a corresponding mask access method.
Background
In the field of lithography semiconductor technology, reticle boxes are commonly used for storing and protecting reticles, and currently, three types of 6-inch reticle boxes are commonly used, namely, a NIKON box, a CANON box and a SMIF box.
The plate box of any type comprises a housing and a base body, the base body comprises a bottom plate and a plate frame arranged on the bottom plate, the housing is locked with the bottom plate to carry out sealing protection on the plate frame, and the plate frame is used for storing the mask plates. The corresponding plate library for storing and unlocking the plate box generally has a vertical lifting module, and after the plate box housing and the plate box base body are unlocked, the plate box housing part and the plate box base body part are separated through the vertical lifting module.
The prior plate library equipment generally adopts a mode that a plate box housing is fixed and a plate box substrate moves up and down to realize the separation of the plate box housing and the plate box substrate. Through the up-and-down motion of the plate box base body, the transmission mechanical arm can take and place the mask plates on different layers of the plate frame at the same plate taking and placing station. In the design, in order to prevent the interference between a mechanical arm plate fork and the side surface of a plate frame when a transmission mechanical arm takes and places a mask plate, the vertical motion direction of a plate box base body is required to be vertical to the upper surface of the mask plate in the plate frame, and the requirement is higher for the design precision of a plate library. Meanwhile, the photoetching machine equipment requires that the size of the plate library is smaller and smaller, a production line crown block is generally adopted to take and place the plate box aiming at the commonly used 6-slot plate box, the space of the crown block when the plate box is taken and placed needs to be avoided during design, and the vertical space of the plate library is required to be smaller.
Therefore, how to provide a plate library device with more reasonable structure, relatively low requirement on design precision and small vertical space is a technical problem which needs to be solved urgently at present.
Disclosure of Invention
The invention aims to provide a plate library device for storing and unlocking plate boxes so as to reduce the precision requirement of a plate library structure.
In order to achieve the purpose, the invention provides a plate library device which is used for storing and unlocking a plate box, wherein the plate box comprises a housing and a base body, the base body comprises a bottom plate and a plate frame arranged on the bottom plate, the housing is used for sealing and protecting the plate frame by locking with the bottom plate, the plate frame is used for storing a mask plate, and the plate library device comprises a supporting seat, a positioning supporting plate, an unlocking module and a lifting driving module;
the positioning support plate is fixed on the support seat and is used for placing the plate box;
the unlocking module is slidably arranged on the supporting seat and used for unlocking the plate box, so that the housing is disconnected with the bottom plate, and the housing is connected with the unlocking module after being unlocked;
the lifting driving module is fixed on the supporting seat and is offset on one side of the positioning supporting plate, and the unlocking module is driven to vertically lift relative to the positioning supporting plate to drive the unlocked housing to move, so that the housing is separated from the base body and the plate frame is exposed.
Optionally, the lifting driving module comprises a motor and a lead screw, the motor is fixed on the supporting seat, the lead screw comprises a lead screw shaft and a lead screw nut, the lead screw shaft is meshed with the lead screw nut, the lead screw shaft is connected with the unlocking module, the lead screw nut is rotatably connected with the supporting seat, the motor drives the lead screw nut to rotate, and then the lead screw shaft is driven to vertically lift relative to the positioning supporting plate.
Optionally, the lifting driving module further comprises a hollow rotating part, the screw nut is fixed in the rotating part, the rotating part is fixed on the supporting seat through a bearing, and the motor is in transmission connection with the rotating part through a synchronous belt pulley and a synchronous belt.
Optionally, the top ends of the motor and the lead screw nut are lower than the bearing surface of the positioning support plate.
Optionally, the plate library device further comprises a lifting guide module, the lifting guide module comprises a fixing component and a sliding component, the fixing component is fixed on the supporting seat, the sliding component is slidably arranged on the fixing component, and the unlocking module is connected with the sliding component.
Optionally, the lifting guide module is a linear guide rail, the fixed component is a rail, and the sliding component is a slider.
Optionally, the lifting guide module is a double-layer stepped linear guide rail, the lifting guide module comprises a first linear guide rail and a second linear guide rail, the track of the first linear guide rail is fixed on the supporting seat through a first supporting plate, the sliding block of the first linear guide rail is connected with the track of the second linear guide rail through a second supporting plate, and the sliding block of the second linear guide rail is connected with the unlocking module through a third supporting plate.
Optionally, the plate library device further comprises a gas bath system, and a gas bath is introduced into the plate frame through the gas bath system to purge particle contamination of the mask plates on the plate frame, and meanwhile, external particles are prevented from entering the plate library device.
Optionally, the plate library device further comprises a pumping and exhausting pipeline respectively arranged on the unlocking module and the lifting guide module, and particles generated in the movement process of the unlocking module and the lifting guide module are exhausted through the pumping and exhausting pipeline.
