JPH11292186A - Base storage case and base holding member - Google Patents

Base storage case and base holding member

Info

Publication number
JPH11292186A
JPH11292186A JP10097095A JP9709598A JPH11292186A JP H11292186 A JPH11292186 A JP H11292186A JP 10097095 A JP10097095 A JP 10097095A JP 9709598 A JP9709598 A JP 9709598A JP H11292186 A JPH11292186 A JP H11292186A
Authority
JP
Japan
Prior art keywords
substrate
holding
holding member
storage case
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10097095A
Other languages
Japanese (ja)
Inventor
Jiro Kobayashi
二郎 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10097095A priority Critical patent/JPH11292186A/en
Publication of JPH11292186A publication Critical patent/JPH11292186A/en
Withdrawn legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a base storage case for the easy handling of take-in and take-out operation and the like without damaging the primary function of the base storage case for storing a base inside and also provide a base holding member for holding the base at the time of take-in and take-out operation of the base into and from the base storage case, carrying the base and the like. SOLUTION: A base holding member 17 for holding a base 13 is set removably in a base storage case for storing the base 13 so as to handle easily the take-in and take-out operation for the base 13 or the like, and the base holding member 17 for holding the base 13 is provided with a handle section 171 for gripping the base holding member 17 and a holding section 172 for holding the base 13 so that the base 13 is held easily at the time of take-in and take-out operation of the base 13 into and from the base storage case, the operation of carrying the base 13 and the like.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【発明の属する技術分野】本発明は、ＩＣやＬＣＤの素
子を製造する際の回路原版として使用するマスクやレチ
クル等の基板を収納するための基板収納ケース、および
上記基板収納ケースへの上記基板の出し入れ等のため
に、上記基板を保持する基板保持部材に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate storage case for storing a substrate such as a mask or a reticle used as a circuit original when manufacturing an IC or LCD element, and to the substrate storage case. The present invention relates to a substrate holding member for holding the substrate for taking in and out.

【従来の技術】ＩＣやＬＣＤの素子を製造する際の回路
原版として使用するマスクやレチクル等のガラスプレー
ト、または、上記マスクやレチクル上に形成されている
回路パターンが転写されるシリコンウエハ等の基板は、
極めて高いレベルで塵等の異物の付着を防止する必要が
あるため、収納専用のケースに入れて保管されている。
従来、この種のケースは、特公平１−３６２５５号公報
または特公昭６３−１８７３４号公報で開示されている
ように、前方および上方が開放された箱状のケースに開
閉自在に蓋を取り付け、その蓋を開けてその箱状のケー
ス内にレチクル等の基板を収納するようになっていた。
図９は、蓋が途中まで開いている状態を示した従来の基
板収納ケースの１つであるレチクルケースの斜視図であ
り、図１０はその正面図である。ただし、図９に示され
ている蓋部９２は図１０では図示省略してある。図９に
おいて、レチクルケースは、本体部９１と蓋部９２とに
よって構成されている。上記本体部９１は、レチクル９
３を支持するレチクル支持部９１１と、上記レチクル支
持部９１１を包囲するように、上記レチクル支持部９１
１の左側と右側と後側の各縁に取付けられた左側側面部
９１２と右側側面部９１３と後側側面部９１５とによっ
て構成されている。上記蓋部９２は、閉じた状態におい
て、上記レチクル支持部９１１と対向する上面部９２１
と、上記左側側面部９１２と上記右側側面部９１３と上
記後側側面部９１５の各側面部と共に上記レチクル支持
部９１１を包囲する前側側面部９２４とによって構成さ
れている。前蓋となる上記前側側面部９２４は、上記上
面部９２１に開閉自在に取付けられ、また、上記蓋部９
２は、上記本体部９１に開閉自在に取付けられ、内部に
レチクル９３を収納することができる。レチクル支持部
９１１の中央寄りには、レチクル９３をほぼ水平に載置
する２本のレール状の載置部９４が取付けられている。
また、載置部９４上に載置されたレチクル９３を係り止
めるためのストッパーとなるピン状のレチクル係止部９
５が、上記載置部９４および上記レチクル支持部９１１
に、レチクル９３の各辺毎に２本ずつ、全部で８本取付
けられている。なお、図９には全部で８本のレチクル係
止部９５のうち載置部９４上の手前側に取付けられた２
本だけが示されており、図１０にはこの２本の他にレチ
クル支持部９１１上の左右手前側に取付けられた２本も
示されている。左側側面部９１２および右側側面部９１
３の外側には、レチクルライブラリにレチクルケースを
装着する際に、レチクルケースをガイドするためのガイ
ド部９６が取付けられている。このような基板収納ケー
スにおいて、基板を出し入れする際は、手あるいは所定
のハンドリング工具を用いて、基板を挟んで出し入れす
る。2. Description of the Related Art A glass plate such as a mask or a reticle used as a circuit master when manufacturing an IC or LCD element, or a silicon wafer to which a circuit pattern formed on the mask or the reticle is transferred. The substrate is
Since it is necessary to prevent foreign matter such as dust from adhering at an extremely high level, it is stored in a case dedicated to storage.
Conventionally, as disclosed in Japanese Patent Publication No. 1-36255 or Japanese Patent Publication No. 63-18834, this type of case has a lid that is openably and closably attached to a box-shaped case that is open at the front and at the top. The lid is opened and a substrate such as a reticle is stored in the box-shaped case.
FIG. 9 is a perspective view of a reticle case, which is one of the conventional substrate storage cases, showing a state in which a lid is partially opened, and FIG. 10 is a front view thereof. However, the lid 92 shown in FIG. 9 is not shown in FIG. In FIG. 9, the reticle case includes a main body 91 and a lid 92. The main body portion 91 includes the reticle 9
Reticle support portion 911 supporting reticle 3 and reticle support portion 91 so as to surround reticle support portion 911.
1 includes a left side surface portion 912, a right side surface portion 913, and a rear side surface portion 915 attached to each of the left, right, and rear edges. When the lid 92 is closed, the upper surface 921 faces the reticle support 911.
And a front side surface portion 924 surrounding the reticle support portion 911 together with the side surface portions of the left side surface portion 912, the right side surface portion 913, and the rear side surface portion 915. The front side surface portion 924 serving as a front cover is attached to the upper surface portion 921 so as to be openable and closable.
2 is attached to the main body 91 so as to be openable and closable, and can house a reticle 93 therein. Two rail-shaped mounting portions 94 for mounting the reticle 93 substantially horizontally are mounted near the center of the reticle support portion 911.
Also, a pin-shaped reticle locking portion 9 serving as a stopper for engaging the reticle 93 mounted on the mounting portion 94.
5 is the mounting portion 94 and the reticle support portion 911 described above.
A total of eight reticle 93 are mounted, two on each side. In FIG. 9, two reticle locking portions 95 are attached to the mounting portion 94 on the near side of the mounting portion 94.
Only the book is shown, and FIG. 10 also shows two books attached to the left and right front sides on the reticle support 911 in addition to the two books. Left side 912 and right side 91
A guide portion 96 for guiding the reticle case when the reticle case is mounted on the reticle library is attached to the outside of the reticle library. When the substrate is put in and taken out of such a substrate storage case, the substrate is put in and out by hand or using a predetermined handling tool.

【発明が解決しようとする課題】しかしながら、上記の
ような基板収納ケースにおいて、蓋部を開け、中に収納
されている基板を手で持って取り出す場合、あるいは、
基板を手で持って中に収納する場合に、手指の皮脂等で
基板を汚してしまったり、また、特にサイズの大きな基
板にあっては片手で持ち難い等の問題点があった。ま
た、所定のハンドリング工具を用いて基板を取り出した
り収納したりする場合には、ハンドリング工具を別に管
理しなければならず、ハンドリング工具を紛失してしま
う危険性があったり、保管場所によってはハンドリング
工具を汚してしまい、その汚れたハンドリング工具を用
いることにより基板を汚してしまうという問題点があっ
た。本発明は、上記の問題点を解決するためになされた
もので、基板を内部に収納するという基板収納ケース本
来の機能を損なうことなく、基板の出し入れ等の取り扱
いを容易にした基板収納ケースを提供することを目的と
する。また、基板収納ケース等への基板の出し入れや基
板の搬送等の際に、容易に基板を保持する基板保持部材
を提供することを目的とする。However, in the above-described substrate storage case, when the lid is opened and the substrate stored therein is taken out by hand, or
When the substrate is held in a hand and stored inside, there are problems that the substrate is contaminated with sebum or the like of a finger, and it is difficult to hold the substrate with one hand especially for a large-sized substrate. In addition, when a substrate is taken out or stored using a predetermined handling tool, the handling tool must be managed separately, and there is a risk of losing the handling tool, and depending on the storage location, handling may be performed. There is a problem in that the tool is soiled and the substrate is soiled by using the dirty handling tool. The present invention has been made in order to solve the above-described problems, and a substrate storage case that facilitates handling such as taking in and out of the substrate without impairing the original function of the substrate storage case that stores the substrate inside. The purpose is to provide. It is another object of the present invention to provide a substrate holding member that easily holds a substrate when a substrate is taken in and out of a substrate storage case or when a substrate is transferred.

