CN114476669B

CN114476669B - Plate library device, plate library system and posture adjustment method

Info

Publication number: CN114476669B
Application number: CN202210127135.9A
Authority: CN
Inventors: 赵东雷; 关宏武; 王浩楠; 林继柱; 刘颖
Original assignee: Beijing Semiconductor Equipment Institute
Current assignee: Beijing Semiconductor Equipment Institute
Priority date: 2022-02-11
Filing date: 2022-02-11
Publication date: 2023-10-03
Anticipated expiration: 2042-02-11
Also published as: CN114476669A

Abstract

The application relates to the technical field of plate bank storage, in particular to a plate bank device, a plate bank system and a posture adjusting method, wherein the plate bank device comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component, an RxRy adjusting component, an Rz adjusting component, an X-direction adjusting component and a plate box, and the Y-direction adjusting component, the RxRy adjusting component and the Rz adjusting component are sequentially arranged from bottom to top; the Y-direction adjusting component is connected with the Rz adjusting component through an RxRy adjusting component and is used for adjusting and locking Rx and Ry of the Y-direction adjusting component and the Rz adjusting component; the Rz adjusting component is connected with the RxRy adjusting component and the Y-direction adjusting component through the Rz adjusting component and is used for adjusting and locking the Rz of the Rz adjusting component; the Rz adjusting component is connected with the plate box through the X-direction adjusting component and is used for adjusting and locking the X-direction position of the plate box. Therefore, the device has the advantages of multiple adjustable degrees of freedom, good adaptability, simple adjustment process, labor saving and high precision.

Description

Plate library device, plate library system and posture adjustment method

Technical Field

The application relates to the technical field of plate bank storage, in particular to a plate bank device, a plate bank system and an attitude adjustment method.

Background

The existing mask plate buffer storage equipment (internal plate library equipment) generally performs attitude adjustment of a plate library by means of vertical movement of a module and then by means of a leveling jackscrew, and the mode has the advantages of less degree of freedom of adjustment, poor adaptability, complicated adjustment process, time consumption and low precision.

Disclosure of Invention

The application aims to provide a plate library device, a plate library system and a posture adjustment method, which solve the technical problems of less degree of freedom, poor adaptability, tedious adjustment process, time consumption and low precision in the posture adjustment process of the traditional mask buffer equipment in the prior art to a certain extent.

The application provides a plate warehouse device, which comprises: the device comprises a gesture adjusting mechanism and a box arranged on the gesture adjusting mechanism, wherein the gesture adjusting mechanism comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component and an X-direction adjusting component; wherein the Y-direction adjusting member, the RxRy adjusting member and the Rz adjusting member are sequentially arranged from bottom to top;

the Y-direction adjusting component is connected with the Rz adjusting component through the RxRy adjusting component, and the RxRy adjusting component is used for adjusting and locking Rx and Ry of the Y-direction adjusting component and the Rz adjusting component;

the Rz adjusting component is connected with the RxRy adjusting component and the Y-direction adjusting component through the Rz adjusting component, and the Rz adjusting component is used for adjusting and locking the Rz of the Rz adjusting component;

the Rz adjusting component is connected with the plate box through the X-direction adjusting component, and the X-direction adjusting component is used for adjusting and locking the X-direction position of the plate box;

the RxRy adjusting assembly comprises a locking bolt, a locking nut, a conical washer and a spherical washer;

the locking bolt sequentially penetrates through the Y-direction adjusting component, the conical surface gasket, the spherical surface gasket and the RxRy adjusting component;

the conical surface of the conical surface washer is matched with the spherical surface of the spherical surface washer; the locking nut is screwed on the bolt and used for locking the Y-direction adjusting member and the RxRy adjusting member;

the Rz adjusting assembly comprises an Rz guide pin and an Rz adjusting seat; wherein the Rz adjusting member and the RxRy adjusting member are rotationally connected through an Rz guiding pin;

the Rz adjusting seat is connected with the Y-direction adjusting component;

the Rz adjusting seat is provided with a first waist-shaped hole, and is connected with the Rz adjusting member through a first fastening member penetrating through the first waist-shaped hole; the Rz adjusting seat is provided with a first thread force application hole;

the X-direction adjusting component comprises an X-direction guide pin, a guide hole, a second kidney-shaped hole, a third fastening member and an X-direction adjusting seat;

the guide hole and the second kidney-shaped hole are formed in the plate box, the X-direction guide pin is arranged in the Rz adjusting member and is inserted into the guide hole, and the X-direction guide pin can move along the guide hole;

the third fastening member is connected with the Rz adjusting member and the plate box through the second kidney-shaped hole;

the X-direction adjusting seat is connected with the Rz adjusting member, and a second thread force application hole is formed on the X-direction adjusting seat.