Optionally, the plate library device further includes a plate library sealing cover, and the plate library sealing cover is fixedly connected to the unlocking module and used for sealing an internal environment of the plate library device.
Optionally, a positioning hole is formed in the positioning support plate, and the bottom plate is fixed through the positioning hole, so that the plate box is positioned.
In order to achieve the above object, the present invention further provides a reticle accessing method, for accessing reticles from a reticle box, including:
unlocking the locked magazine to disconnect the casing of the magazine from the base plate;
removing the housing to expose the bottom plate of the plate box and the plate frame on the bottom plate;
introducing a gas bath into the plate frame;
taking out the mask on the plate frame through a transmission manipulator;
putting the mask back on the plate frame through a transmission manipulator;
replacing said housing;
the gas bath was closed and the plate box was locked.
Optionally, before the unlocking of the locked magazine, the method further comprises the steps of: and positioning the plate box through the bottom plate.
Optionally, the cover is removed or replaced by vertical lifting movement of the unlocking module relative to the base plate.
Optionally, the vertical height of the transmission manipulator relative to the bottom plate is adjusted to take out or put back the masks on different layers on the mask frame.
Compared with the prior art, the invention has the following advantages:
(1) the plate library device drives the unlocking module to vertically lift relative to the positioning support plate through the lifting driving module offset at one side of the positioning support plate to drive the unlocked plate box housing to move, and the plate boxes are separated and opened in a mode of fixing a plate box base body and vertically lifting the plate box housing;
(2) the plate library device reduces the vertical space occupied by the lifting driving module in a mode of 'rotating the screw nut, vertically and linearly moving the screw shaft and arranging the bearing below the screw shaft', and further reduces the vertical space of the plate library by combining a structure which is offset at one side of the positioning support plate and the screw nut and the motor are lower than the bearing surface of the positioning support plate and the linear guide rail with double steps;
(3) the plate library device reduces particle pollution sources in the plate library through the offset lifting driving module and the pumping and exhausting pipeline, and further ensures the cleanness of the internal environment and the mask plate in the plate library by combining the air bath system of the plate library;
(4) the mask access method of the invention adapts to the taking and placing of different layers of masks on the mask frame by adjusting the vertical height of the transmission manipulator, improves the flexibility of taking and placing the masks, does not strictly fix a mask taking station, and continuously introduces air bath in the process of accessing the masks, thereby effectively reducing the pollution of the external environment to the masks.
Drawings
FIG. 1 is a diagram illustrating a library apparatus according to a first embodiment of the present invention;
fig. 2 is a sectional view of a lift driving module of a plate library device according to a first embodiment of the present invention;
FIG. 3 is a flowchart illustrating a reticle accessing method according to a first embodiment of the present invention;
FIG. 4 is a state diagram of the plate library apparatus with the plate cassette housing in the high position according to the first embodiment of the present invention;
FIG. 5 is a state diagram of the plate library apparatus with the plate cassette housing in a low position according to the first embodiment of the present invention;
fig. 6 is a front view of a lift guide module of a plate library apparatus according to a second embodiment of the present invention;
fig. 7 is a schematic side view of a lift guide module of a plate library device according to a second embodiment of the present invention;
fig. 8 is a state diagram of the plate magazine apparatus according to the third embodiment of the present invention when unlocking the plate magazine;
FIG. 9 is a diagram illustrating a third embodiment of a library apparatus;
FIG. 10 is a schematic view of a gas bath and a reticle pick-and-place of a reticle library apparatus according to a third embodiment of the present invention;
in the figure, 1-a support base, 2-a positioning support plate, 3-an unlocking module, 31-an unlocking assembly, 32-an unlocking motor, 33-an unlocking module connecting piece, 341-an adapter piece, 342-a screw fixing piece, 4-a lifting driving module, 41-a motor, 42-a screw, 421-a screw shaft, 422-a screw nut, 431-a first synchronous pulley, 432-a synchronous belt, 433-a second synchronous pulley, 44-a rotating piece, 451-a first bearing, 452-a second bearing, 453-a locking nut, 5-a lifting guiding module, 51-a first linear guide rail, 52-a second linear guide rail, 511-a track of the first linear guide rail, 512-a sliding block of the first linear guide rail, 521-a track of the second linear guide rail, 522-a slide block of a second linear guide rail, 61-a first support plate, 62-a second support plate, 63-a third support plate, 71-a first particle pumping and discharging pipeline, 72-a second particle pumping and discharging pipeline and 8-a plate library sealing cover.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. Advantages and features of the present invention will become apparent from the following description and claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
In studying the existing library structure, the inventors found several problems as follows:
(1) the vertical motion direction of a plate box substrate (a plate box bottom plate and a plate frame) is required to be vertical to the upper surface of a mask plate in the plate frame by a plate box separation mode of a traditional plate library, and the requirement on the design precision of the plate library is very high;
(2) the size of the plate library equipment is required to be smaller and smaller by the photoetching machine equipment, a production line overhead traveling crane is generally adopted to take and place the plate box aiming at the 6-slot plate box, the space of the overhead traveling crane for taking and placing the plate box is required to be avoided during design, and the vertical space of the plate library is required to be smaller;
(3) the internal cleanliness of the traditional version library structure is not guaranteed, and the mask in the opened version box is easy to be polluted.
