KR100665293B1 - Boxcover opener for use of photomask shipping box - Google Patents

Abstract

Disclosed is a mask transport box box cover opener for separating a box cover from a transport box by raising a grip unit to a box cover closing an opening of a transport box in which a mask is stored.

Such a mask transport box box cover opener is a mask transport box box cover opener, which includes a base 111, a motor 112 fixed on the base 111, and a driving / driven pulley 113, 114 rotating by the motor 112. ), The belt 115 wound around the drive / driven pulleys 113 and 114, the belt fixing part 116a fixed on the belt 115, and the moving plate body 116 fixed to the belt fixing part 116a. A lifting unit 110 having a guide rail 117 fixed in the vertical direction on the base 111 and a slider 116b fixed to the moving plate body and sliding on the guide rail 117; And a plate body 121 fixed to the movable plate body 116, a gripper 123 formed at both lower ends thereof, and a movable body 122 disposed on both sides of the plate body 121, and the movable body 122. And a grip unit 120 including a gap adjusting means 130 for moving to the side, and a sensor unit 140 for detecting whether the gripper 123 grasps the box cover C.

Mask, transport box, grip unit, gripper, lifting unit

Description

Box cover opener for use of photomask shipping box}

1 is a perspective view of a mask transport box box cover opener of the present invention,

Figure 2 is an exploded perspective view of the lifting unit of the present invention mask transport box box cover opener,

Figure 3 is an exploded perspective view of the grip unit of the present invention mask transport box box cover opener,

Figure 4 is a front sectional view of the lifting unit of the mask transport box box cover opener of the present invention,

Figure 5 is a side cross-sectional view of the lifting unit of the present invention mask transport box box cover opener,

Figure 6 is a cross-sectional plan view of the grip unit of the present invention mask transport box box cover opener,

Figure 7 is a side cross-sectional view of the grip unit of the present invention mask transport box box cover opener.

※ Explanation of code for main part of drawing

110: lifting unit, 111: base, 112: motor, 113, 114: drive / driven pulley, 115: belt,

116: moving plate, 116a: belt fixing, 116b: slider, 116c: detection,

117: guide rail, 118a, 118b: upper / lower limit sensor, 120: grip unit, 121: plate,

122: moving body, 123: gripper, 130: transport means, 131: motor, 132, 133: driving / driven pulley,

134: belt, 135: screw, 136: ball nut, 137: LM guide, 138: slider,

140: sensor portion, 141: contact portion, 142: shaft, 143: detection piece, 144: detection sensor,

145: elastic member

The present invention relates to a mask transport box box cover opener for separating the box cover from the transport box by raising the grip unit through the lifting unit in a state in which the box cover closing the opening of the transport box in which the mask is stored is fixed with the grip unit. .

Generally, various unit processes such as photolithography, diffusion, etching, and chemical vapor deposition are performed in order to manufacture a semiconductor device, and the photolithography process is a process for forming a predetermined pattern on a semiconductor wafer. For example, after the PR (Photoresist) layer is uniformly formed on the upper surface of the semiconductor wafer, a mask (or reticle) formed in a predetermined layout is placed and irradiated with light of a high intensity wavelength to separate and clean unnecessary PR layers. To form the pattern required.

A mask for forming a predetermined pattern on such a semiconductor wafer is stored in a photomask transport box.

As such, in order to withdraw the mask stored in the transport box, a box cover opener for removing the box cover of the transport box is required.

Accordingly, an object of the present invention is to provide a mask transport box box cover opener that lifts a box cover of a transport box to separate a box cover from a transport box.

It is also an object of the present invention to provide a mask transport box box cover opener in which a lift width for lifting and lowering a grip unit for fixing a box cover is controlled by a sensor.

Another object of the present invention is to provide a mask transport box box cover opener for preventing the box cover from being damaged by the gripper by providing a sensor unit for detecting the box cover in the gripper of the grip unit fixing the box cover.

Mask transport box box cover opener of the present invention for achieving the above object is a mask transport box box cover opener, the base, a motor fixed on the base, a drive / driven pulley rotated by the motor, the drive / driven The belt wound on the pulley, the belt fixing part fixed on the belt, the moving plate body fixed to the belt fixing part, the guide rail fixed vertically on the base, the slider fixed to the moving plate body and sliding on the guide rail. A lifting unit formed; and a plate body fixed to the movable plate body, a movable body disposed on both sides of the plate body by forming grippers at both lower ends thereof, a transfer means for moving the movable body to the opposite sides, and gripping the box cover It is achieved by providing a mask transport box box cover opener comprising a grip unit formed with a sensor unit for detecting a.

The lifting unit of the mask transport box box cover opener of the present invention includes a detection piece fixed to the moving plate body so as to limit the shank width of the moving plate body, and an upper and lower limit sensors fixed to the upper and lower sides of the base to detect the detection piece. It is preferable.

