JP4809714B2 - Thin plate storage container - Google Patents

Thin plate storage container Download PDF

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Publication number
JP4809714B2
JP4809714B2 JP2006133868A JP2006133868A JP4809714B2 JP 4809714 B2 JP4809714 B2 JP 4809714B2 JP 2006133868 A JP2006133868 A JP 2006133868A JP 2006133868 A JP2006133868 A JP 2006133868A JP 4809714 B2 JP4809714 B2 JP 4809714B2
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protective cover
flange
top flange
thin plate
flange portion
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JP2007302311A (en
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和彦 荒牧
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Miraial Co Ltd
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Miraial Co Ltd
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Priority to JP2006133868A priority Critical patent/JP4809714B2/en
Priority to PCT/JP2007/059592 priority patent/WO2007132711A1/en
Priority to US12/227,168 priority patent/US20090277816A1/en
Publication of JP2007302311A publication Critical patent/JP2007302311A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
    • B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
    • B65D2585/86—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packages (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

この発明は、半導体ウエハなどの薄板を収納して、搬送及び保管する薄板収納容器に関し、特にトップフランジの改良に関するものである。   The present invention relates to a thin plate container for storing, transporting and storing a thin plate such as a semiconductor wafer, and more particularly to improvement of a top flange.

半導体ウエハ等の薄板を複数枚収納して搬送、保管等する薄板収納容器は、例えば特許文献１に記載されている。このような薄板収納容器には、薄板収納容器自体を搬送装置で搬送するためのトップフランジを備えている。このトップフランジは、薄板収納容器から出っ張った状態で設けられている。
特開２００４−２１４２６９号公報 For example, Patent Document 1 discloses a thin plate container that stores a plurality of thin plates such as semiconductor wafers and transports and stores them. Such a thin plate container is provided with a top flange for transporting the thin plate container itself by a transport device. The top flange is provided in a state protruding from the thin plate container.
JP 2004-214269 A

ところで、前記薄板収納容器は、搬送時に内部の清浄性を保つために、真空包装されることがある。ところが、前記トップフランジはエッジ部分が存在するため、真空包装したときそのエッジ部分で袋が破れてしまうおそれがあるという問題がある。   By the way, the said thin plate container may be vacuum-packed in order to maintain an internal cleanliness at the time of conveyance. However, since the top flange has an edge portion, there is a problem that the bag may be broken at the edge portion when vacuum packaging is performed.

本発明は、上述の点に鑑みてなされたもので、トップフランジと、当該トップフランジを覆う保護カバーとを備え、前記トップフランジがほぼ四角形平板状のフランジ部を有し、前記保護カバーが、前記フランジ部全体を覆う四角形皿状に形成されると共に、前記フランジ部の対向する２つの辺に当接して一方向の位置決めをする一対の当接部と、当該各当接部と直交する前記フランジ部の２つの辺に当接して他方向の位置決めをすると共に当該２つの辺に係止する一対の係止爪とを備えて構成され、前記保護カバーの周縁の端部から前記係止爪の両側の位置まで２つのスリットを設けて当該係止爪を撓みやすくすると共に、前記２つのスリットで仕切られた保護カバーの周縁部と前記係止爪との間に当該係止爪を開閉させる取っ手部を設けたことを特徴とする。 The present invention has been made in view of the above points, and includes a top flange and a protective cover that covers the top flange, the top flange having a substantially rectangular flat plate-shaped flange portion, and the protective cover includes: A pair of abutting portions that are formed in a rectangular dish shape that covers the entire flange portion, abuts against two opposite sides of the flange portion and performs positioning in one direction, and the orthogonal to the abutting portions. is configured to include a pair of locking claws for locking to the two sides together in contact with the two sides of the flange portion to position the other direction, the locking claw from the end of the peripheral edge of the protective cover Two slits are provided to positions on both sides of the door so that the locking claws are easily bent, and the locking claws are opened and closed between the peripheral edge of the protective cover and the locking claws partitioned by the two slits. provided with a handle portion It is characterized in.

前記構成により、薄板収納容器を真空包装して搬送する場合は、前記トップフランジに前記保護カバーを被せて固定する。このとき、前記保護カバーの一対の当接部が、前記フランジ部の対向する２つの辺に当接して一方向の位置決めをした状態で、一対の係止爪が、前記各当接部と直交する前記フランジ部の２つの辺に当接して他方向の位置決めをする。さらに、一対の係止爪が前記フランジ部に係止して、前記保護カバーを前記フランジ部に、その全体を覆った状態で固定する。また、２つのスリットで撓みやすくなった係止爪が容易に撓んで、前記フランジ部に係止する。さらに、作業者は、取っ手部に手を入れてこの取っ手部を開閉させるだけで、各係止爪を容易に開閉させることができる。 With the above configuration, when the thin plate container is transported in a vacuum package, the top cover is fixed on the top flange. At this time, in a state where the pair of contact portions of the protective cover are in contact with two opposing sides of the flange portion and positioned in one direction, the pair of locking claws are orthogonal to the contact portions. Positioning in the other direction by contacting two sides of the flange portion. Further, a pair of locking claws are locked to the flange portion, and the protective cover is fixed to the flange portion while covering the entirety thereof. Further, the locking claw that is easily bent by the two slits is easily bent and locked to the flange portion. Furthermore, the operator can easily open and close each locking claw simply by putting his / her hand into the handle and opening and closing the handle.