The transmission manipulator for taking and placing the mask has a vertical lifting function and can take and place the mask at different heights, so that the lifting of a plate box base body (a plate box bottom plate and a plate frame) in a traditional plate box separation mode can be replaced. Based on the technical scheme, the invention provides a plate library device for processing a commonly-used 6-slot plate box and a corresponding plate accessing method.
Example one
As shown in figure 1, the plate library device is fixed through a plate box base body (a plate box bottom plate and a plate frame), the plate box housing is separated from the plate box base body in a vertical movement mode, and the vertical movement of a transmission manipulator is combined to realize that a manipulator plate fork takes and places mask plates at different groove positions of the plate frame, so that the precision requirement of the plate library is effectively reduced.
Specifically, referring to fig. 1, the plate library device of the present invention mainly comprises a support base 1, a positioning support plate 2, an unlocking module 3, and a lifting drive module 4.
As shown in fig. 1, a positioning support plate 2 is fixed on a support seat 1 for placing a plate box, the plate box to be processed comprises a housing and a base body, the base body comprises a bottom plate and a plate frame arranged on the bottom plate, the housing is locked with the bottom plate to seal and protect the plate frame, and the plate frame is used for storing a mask plate; the unlocking module 3 is slidably arranged on the supporting seat 1 and used for unlocking the plate box on the positioning supporting plate 2, so that the housing of the plate box is disconnected with the bottom plate, and the housing of the plate box is connected with the unlocking module 3 after being unlocked; the lifting driving module 4 is fixed on the supporting seat 1 and is biased at one side of the positioning supporting plate 2, the unlocking module 3 is driven to vertically lift and drive the magazine housing to move relative to the positioning supporting plate 2, the magazine housing is separated from the magazine base body in an unlocking mode, the magazine base plate placed on the positioning supporting plate 2 is exposed, and the magazine frame on the magazine base plate is exposed.
Optionally, as shown in fig. 1, a positioning hole (not shown) is provided on the positioning support plate 2. When the plate box is placed on the positioning support plate 2 through the crown block, the bottom plate of the plate box is fixed through the positioning hole, so that the plate box is positioned, the position of the plate box is not deviated under external interference when the plate box is subsequently unlocked/locked or a mask plate is taken and placed, and the accuracy and the efficiency of subsequent operation are improved.
Optionally, the plate library device of the present invention further includes a lifting guide module 5, as shown in fig. 1, the lifting guide module 5 is fixed on the supporting seat 1, the unlocking module 3 is slidably connected to the supporting seat 1 through the lifting guide module 5, and the unlocking module 3 is located above the positioning supporting plate 2.
Optionally, the unlocking module 3 includes an unlocking assembly 31, an unlocking motor 32 and an unlocking module connecting member 33. As shown in fig. 2 in conjunction with fig. 1, the unlocking motor 32 is fixed to the lower side of the unlocking module connecting member 33, which is located on the lower side of the entire unlocking module 3. The unlocking assembly 31 and the unlocking motor 32 are offset outside the bearing surface of the positioning support plate 2, and when unlocking, the unlocking motor 32 is located at the outer side and the lower side of the bearing surface of the positioning support plate 2. Therefore, the influence of particles generated by friction when the unlocking module 3 is unlocked on the positioning support plate 2 and the internal environment of the whole plate library device can be effectively avoided.
The unlocking assembly 31 and the unlocking motor 32 are rotatably and slidably connected to the unlocking module connecting member 33, and the specific structure and connection relationship of the unlocking assembly 31 and the unlocking motor 32 can refer to the prior art, which is not described herein again. The unlocking motor 32 drives the unlocking assembly 31 to unlock or lock the plate box bottom plate and the plate box cover.
When the unblock subassembly 31 is right after the version box unblock, the housing of version box with the bottom plate disconnection of version box, and under unblock module connecting piece 33 and unblock subassembly 31's combined action, the housing of version box links together with unblock module 3 to can drive unblock module 3 and the version box housing above for the separation of version box housing and version box base member is realized to vertical elevating movement to the bottom plate (or the base member) of version box under the effect of lift drive module 4.