【課題を解決するための手段】本発明は、上記課題を解
決するため、以下の手段を採用した。すなわち、請求項
１記載の本発明は、基板を収納する基板収納ケースにお
いて、上記基板を保持可能な基板保持部材を、上記基板
収納ケースに着脱自在に設けたことを特徴とする基板収
納ケースである。基板を収納する基板収納ケースに、上
記基板を保持することが出来る基板保持部材を、自在に
装着したり取り外したりすることができるように設ける
ことにより、基板を基板収納ケースに収納する場合に
は、基板収納ケースに設けられた基板保持部材を用いて
基板収納ケースから取り外し、上記基板保持部材で基板
を保持して収納できる。また、基板を基板収納ケースか
ら取り出す場合には、基板収納ケースに設けられた基板
保持部材で基板を保持して取り出せる。よって、基板を
基板収納ケースに収納する場合も基板を基板収納ケース
から取り出す場合も、基板収納ケースに設けられた基板
保持部材を用いて基板を保持し、基板の収納および取り
出しを行うので、別に管理することにより汚染等の危険
性が増えてしまうような、基板を保持するための別の基
板保持部材を用意する必要もなく、また、基板保持部材
を紛失してしまう危険性も大幅に減少する。また、請求
項２記載の本発明は、請求項１記載の基板収納ケースに
おいて、基板保持部材は、基板の側面を挟持する挟持部
材を備えることを特徴とする基板収納ケースである。基
板を保持する基板保持部材に、基板の側面を両側から挟
んで保持する挟持部材を設けることにより、安定して基
板を保持できる。よって、基板を基板収納ケースに収納
する場合も基板を基板収納ケースから取り出す場合も、
水平に保つ必要なしに安定した状態で基板の搬送が行
え、幅の狭い空間での搬送も可能となる。また、請求項
３記載の本発明は、請求項１または請求項２記載の基板
収納ケースにおいて、基板保持部材を上記基板収納ケー
スの所定の位置に係り止める係止部を備えることを特徴
とする基板収納ケースである。基板を保持する基板保持
部材を、基板収納ケースの所定の位置に備える凹状の係
止部に嵌合させる等して係り止めることにより、基板保
持部材を基板収納ケースの所定の位置に固定する。よっ
て、基板収納ケースに着脱自在に設けられた基板保持部
材が、不用意に基板収納ケースの他の部位や収納してい
る基板と衝突あるいは擦り合うなどして基板収納ケース
や基板を傷つけたり粉塵を発生させたりすることを防止
する。また、請求項４記載の本発明は、基板を保持する
基板保持部材において、上記基板保持部材を握持可能な
把手部と、上記基板を保持する保持部と、を備えること
を特徴とする基板保持部材である。基板を保持する基板
保持部材に、基板保持部材自身を掴むあるいは握る等し
て持つことが出来る把手部と、基板を引っ掛ける等して
保持する保持部とを備えることにより、基板の容易な搬
送等のために基板を保持する。よって、直接基板を持つ
には大きすぎたり小さすぎることによる基板の取り扱い
難さを解消することができ、また、直接基板を手で持つ
ことにより基板を汚染したり傷つけたりすることを防止
する。また、請求項５記載の本発明は、請求項４記載の
基板保持部材において、上記基板保持部材は、基板の側
面を挟持する挟持部材を備えることを特徴とする基板保
持部材である。基板を保持する基板保持部材に、基板の
側面を両側から挟んで保持する挟持部材を設けることに
より、安定して基板を保持できる。よって、基板を搬送
等する場合に、水平に保つ必要なしに安定した状態で基
板の搬送が行え、幅の狭い空間での搬送も可能となる。
また、請求項６記載の本発明は、請求項５記載の基板保
持部材において、挟持部材は、把手部と連動して基板の
側面を挟持することを特徴とする基板保持部材である。
基板を挟持する挟持部が基板保持部材自身を掴むあるい
は握る等して持つことが出来る把手部と連動するよう構
成することにより、把手を握持することが同時に基板を
挟持する。よって、直接基板を持つには大きすぎたり小
さすぎることによる基板の取り扱い難さを解消すること
ができ、また、直接基板を手で持つことにより基板を汚
染したり傷つけたりすることを防止すると同時に、基板
を搬送等する場合に、水平に保つ必要なしに安定した状
態で基板の搬送が行え、幅の狭い空間での搬送も可能と
なる。The present invention employs the following means in order to solve the above-mentioned problems. That is, the present invention according to claim 1 is a substrate storage case for storing a substrate, wherein a substrate holding member capable of holding the substrate is detachably provided in the substrate storage case. is there. When a substrate is stored in the substrate storage case by providing a substrate holding member capable of holding the substrate in a substrate storage case for storing the substrate so that the substrate holding member can be freely attached or detached. The substrate can be detached from the substrate storage case using the substrate holding member provided in the substrate storage case, and the substrate can be held and stored by the substrate holding member. When the substrate is taken out of the substrate storage case, the substrate can be held and taken out by the substrate holding member provided in the substrate storage case. Therefore, both when the substrate is stored in the substrate storage case and when the substrate is removed from the substrate storage case, the substrate is held using the substrate holding member provided in the substrate storage case, and the substrate is stored and taken out. There is no need to prepare a separate substrate holding member for holding the substrate, which increases the risk of contamination etc. by management, and the risk of losing the substrate holding member is greatly reduced I do. According to a second aspect of the present invention, there is provided the substrate storage case according to the first aspect, wherein the substrate holding member includes a holding member for holding a side surface of the substrate. By providing the holding member for holding the substrate with the holding member for holding the side surface of the substrate from both sides, the substrate can be stably held. Therefore, whether the substrate is stored in the substrate storage case or the substrate is removed from the substrate storage case,
The substrate can be transported in a stable state without having to be kept horizontal, and transport in a narrow space is also possible. According to a third aspect of the present invention, there is provided the substrate storage case according to the first or second aspect, further comprising a locking portion for locking the substrate holding member at a predetermined position of the substrate storage case. It is a substrate storage case. The substrate holding member, which holds the substrate, is engaged with, for example, a concave locking portion provided at a predetermined position of the substrate storage case, thereby locking the substrate holding member at the predetermined position of the substrate storage case. Therefore, the substrate holding member detachably provided in the substrate storage case may inadvertently collide with or rub against other parts of the substrate storage case or the substrate stored therein, thereby damaging the substrate storage case or the substrate, or causing dust. To prevent the occurrence of According to a fourth aspect of the present invention, there is provided a substrate holding member for holding a substrate, comprising: a grip portion capable of gripping the substrate holding member; and a holding portion for holding the substrate. It is a holding member. The substrate holding member that holds the substrate has a handle portion that can be held by grasping or gripping the substrate holding member itself, and a holding portion that holds the substrate by hooking or the like, so that the substrate can be easily transported. Hold the substrate for Therefore, it is possible to eliminate the difficulty in handling the substrate due to being too large or too small to directly hold the substrate, and prevent the substrate from being contaminated or damaged by directly holding the substrate by hand. According to a fifth aspect of the present invention, there is provided the substrate holding member according to the fourth aspect, wherein the substrate holding member includes a holding member for holding a side surface of the substrate. By providing the holding member for holding the substrate with the holding member for holding the side surface of the substrate from both sides, the substrate can be stably held. Therefore, when the substrate is transported or the like, the substrate can be transported in a stable state without having to keep the substrate horizontal, and transport in a narrow space is also possible.
According to a sixth aspect of the present invention, in the substrate holding member according to the fifth aspect, the holding member holds the side surface of the substrate in conjunction with the handle.
By configuring the holding portion for holding the substrate to interlock with a grip portion that can be held by gripping or gripping the substrate holding member itself, gripping the grip simultaneously grips the substrate. Therefore, it is possible to eliminate the difficulty of handling the substrate due to being too large or too small to directly hold the substrate, and to prevent the substrate from being contaminated or damaged by directly holding the substrate by hand. In the case of transporting a substrate, the substrate can be transported in a stable state without having to keep the substrate horizontal, and transport in a narrow space is also possible.