前記保護カバーの外側面形状を、なだらかな傾斜を描くように形成することが望ましい。   It is desirable to form the outer surface shape of the protective cover so as to draw a gentle slope.

前記構成により、薄板収納容器を真空包装する場合は、トップフランジを保護カバーで覆うため、真空包装用の袋がトップフランジに直接的に接触することが無くなり、なだらかな傾斜の保護カバーの外側から真空包装用の袋が覆われる。   With the above configuration, when vacuum packaging the thin plate container, the top flange is covered with a protective cover, so the bag for vacuum packaging does not come into direct contact with the top flange, and from the outside of the gentle protective cover Vacuum packaging bags are covered.

前記トップフランジのフランジ部の４つの辺に嵌合部を設けると共に、前記一対の当接部又は一対の係止爪のいずれか一方の２箇所又は両方の４箇所に被嵌合部を設けることが望ましい。   Providing fitting portions on the four sides of the flange portion of the top flange, and providing fitting portions at two locations of either one of the pair of contact portions or the pair of locking claws or both. Is desirable.

前記構成により、前記トップフランジのフランジ部の嵌合部に、一対の当接部又は一対の係止爪の被嵌合部が嵌合して、前記保護カバーを前記トップフランジに対して位置決めする。   With the above configuration, a pair of abutting portions or a pair of engagement portions of a pair of locking claws are fitted to the fitting portion of the flange portion of the top flange, and the protective cover is positioned with respect to the top flange. .

以上詳述したように、本発明の薄板収納容器によれば、次のような効果を奏する。   As described in detail above, the thin plate container of the present invention has the following effects.

前記保護カバーの一対の当接部と一対の係止爪が、前記フランジ部の各辺に当接して位置決めをした状態で、さらに、一対の係止爪が前記フランジ部に係止して、前記保護カバーを前記フランジ部に固定するため、前記保護カバーを前記フランジ部に容易に取り付けることができ、真空包装の際に袋が前記トップフランジのエッジ部に接触して破損するのを防止することができる。   In a state where the pair of abutment portions and the pair of latching claws of the protective cover are in contact with and positioned on each side of the flange portion, the pair of latching claws are further latched on the flange portion, Since the protective cover is fixed to the flange portion, the protective cover can be easily attached to the flange portion, and the bag is prevented from being damaged due to contact with the edge portion of the top flange during vacuum packaging. be able to.

作業者は、取っ手部に手を入れてこの取っ手部を開閉させるだけで、各係止爪を容易に開閉させることができるため、係止爪が容易に撓んで前記フランジ部に係止し、係止解除することができ、前記保護カバーを前記フランジ部に容易に取り付けることができる。   The operator can easily open and close each latching claw simply by putting the hand into the handle part and opening and closing the handle part, so that the latching claw can be easily bent and locked to the flange part, The lock can be released, and the protective cover can be easily attached to the flange portion.

薄板収納容器を真空包装する場合、トップフランジを保護カバーで覆うと共にこの保護カバーの外側面形状をなだらかな傾斜を描くように形成したため、真空包装用の袋がトップフランジに直接的に接触することが無くなり、なだらかな傾斜の保護カバーの外側から真空包装用の袋が覆われて、袋の破損を防止することができる。   When vacuum packaging thin plate containers, the top flange is covered with a protective cover and the outer surface of the protective cover is formed with a gentle slope so that the vacuum packaging bag is in direct contact with the top flange. The bag for vacuum packaging is covered from the outside of the gently inclined protective cover, and the bag can be prevented from being damaged.

前記トップフランジのフランジ部の嵌合部に、一対の当接部又は一対の係止爪の被嵌合部が嵌合して、前記保護カバーを前記トップフランジに対して位置決めするため、前記保護カバーを前記トップフランジに対して容易に取り付けることができる。   Since the fitting portion of the flange portion of the top flange is fitted with a pair of contact portions or fitted portions of a pair of locking claws to position the protective cover with respect to the top flange, the protection The cover can be easily attached to the top flange.

以下、本発明の実施形態を添付図面に基づいて説明する。本発明の薄板収納容器は、半導体ウエハ、記憶ディスク、液晶ガラス基板等の薄板を収納、保管、輸送及び製造工程で使用する容器に用いて好適な容器である。なお、本発明は特に薄板収納容器のトップフランジカバーに関するものであり、トップフランジを備えた薄板収納容器全てに適用することができる。このため、本実施形態では、薄板収納容器の一例を概説し、トップフランジ及びトップフランジカバーを中心に説明する。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The thin plate container of the present invention is a container suitable for use in a container for storing, storing, transporting, and manufacturing thin plates such as semiconductor wafers, storage disks, and liquid crystal glass substrates. The present invention particularly relates to a top flange cover of a thin plate storage container, and can be applied to all thin plate storage containers having a top flange. For this reason, in this embodiment, an example of a thin plate container is outlined, and it demonstrates centering on a top flange and a top flange cover.

本実施形態に係る薄板収納容器１は、図２〜９に示すように、内部に半導体ウエハ(図示せず)を複数枚収納する容器本体２と、この容器本体２内の対向する側壁にそれぞれ設けられ、内部に収納された複数枚の半導体ウエハを両側から支持する２つの溝板(図示せず)と、容器本体２の開口を塞ぐ蓋体(図示せず)と、搬送装置（図示せず）の腕部で把持されるトップフランジ５と、作業者が手で薄板収納容器１を持ち運ぶときに掴む持ち運び用ハンドル(図示せず)とから構成されている。   As shown in FIGS. 2 to 9, the thin plate storage container 1 according to the present embodiment has a container body 2 that houses a plurality of semiconductor wafers (not shown) therein, and opposing side walls in the container body 2, respectively. Two groove plates (not shown) that are provided and support a plurality of semiconductor wafers housed inside from both sides, a lid (not shown) that closes the opening of the container body 2, and a transfer device (not shown) 1) and a carrying handle (not shown) that is grasped when the operator carries the thin plate container 1 by hand.

容器本体２は、図２，３に示すように、全体をほぼ立方体状に形成されている。この容器本体２は縦置き状態（半導体ウエハが縦になる状態）で、周囲の壁となる４枚の側壁部２Ａ，２Ｂ，２Ｃ，２Ｄと底板部２Ｅとから構成され、その上部に開口２Ｆが設けられている。各側壁部には、補強用リブ９等が設けられている。この容器本体２は、半導体ウエハの製造ライン等においてウエハ搬送用ロボット（図示せず）に対向して据え付けられるときには、載置台上に正確に位置決めされて横置き（半導体ウエハが水平になる状態）にされる。この横置き状態で底部となる側壁部２Ｄの外側には、薄板収納容器１の本体位置決め手段(図示せず)が設けられている。横置き状態で天井部となる側壁部２Ｂの外側にはトップフランジ５が後述する着脱機構１２によって着脱自在に取り付けられている。横置き状態で横壁部となる２つの側壁部２Ａ，２Ｃの外側には持ち運び用ハンドルが着脱自在に取り付けられる。   As shown in FIGS. 2 and 3, the container body 2 is formed in a substantially cubic shape as a whole. The container body 2 is in a vertically placed state (a state in which the semiconductor wafer is in a vertical state), and is composed of four side wall portions 2A, 2B, 2C, 2D and a bottom plate portion 2E as surrounding walls, and an opening 2F is formed in the upper part Is provided. Each side wall is provided with reinforcing ribs 9 and the like. When the container body 2 is installed opposite to a wafer transfer robot (not shown) in a semiconductor wafer production line or the like, the container body 2 is accurately positioned on the mounting table and placed horizontally (in a state where the semiconductor wafer is horizontal). To be. A main body positioning means (not shown) of the thin plate container 1 is provided outside the side wall 2D that becomes the bottom in the horizontal state. A top flange 5 is detachably attached by an attaching / detaching mechanism 12 described later on the outside of the side wall part 2B which becomes a ceiling part in the horizontal state. A carrying handle is detachably attached to the outside of the two side wall portions 2A and 2C that become the horizontal wall portion in the horizontal state.

トップフランジ５は、図６，７に示すように、フランジ部２５と、本体部２６とから構成されている。フランジ部２５は、搬送装置の腕部（図示せず）で把持されるための部材である。フランジ部２５は、ほぼ四角形平板状に形成されている。このトップフランジ５のフランジ部２５は、工場内等において、搬送装置の腕部で掴まれて、薄板収納容器１が搬送される。本体部２６は、フランジ部２５を支持して容器本体２に取り付けるための部材である。本体部２６の裏面には、後述する着脱機構１２の一方の部材が設けられている。   As shown in FIGS. 6 and 7, the top flange 5 includes a flange portion 25 and a main body portion 26. The flange portion 25 is a member to be held by an arm portion (not shown) of the transport device. The flange portion 25 is formed in a substantially rectangular flat plate shape. The flange portion 25 of the top flange 5 is gripped by the arm portion of the transfer device in the factory or the like, and the thin plate container 1 is transferred. The main body portion 26 is a member for supporting the flange portion 25 and attaching it to the container main body 2. One member of the attachment / detachment mechanism 12 to be described later is provided on the back surface of the main body portion 26.

容器本体２の側壁部２Ｂの中央部には、トップフランジ５を着脱自在に取り付けるための着脱機構１２の他方の部材が設けられている。着脱機構１２は、図４，５に示すように構成されている。具体的には、摺動支持手段２７と、係止手段２８と、案内レール２９とから構成されている。   The other member of the attachment / detachment mechanism 12 for detachably attaching the top flange 5 is provided at the central part of the side wall 2B of the container body 2. The attachment / detachment mechanism 12 is configured as shown in FIGS. Specifically, it is composed of sliding support means 27, locking means 28, and guide rails 29.

摺動支持手段２７は、容器本体２とトップフランジ５とを互いに摺動可能に支持するための部材である。摺動支持手段２７は、容器本体２側に設けられた支持部３０と、トップフランジ５側に設けられて支持部３０に手前側から奥部（図４中の右側から左側の端部）まで挿入される摺動部３１とから構成されている。支持部３０は、容器本体２の側壁部２Ｂの外側表面に、並列に２つ設けられたレール部材によって構成されている。このレール部材には、外側方向（２つのレール部材の互いを背にする方向）に開放した溝が設けられている。摺動部３１は、トップフランジ５の本体部２６のうち、上記支持部３０に対応する位置にそれぞれ設けられたレール部材によって構成されている。このレール部材には、内側方向に開放した溝が設けられている。これら支持部３０及び摺動部３１は、手前側（図４中の右側）におけるこれらの間隔を狭く、奥側を広くして、ハの字状に設定されている。これにより、摺動部３１が、支持部３０に容易に嵌合できるようになっている。   The sliding support means 27 is a member for supporting the container body 2 and the top flange 5 so as to be slidable with respect to each other. The sliding support means 27 includes a support portion 30 provided on the container body 2 side and a support flange 30 provided on the top flange 5 side from the near side to the back side (the right side to the left end in FIG. 4). It is comprised from the sliding part 31 inserted. The support part 30 is comprised by the rail member provided in parallel on the outer surface of the side wall part 2B of the container main body 2 in parallel. The rail member is provided with a groove that is open in an outer direction (a direction in which the two rail members face each other). The sliding portion 31 is constituted by a rail member provided at a position corresponding to the support portion 30 in the main body portion 26 of the top flange 5. The rail member is provided with a groove opened in the inner direction. The support portion 30 and the sliding portion 31 are set in a square shape with a narrower interval on the front side (right side in FIG. 4) and a wider back side. Thereby, the sliding part 31 can be easily fitted to the support part 30.

係止手段２８は、摺動支持手段２７で摺動可能に支持された容器本体２とトップフランジ５とを互いにずれないように係止するための部材である。係止手段２８は、容器本体２側に設けられた係止用突起３３と、トップフランジ５側に設けられた係止用爪３４とから構成されている。係止用突起３３は側壁部２Ｂに２つ設けられている。各係止用突起３３は、２つの支持部３０の各両端部の間の中央にそれぞれ設けられている。各係止用突起３３は、奥側（図４中の左側）に向いた面が垂直な当接面となって、係止用爪３４を手前側（図４中の右側）へずれないように支持する。   The locking means 28 is a member for locking the container body 2 and the top flange 5 that are slidably supported by the sliding support means 27 so as not to deviate from each other. The locking means 28 includes a locking projection 33 provided on the container body 2 side and a locking claw 34 provided on the top flange 5 side. Two locking projections 33 are provided on the side wall 2B. Each locking projection 33 is provided at the center between the both end portions of the two support portions 30. Each of the locking projections 33 has a vertical contact surface on the back side (left side in FIG. 4) so that the locking claw 34 does not shift to the near side (right side in FIG. 4). To support.

係止用爪３４は、係止用突起３３に係止してトップフランジ５が抜け落ちないようにするための部材である。係止用爪３４は、トップフランジ５の本体部２６に２つ設けられている。具体的には、奥側係止用爪３４Ａと、手前側係止用爪３４Ｂとが設けられている。奥側係止用爪３４Ａは、奥側の係止用突起３３に当接する当接部３６と、この当接部３６を支持する支持棒部３７とから構成されている。当接部３６は、手前側に向いた面が垂直な当接面となって係止用突起３３に当接し、トップフランジ５を手前側へずれないように支持する。支持棒部３７は容器本体２側へ、かつ奥側へ向けて延出させて形成されている。   The locking claw 34 is a member for locking to the locking projection 33 and preventing the top flange 5 from falling off. Two locking claws 34 are provided on the main body 26 of the top flange 5. Specifically, a rear locking claw 34A and a front locking claw 34B are provided. The back side locking claw 34 </ b> A includes a contact portion 36 that contacts the back side locking projection 33 and a support bar portion 37 that supports the contact portion 36. The abutting portion 36 has a surface facing toward the near side as a perpendicular abutting surface and abuts against the locking projection 33 to support the top flange 5 so as not to be displaced toward the near side. The support bar portion 37 is formed to extend toward the container body 2 and toward the back side.

手前側係止用爪３４Ｂは、手前側の係止用突起３３に当接する当接部３８と、この当接部３８を支持する支持棒部３９とから構成されている。当接部３８は、手前側に向いた面が垂直な当接面となって係止用突起３３に当接し、係止用爪３４Ｂを手前側へずれないように支持する。支持棒部３９は、容器本体２側へ、かつ手前側へ向けて延出させて形成されている。この支持棒部３９によって、当接部３８が、支持棒部３９の基端部より容器本体２側に設けられている。これにより、トップフランジ５に対して抜け落ちる方向に力が加わった場合に、当接部３８が係止用突起３３に深く食い込む方向に押圧されることになる。これにより、衝撃等により強い力が加わっても、当接部３８が係止用突起３３から外れるのを確実に防止している。これにより、支持棒部３９が突っ張ってトップフランジ５の抜けを抑える（図８，９参照）。   The near-side locking claw 34B includes a contact portion 38 that contacts the front-side locking protrusion 33 and a support bar portion 39 that supports the contact portion 38. The abutting portion 38 has a surface facing toward the near side as a perpendicular abutting surface, abuts against the locking projection 33, and supports the locking claw 34B so as not to be shifted toward the near side. The support bar portion 39 is formed to extend toward the container body 2 and toward the near side. With the support bar portion 39, the contact portion 38 is provided on the container body 2 side from the base end portion of the support bar portion 39. As a result, when a force is applied to the top flange 5 in the direction of falling off, the contact portion 38 is pressed in a direction of deeply biting into the locking projection 33. Thereby, even if a strong force is applied due to an impact or the like, the contact portion 38 is reliably prevented from coming off from the locking projection 33. As a result, the support bar 39 is stretched to prevent the top flange 5 from coming off (see FIGS. 8 and 9).

案内レール２９は、摺動支持手段２７で容器本体２に支持されたトップフランジ５の摺動を案内して、摺動方向と直交する方向の位置決めをするための部材である。この案内レール２９は、嵌合レール部２９Ａと、被嵌合レール２９Ｂとから構成されている。嵌合レール部２９Ａは、１つのレール部材で構成され、容器本体２の側壁部２Ｂのうち２つの支持部３０の内側に２つ設けられている。被嵌合レール２９Ｂは、嵌合レール部２９Ａを両側から挟む２つのレール部材で構成され、嵌合レール部２９Ａに対向するトップフランジ５側に設けられている。嵌合レール部２９Ａ及び被嵌合レール２９Ｂは、平行に設けられている。これにより、嵌合レール部２９Ａが被嵌合レール２９Ｂに嵌合して、トップフランジ５の手前側から奥側への摺動、奥側から手前側への摺動を支持して、トップフランジ５を容器本体２に対して容易に着脱させることができるようになっている。   The guide rail 29 is a member for guiding the sliding of the top flange 5 supported on the container body 2 by the sliding support means 27 and positioning in the direction orthogonal to the sliding direction. The guide rail 29 includes a fitting rail portion 29A and a fitted rail 29B. The fitting rail portion 29 </ b> A is composed of one rail member, and two are provided inside the two support portions 30 in the side wall portion 2 </ b> B of the container body 2. The fitted rail 29B is composed of two rail members sandwiching the fitted rail portion 29A from both sides, and is provided on the top flange 5 side facing the fitted rail portion 29A. The fitting rail portion 29A and the fitting rail 29B are provided in parallel. As a result, the fitting rail portion 29A is fitted to the fitting rail 29B, and supports the sliding of the top flange 5 from the near side to the far side and the sliding from the far side to the near side. 5 can be easily attached to and detached from the container body 2.

トップフランジ５には、図１〜３，１０〜１６に示すように、保護カバー４１が着脱自在に取り付けられる。保護カバー４１は、トップフランジ５全体を覆って、真空包装された袋を保護するための部材である。保護カバー４１は、四角形平板状に張り出したフランジ部２５全体を覆う四角形皿状に形成されている。保護カバー４１は、その中央部が高く、周縁に向けてなだらかな傾斜を描くように形成されている。これにより、鋭いエッジ部を作らないようにしている。   A protective cover 41 is detachably attached to the top flange 5 as shown in FIGS. The protective cover 41 is a member for covering the entire top flange 5 and protecting the vacuum packaged bag. The protective cover 41 is formed in a quadrangular dish shape that covers the entire flange portion 25 protruding in a quadrangular flat plate shape. The protective cover 41 has a high central portion and is formed so as to draw a gentle slope toward the periphery. This prevents a sharp edge portion from being formed.

保護カバー４１の下側面には、当接部４２と、係止爪４３と、取っ手部４４とが設けられている。   On the lower surface of the protective cover 41, a contact portion 42, a locking claw 43, and a handle portion 44 are provided.

当接部４２は、トップフランジ５のフランジ部２５の対向する２つの辺にそれぞれ当接して、保護カバー４１の一方向の位置決めをするための部材である。当接部４２は、保護カバー４１の下側面の対向する２箇所の位置に、トップフランジ５のフランジ部２５の寸法と同じ間隔だけ隔ててそれぞれ設けられている。当接部４２は、弾性を有する平板片として構成されている。これにより、保護カバー４１がトップフランジ５のフランジ部２５に取り付けられると、２つの当接部４２が撓みながらフランジ部２５を挟んでその両側から支持して、保護カバー４１のフランジ部２５に対する位置決めをするようになっている。   The abutting portion 42 is a member that abuts against two opposing sides of the flange portion 25 of the top flange 5 and positions the protective cover 41 in one direction. The abutting portions 42 are provided at two opposing positions on the lower surface of the protective cover 41 with the same distance as the dimension of the flange portion 25 of the top flange 5. The contact part 42 is configured as a flat plate piece having elasticity. Thereby, when the protective cover 41 is attached to the flange portion 25 of the top flange 5, the two contact portions 42 are supported while being bent while sandwiching the flange portion 25, and the protective cover 41 is positioned relative to the flange portion 25. It is supposed to do.

係止爪４３は、当接部４２と直交する前記フランジ部２５の２つの辺に当接して他方向の位置決めをすると共に当該２つの辺に係止するための部材である。係止爪４３は、保護カバー４１の下側面の対向する２箇所の位置に、トップフランジ５のフランジ部２５の寸法と同じ間隔だけ隔ててそれぞれ設けられている。係止爪４３は、弾性を有する平板片として構成されている。これにより、保護カバー４１がトップフランジ５のフランジ部２５に取り付けられると、２つの係止爪４３が撓みながらフランジ部２５を挟んでその両側から支持して、保護カバー４１のフランジ部２５に対する位置決めをするようになっている。さらに、係止爪４３の先端部には爪部４３Ａが形成されている。この爪部４３Ａがフランジ部２５の裏面に回り込んでフランジ部２５に係止するようになっている。   The latching claw 43 is a member that abuts against two sides of the flange portion 25 orthogonal to the abutting portion 42 to perform positioning in the other direction and latch to the two sides. The locking claws 43 are provided at two opposing positions on the lower surface of the protective cover 41 with the same distance as the dimension of the flange portion 25 of the top flange 5. The locking claw 43 is configured as a flat plate piece having elasticity. Thereby, when the protective cover 41 is attached to the flange portion 25 of the top flange 5, the two locking claws 43 are supported from both sides of the flange portion 25 while being bent, and the protective cover 41 is positioned relative to the flange portion 25. It is supposed to do. Further, a claw portion 43 </ b> A is formed at the distal end portion of the locking claw 43. The claw portion 43 </ b> A goes around the back surface of the flange portion 25 and is locked to the flange portion 25.

保護カバー４１のうち、その周縁の端部から係止爪４３の両側の位置まで２つのスリット４５が設けられている。このスリット４５によって、係止爪４３を撓みやすくしている。   In the protective cover 41, two slits 45 are provided from the peripheral edge to positions on both sides of the locking claw 43. The slit 45 makes the locking claw 43 easy to bend.

取っ手部４４は、作業者が手で持って開閉させることで、係止爪４３を開閉させるための部分である。取っ手部４４は、前記２つのスリット４５で仕切られた保護カバー４１の周縁部と係止爪４３との間に設けられている。取っ手部４４は、保護カバー４１の周縁部と係止爪４３とで手が入る程度の空間を有して構成されている。作業者は、この２つの取っ手部４４に両手をそれぞれ入れて係止爪４３を開閉させるようになっている。   The handle part 44 is a part for opening and closing the latching claw 43 when the operator holds and opens it by hand. The handle portion 44 is provided between the peripheral edge portion of the protective cover 41 partitioned by the two slits 45 and the locking claw 43. The handle portion 44 is configured to have a space that allows a hand to enter between the peripheral edge portion of the protective cover 41 and the locking claw 43. The operator puts both hands into the two handle portions 44 to open and close the locking claws 43.

［動作］
以上のように構成された薄板収納容器１は、次のようにして使用される。 [Operation]
The thin plate container 1 configured as described above is used as follows.

容器本体２内に半導体ウエハが多数枚挿入されて蓋体が取り付けられた状態で、半導体製造工場等へ搬送される。そしてこのとき、薄板収納容器１を真空包装して搬送する場合がある。   In a state where a large number of semiconductor wafers are inserted into the container body 2 and a lid is attached, the container body 2 is transported to a semiconductor manufacturing factory or the like. At this time, the thin plate container 1 may be vacuum-packed and transported.

この場合は、トップフランジ５のフランジ部２５に保護カバー４１を被せて固定する。このとき、保護カバー４１の当接部４２と係止爪４３とがフランジ部２５の各辺にそれぞれ当接して、保護カバー４１がフランジ部２５に対して正確に位置決めされる。   In this case, the protective cover 41 is put on and fixed to the flange portion 25 of the top flange 5. At this time, the abutting portion 42 and the locking claw 43 of the protective cover 41 abut against the respective sides of the flange portion 25, and the protective cover 41 is accurately positioned with respect to the flange portion 25.

この状態で、保護カバー４１をフランジ部２５に対して押し込むか、取っ手部４４を手で持って開きながら保護カバー４１をフランジ部２５に対して押し込む。   In this state, the protective cover 41 is pushed into the flange portion 25, or the protective cover 41 is pushed into the flange portion 25 while opening the handle portion 44 by hand.

これにより、係止爪４３がフランジ部２５の縁に係止して、保護カバー４１がトップフランジ５に固定される。   Thereby, the locking claw 43 is locked to the edge of the flange portion 25, and the protective cover 41 is fixed to the top flange 5.

この状態で、薄板収納容器１に袋を被せてその内部を真空引きして、薄板収納容器１を真空包装する。そして、薄板収納容器１が搬送される。   In this state, the thin plate storage container 1 is covered with a bag and the inside thereof is evacuated to vacuum pack the thin plate storage container 1. And the thin plate container 1 is conveyed.

搬送後は、袋を破って真空包装を除去し、保護カバー４１の取っ手部４４を手で持って開きながら取り出す。   After the transport, the bag is broken to remove the vacuum packaging, and the handle 44 of the protective cover 41 is taken out with the hand held by the hand.

その後、トップフランジ５が搬送装置の腕部で把持されて薄板収納容器１が製造ライン等に搬送される。   Thereafter, the top flange 5 is gripped by the arm portion of the transport device, and the thin plate container 1 is transported to the production line or the like.

［効果］
保護カバー４１の一対の当接部４２と一対の係止爪４３が、フランジ部２５の各辺に当接して保護カバー４１をトップフランジ５に対して位置決めをした状態で、さらに、一対の係止爪４３がフランジ部２５に係止して、保護カバー４１をトップフランジ５に固定するため、保護カバー４１をトップフランジ５のフランジ部２５に容易に取り付けることができ、真空包装の際に袋がトップフランジ５のエッジ部に接触して破損するのを確実に防止することができる。 [effect]
In a state where the pair of contact portions 42 and the pair of locking claws 43 of the protective cover 41 are in contact with the respective sides of the flange portion 25 to position the protective cover 41 with respect to the top flange 5, a pair of engagement portions is further provided. Since the pawl 43 is engaged with the flange portion 25 and the protective cover 41 is fixed to the top flange 5, the protective cover 41 can be easily attached to the flange portion 25 of the top flange 5. Can be reliably prevented from coming into contact with the edge portion of the top flange 5 and being damaged.