Optionally, the lifting driving module 4 includes a motor 41 and a lead screw 42, as shown in fig. 2, the motor 41 is fixed on the supporting seat 1; the screw 42 includes a screw shaft 421 and a screw nut 422, the screw shaft 421 and the screw nut 422 are engaged with each other through a thread pair, the top end of the screw shaft 421 is connected to the unlocking module connector 33 through a screw fixing member 342 and an adapter 341, so that the screw shaft 421 is connected to the entire unlocking module 3, and the screw nut 422 is rotatably connected to the support base 1. The motor 41 drives the lead screw nut 422 to rotate, and further drives the lead screw shaft 421 to perform vertical lifting movement relative to the positioning support plate 2.
Specifically, referring to fig. 2, the lifting driving module 4 further includes a hollow rotating member 44, the screw nut 422 is fixed in the rotating member 44 by a bolt, and the rotating member 44 is fixed on the supporting base 1 by a first bearing 451, a second bearing 452 and a lock nut 453. Wherein, the inner rings of the first bearing 451 and the second bearing 452 are respectively matched with the upper side and the lower side of the rotating member 44 to realize the rotation of the rotating member 44, and the lock nut 453 is used for fastening the second bearing 452.
Alternatively, the motor 41 is in driving connection with the rotating member 44 via a synchronous pulley and a synchronous belt. As shown in fig. 2, the first timing pulley 431 is fixed to a rotation shaft of the motor 41, the second timing pulley 433 realizes rotation transmission through the timing belt 432 and the first timing pulley 431, and the second timing pulley 433 is fixed through a jack screw and the rotation member 44.
Specifically, with reference to fig. 2, the working principle of the lifting drive module 4 is as follows: the motor 41 rotates to drive the first synchronous belt pulley 431 to rotate, the second synchronous belt pulley 433 is driven to rotate through the transmission of the synchronous belt 432, so that the rotating piece 44 is driven to rotate, the rotating piece 44 rotates to drive the screw nut 422 to rotate, the screw nut 422 and the screw shaft 421 convert the rotation of the screw nut 422 into the lifting linear motion of the screw shaft 421 through a thread pair, the hollow part A of the rotating piece 44 is a motion space of the lifting linear motion of the screw shaft 421, the up-and-down motion of the screw shaft 421 drives the up-and-down motion of the unlocking module 3 and the plate box housing, and the unlocking separation of the plate box is realized.
Aiming at the version library device of the invention, the invention also provides a corresponding operation version box and a method for accessing the mask, as shown in figure 3, the method comprises the following steps:
s1, unlocking the locked plate box to disconnect the housing of the plate box from the bottom plate;
s2, removing the housing of the plate box to expose the bottom plate of the plate box and the plate frame on the bottom plate;
s3, taking and placing the mask on the plate frame through a transmission manipulator;
s4, replacing the casing of the plate box and locking the plate box.
In step S3, after the plate magazine apparatus of the present invention is vertically lifted to remove the housing of the plate magazine, the vertical height of the transfer robot relative to the positioning support plate 2 is adjusted to take out the mask plates on different layers on the plate frame exposed on the positioning support plate 2, and the used mask plates can be returned to the plate frame by the transfer robot.
After the removal or replacement of the reticle is completed, step S4 is performed to replace the casing of the cassette and lock the cassette.
Optionally, as shown in fig. 2, the plate library apparatus of the present invention further includes a plate library sealing cover 8 connected to the unlocking module 3, and the plate library sealing cover 8 seals an internal environment of the entire plate library apparatus to prevent an external environment from polluting the internal environment of the plate library. When the unlocking is performed, the plate warehouse sealing cover 8 is lifted along with the unlocking module 3, and the positioning support plate 2 and a plate box base body (a plate box bottom plate and a plate frame) arranged on the positioning support plate are exposed.
If fig. 4 is a state diagram when the magazine housing (not shown in the figure) is in a high position, the unlocking module 3 and the magazine seal cover 8 are in a highest position, the magazine housing is on the top end in this state, the magazine housing is separated from the magazine base (the magazine bottom plate and the magazine frame), the transmission manipulator can enter the interior of the magazine from the completely open surface of the magazine seal cover 8 facing the transmission interior, and the different layers of the reticles on the magazine frame are taken and placed.
After carrying out the access operation to required mask plate in the version box, put back the housing of version box and lock the version box, rethread overhead traveling crane is got to the version box in the version storehouse device and is put to realize the change of different version boxes, satisfy the demand of taking to different model mask plates.
When the plate box is replaced, the unlocking module 3 and the plate warehouse sealing cover 8 move downwards through the lifting driving module 4, as shown in fig. 5, a state diagram when a plate box housing (not shown in the diagram) is at a low position is shown, the bottom surface of the plate box housing and a plate box bottom plate are overlapped at the moment, and the position is a plate box unlocking/locking station and is also a station for taking and placing the plate box by a crown block.