In the above technical solution, further, the Rz adjusting assembly further includes at least three second fastening members, and along the width direction of the plate box, at least two second fastening members are disposed on one side of the plate box, and at least one second fastening member is disposed on the opposite side of the plate box;

at least three of the second fastening members are each connected to the Rz adjustment member and the RxRy adjustment member.

In any of the above technical solutions, further, the number of the X-direction guide pins is two, and the two X-direction guide pins are sequentially spaced along the length direction of the plate box.

In any of the above solutions, further, the plate box includes: the device comprises an integral plate box, an in-place detection device, a relief plate detection device, a presence detection device, a right side reflection assembly, a left side reflection assembly, a plate fork limiting member and a plurality of adsorption assemblies;

the adsorption assemblies are arranged in the integral type plate box and are sequentially arranged along the height direction of the integral type plate box;

the in-place detection device and the relief detection device are both arranged at the top of the integral type plate box; the right side reflecting component and the left side reflecting component are respectively arranged at two opposite sides of the bottom of the integral type plate box;

the presence detection device is arranged on any one of the adsorption assemblies, and the presence detection device is arranged on the side part of the adsorption assembly;

the plate fork limiting member is arranged on one side of the integral plate box.

In any of the foregoing solutions, further, the adsorption assembly includes: the device comprises a support plate, an adsorption member, a first limiting member and a second limiting member;

wherein, a mounting protruding part extending along the width direction of the supporting plate is formed on one side of the supporting plate, the first limiting member is arranged at one end of the mounting protruding part, and the second limiting member is arranged at the opposite other end of the mounting protruding part; the opposite side of the support plate is provided with a limit protruding part extending along the width direction;

the adsorption member is arranged on the installation protruding part and is positioned between the first limiting member and the second limiting member;

the first limiting member is formed with a first limiting portion perpendicular to the support plate, and the second limiting member is formed with a second limiting portion perpendicular to the support plate.

In any of the above technical solutions, further, the plate library device further includes a Z-direction module, the gesture adjusting mechanism is connected with the Z-direction module, and the Z-direction module is used for driving the gesture adjusting mechanism to move along the Z-direction; and/or

The plate warehouse device further comprises a support frame, and the Y-direction adjusting component is arranged on the support frame.

The application also provides a plate library system which comprises the plate library device according to the technical scheme, so that the plate library device has all the beneficial technical effects and is not repeated here.

In the above technical scheme, further, the plate warehouse system comprises a rotating shaft device, a supporting member, a gas bath device and a control device; wherein the support member is connected to a target ground through the rotation shaft device; the Z-direction module is arranged on one side of the supporting member, and the control device is arranged on the other side of the supporting member; the plate library device is arranged on one side of the Z-direction module, which is far away from the supporting member;

the plate box of the plate warehouse device is provided with an A surface and a B surface, the A surface is perpendicular to the height direction of the Z-direction module, the B surface is parallel to the height direction of the Z-direction module, and the B surface is arranged along the width direction of the plate box;

the gas bath device is arranged on one side of the plate warehouse device and is used for blowing air to the plate warehouse device.

The application also provides a posture adjusting method, which comprises the plate library device according to any one of the technical schemes, so that the plate library device has all the beneficial technical effects and is not repeated here.

In the above technical solution, further, the posture adjustment method includes the following steps:

firstly, completing preliminary integration work of the version library system according to equipment assembly operation guidance, and meeting design requirements;

the plate library system is integrated onto the mask transmission subsystem through a rotating shaft device of the plate library system, and a debugging coordinate origin is established on a plate fork of an exchange plate hand of the mask transmission subsystem;

the Z-direction module is operated to drive the plate box device to move along the Z direction, the A face and the B face of the plate box device are selected as detection faces, the Deltax and Deltay of the A face are detected, the rotating shaft device is adjusted to enable the Deltax and Deltay of the A face to be in an error allowable range, the Deltax of the B face is detected, and the Deltax of the B face is enabled to be in the error allowable range;

completing Rx and Ry adjustment of a plate box by means of an RxRy adjusting component of the plate library system; completing Rz adjustment of the plate box by means of an Rz adjusting component of the plate library system; the X-direction adjustment of the plate box is completed by means of the X-direction adjusting component; and the Z-direction adjustment of the plate box is completed by means of the Z-direction module, so that the plate fork can complete plate taking and placing actions.

Compared with the prior art, the application has the beneficial effects that:

the plate library device provided by the application realizes a basic adjusting structure required by matching with the manipulator, has multiple degrees of freedom for adjustment and good adaptability, and each degree of freedom is mutually decoupled, namely, is not mutually influenced, and has the advantages of simple and labor-saving adjusting process and high precision.