【発明の実施の形態】以下、本発明の実施の形態を、図
面を参照しながら詳細に説明する。図１は、本発明の第
１の実施の形態における基板収納ケースの斜視図であっ
て、蓋が途中まで開いている状態を示しており、図２は
その断面図である。ただし、図１に示されている蓋部１
２は図２では図示省略してある。図１において、基板収
納ケースは、本体部１１と蓋部１２と基板保持部材１７
とによって構成されている。上記本体部１１は、基板１
３を支持する基板支持部１１１と、上記基板支持部１１
１を包囲するように、上記基板支持部１１１の左側と右
側と後側の各縁に取付けられた左側側面部１１２と右側
側面部１１３と後側側面部１１５とによって構成されて
いる。なお、基板１３の具体例としては、例えば回路パ
ターンが形成されたレチクル（マスク）や感光剤が塗布
された角形のガラスプレートが挙げられる。上記蓋部１
２は、閉じた状態において、上記基板支持部１１１と対
向する上面部１２１と、上記左側側面部１１２と上記右
側側面部１１３と上記後側側面部１１５の各側面部と共
に上記基板支持部１１１を包囲する前側側面部１２４と
によって構成されている。前蓋となる上記前側側面部１
２４は、上記上面部１２１に開閉自在に取付けられ、ま
た、上記蓋部１２は、上記本体部１１に開閉自在に取付
けられ、内部に基板１３を収納することができる。上記
基板保持部材１７は、その上面のほぼ中央に設けられ上
記基板保持部材１７自体を握持するための一対の把手部
１７１と、その長手方向の両端部に設けられ基板を保持
する一対の鉤状の保持部１７２とを備えている。基板支
持部１１１の中央寄りには、基板１３をほぼ水平に載置
する２本のレール状の載置部１４が取付けられている。
また、載置部１４上に載置された基板１３を係り止める
ためのストッパーとなるピン状の基板係止部１５が、上
記載置部１４および上記基板支持部１１１に、基板１３
の各辺毎に２本ずつ、全部で８本取付けられている。な
お、図１および図２には、全部で８本の基板係止部１５
のうち載置部１４上の手前側に取付けられた２本だけが
示されている。さらに、上記基板支持部１１１の左寄り
および右寄りには、上記保持部１７２の下端部と嵌合し
て上記基板保持部材１７を係止する凹状の係止部１８が
設けられている。左側側面部１１２および右側側面部１
１３の外側には、レチクルライブラリ等の基板保管庫に
基板収納ケースを装着する際に、基板収納ケースをガイ
ドするためのガイド部１６が取付けられている。このよ
うな基板収納ケースにおいて、内部に収納されている基
板１３を外部に取り出すには、まず蓋部１２を斜め上後
方へ開ける。そして、手または所定のハンドリング工具
を用いて一対の把手部１７１を握持し、少なくとも保持
部１７２が嵌合している係止部１８から外れるまでは基
板保持部材１７を上方へ持ち上げる。上記基板保持部材
１７を上方へ持ち上げる途中で、保持部１７２が基板１
３の縁に引っ掛かり、載置部１４上に載置されている基
板１３を保持する。その後、基板１３を保持した基板保
持部材１７をほぼ水平に保ったまま、基板１３を所望の
場所まで搬送する。基板１３を所望の場所まで搬送し、
上記基板１３を取り外した基板保持部材１７は、上記係
止部１８に上方から嵌合させることによって本体部１１
に係り止められる。そして、内部に装着された基板保持
部材１７は、蓋部１２を閉じることによる蓋部１２の押
圧、あるいは、係止部１８との摩擦等によって固定され
る。また、外部にある基板１３をこのような基板収納ケ
ースの内部に収納する場合には、上記取り出す場合と同
様に、まず蓋部１２を斜め上後方へ開ける。そして、手
または所定のハンドリング工具を用いて一対の把手部１
７１を握持し、少なくとも保持部１７２が嵌合している
係止部１８から外れるまで基板保持部材１７を上方へ持
ち上げ、収納する基板１３のあるところまで持ってい
く。上記基板保持部材１７は、収納する基板１３の縁を
引っ掛けることにより保持部１７２に上記基板１３を保
持し、ほぼ水平に保ったまま搬送し、上記保持部１７２
を上記係止部１８に上方から嵌合させることによって上
記基板保持部材１７を本体部１１に係り止める。基板１
３を保持した基板保持部材１７を係止部１８に嵌合させ
る途中で、上記基板１３は、載置部１４の上に載置さ
れ、さらに、８本の基板係止部１５に囲まれることによ
り係り止められる。また、内部に装着された基板保持部
材１７は、蓋部１２を閉じることによる蓋部１２の押
圧、あるいは、係止部１８との摩擦等によって固定され
る。また、基板保持部材１７は、係止部１８に係り止め
られることで、蓋部１２の開閉に邪魔にならない位置で
あって、かつ、本体部１１の前方開放部を介して基板１
３を水平方向に出し入れする際の邪魔にならない位置
に、正確に位置決めされる。すなわち、図２に明らかな
ように、基板保持部材１７が係止部１８に係り止められ
た状態において、把手部１７１の上面の高さが蓋部１２
を閉じた時の上面部１２１の内面の高さとほぼ一致する
ようになっており、そのため、基板保持部材１７が蓋部
１２の開閉の邪魔にならないばかりでなく、蓋部１２を
閉じれば基板保持部材１７が係止部１８から外れるのを
防止できる。また、基板１３の上面と基板保持部材１７
中央部の下面との間には、載置部１４上の基板係止部１
５の高さよりも多少大きな間隙ができるようになってお
り、そのため、基板１３を基板係止部１５よりも若干高
く持ち上げた状態で前方に移動させれば、基板保持部材
１７が係止部１８に係止された状態のままでも、基板１
３を水平方向に取り出す操作が可能となる。なお、以上
の第１の実施の形態の説明では、把手部１７１を一対と
したが、必ずしも一対である必要はなく、１つでもよ
い。ただし、１つの場合には、手または所定のハンドリ
ング工具で握持し易いように、あるいは、安定して搬送
できるように、ある程度の大きさを有している方が望ま
しい。図３は、本発明の第２の実施の形態における基板
収納ケースの斜視図であって、蓋が途中まで開いている
状態を示しており、図４はその断面図であり、図５はそ
の平面図である。ただし、図３に示されている蓋部３２
は図４および図５では図示省略してある。図３におい
て、基板収納ケースは、本体部３１と蓋部３２と基板保
持部材３７とによって構成されている。上記本体部３１
は、基板３３を支持する基板支持部３１１と、上記基板
支持部３１１を包囲するように、上記基板支持部３１１
の左側と右側と後側の各縁に取付けられた左側側面部３
１２と右側側面部３１３と後側側面部３１５とによって
構成されている。上記蓋部３２は、閉じた状態におい
て、上記基板支持部３１１と対向する上面部３２１と、
上記左側側面部３１２と上記右側側面部３１３と上記後
側側面部３１５の各側面部と共に上記基板支持部３１１
を包囲する前側側面部３２４とによって構成されてい
る。前蓋となる上記前側側面部３２４は、上記上面部３
２１に開閉自在に取付けられ、また、上記蓋部３２は、
上記本体部３１に開閉自在に取付けられ、内部に基板３
３を収納することができる。上記基板保持部材３７は、
その上面のほぼ中央に設けられ溝状の案内部３７８に沿
って長手方向に摺動し上記基板保持部材３７自体を握持
するための一対の把手部３７１と、上記把手部３７１の
摺動に連動して上記案内部３７８に沿って摺動し基板３
３の側面を挟持する一対の挟持部３７３と、その長手方
向の両端部に設けられ基板を保持する一対の鉤状の保持
部３７２とを備えている。連動する上記把手部３７１と
上記挟持部３７３は、コイルバネ等の弾性部材３７４を
介して上記基板保持部材３７の取付部３７５に取付けら
れている。基板支持部３１１の中央寄りには、基板３３
をほぼ水平に載置する２本のレール状の載置部３４が取
付けられている。また、載置部３４上に載置された基板
３３を係り止めるためのストッパーとなるピン状の基板
係止部３５が、上記載置部３４および上記基板支持部３
１１に、基板３３の各辺毎に２本ずつ、全部で８本取付
けられている。なお、図３および図４には、全部で８本
の基板係止部３５のうち載置部３４上の手前側に取付け
られた２本だけが示されているが、図５には、全８本が
示されている。さらに、上記基板支持部３１１の左寄り
および右寄りには、上記保持部３７２の下端部と嵌合し
て上記基板保持部材３７を係止する凹状の係止部３８が
設けられている。左側側面部３１２および右側側面部３
１３の外側には、レチクルライブラリ等の基板保管庫に
基板収納ケースを装着する際に、基板収納ケースをガイ
ドするためのガイド部３６が取付けられている。このよ
うな基板収納ケースにおいて、内部に収納されている基
板３３を外部に取り出すには、まず蓋部３２を斜め上後
方へ開ける。そして、手または所定のハンドリング工具
を用いて一対の把手部３７１を握持すると、上記一対の
把手部３７１が互いに近づく方向に摺動するとともに上
記把手部３７１と連動して摺動する挟持部３７３が載置
部３４上に載置されている基板３３を挟持する。その
時、上記把手部３７１および挟持部３７３の摺動に伴っ
て、弾性部材３７４は伸張されている。さらに、上記基
板３３を挟持した状態で、少なくとも保持部３７２が嵌
合している係止部３８から外れるまでは基板保持部材３
７を上方へ持ち上げる。上記挟持部３７３が上記基板３
３を挟持している力は、上記把手部３７１と上記挟持部
３７３とが連動しているため、手または所定のハンドリ
ング工具を用いて上記把手部３７１を握持する力がその
ままダイレクトに作用しており、上記作用している力
が、上記基板３３を持ち上げるのには不足していたり緩
んでしまった場合には、上記基板３３を挟持出来なくな
る。その場合は、保持部３７２が基板３３の縁に引っ掛
かり、基板３３を保持し、再度上記把手部３７１に握持
する力を加えることにより、上記基板３３を挟持するこ
とも出来る。その後、基板３３を保持した基板保持部材
３７をほぼ水平に保ったまま、基板３３を所望の場所ま
で搬送する。ただし、挟持部３７３が基板３３を挟持し
ている場合は、必ずしも水平に保つ必要はない。基板３
３を所望の場所まで搬送した後は、挟持部３７３が基板
３３を挟持していた場合には、上記握持していた力を緩
めることにより伸張されていた上記弾性部材３７４が上
記挟持部３７３を引き戻し、上記挟持部３７３が上記基
板３３を挟持しなくなり、上記基板３３を取り外すこと
が出来る。基板３３を取り外した基板保持部材３７は、
上記係止部３８に上方から嵌合させることによって本体
部３１に係り止められる。そして、内部に装着された基
板保持部材３７は、蓋部３２を閉じることによる蓋部３
２の押圧、あるいは、係止部３８との摩擦等によって固
定される。また、外部にある基板３３をこのような基板
収納ケースの内部に収納する場合には、上記取り出す場
合と同様に、まず蓋部３２を斜め上後方へ開ける。そし
て、手または所定のハンドリング工具を用いて一対の把
手部３７１を握持し、少なくとも保持部３７２が嵌合し
ている係止部３８から外れるまで基板保持部材３７を上
方へ持ち上げ、収納する基板３３のあるところまで持っ
ていく。ここで、上記把手部３７１を握持していた力を
緩め上記弾性部材３７４の収縮力を利用して収納する基
板３３を挟むことができる間隔まで上記挟持部３７３を
広げさせ、その後、再度上記把手部３７１を握持し、上
記把手部３７１と連動している上記挟持部３７３により
上記基板３３を挟持する。あるいは、基板３３の縁を引
っ掛けることにより保持部３７２に上記基板３３を保持
する。そして、上記保持部３７２に保持した場合にはほ
ぼ水平に保ったまま搬送し、上記保持部３７２を上記係
止部３８に上方から嵌合させることによって上記基板保
持部材３７を本体部３１に係り止める。基板３３を挟持
あるいは保持した基板保持部材３７を係止部３８に嵌合
させる途中で、上記基板３３は、載置部３４の上に載置
され、さらに、８本の基板係止部３５に囲まれることに
より係り止められる。また、内部に装着された基板保持
部材３７は、蓋部３２を閉じることによる蓋部３２の押
圧、あるいは、係止部３８との摩擦等によって固定され
る。また、基板保持部材３７は、係止部３８に係り止め
られることで、蓋部３２の開閉に邪魔にならない位置で
あって、かつ、本体部３１の前方開放部を介して基板３
３を水平方向に出し入れする際の邪魔にならない位置
に、正確に位置決めされる。すなわち、図４に明らかな
ように、基板保持部材３７が係止部３８に係り止められ
た状態において、把手部３７１の上面の高さが蓋部３２
を閉じた時の上面部３２１の内面の高さとほぼ一致する
ようになっており、そのため、基板保持部材３７が蓋部
３２の開閉の邪魔にならないばかりでなく、蓋部３２を
閉じれば基板保持部材３７が係止部３８から外れるのを
防止できる。また、基板３３の上面と基板保持部材３７
中央部の下面との間には、載置部３４上の基板係止部３
５の高さよりも多少大きな間隙ができるようになってお
り、そのため、基板３３を基板係止部３５よりも若干高
く持ち上げた状態で前方に移動させれば、基板保持部材
３７が係止部３８に係止された状態のままでも、基板３
３を水平方向に取り出す操作が可能となる。なお、以上
の第２の実施の形態の説明では、弾性部材３７４をコイ
ルバネ等としたが、コイルバネ等には少なくともゴムを
含ものとする。図６は、上述の第２の実施の形態におけ
る基板収納ケースの変形例である第３の実施の形態にお
ける基板収納ケースの斜視図であって、蓋が途中まで開
いている状態を示しており、図７はその断面図であり、
図８はその平面図である。ただし、図６に示されている
蓋部３２は図７および図８では図示省略してある。以下
に説明する第３の実施の形態の基板収納ケースは、これ
を構成する本体部と蓋部と基板保持部材のうち、基板保
持部材が第２の実施の形態の基板収納ケースと異なって
いる。以下、この異なっている基板保持部材を中心に説
明する。図６において、基板収納ケースは、第２の実施
の形態の基板収納ケースと同じ本体部３１と第２の実施
の形態の基板収納ケースと同じ蓋部３２と基板保持部材
６７とによって構成されている。上記基板保持部材６７
は、その上面のほぼ中央に設けられ溝状の案内部６７８
に沿って長手方向に摺動し上記基板保持部材６７自体を
握持するための一対の把手部６７１と、上記把手部６７
１の摺動に連動して上記案内部６７８に沿って摺動し基
板３３の側面を挟持する一対の挟持部６７３と、その長
手方向の両端部に設けられ基板を保持する一対の鉤状の
保持部６７２とを備えている。連動する上記把手部６７
１と上記挟持部６７３は、コイルバネ等の第１弾性部材
６７４を介して上記基板保持部材６７の第１取付部６７
５に取付けられており、さらに、上記把手部６７１は、
コイルバネ等の第２弾性部材６７６を介して上記挟持部
６７３の第２取付部６７７に取付けられている。このよ
うな基板収納ケースにおいて、内部に収納されている基
板３３を外部に取り出すには、まず蓋部３２を斜め上後
方へ開ける。そして、手または所定のハンドリング工具
を用いて一対の把手部６７１を握持すると、上記一対の
把手部６７１が互いに近づく方向に摺動するとともに上
記把手部６７１と連動して摺動する挟持部６７３が載置
部３４上に載置されている基板３３を挟持する。その
時、上記把手部６７１および挟持部６７３の摺動に伴っ
て、第１弾性部材６７４は伸張されている。上記基板３
３を挟持した状態で、さらに上記把手部６７１を強く握
持すると、上記把手部６７１はさらに同方向に摺動する
が上記挟持部６７３は挟持している基板３３が邪魔をし
てそれ以上摺動しない。その時、第２弾性部材６７６が
伸張される。そして、このように上記基板３３を挟持し
た状態で、少なくとも保持部６７２が嵌合している係止
部３８から外れるまでは基板保持部材６７を上方へ持ち
上げる。ここで、手または所定のハンドリング工具を用
いて上記把手部６７１を握持している力が、上記基板３
３を持ち上げるのには不足していたり緩んでしまった場
合には、上記基板３３を挟持出来なくなる。その場合
は、保持部６７２が基板３３の縁に引っ掛かり、基板３
３を保持し、再度上記把手部６７１に握持する力を加え
ることにより、上記基板３３を挟持することも出来る。
その後、基板３３を保持した基板保持部材６７をほぼ水
平に保ったまま、基板３３を所望の場所まで搬送する。
ただし、挟持部６７３が基板３３を挟持している場合
は、必ずしも水平に保つ必要はない。基板３３を所望の
場所まで搬送した後は、挟持部６７３が基板３３を挟持
していた場合には、上記握持していた力を緩めることに
より伸張されていた上記第１弾性部材６７４が上記挟持
部６７３を引き戻し、上記挟持部６７３が上記基板３３
を挟持しなくなり、上記基板３３を取り外すことが出来
る。基板３３を取り外した基板保持部材６７は、上記係
止部３８に上方から嵌合させることによって本体部３１
に係り止められる。そして、内部に装着された基板保持
部材６７は、蓋部３２を閉じることによる蓋部３２の押
圧、あるいは、係止部３８との摩擦等によって固定され
る。また、外部にある基板３３をこのような基板収納ケ
ースの内部に収納する場合には、上記取り出す場合と同
様に、まず蓋部３２を斜め上後方へ開ける。そして、手
または所定のハンドリング工具を用いて一対の把手部６
７１を握持し、少なくとも保持部６７２が嵌合している
係止部３８から外れるまで基板保持部材６７を上方へ持
ち上げ、収納する基板３３のあるところまで持ってい
く。ここで、上記把手部６７１を握持していた力を緩め
上記第１弾性部材６７４の収縮力を利用して収納する基
板３３を挟むことができる間隔まで上記挟持部６７２を
広げさせ、その後、再度上記把手部６７１を握持し、上
記把手部６７１と連動している上記挟持部６７２により
上記基板３３を挟持する。あるいは、基板３３の縁を引
っ掛けることにより保持部６７２に上記基板３３を保持
する。そして、上記保持部６７２に保持した場合にはほ
ぼ水平に保ったまま搬送し、上記保持部６７２を上記係
止部３８に上方から嵌合させることによって上記基板保
持部材６７を本体部３１に係り止める。基板３３を挟持
あるいは保持した基板保持部材６７を係止部３８に嵌合
させる途中で、上記基板３３は、載置部３４の上に載置
され、さらに、８本の基板係止部３５に囲まれることに
より係り止められる。また、内部に装着された基板保持
