CN106684023A - Fully-sealed SMIF system - Google Patents
Fully-sealed SMIF system Download PDFInfo
- Publication number
- CN106684023A CN106684023A CN201710192002.9A CN201710192002A CN106684023A CN 106684023 A CN106684023 A CN 106684023A CN 201710192002 A CN201710192002 A CN 201710192002A CN 106684023 A CN106684023 A CN 106684023A
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- Prior art keywords
- container
- plate
- box body
- installing plate
- box
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- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 title claims abstract description 43
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 title claims abstract description 43
- 238000007789 sealing Methods 0.000 claims abstract description 60
- 239000007789 gas Substances 0.000 claims abstract description 33
- 238000013507 mapping Methods 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052756 noble gas Inorganic materials 0.000 claims description 6
- 150000002835 noble gases Chemical class 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 230000008676 import Effects 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 2
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- 238000000034 method Methods 0.000 description 20
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- HJCMDXDYPOUFDY-WHFBIAKZSA-N Ala-Gln Chemical compound C[C@H](N)C(=O)N[C@H](C(O)=O)CCC(N)=O HJCMDXDYPOUFDY-WHFBIAKZSA-N 0.000 description 2
- 108010044940 alanylglutamine Proteins 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Abstract
The invention provides a fully-sealed SMIF system. A first air nozzle hole is formed in a forwarding plate; air nozzles are mounted on a bearing platform; an air inlet hole and a pressure exhausting valve are arranged at the bottom of a container, so that gas replacement in the container can be realized; a first sealing ring is arranged between a mounting plate and the side surface of a box body, so that the system sealing property is improved; a second sealing ring is arranged on the periphery of an operating port of the mounting plate; when the forwarding plate drives the container to move to an operating position, the container is in contact with the second sealing ring, so that the sealing property between the container and the operating port of the mounting plate can be improved; a third sealing ring is arranged on one surface, towards the container, of a box opening plate, so that the sealing property between the box opening plate and the operating port of the mounting plate can be improved; a box opening part, a lifting part and a detection part are all arranged in the box body, so that maintenance can be performed conveniently; and therefore, the fully-sealed SMIF system is high in sealing property, and exchange of dust, gas and water vapor between the environment in the box body and the environment outside the box body can be well avoided.
Description
Technical field
The invention belongs to technical field of semiconductors, and in particular to a kind of totally enclosed type SMIF system.
Background technology
At present, in the manufacture process of quasiconductor, wafer conveying manufactures most important to IC.In order to ensure wafer is in difference
Processing procedure between quality when transporting, it is to avoid wafer is subject to grit or other pollutions, increasing to transport work using standard
Conveying containers, that is, employ standardized mechanical interface (standard mechanical interface, abbreviation SMIF) technology.Such as
U.S. Patent Publication number is US4532970 " the semiconductor machining front-end module in micronic dust environment " and U.S. Patent Publication number is
In US4534389 " automatically-controlled door of semiconductor front end module ", a kind of SMIF systems are disclosed.The system is by significantly reducing
Flow through the grit of wafer to reduce pollution of the grit to wafer.The effect is by ensureing wafer conveying, storage in mechanical aspects
And in most processing procedures, the gas phase of wafer periphery is to wafer remains stationary, and the grit in external environment condition will not enter crystalline substance
Annulus border is realizing.SMIF technologies are centered on " isolation technology " concept.So-called isolation technology is intended to by the way that wafer is closed
In the environment of a ultra-clean, while relaxing to the purity requirements beyond this enclosed environment to prevent product to be contaminated.
Patent publication No US5934991 " improved pure air system (the Pod loader in wafer cassette charging appliance interface
Interface improved clean air system) " it is a kind of integrated air filtering system, cleaning can be provided
Microenvironment.Fan, filter, plenum box and loading platform in the system is moved integrally as one, plenum chamber
Being at an angle of by one has the wafer cassette on the screen and loading platform in hole to communicate, and pure air stream uniformly has hole angled
Crystal column surface is blown on all height of screen.Machinery lifts wafer cassette shell under microenvironment, is then loaded into and sets out
Wafer casket, reduces wafer casket contaminated probability during being loaded into and setting out.