The working principle of the plate warehouse system provided by the application is that firstly, each device is installed in place according to the installation instruction of the system, and is integrated on a mask transmission subsystem through a rotating shaft device thereof, and the attention is paid that the overall height direction of the existing plate warehouse system is Z direction, namely vertical direction, the overall length direction of the plate warehouse system is X direction, the Z direction module is operated, the position deviation of a publishing box is determined, and the position deviation of the plate box is in an allowable range through adjusting the rotating shaft device; after the adjustment is finished, rx and Ry of the plate box are adjusted by means of the RxRy adjusting component of the plate library system, rz of the plate box is adjusted by means of the Rz adjusting component of the plate library system, X-direction adjustment of the plate box is finished by means of the X-direction adjusting component, Z-direction adjustment of the plate box is finished by means of the Z-direction module, and plate fork is used for completing plate taking and placing actions, so that posture adjustment of the plate box is finished. The whole adjustment process is simple and convenient, and the adjustment of multiple degrees of freedom can be realized.

The attitude adjustment method provided by the application can realize the attitude adjustment of six degrees of freedom of the plate box, and the adjustment of each degree of freedom is mutually decoupled, so that the attitude adjustment is simple and convenient, and the precision is high.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a plate library apparatus according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of an attitude adjustment mechanism according to a first embodiment of the present application;

FIG. 3 is a schematic structural diagram of an RxRy adjusting assembly according to a first embodiment of the present application;

FIG. 4 is a schematic diagram of a cartridge according to an embodiment of the present application;

FIG. 5 is a schematic structural diagram of an adsorption assembly according to a first embodiment of the present application;

FIG. 6 is a schematic diagram of a plate library system according to a second embodiment of the present application;

FIG. 7 is a schematic diagram of another embodiment of a plate library system according to the present application;

fig. 8 is a schematic structural diagram of a spindle device according to a second embodiment of the present application;

fig. 9 is a schematic diagram of a rotating shaft device according to a second embodiment of the present application.

Reference numerals:

100-plate library device, 10-gesture adjusting mechanism, 1-Y direction adjusting component, 2-RxRy adjusting component and 3-Rz adjusting component;

4-RxRy adjusting components, 41-locking bolts, 42-locking nuts, 43-conical washers and 44-spherical washers;

a 5-Rz adjustment assembly, a 51-Rz guide pin, a 52-Rz adjustment seat, 521-a first kidney-shaped aperture, 522-a first threaded apply aperture, 53-a second fastening member;

the device comprises a 6-X direction adjusting assembly, a 61-X direction guide pin, a 62-guide hole, a 63-second kidney-shaped hole, a 64-X direction adjusting seat and a 641-second thread force application hole; 7-supporting frames; 8-an electromagnetic valve;

20-plate box, 21-integral plate box, 211-gas pipe installation area, 212-mask plate storage area, 213-plate fork movable area, 22-in-place detection device, 23-relief detection device, 24-presence detection device, 25-right side reflection assembly, 26-left side reflection assembly, 27-plate fork limiting member, 28-adsorption assembly, 281-support plate, 2811-installation boss, 2812-limiting boss, 282-adsorption member, 283-first limiting member, 284-second limiting member;

200-supporting members;

300-rotating shaft device, 301-adjusting mechanism, 302-main rotating shaft, 303-universal bearing, 304-frame interface device, 3011-interface board, 3012-upper bearing seat, 3013-first spherical bearing, 3014-adjusting screw, 3015-wedge block, 3016-adjusting screw, 3017-fixing screw, 3018-bearing seat connecting block, 3031-second spherical bearing, 3032-lower bearing seat, 3033-nut, 3034-Z-direction adjusting block and 3035-top block;

400-control means; 500-Z direction module; 600-target land; 700-gas bath device; 1000-version library system.

Detailed Description

The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the application are shown.

The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.

All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

A library apparatus, a library system, and a posture adjustment method according to some embodiments of the present application are described below with reference to fig. 1 to 9.

Example 1

Referring to fig. 1 and 2, an embodiment of the present application provides a plate library apparatus 100, including: the posture adjustment mechanism 10 and a cartridge 20 provided to the posture adjustment mechanism 10, the posture adjustment mechanism 10 includes: y-direction adjusting means 1, rxRy adjusting means 2, rz adjusting means 3, rxRy adjusting means 4, rz adjusting means 5, and X-direction adjusting means 6; wherein the Y-direction adjusting member 1, the RxRy adjusting member 2 and the Rz adjusting member 3 are sequentially arranged from bottom to top;

the Y-direction adjusting component 1 is connected with the Rz adjusting component 3 through an RxRy adjusting component 4, and the RxRy adjusting component 4 is used for adjusting and locking RX and RY of the Y-direction adjusting component 1 and the Rz adjusting component 3;

the Rz adjusting component 3 is connected with the RxRy adjusting component 2 and the Y-direction adjusting component 1 through an Rz adjusting assembly 5, and the Rz adjusting assembly 5 is used for adjusting and locking the Rz of the Rz adjusting component 3;

the Rz adjusting member 3 is connected with the plate box 20 through an X-direction adjusting assembly 6, and the X-direction adjusting assembly 6 is used for adjusting and locking the X-direction position of the plate box 20.