The plate library device can realize the picking and placing of different layers of mask plates on the plate frame of the plate box by opening and separating the plate box in a mode that the base body of the plate box is fixed and the cover shell of the plate box vertically ascends and descends and combining the means of adjusting the vertical height of the transmission manipulator in the mask plate picking and placing method. The invention adopts the technical scheme that the lifting module of the plate library device is not precisely adapted to the plate picking and placing station of the transmission manipulator of the traditional plate library device, but is adapted to the lifting module of the plate library device by adjusting the transmission manipulator, so that the design precision requirement of the plate library structure is greatly reduced, the design and production efficiency of the plate library device is improved, and the large-scale mass production of the plate library device is facilitated.
Compared with the conventional common arrangement mode of the motion shaft, namely 'rotation of the screw shaft, linear motion of the screw nut and arrangement of the bearings on two sides of the screw shaft', the invention reduces the vertical space size (relative to the bearing surface of the positioning support plate 2) of the plate library in a mode of 'rotation of the screw nut, up-and-down motion of the screw shaft and arrangement of the bearings on the lower side of the screw shaft'.
Alternatively, as shown in fig. 2, the top ends of the motor 41 and the lead screw nut 422 are lower than the bearing surface of the positioning support plate 2. Referring to fig. 2, all the parts of the entire elevation driving module 4 except the screw shaft 421 are located at the lower side of the bearing surface of the positioning support plate 2, and the entire elevation driving module 4 is offset at one side of the positioning support plate 2. Further reducing the vertical space occupied by the lifting driving module 4 and being beneficial to reducing the vertical space of the whole plate library.
Example two
Aiming at the second problem provided by the invention, how to further reduce the vertical space of the plate library device is compressed. On the basis of the first embodiment, the inventor proposes a design of a double-layer stepped guide rail.
The lifting guide module 5 comprises a fixing component and a sliding component, wherein the fixing component is fixed on the supporting seat 1, the sliding component is slidably arranged on the fixing component, and the unlocking module 3 is connected with the sliding component, so that the unlocking module 3 can be slidably connected on the supporting seat 1.
Optionally, the lifting guide module 5 of this embodiment adopts a linear guide, the fixed component is a track, and the sliding component is a slider.
Alternatively, as shown in fig. 6 and with reference to fig. 7, the lifting guide module 5 of this embodiment is a double-layer stepped linear guide, and the lifting guide module 5 includes a first linear guide 51 and a second linear guide 52. The track 511 of the first linear guide 51 is fixed on one surface of the first supporting plate 61 through a bolt, the other surface of the first supporting plate 61 is fixed on the supporting seat 1 through a bolt, and the 512 slide block of the first linear guide 51 is fixed with one surface of the second supporting plate 62 through a bolt; the rail 521 of the second linear guide 52 is fixed to the other surface of the second support plate 62 by a bolt, the slider 522 of the second linear guide 52 is fixed to one surface of the third support plate 63 by a bolt, and the top end of the third support plate 63 is connected to the unlocking module connecting member 33 by a bolt.
In addition, the double-layer stepped guide rail of the embodiment can also be replaced by other forms such as a cross roller guide rail.
This embodiment is through the design of this kind of bilayer is cascaded linear guide's lift direction module, can effectively reduce the vertical space that the version storehouse device (being in the low level as shown the version box housing of fig. 5 promptly) occupied when being in the low level to be favorable to reducing the vertical space size of whole version storehouse device.
On the basis of the arrangement mode of the motion shaft of the first embodiment, i.e., the screw nut rotates, the screw shaft moves up and down, and the bearing is arranged on the lower side of the screw shaft, and the structural design of the whole lifting driving module 4, except for the screw shaft 421, all parts of the whole lifting driving module are positioned on the lower side of the bearing surface of the positioning support plate 2, the vertical space of the plate library device can be further reduced by combining the double-layer stepped guide rail of the first embodiment.
EXAMPLE III
In view of the third problem of the present invention, the inventor has improved the structural design of the plate library device on the basis of the first embodiment and the second embodiment to clean the internal environment of the plate library device.
Analyzing the structure of the plate library device in the first and second embodiments, it is found that the rotation of the motor, the synchronous belt, the synchronous pulley, the bearing, the rotating member and other moving members in the lifting driving module 4, the positions where the relative friction exists such as the screw shaft and the screw nut are all arranged below the positioning support plate 2, and the whole lifting driving module 4 is offset at one side of the positioning support plate 2, so that the particles generated by the lifting driving module 4 in the motion friction do not fall onto the positioning support plate 2, thereby not affecting the environment inside the plate library.