However, in addition to avoiding wafer and being subject to grit or other pollutions, in addition it is also necessary to consider the staff of operation.To crystalline substance
In the working procedures that are processed of circle, process to need to be transported to another procedure from a kind of operation and processed, and removed
Fortune process is generally required and is accomplished manually, due to there is some toxic gas or poisonous powder in the processing procedure of some operations
Dirt, such as wafer needs to be exposed in the environment of heavy metal ion mist in some techniques, due to carrying the container of wafer by people
Work is transported to semiconductor front end module, and semiconductor equipment manufacture the sealed environment seam of front-end module and the technique and
Carry wafer container be opened, during wafer is transported to the manufacturing process, due to mechanical seal sealing property not
It is very good, therefore can there are a small amount of toxic gas from the operation into manually-operated space, process of the workman in operation
These heavy metal ion can be absorbed, body is damaged.And different manufacturing process has different requirements to environment, some
The processing procedure of operation needs the cleanliness factor of the environment for ensureing surrounding higher, or requires dry operating environment, and humidity is not
Certain numerical value can be exceeded, if manufacturing the sealed environment seam of front-end module and the technique in semiconductor equipment and holding
The container for carrying wafer is opened, and during wafer is transported to the manufacturing process, poor sealing then can be to the place of the technique
Reason process is impacted.
The content of the invention
The present invention is carried out to solve the above problems, it is therefore intended that provide a kind of good seal performance, can be preferable
The environment avoided in box body and box body outside environment between dust, gas, vapor etc. exchange totally enclosed type SMIF system
System.
The invention provides a kind of totally enclosed type SMIF system, for the container door of the container of storing semiconductor to be opened,
The quasiconductor is delivered to into a certain operation to be processed, a certain operation is arranged in the box body of sealing, the box body
One side is provided with opening, it is characterised in that include：Installing plate, the installing plate is more than the opening, and the installing plate is installed
It is completely covered on side in the box body and by the opening, with the one side of the box body contacts side surfaces on the installing plate
The first sealing ring for surrounding the opening is provided with, the installing plate is provided with operation in the correspondence open area
Mouthful, four sides of the gathering hole are provided with the second sealing ring；Lifting unit, installed in the installing plate and the box body contacts side surfaces
Another side, be capable of being raised and lowered；Box portion is opened, comprising：In the box body and it is slidably mounted on the lifting unit
Box plate is opened, is used on the lifting unit driving and described opened box plate level and open box toward and away from what the installing plate was moved
Plate driver element and box plate is opened towards container one side and can surround the 3rd sealing of the gathering hole installed in described
Circle；Test section, comprising：The Mapping units that are slidably mounted on the lifting unit and it is used on the lifting unit
The Mapping driver elements for driving the Mapping unit horizontals to move toward and away from the installing plate；Supporting part, comprising：
Installed in the one side and carrying platform, peace of sliding below the gathering hole of the installing plate and the box body contacts side surfaces
Be mounted on the carrying platform and be provided with the first air nozzle hole and locking member hole advancing plate, on the advancing plate and
Locking member at the locking member hole, it is used on the carrying platform to drive the advancing plate horizontally toward
It is used for the platform driver element away from the installing plate and on the carrying platform lazy to pour in the container
The telescopic valve of property gas；And control unit, with the drive division, open box plate driver element, Mapping driver elements,
Platform driver element, Mapping units, valve are connected, wherein, the carrying platform is located at the outside of the box body, described
Box plate is opened more than the gathering hole and the box plate of opening is provided with being embedded in the gathering hole towards the one side of the installing plate
Boss, at least one door lock and suction seal are set on the boss, the valve is connected with source of the gas, the container
Bottom is provided with locked component, air inlet and the pressure exhaust valve matched with the locking member, when the container is placed
When on the advancing plate, the locked component is locked by the locking member, the air inlet and the pressure exhaust valve
Overlap with corresponding the first valve hole site, when the advancing plate moves to operating position with the container, institute
The lower section that valve is placed exactly in first air nozzle hole is stated, the valve rises the air inlet and pressure exhaust valve with the container
Docking.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Totally enclosed type
SMIF systems also step up unit including container, are connected with the control unit, connect with the box body side installed in the installing plate
Tactile one side, and positioned at the top of the gathering hole, for stepping up the container when the container is located at operating position.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：The container
Step up unit to include：Be fixed on above the import of the installing plate two fixing axles, be rotatably installed in respectively two it is described solid
Two briquettings, two ends on dead axle rotate with one end of described two briquettings be connected and horizontally disposed cross bar, Yi Jiyu respectively
The cross bar driver element that the control unit is connected, the other end of two briquettings is hanging, and the top side of the container is near the appearance
One side of device door is provided with fin, and when the container is located at operating position, the cross bar driver element drives the cross bar level
Mobile, the free end of two briquettings straight down steps up the container in operating position.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Totally enclosed type
SMIF systems also include opening box plate compressing unit, are arranged on the another side of the installing plate and the box body contacts side surfaces, and position
In the top of the gathering hole, be connected with the control unit, for it is described open box plate and seal with the gathering hole when, compress
It is described to open box plate.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
Carrying platform is stated for box body, the upper side of the box body be provided with the second air nozzle hole, the 4th guide rail perpendicular to the installing plate,
And the oblong aperture of length and the 4th guide rail parallel, the platform driver element and the valve are arranged on the box body
Interior, the platform driver element is connected by the oblong aperture with the advancing plate, and the valve is located at second air nozzle hole
Place, when the advancing plate moves to operating position, the valve passes sequentially through second air nozzle hole, first air nozzle hole
Dock with the air inlet of the container.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
Door lock is stated for bolt, it is described open box backboard be provided with to the one side of the container bolt being connected with the control unit drive it is single
Unit, the bolt driver element can drive the bolt that the container door of the container is opened or locked.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
State lifting unit to include：The first guide rail for being fixed on the installing plate and being vertically arranged, it is slidably mounted on first guide rail
Crane, be used to drive the lifting that the crane slides on first guide rail to drive singly installed in the casing ontology
Unit；The Mapping units are included：The support that is slidably mounted on the lifting unit and install on the bracket
Mapping sensors, the support is included：The frame of tetragon and it is fixed on one side of the frame and is slidably mounted on institute
The sliding shoe on lifting unit is stated, the Mapping sensors are arranged on another side relative with the sliding shoe on the frame.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
State crane and be divided into two-layer, the box plate driver element of opening installed in the upper strata of crane, install by the Mapping driver elements
In the lower floor of crane, the width of the frame is more than the width of the crane.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
State the first sealing ring, the second sealing ring, the 3rd sealing ring and be gas-flow closure circle.