Based on the above-described structure, the library device 100 works in cooperation with a manipulator, that is, the manipulator is used to take and place the mask plate in the plate box 20, and the manipulator generally has a Y-direction adjustable function, so that the library device 100 only needs to have the above-mentioned Rx, ry, rz, X-direction position and Z-direction position adjustment, but the library device 100 provided by the application can just realize the adjustment of the Rx, ry, rz and X-direction positions, and in addition, the adjustment of the Z-direction position of the plate box 20 generally uses the Z-direction module 500 described below to drive and adjust, or can manually adjust the Z-direction position of the plate box 20, and the Z-direction position of the manipulator generally does not change from the preset height after the adjustment is completed, and then the adjustment is not needed.

Therefore, the plate library device 100 provided by the application realizes a basic adjusting structure required by matching with the manipulator, has multiple degrees of freedom for adjustment and good adaptability, and each degree of freedom is mutually decoupled, i.e. is not mutually influenced, and the adjustment process is simple, labor-saving and high in precision.

In this embodiment, the RxRy adjustment assembly 4 preferably includes a lock bolt 41, a lock nut 42, a conical washer 43, and a spherical washer 44, as shown in fig. 1-3;

wherein, the locking bolt 41 is sequentially penetrated in the Y-direction adjusting component 1, the conical surface washer 43, the spherical surface washer 44 and the RxRy adjusting component 2;

the conical surface of the conical surface washer 43 is matched with the spherical surface of the spherical surface washer 44; the lock nut 42 is screwed to the bolt, and is used to lock the Y-direction adjustment member 1 and the RxRy adjustment member 2.

According to the above-described structure, the nut and the bolt are first screwed, the levelness of the Y-direction adjusting member 1 and the RxRy adjusting member 2 is then adjusted, and after the levelness is adjusted, the bolt is locked by the nut.

Further, preferably, the number of the Rz adjusting assemblies 5 is three, the three Rz adjusting assemblies 5 are arranged along the width direction of the RxRy adjusting member 2, two Rz adjusting assemblies 5 are arranged on one side of the RxRy adjusting member 2, and two Rz adjusting assemblies 5 arranged on the same side are arranged at intervals along the length direction of the RxRy adjusting member 2, wherein one Rz adjusting assembly 5 is arranged on the other side of the RxRy adjusting member 2. Three Rz adjusting components 5 with triangular connecting lines are adopted, so that the adjustment is more stable.

Further, preferably, in order to avoid the Rz adjustment assembly 5, the Rz adjustment member 3 is formed with an avoidance gap.

In this embodiment, preferably, as shown in fig. 1 and 2, the Rz adjustment assembly 5 comprises an Rz guide pin 51 and an Rz adjustment seat 52; wherein the Rz adjusting member 3 and the RxRy adjusting member 2 are rotatably connected by an Rz guide pin 51;

the Rz adjusting seat 52 is connected with the Y-direction adjusting member 1;

the Rz adjuster 52 is formed with a first waist-shaped hole 521, and the Rz adjuster 52 is connected to the Rz adjuster 3 via a first fastening member penetrating through the first waist-shaped hole 521; the Rz adjuster 52 is formed with a first screw-thread biasing hole 522.

According to the above-described structure, when adjusting the Rz of the plate cartridge 20, only the stud having the head in the shape of a ball needs to be screwed into the first screw force application hole 522, and the head in the shape of a ball abuts against the Rz adjustment member 3, so as to apply force to the Rz adjustment member 3, thereby pushing the Rz adjustment member 3 and the plate cartridge 20 thereon to rotate along the Z direction, so as to adjust the Rz to a predetermined angle, typically, the Rz is zero.

In this embodiment, preferably, as shown in fig. 1 and 2, the Rz adjustment assembly 5 further includes at least three second fastening members 53, and along the width direction of the cartridge 20, at least two second fastening members 53 are provided on one side of the cartridge 20, and at least one second fastening member 53 is provided on the opposite side of the cartridge 20;

at least three second fastening members 53 are connected to the Rz adjustment member 3 and the RxRy adjustment member 2.

According to the above-described structure, when Rz is adjusted, three second fasteners are used to lock the Rz adjustment member 3 and the RxRy adjustment member 2 in sequence, thereby avoiding the change of Rz.

Further, it is preferable that the second fastening member 53 is a fastening bolt.