部材６７は、蓋部３２を閉じることによる蓋部３２の押
圧、あるいは、係止部３８との摩擦等によって固定され
る。なお、以上の第３の実施の形態の説明では、第１弾
性部材６７４および第２弾性部材６７６をコイルバネ等
としたが、コイルバネ等には少なくともゴムを含ものと
する。さらに、上述してきた第１の実施の形態、第２の
実施の形態および第３の実施の形態においては、基板収
納ケースの内部に収納する基板を１枚で説明してきた
が、基板を複数枚収納できるタイプの基板収納ケースに
おいても、本発明は適用可能である。また、基板を基板
収納ケースに収納している状態において、基板を載置部
に載置するとしたが、載置部の代わりに保持部が基板を
保持したままの状態で収納しても構わない。ただし、こ
のように保持部が載置部を兼用する場合には、基板を安
定して載置できるようにするために、保持部のサイズが
大きくなってしまうが、部品点数を減らすというメリッ
トがある。また、基板を保持する保持部を鉤状としてき
たが、その形状はショベル状でも釣針状でも爪状でも構
わない。つまり、基板の縁を引っ掛けて保持することが
出来れば、数や形状は任意である。また、基板保持部材
を係り止める係止部の形状を凹状としたが、その形状は
ピン状でも爪状でも構わない。つまり、基板保持部材を
不用意に動かないように係り止めることが出来れば、数
や形状は任意である。このように、本発明は、上述の各
実施の形態に限定されず、本発明の要旨を逸脱しない範
囲内で種々の構成または形状を取ることが出来る。Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view of a substrate storage case according to a first embodiment of the present invention, showing a state where a lid is partially opened, and FIG. 2 is a cross-sectional view thereof. However, the lid 1 shown in FIG.
2 is not shown in FIG. In FIG. 1, the substrate storage case includes a main body 11, a lid 12, and a substrate holding member 17.
And is constituted by. The main body 11 includes a substrate 1
3 supporting the substrate 3 and the substrate supporting portion 11
1 is constituted by a left side surface portion 112, a right side surface portion 113, and a rear side surface portion 115 attached to the left, right, and rear edges of the substrate support portion 111, respectively. Note that specific examples of the substrate 13 include, for example, a reticle (mask) on which a circuit pattern is formed, and a rectangular glass plate coated with a photosensitive agent. The lid 1
2, in the closed state, the substrate supporting portion 111 together with the upper surface portion 121 facing the substrate supporting portion 111, the left side surface portion 112, the right side surface portion 113, and the rear side surface portion 115. And the surrounding front side surface portion 124. The above-mentioned front side surface portion 1 serving as a front lid
Numeral 24 is attached to the upper surface 121 so as to be openable and closable, and the lid 12 is attached to the main body 11 so as to be openable and closable so that the substrate 13 can be accommodated therein. The substrate holding member 17 is provided at substantially the center of the upper surface thereof and has a pair of grips 171 for gripping the substrate holding member 17 itself, and a pair of hooks provided at both ends in the longitudinal direction for holding the substrate. And a holding portion 172 in the shape of an arrow. Near the center of the substrate supporting portion 111, two rail-shaped mounting portions 14 for mounting the substrate 13 substantially horizontally are attached.
Further, a pin-shaped substrate locking portion 15 serving as a stopper for locking the substrate 13 mounted on the mounting portion 14 is provided on the mounting portion 14 and the substrate support portion 111.
Are mounted on each side, two in total, eight in total. 1 and 2 show a total of eight board locking portions 15.
Of these, only two of them are attached to the near side on the mounting portion 14. Further, on the left and right sides of the substrate support portion 111, there are provided concave locking portions 18 which are fitted to the lower ends of the holding portions 172 and lock the substrate holding member 17. Left side portion 112 and right side portion 1
A guide portion 16 for guiding the substrate storage case when mounting the substrate storage case in a substrate storage such as a reticle library is attached to the outside of the substrate 13. In such a substrate storage case, in order to take out the substrate 13 housed inside, the lid 12 is first opened diagonally upward and rearward. Then, the pair of grip portions 171 are gripped by hand or a predetermined handling tool, and the substrate holding member 17 is lifted at least until the holding portion 172 is disengaged from the engaging portion 18 in which the holding portion 172 is fitted. While the substrate holding member 17 is being lifted upward, the holding portion 172
The substrate 13 is held on the mounting portion 14 by being hooked on the edge of the substrate 3. Thereafter, the substrate 13 is transported to a desired location while the substrate holding member 17 holding the substrate 13 is kept substantially horizontal. Transports the substrate 13 to a desired location,
The substrate holding member 17 from which the substrate 13 has been removed is fitted into the locking portion 18 from above, so that
Is locked in. Then, the substrate holding member 17 mounted inside is fixed by pressing the lid portion 12 by closing the lid portion 12, or by friction with the locking portion 18, or the like. When the external substrate 13 is stored in such a substrate storage case, the lid 12 is first opened diagonally upward and rearward as in the case of taking out the substrate. Then, using a hand or a predetermined handling tool, the pair of grips 1
The user holds the substrate 71 and lifts the substrate holding member 17 upward until the holding portion 172 is disengaged from the engagement portion 18 to which the holding portion 172 is fitted, and takes the substrate holding member 17 to a place where the substrate 13 to be stored is located. The substrate holding member 17 holds the substrate 13 on the holding portion 172 by hooking the edge of the substrate 13 to be stored, and transports the substrate 13 while keeping it substantially horizontal.
The substrate holding member 17 is engaged with the main body 11 by being fitted into the locking portion 18 from above. Substrate 1
The substrate 13 is placed on the placing portion 14 while the substrate holding member 17 holding the substrate 3 is being fitted into the engaging portion 18, and is further surrounded by the eight substrate engaging portions 15. Is stopped by. Further, the substrate holding member 17 mounted inside is fixed by pressing the lid portion 12 by closing the lid portion 12, or by friction with the locking portion 18, or the like. Further, the substrate holding member 17 is engaged with the locking portion 18 so that the substrate holding member 17 is at a position where the opening and closing of the lid 12 is not obstructed and the substrate 1 is opened via the front opening portion of the main body 11.
3 is accurately positioned at a position where it does not hinder the loading and unloading of 3 in the horizontal direction. That is, as is apparent from FIG. 2, when the substrate holding member 17 is locked by the locking portion 18, the height of the upper surface of the handle portion 171 is
When the cover 12 is closed, the height of the upper surface 121 substantially coincides with the height of the inner surface of the upper surface 121. Therefore, the substrate holding member 17 does not not only obstruct the opening and closing of the cover 12, but also closes the cover 12. The member 17 can be prevented from coming off the locking portion 18. The upper surface of the substrate 13 and the substrate holding member 17
Between the lower surface of the central portion and the substrate locking portion 1 on the mounting portion 14
5, a gap slightly larger than the height of the substrate holding member 17 is provided. Board 1
3 can be taken out in the horizontal direction. In the above description of the first embodiment, the handle portion 171 is paired, but the handle portion 171 does not necessarily have to be paired and may be one. However, in the case of one type, it is desirable that it has a certain size so that it can be easily gripped with a hand or a predetermined handling tool, or can be stably transported. FIG. 3 is a perspective view of the substrate storage case according to the second embodiment of the present invention, showing a state in which the lid is partially opened, FIG. 4 is a cross-sectional view thereof, and FIG. It is a top view. However, the lid 32 shown in FIG.