The position where the plate magazine apparatus itself generates particles mainly comes from the unlocking module 3 and the elevation guide module 5. As shown in fig. 7, when the magazine is unlocked by the magazine device, the unlocking motor 32 and the connecting bearing in the unlocking module 3 are located below the positioning support plate 2, and the unlocking motor 32 and the connecting bearing thereof are offset outside the bearing surface of the positioning support plate 2, so that particles generated by the movement of the driving part of the unlocking module 3 can fall outside the magazine device, thereby not affecting the environment inside the magazine and not affecting the magazine on the positioning support plate 2.
In addition, the plate library device is located on the outermost side of the whole photoetching machine equipment when in use, and discharged particles generated by the plate library device fall to the outside of the machine table without affecting the photoetching machine equipment.
However, as shown in fig. 7, the unlocking assembly 31 in the unlocking module 3 is always located above the positioning support plate 2, and particles generated when the unlocking assembly 31 is unlocked easily fall onto the positioning support plate 2 to pollute the internal environment of the plate library device; referring to fig. 8, when the plate library device (plate cartridge housing) moves to a high position, the second linear guide 52 in the lifting driving module 5 exceeds the bearing surface of the positioning support plate 2, that is, the second linear guide 52 is located inside the plate library device, and particles generated by friction between the upper slide block of the second linear guide 52 and the rail fall on the positioning support plate 2, which affects the internal environment of the plate library device.
Based on this, as shown in fig. 8, the plate library device in this embodiment is provided with a particle pumping pipeline on the unlocking module 3 and the lifting guide module 5 respectively, and particles generated during the movement of the unlocking assembly 31 and the lifting guide module 5 are exhausted through the particle pumping pipeline.
Specifically, referring to fig. 8, the plate library device in the present embodiment further includes a first particle pumping duct 71 disposed on the second linear guide 52 and a second particle pumping duct 72 disposed on the unlocking assembly 31, wherein the particles generated by the second linear guide 52 are precisely exhausted by pumping air through the first particle pumping duct 71, and the particles generated by the unlocking assembly 31 are precisely exhausted by pumping air through the second particle pumping duct 72.
Inevitably, particles generated by the second linear guide 52 and the unlocking assembly 31 still partially fall on the positioning support plate 2; meanwhile, after the plate box is separated and opened, the plate storage sealing cover 8 is lifted and opened, dust particles in the external environment of the plate storage device can fly into the plate storage device, and then the mask plates in the plate box frame can be polluted.
Based on this, the version storehouse device of this embodiment still includes a set of gas bath system, lets in the gas bath to the inside location backup pad 2 of version storehouse device through the gas bath system to clear away the particle pollution of the version box on the version box shelf that exposes after version box housing and the separation of version box bottom plate, prevent simultaneously that the outside particle of version storehouse device from getting into in the version storehouse device.
As shown in fig. 9 (the gas bath system is not shown in the figure), when the casing of the plate box is in a high position, that is, after the plate box is opened, the top surface of the plate library device is the locking and unlocking module 3 of the casing of the plate box (not shown in the figure), the bottom surface of the plate library device is the positioning support plate 2, 3 surfaces perpendicular to the positioning support plate 2 are the plate library sealing cover 8, and the remaining 1 vertical surface is opposite to the transmission interior and is opened to the transmission interior, and is a space for the transmission manipulator to take and place the mask.
Based on this, can utilize this space, insert a set of gas bath system, blow into the inside open face of version storehouse device from this face with 1 remaining perpendicular and to the transmission as the gas bath of version storehouse device and blow into the inside of version storehouse device, realize the inside local malleation for the external environment of version storehouse device, avoid the outside granule of version storehouse device to get into the inside of version storehouse device, can sweep the granule pollution on the mask version simultaneously, realize the cleanness of the internal environment of version storehouse.
Accordingly, the reticle access method in the first embodiment may also add a step, and referring to fig. 3, a step may be added between S2 and S3: and carrying out gas bath on the area of the plate frame for storing the mask plates until the plate box is locked or replaced. Therefore, the pollution of the mask in the process of accessing the mask from the plate box can be reduced.
In this embodiment, the particles generated by the magazine device are accurately pumped through the particle pumping and discharging pipeline, and meanwhile, a set of gas bath system is added to perform gas bath on the opened magazine device and the opened magazine box, so that local positive pressure inside the magazine device relative to the external environment is realized, the internal environment and the mask plates of the magazine device are cleaned, and by combining with the structural design that most structures of the unlocking module 3, the lifting driving module 4 and the lifting guide module 5 are arranged outside the bearing surface of the positioning support plate 2 in the second embodiment of the embodiment, the pollution inside the magazine device can be effectively reduced.