このとき、保護カバー４１はトップフランジ５に対して容易に着脱できるので、真空包装時の作業性も向上する。   At this time, since the protective cover 41 can be easily attached to and detached from the top flange 5, workability during vacuum packaging is also improved.

作業者は、取っ手部４４に手を入れてこの取っ手部を開閉させるだけで、各係止爪４３を容易に開閉させることができるため、係止爪４３が容易に撓んでフランジ部２５に係止し、係止解除することができ、保護カバー４１をフランジ部２５に対して容易に着脱することができる。   The operator can easily open and close each locking claw 43 simply by putting the hand into the handle portion 44 and opening and closing the handle portion, so that the locking claw 43 easily bends and engages with the flange portion 25. The protective cover 41 can be easily attached to and detached from the flange portion 25.

薄板収納容器１を真空包装する場合、トップフランジ５を保護カバー４１で覆うと共にこの保護カバー４１の外側面形状をなだらかな傾斜を描くように形成したため、真空包装用の袋がトップフランジ５に直接的に接触することが無くなり、なだらかな傾斜の保護カバー４１の外側から真空包装用の袋が覆われて、袋の破損を確実に防止することができる。この結果、輸送中の薄板収納容器１内の清浄性を確実に保つことができるようになる。   When the thin plate container 1 is vacuum-packed, the top flange 5 is covered with the protective cover 41 and the outer surface shape of the protective cover 41 is formed to have a gentle inclination, so that the vacuum packaging bag is directly attached to the top flange 5. And the bag for vacuum packaging is covered from the outside of the gently inclined protective cover 41, and the bag can be reliably prevented from being damaged. As a result, the cleanliness in the thin plate container 1 during transportation can be reliably maintained.

［変形例］
（１） 上記実施形態では、当接部４２及び係止爪４３を平坦板状に形成したが、これら当接部４２及び係止爪４３とフランジ部２５との間に、嵌合部及び被嵌合部を設けてもよい。この場合、トップフランジ５のフランジ部２５に、嵌合部としてのＶ溝２５Ａ（図６，７参照）を設ける。このＶ溝２５Ａは、フランジ部２５の各辺の中央位置をＶ字型に切り欠いて形成されている。保護カバー４１の当接部４２及び係止爪４３には、前記Ｖ溝２５Ａに嵌合する被嵌合部としてＶ型突起片(図示せず)を設ける。 [Modification]
(1) In the above embodiment, the abutment portion 42 and the locking claw 43 are formed in a flat plate shape, but the fitting portion and the covered portion are interposed between the abutment portion 42 and the locking claw 43 and the flange portion 25. A fitting part may be provided. In this case, the flange portion 25 of the top flange 5 is provided with a V groove 25A (see FIGS. 6 and 7) as a fitting portion. The V groove 25A is formed by cutting out the center position of each side of the flange portion 25 into a V shape. The contact portion 42 and the locking claw 43 of the protective cover 41 are provided with V-shaped projecting pieces (not shown) as fitted portions that fit into the V groove 25A.

これにより、フランジ部２５に保護カバー４１の当接部４２及び係止爪４３が取り付けられると、Ｖ型突起片がＶ溝２５Ａにそれぞれ嵌合して保護カバー４１がフランジ部２５に容易に位置決めされる。この結果、保護カバー４１をフランジ部２５に容易に取り付けることができる。   Thus, when the contact portion 42 and the locking claw 43 of the protective cover 41 are attached to the flange portion 25, the V-shaped projecting pieces are fitted into the V grooves 25A, respectively, and the protective cover 41 is easily positioned on the flange portion 25. Is done. As a result, the protective cover 41 can be easily attached to the flange portion 25.

本発明の実施形態に係る保護カバーをトップフランジに取り付けられた状態でその底面側から示す斜視図である。It is a perspective view which shows the protective cover which concerns on embodiment of this invention from the bottom face side in the state attached to the top flange. 本発明の実施形態に係る薄板収納容器を示す斜視図である。It is a perspective view which shows the thin plate container which concerns on embodiment of this invention. 本発明の実施形態に係る薄板収納容器を示す背面図である。It is a rear view which shows the thin plate container which concerns on embodiment of this invention. 本発明の実施形態に係る薄板収納容器をその蓋体とトップフランジを取り外した状態で示す斜視図である。It is a perspective view which shows the thin plate container which concerns on embodiment of this invention in the state which removed the cover body and the top flange. 本発明の実施形態に係るトップフランジをその裏面から示す要部拡大斜視図である。It is a principal part expansion perspective view which shows the top flange which concerns on embodiment of this invention from the back surface. 本発明の実施形態に係るトップフランジを示す斜視図である。It is a perspective view which shows the top flange which concerns on embodiment of this invention. 本発明の実施形態に係るトップフランジをその裏面から示す斜視図である。It is a perspective view which shows the top flange which concerns on embodiment of this invention from the back surface. 本発明の実施形態に係るトップフランジが薄板収納容器に取り付けられた状態を示す要部断面斜視図である。It is a principal part section perspective view showing the state where the top flange concerning the embodiment of the present invention was attached to the thin plate storage container. 本発明の実施形態に係るトップフランジが薄板収納容器に取り付けられた状態を示す斜視図である。It is a perspective view which shows the state in which the top flange which concerns on embodiment of this invention was attached to the thin plate container. 本発明の実施形態に係るトップフランジに取り付けられた保護カバーを示す側面図である。It is a side view which shows the protective cover attached to the top flange which concerns on embodiment of this invention. 本発明の実施形態に係るトップフランジに取り付けられた保護カバーをその裏面から示す斜視図である。It is a perspective view which shows the protective cover attached to the top flange which concerns on embodiment of this invention from the back surface. 本発明の実施形態に係る保護カバーを示す平面図である。It is a top view which shows the protective cover which concerns on embodiment of this invention. 本発明の実施形態に係る保護カバーを示す底面図である。It is a bottom view which shows the protective cover which concerns on embodiment of this invention. 本発明の実施形態に係る保護カバーを示す側面図である。It is a side view which shows the protective cover which concerns on embodiment of this invention. 図１２のＡ−Ａ線矢視断面図である。It is AA arrow sectional drawing of FIG. 図１２のＢ−Ｂ線矢視断面図である。It is a BB line arrow directional cross-sectional view of FIG.

符号の説明Explanation of symbols

１：薄板収納容器、２：容器本体、２Ａ，２Ｂ，２Ｃ，２Ｄ：側壁部、２Ｅ：底板部、２Ｆ：開口、５：トップフランジ、９：補強用リブ、２５：フランジ部、２５Ａ：Ｖ溝、２６：本体部、２７：摺動支持手段、２８：係止手段、２９：案内レール、３０：支持部、３１：摺動部、３３：係止用突起、３４：係止用爪、３４Ａ：奥側係止用爪、３４Ｂ：手前側係止用爪、３６：当接部、３７：支持棒部、３８：当接部、３９：支持棒部、４１：保護カバー、４２：当接部、４３：係止爪、４３Ａ：爪部、４４：取っ手部。
1: Thin plate container, 2: Container body, 2A, 2B, 2C, 2D: Side wall portion, 2E: Bottom plate portion, 2F: Opening, 5: Top flange, 9: Reinforcing rib, 25: Flange portion, 25A: V Groove, 26: body part, 27: sliding support means, 28: locking means, 29: guide rail, 30: support part, 31: sliding part, 33: locking projection, 34: locking claw, 34A: back side locking claw, 34B: front side locking claw, 36: contact portion, 37: support rod portion, 38: contact portion, 39: support rod portion, 41: protective cover, 42: contact Contact portion, 43: locking claw, 43A: claw portion, 44: handle portion.

Claims (3)

トップフランジと、当該トップフランジを覆う保護カバーとを備え、
前記トップフランジがほぼ四角形平板状のフランジ部を有し、
前記保護カバーが、前記フランジ部全体を覆う四角形皿状に形成されると共に、前記フランジ部の対向する２つの辺に当接して一方向の位置決めをする一対の当接部と、当該各当接部と直交する前記フランジ部の２つの辺に当接して他方向の位置決めをすると共に当該２つの辺に係止する一対の係止爪とを備えて構成され、
前記保護カバーの周縁の端部から前記係止爪の両側の位置まで２つのスリットを設けて当該係止爪を撓みやすくすると共に、前記２つのスリットで仕切られた保護カバーの周縁部と前記係止爪との間に当該係止爪を開閉させる取っ手部を設けたことを特徴とする薄板収納容器。 A top flange and a protective cover covering the top flange;
The top flange has a substantially rectangular plate-like flange portion;
The protective cover is formed in a rectangular dish shape that covers the entire flange portion, a pair of contact portions that contact two opposite sides of the flange portion and perform positioning in one direction, and each of the contact portions A pair of locking claws that are in contact with two sides of the flange portion orthogonal to the portion and positioned in the other direction and locked to the two sides,
Two slits are provided from the peripheral edge of the protective cover to positions on both sides of the locking claw to make the locking claw easy to bend, and the peripheral edge of the protective cover partitioned by the two slits and the engagement A thin plate container comprising a handle for opening and closing the locking claw between the locking claw . 請求項１に記載の薄板収納容器において、
前記保護カバーの外側面形状が、なだらかな傾斜を描くように形成されたことを特徴とする薄板収納容器。 The thin plate container according to claim 1 ,
A thin plate container, wherein an outer surface shape of the protective cover is formed so as to draw a gentle slope. 請求項１又は２に記載の薄板収納容器において、
前記トップフランジのフランジ部の４つの辺に嵌合部を設けると共に、
前記一対の当接部又は一対の係止爪のいずれか一方の２箇所又は両方の４箇所に被嵌合部を設けたことを特徴とする薄板収納容器。 In the thin plate container according to claim 1 or 2 ,
While providing fitting portions on the four sides of the flange portion of the top flange,
A thin plate container, wherein a fitted portion is provided at two locations of either one of the pair of contact portions or the pair of locking claws or at four locations of both.
JP2006133868A 2006-05-12 2006-05-12 Thin plate storage container Expired - Fee Related JP4809714B2 (en)

Priority Applications (3)

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JP2006133868A JP4809714B2 (en) 2006-05-12 2006-05-12 Thin plate storage container
PCT/JP2007/059592 WO2007132711A1 (en) 2006-05-12 2007-05-09 Top-flange protective cover for container for receiving thin plate, and container for receiving thin plate, using the same
US12/227,168 US20090277816A1 (en) 2006-05-12 2007-05-09 Top Flange Protective Cover for Thin Plate Container and Thin Plate Container Provided Therewith

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