Are omitted from FIGS. 4 and 5. In FIG. 3, the substrate storage case includes a main body 31, a lid 32, and a substrate holding member 37. The main body 31
The substrate support portion 311 for supporting the substrate 33 and the substrate support portion 311 so as to surround the substrate support portion 311.
Left side 3 attached to the left, right and rear edges of the
12, a right side surface portion 313, and a rear side surface portion 315. The lid portion 32, when closed, includes an upper surface portion 321 facing the substrate support portion 311;
The substrate support 311 together with the side surfaces of the left side surface 312, the right side surface 313, and the rear side surface 315.
And a front side surface portion 324 surrounding the front side. The front side surface portion 324 serving as a front lid is provided on the upper surface portion 3.
The cover 32 is attached to the cover 21 so as to be openable and closable.
It is attached to the main body 31 so as to be openable and closable.
3 can be stored. The substrate holding member 37 includes:
A pair of grips 371 for sliding in the longitudinal direction along the groove-shaped guide 378 provided substantially at the center of the upper surface and gripping the substrate holding member 37 itself, and for sliding the grips 371. The substrate 3 slides along the guide portion 378 in conjunction therewith.
3 and a pair of hook-shaped holding portions 372 provided at both ends in the longitudinal direction for holding the substrate. The interlocked handle portion 371 and the holding portion 373 are attached to the attachment portion 375 of the substrate holding member 37 via an elastic member 374 such as a coil spring. Near the center of the substrate support 311, the substrate 33
Are mounted on two rail-shaped mounting portions 34 for mounting the rails substantially horizontally. Further, a pin-shaped substrate locking portion 35 serving as a stopper for engaging the substrate 33 mounted on the mounting portion 34 is provided with the mounting portion 34 and the substrate supporting portion 3.
11 are mounted on each of the two sides of the substrate 33, for a total of eight. FIGS. 3 and 4 show only two of the eight substrate locking portions 35 which are attached to the near side on the mounting portion 34, but FIG. Eight are shown. Further, on the left and right sides of the substrate support portion 311, there are provided concave locking portions 38 which are fitted to lower ends of the holding portions 372 and lock the substrate holding members 37. Left side part 312 and right side part 3
A guide portion 36 for guiding the substrate storage case when mounting the substrate storage case in a substrate storage such as a reticle library is attached to the outside of the substrate 13. In such a substrate storage case, in order to take out the substrate 33 stored therein, first, the lid 32 is opened obliquely upward and rearward. When the pair of grips 371 are gripped by hand or a predetermined handling tool, the grips 373 slide in the direction in which the grips 371 approach each other and slide in conjunction with the grips 371. Sandwiches the substrate 33 mounted on the mounting portion 34. At this time, the elastic member 374 is extended as the handle 371 and the holding portion 373 slide. Further, in a state where the substrate 33 is sandwiched, the substrate holding member 3 is held at least until the holding portion 372 is disengaged from the engaging portion 38 into which the holding portion 372 is fitted.
Lift 7 upward. The holding portion 373 is connected to the substrate 3
Since the grip portion 371 and the grip portion 373 are interlocked with each other, the force for gripping the grip portion 371 directly or directly using the hand or a predetermined handling tool is applied to the gripping force. If the acting force is insufficient to lift the substrate 33 or becomes loose, the substrate 33 cannot be pinched. In this case, the holding portion 372 is hooked on the edge of the substrate 33, holds the substrate 33, and again applies a gripping force to the grip portion 371, so that the substrate 33 can be sandwiched. Thereafter, the substrate 33 is transported to a desired location while the substrate holding member 37 holding the substrate 33 is kept substantially horizontal. However, when the holding portion 373 holds the substrate 33, it is not always necessary to keep the board horizontal. Substrate 3
After transporting the substrate 3 to a desired location, if the holding portion 373 is holding the substrate 33, the elastic member 374 that has been extended by relaxing the gripping force is moved to the holding portion 373. Is pulled back, the holding portion 373 stops holding the substrate 33, and the substrate 33 can be removed. The substrate holding member 37 from which the substrate 33 has been removed,
By being fitted into the locking portion 38 from above, it is engaged with the main body 31. Then, the substrate holding member 37 mounted inside the cover portion 3 by closing the cover portion 32.
2 or is fixed by friction with the locking portion 38 or the like. When the external substrate 33 is to be stored in such a substrate storage case, the lid 32 is first opened diagonally upward and rearward as in the case of removing the substrate 33. Then, the pair of grip portions 371 are gripped by hand or a predetermined handling tool, and the substrate holding member 37 is lifted upward at least until the holding portion 372 is disengaged from the engaging portion 38 in which the holding portion 372 is fitted, and the substrate to be stored is held. Take it to where there are 33. Here, the gripping portion 373 is relaxed by using the contraction force of the elastic member 374 to loosen the force holding the grip portion 371, and the holding portion 373 is expanded to an interval where the holding substrate 33 can be sandwiched. The handle portion 371 is gripped, and the substrate 33 is held by the holding portion 373 interlocked with the handle portion 371. Alternatively, the board 33 is held by the holding section 372 by hooking the edge of the board 33. When the board holding member 37 is held by the holding section 372, it is conveyed while being kept substantially horizontal, and the board holding member 37 is engaged with the main body section 31 by fitting the holding section 372 into the locking section 38 from above. stop. In the course of fitting the substrate holding member 37 holding or holding the substrate 33 to the locking portion 38, the substrate 33 is placed on the mounting portion 34, and It is stopped by being surrounded. Further, the substrate holding member 37 mounted inside is fixed by pressing the lid portion 32 by closing the lid portion 32, or by friction with the locking portion 38, or the like. Further, the substrate holding member 37 is a position that does not hinder the opening and closing of the lid portion 32 by being engaged with the locking portion 38, and the substrate 3 is held through the front opening portion of the main body portion 31.
3 is accurately positioned at a position where it does not hinder the loading and unloading of 3 in the horizontal direction. That is, as is apparent from FIG. 4, when the substrate holding member 37 is engaged with the locking portion 38, the height of the upper surface of the handle portion 371 is
When the cover 32 is closed, the height of the upper surface 321 substantially coincides with the height of the inner surface of the upper surface 321. Therefore, the substrate holding member 37 does not not only obstruct the opening and closing of the cover 32, but also closes the cover 32. The member 37 can be prevented from coming off the locking portion 38. The upper surface of the substrate 33 and the substrate holding member 37
Between the lower surface of the central portion and the lower surface of the mounting portion 34,
5, a gap slightly larger than the height of the substrate locking member 35 can be formed. Board 3