Further, in the totally enclosed type SMIF system that the present invention is provided, can also have the feature that：Wherein, institute
Noble gases are stated for nitrogen.
The invention has the advantages that：
According to totally enclosed type SMIF system involved in the present invention, because being provided with locking component and the first gas on advancing plate
Nozzle aperture, is provided with valve on carrying platform, container bottom is provided with locked component, air inlet and the pressure that locking member matches
Power air bleeding valve, when container is placed on advancing plate, locking member pins in container, and the first air nozzle hole is arranged with air inlet and pressure
Air valve is corresponding, and when advancing plate drives container to slide into operating position, valve is located just at the lower section of the first air nozzle hole, on valve
Rise and docked with air inlet and pressure exhaust valve, be that noble gases are filled with container, pressure exhaust valve is in container inner pressure more than one
Gas is discharged during definite value so that gas in container circulates and ensure pressure stability, so as to by the gas displacement in container, it is to avoid
There is the gas for affecting processing procedure in box body in container；The first sealing ring is provided between installing plate and box body side, it is to avoid
Because of the leakage that body deformation causes, the sealing of system is increased；Four sides of the gathering hole of installing plate are provided with the second sealing
Circle, when the visibly moved device of advance strip moves to operating position, container is contacted with the second sealing ring, increased container and installing plate from
Sealing between gathering hole；Open box plate and container one side is provided with the 3rd sealing ring, increased out box plate with installing plate
Sealing between gathering hole；Open box portion, lifting unit, test section to be arranged in box body, convenient maintenance, therefore, it is of the invention
Totally enclosed type SMIF system sealing performance is good, can preferably avoid dust between the environment outside the environment and box body in box body,
The exchange of gas, vapor etc..
Description of the drawings
Fig. 1 is that totally enclosed type SMIF system is arranged on the structural representation on box body in embodiments of the invention；
Fig. 2 is the structural representation that totally enclosed type SMIF system removes box body in embodiments of the invention；
Fig. 3 is the part-structure schematic diagram of totally enclosed type SMIF system in embodiments of the invention；
Fig. 4 is the rearview that totally enclosed type SMIF system removes bonnet in embodiments of the invention；
Fig. 5 is the front view of installing plate in embodiments of the invention；
Fig. 6 is the structure enlarged diagram in embodiments of the invention in Fig. 4 in dotted line frame A；
Fig. 7 is the structural representation that box plate is opened in embodiments of the invention；
Fig. 8 is the part-structure schematic diagram of test section in embodiments of the invention；
Fig. 9 is that supporting part looks up-sectional view in embodiments of the invention；
Figure 10 is the top view of carrying platform in embodiments of the invention；
Figure 11 is the top view of advancing plate in embodiments of the invention；
Figure 12 is the upward view of container in embodiments of the invention；
Figure 13 is the side view of container in embodiments of the invention；
Figure 14 is the schematic enlarged-scale view of container plus locking structure in embodiments of the invention；
Figure 15 is the front view of the structure of container plus locking structure in embodiments of the invention.
Specific embodiment
In order that technological means, creation characteristic, reached purpose and effect that the present invention is realized are easy to understand, it is real below
Apply example combine accompanying drawing to the present invention totally enclosed type SMIF system be specifically addressed.
As shown in figure 1, totally enclosed type SMIF system 100 is arranged on the one side in box body 200, totally enclosed type SMIF system
100 are used to open in container 60, and the product in container 60 is transported in the box body 200 of sealing.In the present embodiment, container 60
Interior product is wafer.The processing unit (plant) of processing quasiconductor is provided with box body 200, the one side of box body 200 is provided with opening.