In summary, in the plate library device provided in the first embodiment of the present invention, the separate plate box is opened by fixing the plate box base (the plate box bottom plate + the plate frame) and vertically lifting the plate box cover, and then the means for adjusting the vertical height of the transmission manipulator in the mask access method of the first embodiment is combined to realize taking and placing of different layers of masks on the plate box plate frame; the lifting module of the plate library device is not precisely adapted to the plate taking and placing station of the transmission manipulator of the traditional plate library device, but is adapted to the lifting module of the plate library device by adjusting the transmission manipulator, so that the design precision requirement of the plate library structure is greatly reduced, the design and production efficiency of the plate library device is improved, and the large-scale mass production of the plate library device is facilitated.
In addition, on the basis of the arrangement mode of the motion shaft of the first embodiment, namely that the screw nut rotates, the screw shaft moves up and down, and the bearing is arranged on the lower side of the screw shaft, and the structural design that all parts except the screw shaft in the whole lifting driving module are positioned on the lower side of the bearing surface of the positioning support plate, the vertical space of the plate library device can be further reduced by combining the double-layer stepped guide rail of the second embodiment; on the basis of the design that most structures of the unlocking module, the lifting driving module and the lifting guide module are arranged outside the bearing surface of the positioning support plate in the second embodiment, the pollution to the internal environment of the plate library device can be effectively reduced and the mask plates in the plate box can be opened and cleaned by combining the particle pumping and exhausting pipeline and the gas bath system in the third embodiment.
It is noted that, in this document, relational terms such as "first," "second," and the like are used solely to distinguish one element from another element without necessarily requiring or implying any actual such relationship or order between such elements.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (15)
1. A plate library device is used for storing and unlocking a plate box, the plate box comprises a housing and a base body, the base body comprises a bottom plate and a plate frame arranged on the bottom plate, the housing is locked with the bottom plate to carry out sealing protection on the plate frame, and the plate frame is used for storing mask plates;
the positioning support plate is fixed on the support seat and is used for placing the plate box;
the unlocking module is slidably arranged on the supporting seat and used for unlocking the plate box, so that the housing is disconnected with the bottom plate, and the housing is connected with the unlocking module after being unlocked;
the lifting driving module is fixed on the supporting seat and is offset on one side of the positioning supporting plate, and the unlocking module is driven to vertically lift relative to the positioning supporting plate to drive the unlocked housing to move, so that the housing is separated from the base body and the plate frame is exposed.
2. The plate library device according to claim 1, wherein the lifting driving module comprises a motor and a lead screw, the motor is fixed on the support base, the lead screw comprises a lead screw shaft and a lead screw nut, the lead screw shaft is engaged with the lead screw nut, the lead screw shaft is connected with the unlocking module, the lead screw nut is rotatably connected with the support base, and the motor drives the lead screw nut to rotate, so as to drive the lead screw shaft to vertically lift relative to the positioning support plate.
3. The plate library device as claimed in claim 2, wherein the lifting driving module further comprises a hollow rotating member, the screw nut is fixed in the rotating member, the rotating member is fixed on the supporting base through a bearing, and the motor is in transmission connection with the rotating member through a synchronous pulley and a synchronous belt.
4. The plate library device of claim 2, wherein the top ends of the motor and the lead screw nut are lower than the bearing surface of the positioning support plate.
5. The library system of claim 4, further comprising a lift guide module, the lift guide module including a fixed assembly and a slide assembly, the fixed assembly being fixed to the support base, the slide assembly being slidably disposed on the fixed assembly, the unlocking module being coupled to the slide assembly.
6. The plate library apparatus of claim 5, wherein the lifting guide module is a linear guide, the fixed component is a rail, and the sliding component is a slider.
7. The plate library device according to claim 6, wherein the lifting guide module is a double-layer stepped linear guide, the lifting guide module comprises a first linear guide and a second linear guide, a track of the first linear guide is fixed on the support base through a first support plate, a slide block of the first linear guide is connected with a track of the second linear guide through a second support plate, and a slide block of the second linear guide is connected with the unlocking module through a third support plate.
8. The apparatus of claim 7, further comprising a gas bath system through which a gas bath is introduced to the plate holder to purge particle contamination of reticles on the plate holder while preventing external particles from entering the apparatus.
9. The library apparatus of claim 8, further comprising an exhaust duct provided on the unlocking module and the elevation guide module, respectively, through which particles generated during the movement of the unlocking module and the elevation guide module are exhausted by suction.
10. The library apparatus of claim 9, further comprising a library seal cover fixedly coupled to the unlocking module for sealing an internal environment of the library apparatus.
11. The plate library device according to any one of claims 1 to 10, wherein a positioning hole is provided in the positioning support plate, and the bottom plate is fixed through the positioning hole to position the magazine.