3 can be taken out in the horizontal direction. Although the elastic member 374 is a coil spring or the like in the above description of the second embodiment, the coil spring or the like includes at least rubber. FIG. 6 is a perspective view of a substrate storage case according to a third embodiment, which is a modification of the substrate storage case according to the above-described second embodiment, and shows a state where a lid is partially opened. , FIG. 7 is a sectional view thereof,
FIG. 8 is a plan view thereof. However, the lid 32 shown in FIG. 6 is not shown in FIGS. 7 and 8. The substrate storage case according to the third embodiment described below differs from the substrate storage case according to the second embodiment in the main body, the lid, and the substrate holding member that constitute the substrate storage case. . Hereinafter, the different substrate holding member will be mainly described. In FIG. 6, the substrate storage case includes the same main body 31 as the substrate storage case of the second embodiment, the same lid 32 and the substrate holding member 67 as the substrate storage case of the second embodiment. I have. The substrate holding member 67
Are provided at substantially the center of the upper surface thereof, and have a groove-shaped guide portion 678.
A pair of grips 671 for sliding in the longitudinal direction along the axis and gripping the substrate holding member 67 itself;
A pair of holding portions 673 that slides along the guide portion 678 to hold the side surface of the board 33 in conjunction with the sliding of the pair 1 and a pair of hook-shaped members provided at both ends in the longitudinal direction for holding the board. And a holding portion 672. Interlocked handle part 67
1 and the holding portion 673 are connected to the first mounting portion 67 of the substrate holding member 67 via a first elastic member 674 such as a coil spring.
5 and the handle 671 is
It is attached to the second attaching portion 677 of the holding portion 673 via a second elastic member 676 such as a coil spring. In such a substrate storage case, in order to take out the substrate 33 stored therein, first, the lid 32 is opened obliquely upward and rearward. Then, when the pair of grips 671 are gripped by hand or a predetermined handling tool, the grips 673 slide in a direction approaching each other and slide in conjunction with the grips 671. Sandwiches the substrate 33 mounted on the mounting portion 34. At this time, the first elastic member 674 is extended with the sliding of the handle portion 671 and the holding portion 673. The above substrate 3
When the handle 671 is further strongly gripped while the handle 3 is being held, the handle 671 slides further in the same direction, but the holding portion 673 is hindered by the board 33 being held and further slid. Does not work. At that time, the second elastic member 676 is extended. Then, with the substrate 33 sandwiched in this way, the substrate holding member 67 is lifted up at least until the holding portion 672 comes off from the engaging portion 38 in which it is fitted. Here, the force of gripping the handle portion 671 using a hand or a predetermined handling tool is applied to the substrate 3.
If it is insufficient or loose to lift 3, it becomes impossible to hold the substrate 33. In that case, the holding portion 672 is caught on the edge of the substrate 33 and the substrate 3
By holding the grip 3 again and applying a gripping force to the grip portion 671 again, the substrate 33 can be sandwiched.
Thereafter, the substrate 33 is transported to a desired location while the substrate holding member 67 holding the substrate 33 is kept substantially horizontal.
However, when the holding section 673 holds the substrate 33, it is not always necessary to keep the board 33 horizontal. After the substrate 33 has been transported to a desired location, if the holding portion 673 has held the substrate 33, the first elastic member 674 that has been extended by relaxing the gripping force is released by the first elastic member 674. The holding portion 673 is pulled back, and the holding portion 673 is
And the substrate 33 can be removed. The substrate holding member 67 from which the substrate 33 has been removed is fitted into the locking portion 38 from above, so that the main body 31
Is locked in. Then, the substrate holding member 67 mounted inside is fixed by pressing the lid portion 32 by closing the lid portion 32, or by friction with the locking portion 38, or the like. When the external substrate 33 is to be stored in such a substrate storage case, the lid 32 is first opened diagonally upward and rearward as in the case of removing the substrate 33. Then, using a hand or a predetermined handling tool, the pair of grips 6
The substrate holding member 67 is grasped, and the substrate holding member 67 is lifted upward at least until the holding portion 672 is disengaged from the engaging portion 38 in which the holding portion 672 is fitted, and is brought to a place where the substrate 33 to be stored is located. Here, the gripping portion 671 is loosened and the contraction force of the first elastic member 674 is used to loosen the gripping portion 672 so that the substrate 33 to be accommodated can be clamped. The grip portion 671 is gripped again, and the substrate 33 is gripped by the gripping portion 672 interlocked with the grip portion 671. Alternatively, the substrate 33 is held by the holding section 672 by hooking the edge of the substrate 33. When the board holding member 67 is held by the holding section 672, the board is conveyed while being kept substantially horizontal, and the board holding member 67 is engaged with the main body section 31 by fitting the holding section 672 into the locking section 38 from above. stop. While the substrate holding member 67 holding or holding the substrate 33 is being fitted to the locking portion 38, the substrate 33 is placed on the mounting portion 34, and It is stopped by being surrounded. Further, the substrate holding member 67 mounted inside is fixed by pressing the lid portion 32 by closing the lid portion 32, or by friction with the locking portion 38, or the like. In the above description of the third embodiment, the first elastic member 674 and the second elastic member 676 are coil springs or the like, but the coil springs and the like include at least rubber. Furthermore, in the first, second, and third embodiments described above, one substrate is accommodated in the substrate storage case, but a plurality of substrates are accommodated. The present invention is applicable to a board storage case of a type that can be stored. Further, it is described that the substrate is placed on the mounting portion in a state where the substrate is stored in the substrate storage case, but the substrate may be stored in a state where the holding portion holds the substrate instead of the mounting portion. . However, when the holding unit also serves as the mounting unit, the size of the holding unit increases in order to stably mount the substrate, but the advantage of reducing the number of components is obtained. is there. Further, the holding portion for holding the substrate has been hook-shaped, but the shape may be shovel-shaped, fishing-hook-shaped, or claw-shaped. That is, the number and shape are arbitrary as long as the edge of the substrate can be hooked and held. Further, the shape of the locking portion for engaging the substrate holding member is concave, but the shape may be pin-like or claw-like. In other words, the number and shape are arbitrary as long as the substrate holding member can be engaged so as not to move carelessly. As described above, the present invention is not limited to the above-described embodiments, and can take various configurations or shapes without departing from the gist of the present invention.