In this embodiment, preferably, as shown in fig. 1 and 2, the X-direction adjustment assembly 6 includes an X-direction guide pin 61, a guide hole 62, a second kidney-shaped hole 63, a third fastening member, and an X-direction adjustment seat 64;

wherein, the guide hole 62 and the second kidney-shaped hole 63 are formed in the plate box 20, the X-direction guide pin 61 is arranged in the Rz adjusting member 3 and is inserted in the guide hole 62, and the X-direction guide pin 61 can move along the guide hole 62;

the third fastening member connects the Rz adjuster member 3 to the cartridge 20 through the second kidney-shaped aperture 63;

the X-direction adjustment seat 64 is connected to the Rz adjustment member 3, and the X-direction adjustment seat 64 is formed with a second screw force application hole 641.

According to the above-described structure, when the X-position of the cartridge 20 is adjusted, only the stud having the head in the shape of the ball head needs to be screwed into the second screw force application hole 641, and the head in the shape of the ball head abuts against the cartridge 20 and pushes the cartridge 20 to move along the X-direction relative to the Rz adjustment member 3, thereby completing the X-direction adjustment, and during the movement, the guide pin moves in the guide hole 62, thereby playing a guiding role and ensuring the adjustment accuracy. And especially, after the X-direction adjustment is finished, the third fastening member is used for locking the plate box 20 on the Rz adjusting member 3, so that the X-direction position of the plate box 20 is ensured to be unchanged.

Further, it is preferable that the number of the X-direction guide pins 61 is two, and the two X-direction guide pins 61 are sequentially spaced apart along the length direction of the cartridge 20, as shown in fig. 2.

As can be seen from the above-described structure, the use of two X-direction guide pins 61 makes the cartridge 20 more stable during movement.

In this embodiment, preferably, as shown in fig. 1 and 4, the cartridge 20 includes: the plate box 21, the in-place detection device 22, the relief detection device 23, the presence detection device 24, the right side reflection assembly 25, the left side reflection assembly 26, the plate fork limiting member 27 and the plurality of adsorption assemblies 28;

wherein, the plurality of adsorption components 28 are all arranged in the integral plate box 21 and are sequentially arranged along the height direction of the integral plate box 21;

the in-place detection device 22 and the relief detection device 23 are arranged at the top of the integral plate box 21; the right side reflection assembly 25 and the left side reflection assembly 26 are respectively arranged at two opposite sides of the bottom of the integral type plate box 21;

the presence detection device 24 is arranged on any adsorption component 28, and the presence detection device 24 is arranged on the side part of the adsorption component 28;

the fork stopper member 27 is provided at one side of the integral type cartridge 21.

According to the above-described structure, a reliable detecting device is provided in the box 20, and the 'relief detecting device 23' is used for detecting whether the abnormal condition of relief occurs in the mask in real time; detecting which layer in the cartridge 20 has a reticle by means of the presence detection device 24 to improve the transfer efficiency; judging whether the plate fork installed by the manipulator enters the plate warehouse by means of the 'in-place detection device 22', and avoiding mechanical interference between the plate warehouse and the plate fork; the left and right reflecting components are used for detecting the fixed state of the mask; the plate fork limiting member 27 plays a role in limiting the plate fork mounted on the manipulator, in particular limiting in the Y direction; the integral type mask box 20 is adopted, the mask storage area and the mounting groove for mounting the adsorption assemblies 28 are formed by one-step machining, so that the shape and position precision is ensured, a plurality of adsorption assemblies 28, such as six adsorption assemblies 28, are manufactured by combined machining, error sources are reduced to the greatest extent, the relative error of a plurality of masks, such as six masks, is reduced by 80%, the relative precision of the masks and the mounting groove is reduced by 75%, and the transmission precision of the masks is greatly improved.

In addition, the internal structure of the plate box 20 is optimized, the internal area of the plate box 20 is divided into a plurality of small areas, such as six small areas, after improvement, the gas flow field of the gas bath has uniform speed and no reflux and vortex phenomena, and the cleaning grade of a plate library (mask) is further improved.

Further, it is preferable that the in-place detecting means 22, the relief detecting means 23, and the presence detecting means 24 are all laser sensors.

Further, it is preferable that the fork stopper member 27 has a long strip-like structure extending in the Z direction, and the fork stopper member 27 is connected with the integral type cartridge 21 by a fastening member.

Further, it is preferable that the number of the relief detection devices 23 is two, and that the two relief detection devices 23 are provided at intervals along the longitudinal direction of the cartridge 20, that is, along the X direction, at positions of the cartridge 20 corresponding to both ends of the suction member 28.

Further, it is preferable that the integral type plate case 21 includes an air pipe installation area 211, a mask plate storage area 212 and a plate fork movable area 213 which are sequentially provided along a length direction thereof, and an electromagnetic valve 8 for controlling an air pipe is provided on the support frame 7, an air pipe joint communicated with the air pipe is installed at an end portion of the support plate 281, an air guide passage is opened on the support plate 281, one end of the air guide passage is communicated with the air pipe joint, and the other end of the air guide passage is communicated with the adsorbing member 282, i.e., the suction cup.