12. A reticle storing and taking method for storing and taking reticles from a reticle box stored in a reticle library apparatus according to any one of claims 1 to 11, comprising:
unlocking the locked magazine to disconnect the casing of the magazine from the base plate;
removing the housing to expose the bottom plate of the plate box and the plate frame on the bottom plate;
introducing a gas bath into the plate frame;
taking out the mask on the plate frame through a transmission manipulator;
putting the mask back on the plate frame through a transmission manipulator;
replacing said housing;
the gas bath was closed and the plate box was locked.
13. The method of accessing a reticle recited in claim 12, further comprising, prior to unlocking the locked reticle pod, the steps of: and positioning the plate box through the bottom plate.
14. The method of accessing a reticle recited in claim 12 or 13 wherein the enclosure is removed or replaced by vertical elevating movement of an unlocking module relative to the base plate.
15. The reticle access method according to claim 12 or 13, wherein reticles on different layers on the reticle stage are taken out or put back by adjusting the vertical height of the transport robot relative to the base plate.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711125166.6A CN109782532B (en) | 2017-11-14 | 2017-11-14 | Version library device and mask access method |
| PCT/CN2018/115057 WO2019096094A1 (en) | 2017-11-14 | 2018-11-12 | Mask container apparatus and mask storage and removal method |
| TW107140418A TW201925067A (en) | 2017-11-14 | 2018-11-14 | Mask container apparatus and mask storage and removal method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711125166.6A CN109782532B (en) | 2017-11-14 | 2017-11-14 | Version library device and mask access method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109782532A CN109782532A (en) | 2019-05-21 |
| CN109782532B true CN109782532B (en) | 2020-09-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711125166.6A Active CN109782532B (en) | 2017-11-14 | 2017-11-14 | Version library device and mask access method |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN109782532B (en) |
| TW (1) | TW201925067A (en) |
| WO (1) | WO2019096094A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112091986A (en) * | 2020-08-06 | 2020-12-18 | 陈凯 | Dish conveying robot suitable for overhead track |
| CN112091934A (en) * | 2020-08-06 | 2020-12-18 | 陈凯 | Overhead rail type intelligent unmanned dish delivery system |
| CN114476669B (en) * | 2022-02-11 | 2023-10-03 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Plate library device, plate library system and posture adjustment method |
| CN115057081A (en) * | 2022-06-23 | 2022-09-16 | 上海大族富创得科技有限公司 | Light shield storage box opening and closing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001154341A (en) * | 1999-11-25 | 2001-06-08 | Ulvac Seimaku Kk | Mask transporting case |
| KR20060010858A (en) * | 2006-01-10 | 2006-02-02 | 코리아테크노(주) | Photomask position controlling apparatus |
| CN101526744A (en) * | 2009-01-07 | 2009-09-09 | 上海微电子装备有限公司 | Positioning access mechanism of mask |
| CN201327564Y (en) * | 2008-12-10 | 2009-10-14 | 上海微电子装备有限公司 | Reticle library mechanism |
| CN203720526U (en) * | 2013-12-31 | 2014-07-16 | 上海微电子装备有限公司 | Mask library transmitting device |
| CN203714553U (en) * | 2013-12-31 | 2014-07-16 | 上海微电子装备有限公司 | Plate cabin device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100665293B1 (en) * | 2006-01-04 | 2007-01-17 | 코리아테크노(주) | Boxcover opener for use of photomask shipping box |
| CN202944866U (en) * | 2012-10-19 | 2013-05-22 | 上海微电子装备有限公司 | Unlocking mechanism of mask plate box |
| CN103984203B (en) * | 2013-02-07 | 2018-01-19 | 上海微电子装备（集团）股份有限公司 | The lock and unlock device of mask box |
-
2017
- 2017-11-14 CN CN201711125166.6A patent/CN109782532B/en active Active
-
2018
- 2018-11-12 WO PCT/CN2018/115057 patent/WO2019096094A1/en active Application Filing
- 2018-11-14 TW TW107140418A patent/TW201925067A/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001154341A (en) * | 1999-11-25 | 2001-06-08 | Ulvac Seimaku Kk | Mask transporting case |
| KR20060010858A (en) * | 2006-01-10 | 2006-02-02 | 코리아테크노(주) | Photomask position controlling apparatus |
| CN201327564Y (en) * | 2008-12-10 | 2009-10-14 | 上海微电子装备有限公司 | Reticle library mechanism |
| CN101526744A (en) * | 2009-01-07 | 2009-09-09 | 上海微电子装备有限公司 | Positioning access mechanism of mask |
| CN203720526U (en) * | 2013-12-31 | 2014-07-16 | 上海微电子装备有限公司 | Mask library transmitting device |
| CN203714553U (en) * | 2013-12-31 | 2014-07-16 | 上海微电子装备有限公司 | Plate cabin device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019096094A1 (en) | 2019-05-23 |
| CN109782532A (en) | 2019-05-21 |
| TW201925067A (en) | 2019-07-01 |
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