【発明の効果】本発明によれば、基板を収納する基板収
納ケースに、上記基板を保持することが出来る基板保持
部材を、自在に装着したり取り外したりすることができ
るように設けることにより、基板を基板収納ケースに収
納する場合には、基板収納ケースに設けられた基板保持
部材を用いて基板収納ケースから取り外し、上記基板保
持部材で基板を保持して収納でき、あるいは、基板を基
板収納ケースから取り出す場合には、基板収納ケースに
設けられた基板保持部材で基板を保持して取り出せるの
で、基板を基板収納ケースに収納する場合も基板を基板
収納ケースから取り出す場合も、基板収納ケースに設け
られた基板保持部材を用いて基板を保持し、基板の収納
および取り出しを行うので、別に管理することにより汚
染等の危険性が増えてしまうような、基板を保持するた
めの別の基板保持部材を用意する必要もなくなり、ある
いは、基板保持部材を紛失してしまう危険性も大幅に減
少できる。また、基板を保持する基板保持部材に、基板
の側面を両側から挟んで保持する挟持部材を設けること
により、安定して基板を保持できるので、基板を基板収
納ケースに収納する場合も基板を基板収納ケースから取
り出す場合も、水平に保つ必要なしに安定した状態で基
板の搬送が行え、幅の狭い空間での搬送も可能となる。
また、基板を保持する基板保持部材を、基板収納ケース
の所定の位置に備える凹状の係止部に嵌合させる等して
係り止めることにより、基板保持部材を基板収納ケース
の所定の位置に固定するので、基板収納ケースに着脱自
在に設けられた基板保持部材が、不用意に基板収納ケー
スの他の部位や収納している基板と衝突あるいは擦り合
うなどして基板収納ケースや基板を傷つけたり粉塵を発
生させたりすることを防止できる。また、基板を保持す
る基板保持部材に、基板保持部材自身を掴むあるいは握
る等して持つことが出来る把手部と、基板を引っ掛ける
等して保持する保持部とを備えることにより、基板の容
易な搬送等のために基板を保持するので、直接基板を持
つには大きすぎたり小さすぎることによる基板の取り扱
い難さを解消することができ、あるいは、直接基板を手
で持つことにより基板を汚染したり傷つけたりすること
を防止できる。また、基板を保持する基板保持部材に、
基板の側面を両側から挟んで保持する挟持部材を設ける
ことにより、安定して基板を保持できるので、基板を搬
送等する場合に、水平に保つ必要なしに安定した状態で
基板の搬送が行え、幅の狭い空間での搬送も可能とな
る。また、基板を挟持する挟持部が基板保持部材自身を
掴むあるいは握る等して持つことが出来る把手部と連動
するよう構成することにより、把手を握持することが同
時に基板を挟持するので、直接基板を持つには大きすぎ
たり小さすぎることによる基板の取り扱い難さを解消す
ることができ、あるいは、直接基板を手で持つことによ
り基板を汚染したり傷つけたりすることを防止すると同
時に、基板を搬送等する場合に、水平に保つ必要なしに
安定した状態で基板の搬送が行え、幅の狭い空間での搬
送も可能となる。According to the present invention, a substrate holding member capable of holding a substrate is provided in a substrate storing case for storing the substrate so that the substrate holding member can be freely attached and detached. When storing the substrate in the substrate storage case, the substrate can be removed from the substrate storage case using the substrate holding member provided in the substrate storage case, and the substrate can be stored and stored by the substrate holding member, or the substrate can be stored in the substrate storage case. When removing the board from the case, the board can be held and taken out by the board holding member provided in the board storage case, so whether the board is stored in the board storage case or the board is removed from the board storage case, Since the substrate is held using the provided substrate holding member and the substrate is stored and removed, the risk of contamination etc. increases due to separate management. And would like, it eliminates the need to prepare another substrate holding member for holding a substrate, or a risk that lost the substrate holding member can also be greatly reduced. Also, by providing a holding member for holding the substrate with a holding member for holding the side surface of the substrate from both sides, the substrate can be stably held. Even when the substrate is taken out of the storage case, the substrate can be transported in a stable state without having to keep the substrate horizontal, and the substrate can be transported in a narrow space.
In addition, the substrate holding member that holds the substrate is fixed to a predetermined position of the substrate storage case by engaging with, for example, fitting a concave holding portion provided at a predetermined position of the substrate storage case. Therefore, the substrate holding member detachably provided in the substrate storage case may inadvertently collide with or rub against other parts of the substrate storage case or the stored substrate, thereby damaging the substrate storage case or the substrate. The generation of dust can be prevented. Further, by providing the substrate holding member for holding the substrate with a grip portion that can hold the substrate holding member itself by gripping or grasping the same and a holding portion that holds the substrate by hooking or the like, the substrate can be easily mounted. Since the substrate is held for transportation etc., it is possible to eliminate the difficulty of handling the substrate due to being too large or too small to hold the substrate directly, or to contaminate the substrate by holding the substrate directly by hand. It can be prevented from being damaged or damaged. In addition, a substrate holding member for holding the substrate,
By providing a holding member that holds the side surface of the substrate by sandwiching it from both sides, the substrate can be stably held.When transporting the substrate, the substrate can be transported in a stable state without having to keep the substrate horizontal. Transport in a narrow space is also possible. Also, by configuring the holding portion for holding the substrate to interlock with the grip portion that can be held by grasping or gripping the substrate holding member itself, holding the grip simultaneously holds the substrate, so that It can eliminate the difficulty of handling the substrate due to being too large or too small to hold the substrate, or prevent the substrate from being contaminated or damaged by directly holding the substrate, When transporting the substrate, the substrate can be transported in a stable state without having to keep the substrate horizontal, and transport in a narrow space is also possible.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の第１の実施の形態における基板収納ケ
ースの斜視図である。FIG. 1 is a perspective view of a substrate storage case according to a first embodiment of the present invention.