The conveying means of the mask transport box box cover opener of the present invention includes a motor fixed to the plate, a drive / driven pulley rotated by the motor, a belt wound on the drive / driven pulley, and threads opposite to each other at both ends. And a ball screw fixed to the driven pulley, a ball nut coupled to the ball screw 135 and slid to the movable body, an LM guide fixed to the plate body, and a slider fixed to the movable body sliding on the LM guide. desirable.

The sensor unit of the present invention mask transport box box cover opener, the contact portion formed at the front end of the gripper, the shaft is fixed to the contact portion by forming a detection piece at the rear end, a sensor for detecting the detection piece is fixed to the rear of the gripper, the gripper It is preferable that the elastic member be elastically supported from the contact portion.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of the mask transport box box cover opener of the present invention will be described in detail.

1 is a perspective view of a mask shipping box box cover opener of the present invention, Figure 2 is an exploded perspective view of a lifting unit of the mask shipping box box cover opener of the present invention, Figure 3 is a grip of the mask shipping box box cover opener of the present invention An exploded perspective view of the unit.

As shown in the figure, the mask transport box box cover opener of the present invention includes a grip unit 120 for holding a box cover of a transport box in which a mask is stored, and a lifting unit 110 for raising the grip unit 120. Is done.

The lifting unit 110 includes a base 111, a motor 112 fixed on the base 111, driving / driven pulleys 113 and 114 rotating by the motor 112, and the driving / driven pulley ( Belt 115 wound around 113, 114, Belt fixing portion 116a fixed on belt 115, Moving plate body 116 fixed on belt fixing portion 116a, Vertical on base 111 A guide rail 117 fixed in the direction, a slider 116b fixed to the moving plate body 116 and sliding on the guide rail 117, a detection piece 116c fixed to the moving plate body 116, and a base. The upper and lower limit sensors 118a and 118b are respectively fixed to the upper and lower sides of the 111 to detect the detection piece 116c.

The grip unit 120 includes a plate body 121 fixed to the moving plate body 116 of the lifting unit 110, and a gripper 123 formed at both lower ends thereof to move the mobile body 122 disposed at both sides of the plate body 121. ), A gap adjusting means 130 for moving the movable body 122 to the opposite sides, and a grip unit 120 having a sensing sensor 140 for detecting whether the gripper 123 grips the box. .

Here, the gap adjusting means 130 is wound around the motor 131 fixed to the plate body 121, the driving / driven pulleys (132, 133), and the driving / driven pulleys (132, 133) rotated by the motor 131 The belt 134 and the ball screw 135 rotated by the driven pulley 133 by forming threads opposite to each other at both ends and the ball screw 135 are coupled to the ball screw 135 to slide and are fixed to the movable body 122. A ball nut 136, an LM guide 137 fixed to the plate body 121, and a slider 138 fixed to the moving body 122 and sliding on the LM guide 137,

The sensor unit 140 includes a contact part 141 formed at the tip of the gripper 123, a shaft 142 fixed to the contact part 141 by forming a detection piece 143 at the rear end, and a rear of the gripper 123. It is fixed to the sensing sensor 144 for detecting the detection piece 143 and the elastic member 145 for elastically supporting the contact portion 141 from the gripper 123.

Hereinafter, the operation of the mask transport box box cover opener of the present invention having the configuration as described above.

Figure 4 is a plan sectional view of the grip unit of the present invention mask transport box box cover opener, Figure 5 is a side cross-sectional view of the grip unit of the present invention mask transport box box cover opener, Figure 6 is a present invention mask transport box box Side cross-sectional view of the lifting unit of the cover opener, Figure 7 is a plan cross-sectional view of the lifting unit of the mask transport box box cover opener of the present invention.

First, referring to the operation of the lifting unit as shown in FIGS. 4 and 5, when the belt 115 wound around the driving / driven pulleys 113 and 114 is rounded by the rotation of the motor 112, the belt 115 is moved on the belt 115. The movable plate body 116 fixed by the belt fixing unit is lifted, and the movable plate body 116 is lifted by the slider 116b which slides on the guide rail 117.

In addition, the upper and lower limit sensors 118a and 118b fixed to the upper and lower sides of the base 111 respectively detect the detection piece 116c fixed to one side of the moving plate body 116, and control the raising and lowering height by a detection signal. The lifting width of the moving plate body 116 is limited.

Next, referring to the operation of the grip unit 120 shown in Figs. 6 and 7, the ball nut 136 fixed to the moving body 122 at both ends of the ball screw 135 formed with threads in the opposite direction is One end of the ball screw 135 is assembled to the driven pulley 133 and rotated by the motor 131 together with the driving pulley 132 wound by the belt 134.

Therefore, both moving bodies 122 fixed to the ball nut 136 according to the forward and reverse rotation of the ball screw 135 of the gap adjusting means 130 are reversed / moved so that the gap is narrowed or widened, and the movable body 122 The slider 138 fixed to the bottom of the guide guides the movement of the movable body 122 while sliding on the LM guide 137 fixed on the plate surface.