In this embodiment, preferably, as shown in FIG. 5, the adsorbent assembly 28 comprises: a support plate 281, an adsorption member 282, a first spacing member 283 and a second spacing member 284;

wherein, a mounting boss 2811 extending in the width direction of the support plate 281 is formed at one side thereof, a first limiting member 283 is disposed at one end of the mounting boss 2811, and a second limiting member 284 is disposed at the opposite end of the mounting boss 2811; the opposite side of the support plate 281 is formed with a limit protrusion 2812 extending in the width direction thereof;

the adsorption member 282 is disposed at the mounting boss 2811 and is located between the first and second spacing members 283 and 284;

the first limiting member 283 is formed with a first limiting portion perpendicular to the support plate 281, and the second limiting member 284 is formed with a second limiting portion perpendicular to the support plate 281.

According to the above-described structure, the first and second limiting members 283 and 284 are respectively abutted against two sides of the mask plate, so as to fix the mask plate and ensure the position of the mask plate, and in addition, the adsorption member 282, such as a sucker, is used to adsorb the mask plate, that is, the mask plate is vacuum-adsorbed+mechanically limited to ensure the position, so that the mask plate is more accurate.

In this embodiment, as shown in fig. 6, the plate library apparatus 100 preferably further includes a Z-direction module 500, and the posture adjustment mechanism 10 is connected to the Z-direction module 500 in a direction, specifically, connected to the Z-direction module 500 by a support member 2008, and the Z-direction module 500 is used for driving the posture adjustment mechanism 10 to move along the Z-direction.

As can be seen from the above-described structure, the Z-direction module 500 drives the posture adjustment mechanism 10 to move in the Z-direction, thereby adjusting the Z-direction position.

Further, preferably, the Z-direction module 500 is a linear module extending along the Z-direction, i.e. the vertical direction, and is capable of driving the posture adjustment mechanism connected thereto to move along the Z-direction, i.e. driving the cartridge 20 to move along the Z-direction.

Example two

Referring to fig. 6 and fig. 7, a second embodiment of the present application further provides a posture adjustment method, which includes the plate library device 100 described in the first embodiment, so that all the beneficial technical effects of the plate library device 100 are provided, and the same technical features and beneficial effects are not repeated.

In this embodiment, preferably, as shown in fig. 6 and 7, the plate library system 1000 further includes a rotation shaft device 300, a support member 200, an air bath device 700, and a control device 400;

wherein the support member 200 is connected to the target ground 600 through the rotation shaft device 300; the Z-direction module 500 is disposed on one side of the support member 200, and the control device 400 is disposed on the other side of the support member 200; the plate library device 100 is arranged on one side of the Z-direction module 500 away from the supporting member 200;

the plate box 20 of the plate warehouse device 100 is formed with an A surface and a B surface, wherein the A surface is perpendicular to the height direction of the Z-direction module 500, the B surface is parallel to the height direction of the Z-direction module 500, and the B surface is arranged along the width direction of the plate box 20;

the gas bath device 700 is disposed at one side of the plate stock device 100, and is used for blowing air to the plate stock device 100, so as to provide clean gas to improve the cleanliness of the plate box 20.

According to the above-described structure, as can be seen from the following posture adjustment method, firstly, according to the installation instruction of the system, each device is installed in place, and the device is integrated onto the mask transmission subsystem through the rotating shaft device 300 thereof, note that the overall height direction of the present plate warehouse system 1000 is the Z direction, namely the vertical direction, the overall length direction of the plate warehouse system 1000 is the X direction, the Z direction module 500 is operated, the position deviation of the publishing box 20 is determined, and then, the position deviation of the printing box 20 is within the allowable range through adjusting the rotating shaft device 300; after the adjustment is completed, the Rx and Ry adjustment of the plate box 20 is completed by means of the RxRy adjustment assembly 4 of the plate library system 1000, the Rz adjustment of the plate box 20 is completed by means of the Rz adjustment assembly 5 of the plate library system 1000, the X-direction adjustment of the plate box 20 is completed by means of the X-direction adjustment assembly 6, and the Z-direction adjustment of the plate box 20 is completed by means of the Z-direction module 500, so that the plate fork can complete the plate taking and placing actions, and the posture adjustment of the plate box 20 is completed (see the foregoing for the adjustment of Rx, ry, rz, X and Z). The whole adjustment process is simple and convenient.

Further, as shown in fig. 8 and 9, preferably, the rotation shaft device 300 includes: the device comprises a main rotating shaft 302, an adjusting mechanism 301, a frame interface device 304 and a universal bearing 303, wherein two ends of the main rotating shaft 302 are respectively connected with the adjusting mechanism 301 and the universal bearing 303, the main rotating shaft 302 is fixedly connected with the supporting member 200 through the frame interface device 304, and the adjusting mechanism 301 adjusts the posture position of the rotating shaft to level the supporting member 200, the Z-direction module 500 on the supporting member and the plate warehouse device 100.