【図２】図１で示した本発明の第１の実施の形態におけ
る基板収納ケースの断面図である。FIG. 2 is a sectional view of the substrate storage case according to the first embodiment of the present invention shown in FIG.

【図３】本発明の第２の実施の形態における基板収納ケ
ースの斜視図である。FIG. 3 is a perspective view of a substrate storage case according to a second embodiment of the present invention.

【図４】図３で示した本発明の第２の実施の形態におけ
る基板収納ケースの断面図である。FIG. 4 is a cross-sectional view of the substrate storage case according to the second embodiment of the present invention shown in FIG.

【図５】図３で示した本発明の第２の実施の形態におけ
る基板収納ケースの平面図である。FIG. 5 is a plan view of the substrate storage case according to the second embodiment of the present invention shown in FIG.

【図６】本発明の第３の実施の形態における基板収納ケ
ースの斜視図である。FIG. 6 is a perspective view of a substrate storage case according to a third embodiment of the present invention.

【図７】図６で示した本発明の第３の実施の形態におけ
る基板収納ケースの断面図である。FIG. 7 is a cross-sectional view of the substrate storage case according to the third embodiment of the present invention shown in FIG.

【図８】図６で示した本発明の第３の実施の形態におけ
る基板収納ケースの平面図である。FIG. 8 is a plan view of the substrate storage case according to the third embodiment of the present invention shown in FIG.

【図９】従来のレチクルケースの斜視図である。FIG. 9 is a perspective view of a conventional reticle case.

【図１０】図９で示した従来のレチクルケースの正面図
である。FIG. 10 is a front view of the conventional reticle case shown in FIG.

【符号の説明】[Explanation of symbols]

１１ 本体部 １２ 蓋部 １３ 基板 １７ 基板保持部材 １８ 係止部 ３７ 基板保持部材 ３８ 係止部 ６７ 基板保持部材 ６８ 係止部 １７１ 把手部 １７２ 保持部 ３７１ 把手部 ３７２ 保持部 ３７３ 挟持部 ３７４ 弾性部材 ３７５ 取付部 ３７８ 案内部 ６７１ 把手部 ６７２ 保持部 ６７３ 挟持部 ６７４ 第１弾性部材 ６７５ 第１取付部 ６７６ 第２弾性部材 ６７７ 第２取付部 ６７８ 案内部 DESCRIPTION OF SYMBOLS 11 Main body part 12 Cover part 13 Substrate 17 Substrate holding member 18 Locking part 37 Board holding member 38 Locking part 67 Board holding member 68 Locking part 171 Handle part 172 Holding part 371 Handle part 372 Holding part 373 Holding part 374 Elastic member 375 Mounting part 378 Guide part 671 Handle part 672 Holding part 673 Nipping part 674 First elastic member 675 First mounting part 676 Second elastic member 677 Second mounting part 678 Guide part

Claims (6)

【特許請求の範囲】[Claims] 【請求項１】 基板を収納する基板収納ケースにおい
て、 前記基板を保持可能な基板保持部材を、前記基板収納ケ
ースに着脱自在に設けたことを特徴とする基板収納ケー
ス。1. A substrate storage case for storing a substrate, wherein a substrate holding member capable of holding the substrate is detachably provided in the substrate storage case. 【請求項２】 請求項１記載の基板収納ケースにおい
て、 前記基板保持部材は、前記基板の側面を挟持する挟持部
材を備えることを特徴とする基板収納ケース。2. The substrate storage case according to claim 1, wherein the substrate holding member includes a holding member for holding a side surface of the substrate. 【請求項３】 請求項１または請求項２記載の基板収納
ケースにおいて、 前記基板保持部材を前記基板収納ケースの所定の位置に
係り止める係止部を備えることを特徴とする基板収納ケ
ース。3. The substrate storage case according to claim 1, further comprising a locking portion that locks the substrate holding member at a predetermined position on the substrate storage case. 【請求項４】 基板を保持する基板保持部材において、 前記基板保持部材を握持可能な把手部と、 前記基板を保持する保持部と、を備えることを特徴とす
る基板保持部材。4. A substrate holding member for holding a substrate, comprising: a grip portion capable of gripping the substrate holding member; and a holding portion for holding the substrate. 【請求項５】 請求項４記載の基板保持部材において、 前記基板保持部材は、前記基板の側面を挟持する挟持部
材を備えることを特徴とする基板保持部材。5. The substrate holding member according to claim 4, wherein the substrate holding member includes a holding member for holding a side surface of the substrate. 【請求項６】 請求項５記載の基板保持部材において、 前記挟持部材は、前記把手部と連動して前記基板の側面
を挟持することを特徴とする基板保持部材。6. The substrate holding member according to claim 5, wherein the holding member holds the side surface of the substrate in conjunction with the handle.
JP10097095A 1998-04-09 1998-04-09 Base storage case and base holding member Withdrawn JPH11292186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10097095A JPH11292186A (en) 1998-04-09 1998-04-09 Base storage case and base holding member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10097095A JPH11292186A (en) 1998-04-09 1998-04-09 Base storage case and base holding member

Publications (1)

Publication Number Publication Date
JPH11292186A true JPH11292186A (en) 1999-10-26

Family

ID=14183085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10097095A Withdrawn JPH11292186A (en) 1998-04-09 1998-04-09 Base storage case and base holding member

Country Status (1)

Country Link
JP (1) JPH11292186A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006128188A (en) * 2004-10-26 2006-05-18 Nikon Corp Substrate carrying apparatus, substrate carrying method and exposure apparatus
JP2011054999A (en) * 2010-11-30 2011-03-17 Nikon Corp Apparatus and method for exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006128188A (en) * 2004-10-26 2006-05-18 Nikon Corp Substrate carrying apparatus, substrate carrying method and exposure apparatus
JP2011054999A (en) * 2010-11-30 2011-03-17 Nikon Corp Apparatus and method for exposure

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