Box body 200 is to be provided with the seal box of opening, or the sealing room for being provided with opening.
As shown in Figure 2, Figure 3, Figure 4, totally enclosed type SMIF system 100 is included：Installing plate 11, lifting unit, open box portion, detection
Portion, supporting part 50, container 60, control unit 80.Lifting unit, open box portion, test section, control unit 80 be located at installing plate side and
In box body 200, supporting part 50 is located at the opposite side of installing plate and in the outside of box body 200.In the present embodiment, the court of installing plate 11
To the side of box body 200, the side is seen as right side with the direction in Fig. 1, is provided with bonnet 15, bonnet 15 by lifting unit, open box portion,
Test section, control unit 80 cover.Installing plate 11 sees the side as left side towards the side outside box body 200 with the direction in Fig. 1,
It is provided with protecgulum 12.
Installing plate 11 is used to install lifting unit, open box portion, test section, supporting part 50 and control unit 80.Installing plate 11 is installed
In the side of box body 200, more than the opening of box body 200, installing plate 11 will after being arranged on the side in box body 200 for installing plate 11
The opening of box body 200 is completely covered.
As shown in Fig. 2, Fig. 3, Fig. 5, the one side of the contacts side surfaces of box body 200 is provided with the first sealing ring on installing plate 11
13, more than the opening of box body 200, first seals the first sealing ring 13 after installing plate 11 is arranged on the side in box body 200
Circle 13 surrounds box body 200, it is to avoid poor sealing between installing plate 11 and box body 200, so that the gas in box body 200
Or dust is leaked to outside box body 200, or the gas outside box body 200, dust or humid air etc. are entered in box body 200.It is excellent
Choosing, the first sealing ring 13 is gas-flow closure circle, when mechanically deform is produced between installing plate 11 and box body 200, is still had good
Good sealing.
Gathering hole 111 is provided with installing plate 11, gathering hole 111 is located at the open area of box body 200.Such as Fig. 3, Fig. 5 institute
Show, four sides of gathering hole 111 are provided with the second sealing ring 14.When container 60 is located at operating position, container 60 is towards installing plate
11 one side is contacted with the second sealing ring 14, increased out the sealing of whole system after the container door of box portion opening container 60
Property.Preferably, the second sealing ring 14 is gas-flow closure circle.When equipment produces mechanically deform, still there is good sealing.
As shown in figure 4, lifting unit is arranged on the another side of installing plate 11 and the contacts side surfaces of box body 200, positioned at box body 200
It is interior, it is capable of being raised and lowered.Lifting unit includes the first guide rail 21, crane 22 and elevation driving unit 23.First guide rail 21 is pacified
It is mounted on casing ontology 11, and is vertically arranged.Crane 22 is slidably mounted on the first guide rail 21.Elevation driving unit 23 is installed
On casing ontology 11, it is connected with control unit 80, for driving crane 22 to slide on the first guide rail 21.In the present embodiment
In, elevation driving unit 23 is included：The motor being connected on casing ontology 11 and with control unit 80 and the electricity with motor
The ball-screw of arbor drive connection, crane 22 is fixed on ball-screw.
As shown in Figure 6, Figure 7, open box portion to include：Open box plate 32, open box plate driver element 33 and the 3rd sealing ring 34.Open box
Plate 32 is more than gathering hole 111, opens the boss that box plate 32 is provided with embedding operation mouth 111 towards the one side of installing plate 11.Open
Box plate 32 is slidably mounted on crane 22, can be moved horizontally toward and away from installing plate 11.In the present embodiment, crane
It is provided with the second guide rail 31 on 22, perpendicular to installing plate 11, the one side for driving the dorsad container 60 of box plate 32 is fixed with the second guide rail 31
Travelling carriage 323, travelling carriage 323 is slidably mounted on the second guide rail 31.
The one side contrary with travelling carriage 323 of box plate 32 is opened, i.e., towards the one side of installing plate 11, at least one door lock is set
321 and suction seal 322, and arrange the sealing ring 34 of a circle the 3rd, when opening box plate 32 and blocking gathering hole 111, the 3rd is close
Seal 34 can surround gathering hole 111, it is to avoid open poor sealing between box plate 32 and installing plate 11, so that box body
Gas or dust in 200 is leaked to outside box body 200, or the gas outside box body 200, dust or humid air etc. enter box
In body 200.Door lock 321 is used to that the container door 65 of container 60 to be opened or pinned.
In the present embodiment, door lock 321 is set to two, and door lock 321 can automatically lock the container door 65 of container 60
Or open, in specific embodiment, two door locks 321 are bolt, and the one side for driving the dorsad container 60 of box plate 32 is provided with bolt driving
Unit 324, bolt driver element 324 is connected with control unit 80, and bolt driver element 324 can drive two bolts to rotate, from
And the container door 65 of container 60 is pinned or opened；Preferably, the 3rd sealing ring 34 is gas-flow closure circle.When equipment is produced
During mechanically deform, still there is good sealing.
In the present embodiment, suction seal 322 is two, and suction seal 322 is vacuum cup.
Box plate driver element 33 is opened on the crane 22, is connected with control unit 80, for driving travelling carriage 323 the
Slide on two guide rails 31.In the present embodiment, box plate driver element 33 is opened for cylinder.
As shown in Fig. 6, Fig. 8, test section is included：Mapping units and Mapping driver elements 44.Mapping units are slided
It is dynamic to be arranged on crane 22, can move toward and away from installing plate 11.Mapping units are included：Support and Mapping are passed
Sensor 43.Bracket slide is arranged on crane 22, and support is included：The frame 421 and sliding shoe 422 of tetragon.Sliding shoe 422 is consolidated
It is scheduled on one side of frame 421 and is slidably mounted on crane 22.Mapping sensors 43 are arranged on frame 421 and sliding shoe
422 relative another sides, are connected with control unit 80, Mapping sensors 43 be used for detection container 60 in wafer position and
Quantity.In the present embodiment, the 3rd guide rail 41 is installed on crane 22, the 3rd guide rail 41 is perpendicular to installing plate 11, sliding shoe
422 are slidably mounted on the 3rd guide rail 41, and the quantity of Mapping sensors 43 is two.
Mapping driver elements 44 are arranged on crane 22, are connected with control unit 80, for driving frame 421 the 3rd
Slide on guide rail 41.In the present embodiment, Mapping driver elements 44 are cylinder.
In the present embodiment, 22 points of crane is two-layer, opens box plate driver element 33, the second guide rail 31 and is arranged on crane
22 upper strata, Mapping driver elements 44, the 3rd guide rail 41 are arranged on the lower floor of crane 22, and the width of frame 421 is more than lifting
The width of frame 22, enables to frame 421 when moving toward and away from installing plate 11, can pass through crane 22 and open box
Plate driver element 33.So design, be not only simple in structure and save space.
As shown in Fig. 1, Fig. 3, Fig. 9, supporting part 50 is located at the outside of box body 200.Supporting part 50 includes：Carrying platform 51,
Advancing plate 52, locking member 54, platform driver element 55 and valve 56a, 56b.
As shown in figure 3, carrying platform 51 is arranged on the one side of installing plate 11 and the contacts side surfaces of box body 200 and positioned at gathering hole
111 lower sections.Advancing plate 52 is slidably mounted on carrying platform 51, can be moved toward and away from installing plate 11.In the present embodiment
In, the 4th guide rail 53 is installed on carrying platform 51, perpendicular to installing plate 11, advancing plate 52 is slidably mounted on to the 4th guide rail 53
On four guide rails 53.
As shown in figure 11, the first air nozzle hole 521 and locking member hole 522 are provided with advancing plate 52.In the present embodiment,
Advancing plate 52 also on be provided with three removable pins 523, the Height Adjustable of advancing plate 52 is stretched out in one end of each removable pin 523.
Locking member 54 is arranged on advancing plate 52 and at locking member hole 522.
Platform driver element 55 is arranged on carrying platform 51, is connected with control unit 80, for driving the court of advancing plate 52
To with slide away from installing plate 11.
Valve includes valve 56a, valve 56b, and valve 56a, valve 56b are arranged on carrying platform 51, with source of the gas (in figure
Do not show) and control unit 80 connect, valve 56a and valve 56b are scalable, and valve 56a is used for be filled with indifferent gas in container 60
Body, valve 56b is used to discharge the gas in container 60 by valve 56b, and the gas in container 60 is discharged to by valve 56b
Source of the gas, it is to avoid the gas in container 60 is directly discharged in employee's operating environment.Certainly, the gas of valve 56a, valve 56b connection
Source can be different source of the gas, the source of the gas to be loaded with clean gas of valve 56a connections, valve 56b connections to include
The source of the gas of impurity mixing.It is in order to by the gas displacement in container 60 that container 60 was filled with noble gases before being opened, it is to avoid
There is the gas for affecting processing procedure in box body 200 in container.In the present embodiment, noble gases are nitrogen.
Container 60 is used to contain and transport semiconductor product, and in the present embodiment, container 60 is FOUP, and semiconductor product is
Wafer.As shown in figure 11, the bottom of container 60 is provided with air inlet 61, locked component 62 and pressure exhaust valve 63, works as container
60 when being placed on advancing plate 52, and locked component 62 is advanced by the locking component locking on plate 52, air inlet 61 and advancing plate
The position of the first air nozzle hole 521 on 52 overlaps, when driving container 60 to move to operating position when advancing plate 52 is moved, valve
56a, valve 56b overlap respectively with the position of the first air nozzle hole 521 on advancing plate 52.As shown in Fig. 2, Figure 13, the top side of container
One side near container door 65 is provided with fin 64.
In the present embodiment, carrying platform 51 is box body.As shown in Figure 10, the upper side of carrying platform 51 is provided with second
Air nozzle hole 511, oblong aperture 512.The length direction of oblong aperture 512 is perpendicular to installing plate 11, i.e. the 4th guide rail 53 and oblong aperture 512
Length direction it is parallel.Platform driver element 55 is arranged in carrying platform 51, and platform driver element 55 is cylinder, and cylinder is stretched
Fixed block is installed, fixed block after oblong aperture 512 by being fixed on advancing plate 52 on contracting axle.When advancing plate 52 drives container 60
When moving to operating position, the first air nozzle hole 521 overlaps with the position of the second air nozzle hole 511, valve 56a, valve 56b respectively with phase
The corresponding position of first air nozzle hole, 521 and second air nozzle hole 511 overlaps, and valve 56a, valve 56b rising passes sequentially through the second gas
Nozzle aperture 511, the first air nozzle hole 521 are docked with the air inlet 61 and pressure exhaust valve 63 of container 60.
Totally enclosed type SMIF system 100 also steps up unit 70 including container.As shown in Fig. 2 container steps up unit 70 installing
In installing plate 11 and the one side of the contacts side surfaces of box body 200, and positioned at the top of gathering hole 111, it is connected with control unit 80, is used for
Step up container 60 when container 60 is located at operating position.As shown in Figure 13, Figure 14, container steps up unit 70 and includes：Two fixations
Axle 71, two briquettings 72, cross bar 73, cross bar driver elements 74.Two fixing axles 71 are fixed on above the import of casing ontology, and two
Individual briquetting 72 is rotatably installed in respectively in two fixing axles 71, and the two ends of cross bar 73 rotate with one end of two briquettings 72 connect respectively
Connect, the other end of two briquettings 72 is hanging, and the free end of briquetting 72 is provided with a step.Cross bar driver element 74 and control unit 80
Connection.When container 60 is located at operating position, cross bar driver element 74 drives cross bar 73 to move horizontally, two briquettings 72 it is hanging
Straight down, the step of the free end of briquetting 72 is pressed on fin 64, so as to container 60 be stepped up in operating position at end, it is to avoid because
Container 60 built on the sand, it is little with the Dipeptiven between the second sealing ring 14 and affect sealing.
Totally enclosed type SMIF system 100 also includes opening box plate compressing unit 90, as shown in figure 4, opening box plate compressing unit 90
The another side of installing plate 11 and the contacts side surfaces of box body 200 is arranged on, i.e., steps up the contrary one side of unit 70 with container, and positioned at behaviour
Make the top of mouth 111, be connected with control unit 80.For when box plate 32 is opened with the sealing of gathering hole 111, compression to open box plate 32,
Avoid because opening box plate 32 built on the sand, it is little with the Dipeptiven between installing plate 11 and affect sealing.
Before work, open box plate 32 and seal with the gathering hole 111 of installing plate 11, open box plate compressing unit 90 and will open box plate 32 and press
Tightly, the first sealing ring 13, the second sealing ring 14, the 3rd sealing ring 34 are in the good state of gas-flow closure.During work, will hold
Device 60 is placed on advancing plate 52, and the locking member that the component 62 that is locked of the bottom of container 60 is advanced by plate 52 is locked, control
The control platform driver element 55 of portion 80 moves to operating position towards installing plate 11, when at this position, valve 56a, 56b, the
One air nozzle hole 521 overlaps with the three position of the second air nozzle hole 511, and the fin 65 of container 60 contacts sealing with the second sealing ring 14,
Avoid container 60 from contacting poorly sealed with gathering hole 111, or cause sealing after mechanically deform to reduce, the control gas of control unit 80
Mouth 56a, 56b rise the air inlet 61 and pressure exhaust for passing sequentially through the second air nozzle hole 511, the first air nozzle hole 521 and container 60
Valve 63 is docked, and is then filled with nitrogen into container 60, when the pressure in container 60 reaches certain value, by the bottom of container 60
Pressure exhaust valve 63 is discharged, so as to by the gas displacement in container 60；Meanwhile, the control container clamping unit 70 of control unit 80 will hold
Device 60 steps up in operating position, and control bolt driver element 324 causes two door locks 321 to open the container door 65 of container 60,
Suction seal 322 adsorbs the container door 65 of container 60 on box plate 32 is opened, and completes to open the door.
Then, open box plate compressing unit 90 to unclamp, the 3rd sealing ring 34 is deflated and recovers initial condition, and the control of control unit 80 is opened
Box plate driver element 33 drives opens the direction operation that box plate is directed away from installing plate 11, and then, the control lifting of control unit 80 drives
Unit 23 drives crane 22 to move downward, and drives test section to run downwards, when test section drops to specified location, control unit
80 driving arm driver element 44 drives frame 421 to move towards the direction of installing plate 11, drives Mapping sensors 43 towards peace
The direction movement of dress plate 11, when Mapping sensors 43 move to precalculated position, starts to examine the wafer in FOUP60
Survey, crane 22 continues to drive Mapping sensors 43 to move downward, when the precalculated position of bottom is reached, Mapping sensings
Device 43 completes to detect work, while the position of the wafer for detecting and quantity information are sent to into controller 80.Complete once
Complete process of uncapping.
After wafer completion of processing in box body 200, wafer is sent back in FOUP60, operating process and process phase of uncapping
Instead.
Above-mentioned embodiment is the preferred case of the present invention, is not intended to limit protection scope of the present invention.
Claims (10)
1. a kind of totally enclosed type SMIF system, defeated by the quasiconductor for the container door of the container of storing semiconductor to be opened
Deliver to a certain operation to be processed, a certain operation is arranged in the box body of sealing, and the one side of the box body is provided with out
Mouthful, it is characterised in that include：
Installing plate, the installing plate is more than the opening, and the installing plate is arranged on the side in the box body and will be described
Opening is completely covered, and surround the opening the is provided with the one side of the box body contacts side surfaces on the installing plate
One sealing ring, the installing plate is provided with gathering hole in the correspondence open area, and four sides of the gathering hole are provided with the
Two sealing rings；
Lifting unit, installed in the installing plate and the another side of the box body contacts side surfaces, is capable of being raised and lowered；
Box portion is opened, comprising：In the box body and be slidably mounted on the lifting unit open box plate, installed in the lifting
It is used to driving in portion and described open box plate level and open box plate driver element and be arranged on toward and away from what the installing plate was moved
It is described to open box plate towards container one side and the 3rd sealing ring of the gathering hole be surrounded；
Test section, comprising：The Mapping units that are slidably mounted on the lifting unit and use on the lifting unit
In the Mapping driver elements for driving the Mapping unit horizontals to move toward and away from the installing plate；
Supporting part, comprising：Installed in the installing plate and the box body contacts side surfaces one side and positioned at gathering hole lower section
Carrying platform, the advancing plate, the peace that are slidably mounted on the carrying platform and are provided with the first air nozzle hole and locking member hole
It is mounted on the advancing plate and the locking member at the locking member hole, is used on the carrying platform to drive
Platform driver element of the advancing plate horizontally toward and away from the installing plate and it is used on the carrying platform
To pour the telescopic valve of noble gases in the container；And
Control unit, with the drive division, to open box plate driver element, Mapping driver elements, platform driver element, Mapping mono-
Unit, valve are connected,
Wherein, the carrying platform is located at the outside of the box body, described to open box plate more than the gathering hole and described open box plate
It is provided with being embedded in the boss of the gathering hole towards the one side of the installing plate, at least one door lock is set on the boss
And suction seal, the valve is connected with source of the gas, and the bottom of the container is provided with and matches with the locking member
Locked component, air inlet and pressure exhaust valve, when the container is placed on the advancing plate, the locked component quilt
The locking member is locked, and the air inlet and the pressure exhaust valve are heavy with corresponding the first valve hole site respectively
Close, when the advancing plate moves to operating position with the container, the valve is placed exactly in first air nozzle hole
Lower section, the valve rising is docked respectively with the air inlet and pressure exhaust valve of the container.
2. totally enclosed type SMIF system according to claim 1, it is characterised in that also include：
Container steps up unit, is connected with the control unit, installed in the one side of the installing plate and the box body contacts side surfaces, and
Positioned at the top of the gathering hole, for stepping up the container when the container is located at operating position.
3. totally enclosed type SMIF system according to claim 2, it is characterised in that：
The container steps up unit and includes：Two fixing axles above the import of the installing plate are fixed on, are rotated install respectively
Two briquettings, two ends in two fixing axles rotate with one end of described two briquettings be connected and horizontally disposed respectively
Cross bar and the cross bar driver element being connected with the control unit, the other end of two briquettings is hanging,
The top side of the container is provided with fin near one side of the container door,
When the container is located at operating position, the cross bar driver element drives the cross bar to move horizontally, two briquettings
Free end the container is stepped up in operating position straight down.
4. totally enclosed type SMIF system according to claim 1, it is characterised in that also include：
Box plate compressing unit is opened, the another side of the installing plate and the box body contacts side surfaces is arranged on, and positioned at the operation
Mouthful top, be connected with the control unit, for it is described open box plate and seal with the gathering hole when, open box described in compression
Plate.
5. totally enclosed type SMIF system according to claim 1, it is characterised in that：
The carrying platform is box body, and the upper side of the box body is provided with the second air nozzle hole, perpendicular to the of the installing plate
The oblong aperture of four guide rails and length and the 4th guide rail parallel, the platform driver element and the valve are arranged on institute
State in box body, the platform driver element is connected by the oblong aperture with the advancing plate, the valve is located at described second
At air nozzle hole, when the advancing plate moves to operating position, the valve pass sequentially through second air nozzle hole, described first
Air nozzle hole is docked with the air inlet of the container.
6. totally enclosed type SMIF system according to claim 1, it is characterised in that：
The door lock is bolt, and the box backboard of opening is provided with the bolt being connected with the control unit to the one side of the container
Driver element, the bolt driver element can drive the bolt that the container door of the container is opened or locked.
7. totally enclosed type SMIF system according to claim 1, it is characterised in that：
The lifting unit is included：The first guide rail for being fixed on the installing plate and being vertically arranged, it is slidably mounted on described first
Crane on guide rail, the lifting for being used to drive the crane to slide on first guide rail installed in the casing ontology
Driver element；
The Mapping units are included：The support that is slidably mounted on the lifting unit and install on the bracket
Mapping sensors, the support is included：The frame of tetragon and it is fixed on one side of the frame and is slidably mounted on institute
The sliding shoe on lifting unit is stated, the Mapping sensors are arranged on another side relative with the sliding shoe on the frame.
8. totally enclosed type SMIF system according to claim 7, it is characterised in that：
The crane is divided into two-layer, and installed in the upper strata of crane, the Mapping drives single the box plate driver element of opening
Unit is arranged on the lower floor of crane, and the width of the frame is more than the width of the crane.
9. totally enclosed type SMIF system according to claim 1, it is characterised in that：
First sealing ring, the second sealing ring, the 3rd sealing ring are gas-flow closure circle.
10. totally enclosed type SMIF system according to claim 1, it is characterised in that：
The noble gases are nitrogen.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710150391 | 2017-03-14 | ||
| CN2017101503919 | 2017-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106684023A true CN106684023A (en) | 2017-05-17 |
Family
ID=58828509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710192002.9A Pending CN106684023A (en) | 2017-03-14 | 2017-03-28 | Fully-sealed SMIF system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106684023A (en) |
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| CN109969594A (en) * | 2017-12-28 | 2019-07-05 | 沈阳新松机器人自动化股份有限公司 | A kind of foup box retaining mechanism, foup device and its locking method |
| CN109969595A (en) * | 2017-12-28 | 2019-07-05 | 沈阳新松机器人自动化股份有限公司 | A kind of foup box automatically-controlled door and foup box automatically turns on and encapsulating method |
| CN109969593A (en) * | 2017-12-28 | 2019-07-05 | 沈阳新松机器人自动化股份有限公司 | A kind of foup box auto-unlocking device and foup box |
| CN110491812A (en) * | 2019-09-25 | 2019-11-22 | 沈阳芯达半导体设备有限公司 | A kind of high-cleanness, high semiconductor crystal wafer automatic loading device |
| CN110809820A (en) * | 2017-06-23 | 2020-02-18 | 应用材料公司 | Side storage compartment, equipment front end module and method for processing substrate |
| CN112018007A (en) * | 2019-05-31 | 2020-12-01 | 芯恩（青岛）集成电路有限公司 | Connecting cover for SMIF and machine table, semiconductor equipment and manufacturing method |
| CN112912999A (en) * | 2018-10-26 | 2021-06-04 | 应用材料公司 | High flow rate, gas purged side storage tank apparatus, assembly and method |
| CN114194776A (en) * | 2021-12-15 | 2022-03-18 | 上海世禹精密机械有限公司 | Apparatus for transferring wafer transport box |
| CN115295460A (en) * | 2022-09-27 | 2022-11-04 | 无锡邑文电子科技有限公司 | Wafer bearing cavity equipment and control method thereof |
| TWI807746B (en) * | 2022-03-31 | 2023-07-01 | 華景電通股份有限公司 | Gas-inlet module and gas-inlet nozzle |
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| CN110491812A (en) * | 2019-09-25 | 2019-11-22 | 沈阳芯达半导体设备有限公司 | A kind of high-cleanness, high semiconductor crystal wafer automatic loading device |
| CN114194776A (en) * | 2021-12-15 | 2022-03-18 | 上海世禹精密机械有限公司 | Apparatus for transferring wafer transport box |
| TWI807746B (en) * | 2022-03-31 | 2023-07-01 | 華景電通股份有限公司 | Gas-inlet module and gas-inlet nozzle |
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