When the movable body 122 moves toward the center of the plate surface 121, the grippers 123 formed at both ends of the movable body 122 hold the box cover C, and the sensor unit 140 formed at the gripper 123. Whether the gripping of the box cover (C) is sensed to control the rotation of the motor 131 of the gap adjusting means (130).

That is, when the contact portion 141 formed at the tip of the gripper 123 comes into contact with the box cover C, the shaft 142 fixed to the rear of the contact portion 141 moves backward and the detection piece 143 at the rear end moves the gripper 123. ) To generate a detection signal by contacting the detection sensor 144 fixed to the control unit, thereby controlling the motor 131 of the gap adjusting means 130 to limit its movement.

On the other hand, when the gripper 123 is separated from the box cover (C), the contact portion 141 is projected to the original position by the elastic member 145 inserted between the gripper 123 and the contact portion 141 of the shaft 142 The contact portion between the detection piece 143 and the detection sensor 144 is opened again.

In the mask transport box box cover opener of the present invention, the movable body 122 having the gripper 123 fixed to both lower ends thereof is fixed / released while the box cover C moves in the opposite direction by the gap adjusting means 130. When the gripper 123 contacts the box cover C, the movement of the movable body 122 is limited by controlling the motor 131 of the gap adjusting means 130 through the sensor unit 140 formed on the gripper 123. After maintaining the fixed state, by driving the motor of the lifting unit to lift the moving plate body 116 is fixed to the grip unit 120 to open the box cover (C) of the transport box the mask is stored.

Meanwhile, as shown in FIG. 7, a vacuum pad (V) is installed on the bottom surface of the plate body 121 and the upper surface of the box cover C is held on both sides through the grip unit 120. The adsorption causes the box cover C to move upward to open.

The mask transport box box cover opener of the present invention as described above enables the unmanned box-open function of separating the mask in the transport box by raising / removing the box cover of the transport box to provide a system suitable for the automated process of mask transport. It has an effect of preventing contamination and damage of the mask.

In addition, the elevating width of the elevating unit for raising and lowering the grip unit is controlled by the sensor, and the sensor unit for detecting the box cover is provided in the gripper of the grip unit for fixing the box cover so that the mask is damaged during the movement of the grip unit or the elevating unit. It also has the effect of preventing it.

Claims (5)

In the mask shipping box box cover opener, Lifting unit 110, the movable plate body 116 is moved up and down by the base 111; And The plate body 121 horizontally fixed to the movable plate body 116, the plurality of movable bodies 122 which are moved while being controlled at a predetermined interval on the plate body 121, and vertically hanged on both lower ends of the movable bodies 122, respectively. Gripping with grippers 123, a gap adjusting unit 130 for adjusting the front and rear gaps of the grippers 123, and a sensor unit 140 for detecting whether the grippers 123 are gripped by the box cover C. Including unit 120, A mask transport box box cover opener, characterized in that the box cover (C) is separated from the mask packing box. The method of claim 1, Mask transport box box cover opener, characterized in that to form a sucker (V) on the bottom surface of the plate body (121). The method according to claim 1 or 2, The gap adjusting means 130 may include a motor 131 fixed to the plate body 121, driving / driven pulleys 132 and 133 rotating by the motor 131, and a belt wound around the driving / driven pulleys 132 and 133 ( 134, a ball screw 135 fixed to the driven pulley 133 by forming threads in opposite directions at both ends, and a ball nut coupled to the ball screw 135 to slide and fixed to the movable body 122 ( 136 and a LM guide 137 fixed to the plate body 121 and coupled with the slider 138 formed on the bottom of the movable body 122 to guide the movable body 122. Opener. The method of claim 3, wherein The sensor unit 140 includes a contact part 141 formed at the tip of the gripper 123, a shaft 142 fixed to the contact part 141 by forming a detection piece 143 at the rear end, and a rear of the gripper 123. Mask transport box box cover opener, characterized in that consisting of a sensor 144 is fixed to the detecting member 143 and an elastic member 145 elastically supporting the contact portion 141 from the gripper 123. The method of claim 3, wherein The lifting unit 110, The base 111, the motor 112 fixed on the base 111, the drive / driven pulleys 113 and 114 rotated by the motor 112, and the belt wound around the drive / driven pulleys 113 and 114 ( 115, a belt fixing part 116a fixed on the belt 115, a moving plate body 116 fixed to the belt fixing part 116a, and a guide rail fixed vertically on the base 111 ( 117, a slider 116b fixed to the moving plate body 116 and sliding on the guide rail 117, a detection piece 116c fixed to the moving plate body 116, and above and below the base 111, respectively. A mask transport box box cover opener, which is fixed to form upper and lower limit sensors 118a and 118b for detecting the detection piece 116c.

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