The adjusting mechanism 301 includes an interface board 3011, a first spherical bearing 3013, an upper bearing block 3012, a bearing block connecting block 3018, a wedge block 3015 and an adjusting screw 3016, the adjusting screw 3016 is connected to the wedge block 3015 along the Z direction, and further, the wedge block 3015 is adjusted along the X direction by adjusting the Z direction, the wedge block 3015 is a member with a wedge surface, the wedge surface of the member forms an angle with the surface determined by the Y axis and the Z axis, and the conversion between the Z direction and the X direction can be naturally obtained, which is obvious to those skilled in the art, so that the expansion description is not performed, the wedge block 3015 is connected to the upper bearing block 3012 through the bearing block connecting block 3018, the upper bearing block 3012 is connected to one end of the main rotating shaft 302 through the first spherical bearing 3013, and then, along with the X direction adjustment of the wedge block 3015, the inner ring of the first spherical bearing 3013 swings in the Ry direction.

In addition, the alternative of the present application introduces a fixing screw 3017 to lock the pose of the wedge 3015, and further, in order to convert the linear motion and the final swing, in an alternative embodiment of the present application, the wedge 3015 further has a first kidney-shaped hole 521, and the fixing screw 3017 passes through the kidney-shaped hole, thereby providing a certain adjustment margin.

By the above design, the adjustment in the Ry direction can be achieved, specifically, the adjustment process thereof can be described as: adjusting the adjusting screw 3016, the wedge-shaped block 3015 drives the bearing seat connecting block 3018 to move along the X direction, and the main rotating shaft 302 connected with the upper bearing seat 3012 is forced to swing along Ry in a small amplitude due to the fixed lower end, and after Ry is adjusted, the fixing screw 3017 is locked;

not only can the Ry direction be adjusted, but also the Rx direction can be further adjusted, specifically, the adjusting mechanism 301 further includes an adjusting screw 3014, and the adjusting screw 3014 adjusts the position between the bearing block connecting block 3018 and the upper bearing block 3012 along the Y direction, so that the upper bearing block 3012 swings relative to the inner ring of the first spherical bearing 3013 in the Rx direction.

The adjustment of Rx is performed after the Ry direction adjustment is completed, specifically, the adjustment screw 3014 and the upper bearing block 3012 move along the Y direction, and the main shaft 302 is forced to swing by a small amplitude along Rx due to the fixed lower end, so as to implement the adjustment of Rx.

Regarding the universal bearing 303: the universal bearing 303 comprises a second spherical bearing 3031, a lower bearing seat 3032 and a Z-direction adjusting block 3034, wherein the lower bearing seat 3032 is connected with one end of the main rotating shaft 302 through the second spherical bearing 3031, and the Z-direction adjusting block 3034 adjusts the position of the main rotating shaft 302 along the Z direction through a top block 3035.

The universal bearing 303 further includes a nut 3033, configured to lock the position of the Z-adjusting block 3034, and rotate the Z-adjusting block 3034 during actual adjustment, so that the Z-adjusting block 3034 moves along the Z-direction, and further, the top block 3035 connected with the Z-adjusting block 3034 implements Z-adjustment on the plate library mechanism, and after the adjustment, the nut 3033 is used for locking. The above-mentioned rotating shaft device 300 is a prior art, and will not be described in detail herein.

Further, preferably, the control device 400 includes a driver, an electromagnetic valve, an IO module, an adapter board card, and the like of the module, and the control unit completes a series of actions of the board library through the driving module, so as to realize station transmission of the mask, and the control device 400 is of a structure in the prior art, and will not be described in detail herein.

Example III

Referring to fig. 1 to 7, a third embodiment of the present application further provides a posture adjustment method, which includes the plate library device 100 described in the first embodiment, so that all the beneficial technical effects of the plate library device 100 are provided, and the same technical features and beneficial effects are not repeated.

In this embodiment, preferably, as shown in fig. 1 to 7, the posture adjustment method includes the steps of:

firstly, completing preliminary integration work of the version library system 1000 according to equipment assembly operation guidance, and meeting design requirements;

the plate library system 1000 is integrated on a mask transmission subsystem through a rotating shaft device 300 thereof, and a debugging coordinate origin is established on a plate fork of a plate exchanging hand of the mask transmission subsystem, wherein the height direction of a Z-direction module 500 of the plate library system 1000 is a Z direction, and the length direction of a plate box 20 of the plate library system 1000 is an X direction;

the Z-direction module 500 is operated to drive the plate box 20 to move along the Z direction, the A face and the B face of the plate box 20 of the plate library device 100 are selected as detection faces, the Deltax and Deltay of the A face are detected, the rotating shaft device 300 is adjusted to ensure that the Deltax and Deltay of the A face are in an error allowable range, the Deltax of the B face is detected, and the Deltax of the B face is in the error allowable range;

the adjustment of Rx and Ry of the plate box 20 is completed by means of the RxRy adjusting component 4 of the plate library system 1000, specifically, nuts and bolts are screwed firstly, then the levelness of the Y-direction adjusting component 1 and the levelness of the RxRy adjusting component 2 are adjusted, and after the levelness is adjusted, the bolts are locked by the nuts;

the Rz adjustment of the plate box 20 is completed by means of the Rz adjustment assembly 5 of the plate box 1000, specifically, when the Rz of the plate box 20 is adjusted, only a bolt with a head in a ball head shape is screwed into the first threaded force application hole 522, and the ball head shape is abutted against the Rz adjustment member 3, so that the Rz adjustment member 3 is applied with force, and the Rz adjustment member 3 and the plate box 20 thereon are pushed to rotate along the Z direction, so that the Rz is adjusted to a preset angle, generally Rz is zero, and after the Rz is adjusted, three second fasteners are adopted to lock the Rz adjustment member 3 and the RxRy adjustment member 2 in sequence, so that the Rz is prevented from changing;

the adjustment of the X direction of the plate box 20 is completed by means of the X direction adjusting component 6, specifically, when the X position of the plate box 20 is adjusted, only the bolt with the head in the shape of a ball head needs to be screwed into the second threaded force application hole 641, the head in the shape of the ball head is abutted against the plate box 20, and the plate box 20 is pushed to move along the X direction relative to the Rz adjusting component 3, so that the adjustment of the X direction is completed, and in the moving process, the guide pin moves in the guide hole 62, so that the guide function is realized, and the adjusting precision is ensured. Particularly, after the X-direction adjustment is completed, the third fastening member is used for locking the plate box 20 on the Rz adjusting member 3, so that the X-direction position of the plate box 20 is ensured to be unchanged;

the adjustment of the plate box 20 in the Z direction is completed by means of the Z-direction module 500 so as to realize that the plate fork completes the plate taking and placing actions, specifically, the Z-direction module 500 drives the posture adjustment mechanism 10 to move along the Z direction, and therefore the position of the Z direction is adjusted.

According to the above-described structure, the posture adjustment method can realize the posture adjustment of six degrees of freedom of the plate box 20, and the adjustment of each degree of freedom is mutually decoupled, so that the posture adjustment is simple and convenient, and the accuracy is high.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application.

Claims

1. A plate library apparatus, comprising: the device comprises a gesture adjusting mechanism and a box arranged on the gesture adjusting mechanism, wherein the gesture adjusting mechanism comprises a Y-direction adjusting component, an RxRy adjusting component, an Rz adjusting component and an X-direction adjusting component; wherein the Y-direction adjusting member, the RxRy adjusting member and the Rz adjusting member are sequentially arranged from bottom to top;

the Rz adjusting seat is connected with the Y-direction adjusting component;

2. The plate magazine apparatus of claim 1, wherein the Rz adjustment assembly further comprises at least three second fastening members, and wherein along the width of the plate cartridge, at least two of the second fastening members are disposed on one side of the plate cartridge and at least one of the second fastening members are disposed on an opposite side of the plate cartridge;

3. The plate warehouse apparatus as claimed in claim 1, wherein the number of the X-direction guide pins is two, and the two X-direction guide pins are sequentially spaced apart along the length direction of the plate cartridge.

4. The plate magazine apparatus of claim 1, wherein the plate cartridge comprises: the device comprises an integral plate box, an in-place detection device, a relief plate detection device, a presence detection device, a right side reflection assembly, a left side reflection assembly, a plate fork limiting member and a plurality of adsorption assemblies;

5. The plate library apparatus according to claim 4, wherein the adsorption assembly comprises: the device comprises a support plate, an adsorption member, a first limiting member and a second limiting member;

6. The plate library apparatus according to any one of claims 1 to 5, further comprising a Z-direction module, wherein the posture adjustment mechanism is connected to the Z-direction module in a direction, and wherein the Z-direction module is configured to drive the posture adjustment mechanism to move in a Z-direction; and/or

7. A plate library system comprising a spindle device, a support member, a gas bath device, a control device, and a plate library device according to claim 6; wherein the support member is connected to a target ground through the rotation shaft device; the Z-direction module is arranged on one side of the supporting member, and the control device is arranged on the other side of the supporting member; the plate library device is arranged on one side of the Z-direction module, which is far away from the supporting member;

8. A method of posture adjustment comprising the library system of claim 7, the method of posture adjustment comprising the steps of: