JP4616319B2 - Thin plate support container - Google Patents

Description

  The present invention relates to a thin plate support container for storing, storing, and transporting thin plates such as semiconductor wafers, storage disks, and liquid crystal glass substrates.

  The thin plate support container is generally composed of a container body and a lid that closes the upper opening of the container body. In the container body, groove plates are respectively provided on opposing side walls, and a plurality of thin plates such as semiconductor wafers are supported between the groove plates.

  The groove plate is detachably supported by the container body. Specifically, a support hole is provided on the groove plate side and a support projection is provided on the container body side, and the groove plate is detachably supported by the container body.

This example is shown in Patent Document 1. A support hole portion is provided on the groove plate (thin plate support portion) side, and a support protrusion is provided on the container body side corresponding to the support hole portion. These are provided at three locations.
International publication WO99 / 39994

  A thin plate pressing member is provided on the back surface of the lid. The thin plate holding member is provided with a fitting groove, and the semiconductor wafer is fitted and supported one by one in the fitting groove. The fitting groove is formed in a V-shape, but the angle of the V-shaped fitting groove is usually an obtuse angle, and only holds the periphery of the semiconductor wafer lightly. In this case, although there is no problem in a normal use mode, the semiconductor wafer may be rotated or displaced due to an abnormal impact such as dropping the thin plate support container, so that the support force is not sufficient.

  The thin plate presser member is formed by arranging a number of presser bands in parallel to support each semiconductor wafer one by one with a predetermined interval, and the periphery of the semiconductor wafer is fitted in the fitting groove provided in the presser band. Supported. In this case, if the semiconductor wafer is disengaged from the fitting groove of the presser band, the semiconductor wafer may enter the gap between the presser bands and be pinched.

  Positioning means for positioning the thin plate support container is provided at the bottom of the container body in the horizontally placed state, and this positioning means is configured by three fitting grooves provided at three substantially equal intervals. ing. By positioning the positioning projections on the base side in these fitting grooves, accurate positioning is performed. However, since the fitting groove is made of the same material as the thin plate support container, the fitting may not slide very smoothly in a state where the positioning protrusion is fitted to each fitting groove. In this case, the positioning protrusion may be caught in the middle of each fitting groove, and accurate positioning cannot be performed.

  In addition, a sufficient gap is provided between the semiconductor wafer housed in the thin plate support container and the bottom plate portion of the thin plate support container. This is to prevent the semiconductor wafer from coming into contact with the bottom plate portion even with an abnormal impact caused by dropping of the thin plate supporting container. However, in this case, since the thin plate supporting container has a height, when the thin plate supporting container is packed in a box, the gap between the bottom plate portion of the box and the bottom portion of the thin plate supporting container is reduced. For this reason, the amount of the cushioning material put between the bottom plate portion of the box and the bottom portion of the thin plate supporting container is reduced. In this case, there is no problem in the normal conveyance state, but it becomes somewhat problematic when an abnormal impact is applied by dropping from a high place or the like.

  In addition, the top flange and the handle are detachably attached to the thin plate support container, but a strong external force is applied in the direction in which the top flange and the handle are pulled out due to an abnormal impact that is not normally possible, such as dropping the thin plate support container. Then, the locking claws or the like may come off and the top flange or the like may fall off.

  The present invention has been made in view of the above problems, and can support the thin plate accurately and reliably, stably maintaining the inside in a clean state, and securely attaching and detaching the lid and the top end. An object of the present invention is to provide a thin plate supporting container that can be easily positioned and can be accurately positioned.

In order to solve the above-mentioned problems, a thin plate supporting container according to the first invention is provided on a container main body that houses a plurality of thin plates therein, a lid that closes the container main body, and opposing side walls in the container main body, respectively. A thin plate support container comprising a groove plate that supports the thin plate housed inside from both sides, and is housed in the container body when the lid body is attached to the container body on the back surface of the lid body. A thin plate pressing member that holds and supports the upper portion of the thin plate is provided, and the thin plate holding member is provided with a fitting groove that fits and supports the thin plates one by one, and the fitting groove is a peripheral edge of the thin plate. It made form so as to sandwich the Rutotomoni includes a detachable mechanism for one or both of a handle for having the top flange or human for conveying machine detachably supported by the container body, the attaching and detaching mechanism, the container body And above Sliding support means for slidably supporting two members of the lunge or handle, and locking means for locking the two members slidably supported by the sliding support means so as not to deviate from each other The sliding support means comprises a support portion provided on one member and a slide portion provided on the other member and inserted into the support portion from the near side to the back side. The locking means comprises a locking projection provided on one or the other member and a locking claw provided on the other or one member, and the locking claw contacts the locking projection. The contact portion includes a contact portion and a support rod portion that supports the contact portion, and the support rod portion is formed to extend toward the counterpart member and toward the front side of the sliding support means. It is characterized by that.

With the above configuration, the thin plate holding member is provided with a fitting groove for fitting and supporting the thin plates one by one, and the fitting groove is formed at an acute angle so as to sandwich the peripheral edge of the thin plate. Even when an impact is applied, the acute-angle fitting groove sandwiches the periphery of the thin plate, and the rotation of the thin plate can be suppressed and reliably supported. In addition, since the support bar is formed to extend toward the mating member and toward the front side of the sliding support means, if a strong force is applied in the direction in which the top flange or the like is pulled out, the support bar is stretched. To prevent the top flange from coming off. Thereby, even if a strong impact is applied to the top flange or the like, it will not fall out.

A thin plate supporting container according to the second invention is provided in a container main body for storing a plurality of thin plates therein, a lid for closing the container main body, and opposing side walls in the container main body, respectively. In a thin plate supporting container comprising a groove plate that supports the thin plate from both sides, the upper surface of the thin plate stored in the container body is pressed against the back surface of the lid body when the lid body is attached to the container body. A thin plate holding member to be supported is provided, and the thin plate holding member is provided with a fitting groove for fitting and supporting the thin plates one by one, and the fitting groove is formed so as to sandwich the periphery of the thin plate. together, the gasket is provided between the lid and the container body, the gasket, and the base end support portion for supporting the whole is fitted on the lid side, extending from the base end supporting portion A contact portion formed, and Parts, along with formed spreading in a flange shape around from the base end supporting portion, the intermediate portion of the raised outer peripheral portion to the lid side is formed by folding into the container main body side, the outer peripheral portion container by the middle portion in a state of being in contact with the main body is pressed against the lid side, the outer peripheral edge portion by the elastic force possessed by the abutting portion, characterized in that it is in close contact with the container body side.

  With the above configuration, the thin plate can be reliably supported, and the intermediate portion of the contact portion is raised upward and the outer peripheral edge portion is folded downward, so that the intermediate portion is pressed toward the lid or the main body. Thus, the outer peripheral edge is brought into close contact with the container main body or the lid by the elastic force of the contact portion. As a result, even when the gasket is bent, its outer peripheral edge can be securely adhered to the container body side or the lid body side, and the thin plate is kept in a clean state and is accurately and reliably supported stably. can do.

A thin plate support container according to a third invention is the thin plate support container according to the first invention, wherein the abutment portion of the locking claw is provided on the counterpart member side from the base end portion of the support rod portion. It is characterized by.

  With the above configuration, since the contact portion of the locking claw is provided on the counterpart member side from the base end portion of the support rod portion, the contact portion is pressed in a direction of deeply biting into the locking protrusion. Thereby, even if a strong force is applied due to an impact or the like, the contact portion does not fall out of the locking projection.

A thin plate supporting container according to a fourth aspect of the present invention is the thin plate supporting container according to the third aspect of the present invention, wherein two supporting portions and two sliding portions of the sliding support means are provided in parallel, and the distance between them on the near side is narrowed. The back side is set wide.

  With the above configuration, since the near side is set narrow and the back side is set wide, the sliding portion can be easily fitted to the support portion.

A thin plate supporting container according to a fifth invention is the thin plate supporting container according to any of the third and fourth inventions, wherein the sliding of the two members supported by the sliding support means is guided and slid. A guide rail for positioning in a direction orthogonal to the direction is provided.

  With the above configuration, the two members guided by the guide rail and supported by the sliding support means can be easily attached and detached.

(1) A thin plate pressing member is provided on the back surface of the lid body to hold and support the upper part of the thin plate stored in the container body when the lid body is attached to the container body. A fitting groove for fitting and supporting the thin plates one by one is provided, and the bottom of the fitting groove is formed at an acute angle so as to sandwich the peripheral edge of the thin plate, so that the thin plate can be reliably supported. .

(2) On the back surface of the lid body, a thin plate pressing member is provided that holds and supports the upper part of the thin plate stored in the container body when the lid body is attached to the container body. A plurality of presser bands are provided in parallel, and each presser band is held in contact with the peripheral edge of the thin plate to support each thin plate one by one at a predetermined interval. The presser band is formed in a waveform along the peripheral edge of the thin plate. Therefore, it is possible to prevent the thin plate from entering between the presser bands.

(3) A gasket is provided between the lid body and the container body, and the gasket is fitted to the lid body side or the container body side to support the whole, and from the base end support section The abutting portion is formed to extend from the base end support portion in the form of a bowl, and the middle portion is raised upward and the outer peripheral edge portion is lowered downward. When the intermediate portion is pressed against the lid body or the main body side in a state where the outer peripheral edge is in contact with the container main body side or the lid body side, the outer peripheral edge is formed by the elastic force of the contact portion. Since the portion is in close contact with the container body or the lid body, the airtightness can be improved between the lid body and the container body.

(4) A seal piece provided on the inner side of the upper surface of the base end support portion of the gasket, extending upward and contacting the lid or the container body, and provided on the outer side of the seal piece, the elasticity of the seal piece Since the annular groove for absorbing the deformation is provided, the airtightness can be improved between the gasket and the lid.

(5) Since the bottom plate portion of the container main body is set to a clearance of about 3 mm from the lower end of the thin plate housed in the container main body, the height of the container main body can be reduced.

(6) Since the height of the container main body is reduced by the amount of the gap between the bottom plate portion of the container main body and the lower end of the thin plate accommodated therein, the thin plate supporting container can be reduced in size and packed. In this case, the buffer material to be packed can be thickened, and the shock absorbing capacity can be greatly improved.

(7) The locking means of the attachment / detachment mechanism includes a locking projection provided on one or the other member and a locking claw provided on the other or one member. It comprises a contact part that contacts the locking projection and a support bar part that supports the contact part, and the support bar part is directed toward the mating member and toward the front side of the sliding support means. Since it is formed to extend, it is possible to prevent the top flange and the like from falling off due to an impact.

(8) Since the abutment portion of the locking claw is provided on the mating member side from the base end portion of the support rod portion, the abutment portion will not come off from the locking projection, and the top flange or the like It can be prevented from falling off due to an impact.

(9) Since the two support portions and the slide portions of the slide support means are provided in parallel, the distance between the front side and the back side is set narrow, and the back side is set wide. Can be detached.

(10) Since the guide rail for guiding the sliding of the two members supported by the sliding support means and positioning in the direction orthogonal to the sliding direction is provided, the top flange is guided by the guide rail. Etc. can be easily attached and detached.

(11) A body positioning means for positioning the entire body is provided at the bottom of the container body in a horizontally placed state, and the body positioning means is provided at three locations on the bottom of the container body in three directions. Since the V-shaped groove plate piece and the support base that supports the V-shaped groove plate piece are configured, a V-shaped groove plate piece made of a material different from that of the container body can be attached.

(12) Since the V-shaped groove plate piece is made of a material having a small surface frictional resistance, the thin plate supporting container can be accurately positioned by sliding smoothly with respect to the fitting protrusion of the mounting table.

(13) Since the V-shaped groove plate piece is detachably attached to the support base, the V-shaped groove plate piece can be easily replaced with a different material depending on the material or the like of the mating protrusion.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. The thin plate supporting container of the present invention is a container suitable for use in a container for storing, storing, transporting and manufacturing thin plates such as semiconductor wafers, storage disks, and liquid crystal glass substrates. In the present embodiment, a thin plate support container that stores a semiconductor wafer will be described as an example.

  As shown in FIGS. 1 to 3, the thin plate support container 1 according to this embodiment includes a container body 2 that houses a plurality of semiconductor wafers S (see FIG. 16), and opposing side walls in the container body 2. Are gripped by two groove plates 3 that support the semiconductor wafer S accommodated therein from both sides, a lid 4 that closes the opening 2F of the container body 2, and an arm portion of a transfer device (not shown). And a carrying handle 6 that is gripped when the operator carries the thin plate supporting container 1 by hand.

  The container body 2 is formed in a substantially cubic shape as a whole. The container main body 2 is composed of four side wall portions 2A, 2B, 2C, 2D and a bottom plate portion 2E as surrounding walls in a vertically placed state (a state in which the bottom plate portion 2E is turned down), and an opening is formed above the container. 2F is provided. Each side wall 2A, 2B, 2C, 2D is provided with reinforcing ribs 9 and the like. When the container body 2 is installed facing a wafer transfer robot (not shown) in the production line of the semiconductor wafer S or the like, the container body 2 is accurately positioned on the mounting table and placed horizontally (state shown in FIG. 2). The The main body positioning means 11 of the thin plate supporting container 1 is provided outside the side wall 2A which becomes the bottom in the horizontal state. A top flange 5 is detachably attached by an attachment / detachment mechanism 12 on the outer side of the side wall 2B that becomes a ceiling portion in a horizontally placed state. A carrying handle 6 is detachably attached by an attaching / detaching mechanism 12 on the outside of the side wall portions 2C, 2D which become the horizontal wall portion in the horizontal state.

  As shown in FIG. 3, the main body positioning means 11 is constituted by three V-groove fitting grooves 13. Each fitting groove 13 includes a first fitting groove 13A that is aligned in the vertical direction of the container body 2, and second and third fittings that are inclined by the same angle (approximately 60 degrees) with respect to the vertical direction of the container body 2. It is comprised from the joint grooves 13B and 13C. These three fitting grooves 13 are set to precise dimensional accuracy according to the standard. Each of the fitting grooves 13A, 13B, 13C of the main body positioning means 11 is fitted to a fitting projection (not shown) of a mounting table in the semiconductor manufacturing process, so that the thin plate supporting container 1 is placed at an accurate position. The semiconductor wafer S is put in and out by the wafer transfer robot.

  Each fitting groove 13 is comprised from the V-shaped groove plate piece 15 and the support stand 16, as shown in FIGS.

  The V-shaped groove plate piece 15 is a member for constituting the fitting groove 13. The V-shaped groove plate piece 15 includes a frame body 17, an inclined plate 18, and a locking claw 19.

  The frame 17 is a member for supporting the inclined plate 18 and the locking claw 19. The frame body 17 is formed in a rectangular shape so as to be fitted into a fitting cutout 21 </ b> C of the support base 16 described later. On both sides in the longitudinal direction of the frame body 17, a support plate that is fitted to an end support plate 22 of a support base 16 to be described later and coupled to the fitting notch 21 </ b> C to stably support the whole. A fitting notch 17A is provided. The inclined plate 18 is a member for constituting the inclined surface of the fitting groove 13. Two inclined plates 18 are provided on the frame body 17. In a state where the base end portion of the inclined plate 18 is fixed to the frame body 17, the inclined plate 18 is configured to extend inward and downward. In the state where the inclined plate 18 is attached to the support base 16, the plate pressure is accurately set in relation to the support base 16 so that the upper surface (the upper surface in FIG. 6) has a predetermined dimension. . The V-shaped groove plate piece 15 is made of a material having a small surface frictional resistance, and can smoothly slide when the mounting protrusions of the mounting table in the semiconductor manufacturing process are fitted, so that the thin plate supporting container 1 can be accurately positioned. It is like that. As this material, PBT or the like is used.

  The locking claw 19 is a member for fixing the V-shaped groove plate piece 15 to the support base 16. The locking claw 19 is configured to extend inward and downward from the central portion of the inclined plate 18. The front end portion of the locking claw 19 is configured to be folded back in the vertical direction, and the claw portion 19A at the front end is locked to a locking projection 23 of the support base 16 described later. Thereby, the V-shaped groove plate piece 15 is detachably attached to the support base 16. Further, a V-shaped groove plate piece 15 made of a material (slippery material) matched to the material of the fitting protrusion of the mounting table in the semiconductor manufacturing process is selectively attached. As a result, the mating projection on the mating side and the V-shaped groove plate piece 15 can smoothly slide with each other to perform accurate positioning.

  The support base 16 is a member for supporting the V-shaped groove plate piece 15. The support base 16 includes an inclined support plate 21, an end support plate 22, and a locking projection 23.

  The inclined support plate 21 is a member for accurately positioning and supporting the inclined plate 18 of the V-shaped groove plate piece 15. A surface formed by arranging four planar U-shaped plate pieces, and the inclined surface 21A formed along the V-groove inside the flat U-shaped plate piece is in direct contact with and supports the inclined plate 18 of the V-shaped groove plate piece 15. It becomes. The dimension of the inclined surface 21A is accurately set so that the upper surface of the inclined plate 18 of the V-shaped groove plate piece 15 supported by the inclined surface 21A has a predetermined dimension. In this case, since the fitting protrusions of the mounting table in the semiconductor manufacturing process mainly come into contact with the tip portion of each inclined plate 18, the inner portion 21B of the planar U-shaped inclined surface 21A is finished to a more accurate dimension. It has been. A fitting notch 21 </ b> C is provided at the upper end of the inclined support plate 21. This fitting notch 21 </ b> C is a notch for fitting the frame body 17 of the V-shaped groove plate piece 15. The V-shaped groove plate piece 15 is supported by the eight fitting cutouts 21C.

  The end support plate 22 is a member for supporting both sides in the longitudinal direction of the V-shaped groove plate piece 15 fitted in the fitting notch 21 </ b> C of the inclined support plate 21. The end support plates 22 are formed in a standing plate shape, and are provided at both ends of the inclined support plate 21, respectively. The upper end portion of the end support plate 22 is fitted into the support plate fitting notch 17A of the frame 17 of the V-shaped groove plate piece 15, thereby suppressing the longitudinal displacement of the V-shaped groove plate piece 15. The V-shaped groove plate piece 15 is stably supported.

  The locking projection 23 is a member for supporting the V-shaped groove plate piece 15. The locking projection 23 is provided at the center between the inclined support plates 21. The upper end portion of the locking projection 23 is enlarged, and the claw portion 19A of the locking claw 19 of the V-shaped groove plate piece 15 is locked.

  As shown in FIGS. 9 and 10, the top flange 5 includes a flange portion 25 and a main body portion 26. The flange portion 25 is a member to be held by an arm portion (not shown) of the transport device. In the factory or the like, the top flange 5 is gripped by the arm portion of the transport device, and the thin plate support container 1 is transported. The main body portion 26 is a member for supporting the flange portion 25 and attaching it to the container main body 2. One member of the attachment / detachment mechanism 12 to be described later is provided on the back surface of the main body portion 26.

  The other member of the attachment / detachment mechanism 12 for detachably attaching the top flange 5 is provided at the central portion of the side wall 2B of the container body 2. The attachment / detachment mechanism 12 is configured as shown in FIGS. 1 and 11 to 15. Specifically, it is composed of sliding support means 27, locking means 28, and guide rails 29.

  The sliding support means 27 is a member for supporting the container body 2 and the top flange 5 so as to be slidable with respect to each other. The sliding support means 27 includes a support portion 30 provided on the container body 2 side and a support flange 30 provided on the top flange 5 side from the near side to the back side (from the right side to the left end in FIG. 11). It is comprised from the sliding part 31 inserted. The support part 30 is comprised by the rail member provided in parallel on the outer surface of the side wall part 2B of the container main body 2 in parallel. The rail member is provided with a groove that is open in an outer direction (a direction in which the two rail members face each other). The sliding portion 31 is constituted by a rail member provided at a position corresponding to the support portion 30 in the main body portion 26 of the top flange 5. The rail member is provided with a groove opened in the inner direction. The support portion 30 and the sliding portion 31 are set in a square shape with a narrower interval on the front side (right side in FIG. 11) and a wider back side. Thereby, the sliding part 31 can be easily fitted to the support part 30.

  The locking means 28 is a member for locking the container body 2 and the top flange 5 that are slidably supported by the sliding support means 27 so as not to deviate from each other. The locking means 28 includes a locking projection 33 provided on the container body 2 side and a locking claw 34 provided on the top flange 5 side. Two locking projections 33 are provided on the side wall 2B. Each locking projection 33 is provided at the center between the both end portions of the two support portions 30. Each of the locking projections 33 has a vertical contact surface facing the back side (left side in FIG. 11) so that the locking claw 34 does not shift to the near side (right side in FIG. 11). To support.

  The locking claw 34 is a member for locking to the locking projection 33 and preventing the top flange 5 from falling off. Two locking claws 34 are provided on the main body 26 of the top flange 5. Specifically, a rear locking claw 34A and a front locking claw 34B are provided. The back side locking claw 34 </ b> A includes a contact portion 36 that contacts the back side locking projection 33 and a support bar portion 37 that supports the contact portion 36. The abutting portion 36 has a surface facing toward the near side as a perpendicular abutting surface and abuts against the locking projection 33 to support the top flange 5 so as not to be displaced toward the near side. The support bar portion 37 is formed to extend toward the container body 2 and toward the back side.

  The near-side locking claw 34B includes a contact portion 38 that contacts the front-side locking protrusion 33 and a support bar portion 39 that supports the contact portion 38. The abutting portion 38 has a surface facing toward the near side as a perpendicular abutting surface, abuts against the locking projection 33, and supports the locking claw 34B so as not to be shifted toward the near side. The support bar portion 39 is formed to extend toward the container body 2 and toward the near side. With the support bar portion 39, the contact portion 38 is provided on the container body 2 side from the base end portion of the support bar portion 39. As a result, when a force is applied to the top flange 5 in the direction of falling off, the contact portion 38 is pressed in a direction of deeply biting into the locking projection 33. Thereby, even if a strong force is applied due to an impact or the like, the contact portion 38 is reliably prevented from coming off from the locking projection 33. As a result, the support bar 39 is stretched to prevent the top flange 5 from coming off.

  The guide rail 29 is a member for guiding the sliding of the top flange 5 supported on the container body 2 by the sliding support means 27 and positioning in the direction orthogonal to the sliding direction. The guide rail 29 includes a fitting rail portion 29A and a fitted rail 29B. The fitting rail portion 29 </ b> A is composed of one rail member, and two are provided inside the two support portions 30 in the side wall portion 2 </ b> B of the container body 2. The fitted rail 29B is composed of two rail members sandwiching the fitted rail portion 29A from both sides, and is provided on the top flange 5 side facing the fitted rail portion 29A. The fitting rail portion 29A and the fitting rail 29B are provided in parallel. As a result, the fitting rail portion 29A is fitted to the fitting rail 29B, and supports the sliding of the top flange 5 from the near side to the far side and the sliding from the far side to the near side. 5 can be easily attached to and detached from the container body 2.

  As shown in FIGS. 2 and 3, the handle 6 includes two gripping bar portions 41 and 42. The grip bar portions 41 and 42 are set at different angles. Accordingly, when the thin plate supporting container 1 is held vertically or horizontally, the two gripping bar portions 41 and 42 are selected and gripped. The angles of the gripping bar portions 41 and 42 are set to an optimum angle when the thin plate support container 1 is held vertically and an optimum angle when it is held horizontally. The specific angle is appropriately set according to various conditions such as the size and weight of the thin plate supporting container 1. The handle 6 is detachably attached to the side walls 2C and 2D by an attachment / detachment mechanism having the same structure as the attachment / detachment mechanism 12.

  As shown in FIGS. 3 and 16, the bottom plate portion 2 </ b> E is composed of a foot portion 44 and a cover plate portion 45. The foot portion 44 is a member for supporting the container body 2. The foot portion 44 is constituted by a ridge formed over the entire width of two opposing sides of the bottom plate portion 2E. The cover plate part 45 is a member for covering the lower side part of the semiconductor wafer S accommodated in the container body 2. The cover plate portion 45 is provided to be curved downward between the foot portions 44. The cover plate portion 45 is set so that the distance t from the lower end of the semiconductor wafer S accommodated in the container body 2 is about 3 mm. This is because the mounting accuracy and support rigidity of the groove plate 3 to be described later have been improved, so that the semiconductor wafer S is supported with sufficient strength even when a strong impact is caused by the drop of the thin plate support container 1 and the downward displacement is reduced. This is because you will be able to. Furthermore, the height of the container main body 2 is reduced by the amount that the gap between the bottom plate portion 2E and the lower end of the semiconductor wafer S is reduced, thereby reducing the size. As a result, when the thin plate support container 1 is packed, the gap between the bottom of the thin plate support container 1 and the packing box can be increased and the buffer material can be thickened. Can be improved.

  As shown in FIG. 1, a lid receiving step 47 for fitting the lid 4 is provided at the upper end of the container body 2. The lid receiving step 47 is formed by expanding the upper end of the container body 2 to the dimensions of the lid 4. Thus, the lid body 4 is fitted to the inside of the vertical plate portion 47A of the lid body receiving step portion 47, and is attached to the lid body receiving step portion 47 by contacting the horizontal plate portion 47B. . Further, a gasket 80 (see FIG. 29) attached to the lower surface of the lid 4 is brought into contact with the horizontal plate portion 47B so as to seal the inside of the thin plate supporting container 1. A fitting hole 48 for fixing a dedicated lid (not shown) used in the semiconductor manufacturing process to the container body 2 side is provided inside the vertical plate portion 47A of the lid receiving step 47. Yes. The fitting holes 48 are provided at the four corners of the lid receiving step 47. The position and shape of the fitting hole 48 are appropriately set according to a dedicated lid used in the semiconductor manufacturing process.

  As shown in FIGS. 1 and 16 to 23, the groove plate 3 is a member for supporting the semiconductor wafer S, which is provided on each of the opposing side wall portions 2 </ b> C and 2 </ b> D in the container body 2 and accommodated therein, from both sides. is there. The groove plate 3 is detachably attached to the inside of the container body 2. A plurality of groove plates 3 are mainly arranged in parallel at regular intervals and a plate piece 50 that supports each semiconductor wafer S with a single gap therebetween, and the plate pieces 50 are arranged in parallel at regular intervals. It is comprised from the support plate part 51 which supports these integrally in the installed state.

  The plate piece 50 is provided so as to extend from the back side of the container body 2 to the loading / unloading port (opening 2F) side of the semiconductor wafer S. The plate piece 50 is curved along the periphery of the semiconductor wafer S from the back side to the intermediate position, and is formed along the container body 2 from the intermediate position to the loading / unloading port side. A thin plate supporting protrusion 52 for supporting the semiconductor wafer S is provided on the back side and the inlet / outlet side of the plate piece 50. The thin plate supporting protrusion 52 on the loading / unloading port side is provided near the intersection of the inner edge of the plate piece 50 and the periphery of the semiconductor wafer S. This is because the thin plate supporting protrusions 52 are provided as close as possible to the inlet / outlet side to stably support the semiconductor wafer S.

  A V-shaped groove 53 is provided between the back plate pieces 50. The V-shaped groove 53 supports the semiconductor wafer S by dropping into the groove bottom of the V-shaped groove 53 and supporting it at the center when the container body 2 is placed vertically.

  Two handles 54 are provided on the upper portion of the groove plate 3. The handle 54 is a portion that is gripped when the groove plate 3 is lifted. Pick the two handles 54 with your fingers and lift them.

  The support plate portion 51 is provided at three positions on the farthest side of each plate piece 50 (lower left portion in FIG. 17), the middle and the entrance side (upper right portion in FIG. 17). Supports integrally.

  The groove plate 3 is detachably fixed to the opposing side wall portions 2 </ b> C and 2 </ b> D in the container body 2 by an upper fitting portion 55 and a lower fitting portion 56.

  The upper fitting portion 55 is a member for supporting the upper portion of the groove plate 3 to the container body 2. The upper fitting portion 55 includes an upper fitting piece 57 and an upper fitting piece 58. The upper fitting pieces 57 are respectively provided on the opposing side wall portions 2C and 2D in the container main body 2. A step portion 59 is provided at an intermediate position in the vertical direction between the side wall portions 2C and 2D, and four upper fitting pieces 57 are provided on the step portion 59. It is sufficient to provide two upper fitting pieces 57 at both ends, and there may be three or five or more depending on the size of the groove plate 3 or the like. The upper fitting piece 57 is formed in a U shape in plan view. The U-shaped upper fitting piece 57 is provided with a contact surface 57A and a support surface 57B. The contact surface 57A is a portion for positioning the groove plate 3 in the front-rear direction (the direction from the left back side to the right front side in FIG. 20) while suppressing the rotation of the groove plate 3 by contacting the groove plate 3 side. The flat surface is formed. Since the groove surface 3 is positioned in the front-rear direction using the contact surface 57A as a reference, the contact surface 57A is formed at an accurate position and size. The support surface 57B is a part for supporting the contact state in a state where the contact surface 57A is in contact with the groove plate 3 side.

  The upper mating piece 58 is a member for fitting with the upper fitting piece 57 and positioning the groove plate 3 in the front-rear direction. The upper mating piece 58 is provided at a position facing the upper fitting piece 57 in the groove plate 3. Specifically, it is composed of a contacted surface 58A and a supported surface 58B. The contacted surface 58A is a part for positioning the groove plate 3 in the front-rear direction while contacting the contact surface 57A of the upper fitting piece 57 and suppressing the rotation of the groove plate 3. The abutted surface 58A is formed in a flat surface shape so as to suppress the rotation with the upper fitting piece 57. 58 A of to-be-contacted surfaces are formed in the front-end | tip of the protruding item | line 61 provided in the position corresponding to the contact surface 57A of the fitting piece 57 among the groove plates 3. FIG. The abutment surface 58A of the ridge 61 abuts on the abutment surface 57A of the upper fitting piece 57 to position the groove plate 3 in the front-rear direction. Here, the two ridges 61 come into contact with the contact surface 57 </ b> A of one upper fitting piece 57. The shape of the ridge 61 is to prevent sink marks during molding and improve dimensional accuracy.

  The supported surface 58B is a member for supporting the contacted surface 58A in contact with the contact surface 57A of the upper fitting piece 57 by contacting the support surface 57B of the upper fitting piece 57. is there. The supported surface 58 </ b> B is formed on the back surface of a strip-shaped plate material 63 supported on the groove plate 3 side by a plurality of support plate pieces 62. All the sub-parts of the plate material 63 become the supported surface 58B, and the groove plate 3 can be supported by contacting the support surface 57B at any position.

  In this way, the contact surfaces 57A and 58A are in contact with each other while being supported by the support surfaces 57A and 57B, thereby suppressing deformation such as bending of the groove plate 3 due to the rotation of the support portion of the groove plate 3. The groove plate 3 can be accurately positioned in the front-rear direction. In addition, in the upper fitting part 55, only the positioning of the groove plate 3 in the front-back direction is performed. Positioning in the other direction is performed by the lower fitting portion 56.

  The lower fitting part 56 is a member for supporting the lower part of the groove plate 3 to the container main body 2 side. The lower fitting portion 56 includes a vertical positioning means 65 for positioning the groove plate 3 in the vertical direction, a horizontal positioning means 66 for positioning in the horizontal direction, and a longitudinal positioning means 67 for positioning in the front-rear direction. It is configured. Together with these means, the lower portion of the groove plate 3 is accurately positioned in the up / down / left / right and front / rear directions, and together with the upper fitting portion 55, the groove plate 3 is accurately positioned and fixed to the container body 2.

  The vertical positioning means 65 includes a vertical support piece 68 and a lower plate portion 69.

  The vertical support piece 68 is provided at the lower part of the opposing side wall surfaces 2C and 2D in the container main body 2 and is fitted to the lower part of the groove plate 3 and abuts on the lower end portion thereof in the vertical direction of the groove plate 3. It is a member for positioning. The vertical support piece 68 includes a fitting notch 68 </ b> A that fits into the groove plate 3. The fitting cutout 68A is accurately set in the vertical direction so that the vertical position of the groove plate 3 is accurately positioned.

  The lower plate portion 69 is a member for accurately positioning the vertical position of the groove plate 3 by fitting into the fitting notch 68 </ b> A of the vertical support piece 68. The lower plate portion 69 is configured by a plate material that extends downward from the lower portion of the groove plate 3. Since the lower end surface of the lower plate portion 69 is a portion that directly engages with the fitting notch 68A, its vertical dimension is accurately set.

  The left / right direction positioning means 66 includes a notch 71 and a left / right direction support piece 72.

  The notch 71 is provided in the lower plate portion 69 of the groove plate 3 as a notch that opens downward.

  The left-right support piece 72 is provided between the vertical support pieces 68 below the opposing side wall surfaces 2C, 2D in the container body 2, and is fitted into the notch 71 at the bottom of the groove plate 3 to fit the groove plate. 3 is a member for positioning in the left-right direction. The left-right support piece 72 is formed in a wedge shape that fits into the notch 71. The left-right direction support piece 72 is fitted into the notch 71, so that the left-right direction of the groove plate 3 is accurately positioned.

  The front-rear direction positioning means 67 is constituted by a front-rear direction support plate piece 73. The front-rear direction support plate piece 73 is formed of a strip-shaped plate material. A longitudinal support plate piece 73 made of this strip-shaped plate material is provided at the lower part of the groove plate 3 so as to extend horizontally to the back side thereof, and comes into contact with the lower portions of the side wall surfaces 2C and 2D of the container main body 2 to form the groove plate. 3, positioning in the front-rear direction is performed.

  A stopper 75 is provided below the groove plate 3. The stopper 75 is a member for suppressing the groove plate 3 from being pulled upward. The stopper 75 includes a locking piece 76 and a locking projection 77. The locking piece 76 includes a belt-like elastic plate piece 76A extending downward from the lower end of the groove plate 3 and a locking claw 76B provided on the locking projection 77 side of the elastic plate piece 76A. Has been. The locking protrusion 77 is a member for locking to the locking claw 76 </ b> B of the locking piece 76. When the locking claw 76B of the locking piece 76 provided between the vertical support pieces 68 of the side wall surfaces 2C and 2D is fitted into the locking projection 77, the groove plate 3 does not come out upward. It is like that.

  The lid 4 is configured as shown in FIG. 2 and FIGS. The lid 4 is formed in a dish shape that opens upward.

  A gasket 80 is provided between the lid 4 and the container body 2. The gasket 80 includes a proximal end support portion 81 and a contact portion 82.

  The proximal end support portion 81 is a portion that is fitted in the fitting groove 4A on the lid 4 side to support the whole, and has a substantially trapezoidal cross-sectional shape. A seal piece 83 and an annular groove 84 are provided inside the upper side surface of the base end support portion 81. The seal piece 83 extends upward and comes into contact with the lid 4 side to seal. The annular groove 84 is provided outside the seal piece 83 and absorbs elastic deformation of the seal piece 83.

  The abutting portion 82 is formed so as to expand from the proximal end support portion 81 in the shape of a bowl. The cross-sectional shape of the contact part 82 is formed by raising the middle part upward (the lid 4 side) and folding the outer peripheral edge part downward (container body 2 side). Of the abutting portion 82, a portion 82 </ b> A raised upward is a pressing portion by the lid body 4, and an outer peripheral edge portion is a contact portion to the container body 2 side. Accordingly, the intermediate pressing portion is pressed against the lid body 4 in a state where the outer peripheral edge is in contact with the container main body 2 side, and the outer peripheral edge is brought into close contact with the container main body by the elastic force of the contact portion 82. It is like that.

  A latch mechanism 86 is provided on the side of the lid 4 that faces the side wall surfaces 2C and 2D of the container body 2. The latch mechanism 86 is a mechanism for fixing the lid body 4 to the container body 2. The latch mechanism 86 includes a first arm portion 87 and a second arm portion 88. The first arm portion 87 is a member that is directly locked to a receiving portion (not shown) on the container body 2 side to fix the lid 4 to the container body 2. The second arm portion 88 is a member for rotatably supporting the first arm portion 87 while being rotatably supported by the lid body 4.

  The first arm portion 87 includes a locking claw 90 and a grip portion 91. The locking claw 90 is provided at the base end part and abuts on the receiving part on the container body 2 side to fix the lid 4 to the container body 2 side. The grip portion 91 is a member for lifting the lid body 4. The grip 91 is formed at the tip of the first arm 87 so as to be easily gripped by hand. The first and second arm portions 88 are set so that the grip portion 91 is held at a position that is easy to hold in the lateral direction of the lid body 4 with the first and second arm portions 88 rotated to the limit. Further, the locking claw 90 at the base end portion of the first arm portion 87 is set so as not to contact the container body 2 in a state where the first and second arm portions 88 are rotated to the limit. Specifically, the first arm portion 87 is set to open 90 ° with respect to the second arm portion 88, and the second arm portion 88 is set to open 35 ° with respect to the container body 2. The first arm portion 87 is supported at 90 ° with its distal end abutting while the base end portion is pivotally supported by the L-shaped second arm portion 88. The second arm portion 88 is supported at 35 ° by the stopper 92.

  A thin plate pressing member 94 is provided on the back surface of the lid body 4. The thin plate pressing member 94 is a member for pressing and supporting the upper part of the semiconductor wafer S accommodated in the container body 2 when the lid 4 is attached to the container body 2.

  The thin plate pressing member 94 is formed in a substantially rectangular shape as shown in FIGS. Both end portions and the center portion in the longitudinal direction of the thin plate pressing member 94 are fixed to the back surface of the lid body 4, and a presser portion 95 is formed therebetween. The presser part 95 is a member for elastically pressing and supporting the semiconductor wafer S from above, and is constituted by a plurality of presser bands 96 arranged in parallel. The presser band 96 is a member having elasticity, and is formed by bending downward. Furthermore, the presser band 96 is formed by curving its planar shape (the shape in the state of FIG. 25) into a waveform along the periphery of the semiconductor wafer S, so that the semiconductor wafer S does not enter the gap of the presser band 96. ing.

  The side surface shape of the presser band 96 is formed in a mountain shape facing downward. At two apex positions of the chevron, there are provided fitting grooves 97 for fitting the semiconductor wafers S one by one and supporting them at a predetermined interval. The fitting groove 97 is formed at an acute angle so as to sandwich the periphery of the semiconductor wafer S.

[Operation]
The thin plate supporting container 1 configured as described above is used as follows.

  In a state where a large number of semiconductor wafers S are inserted into the container body 2 and the lid 4 is attached, the container body 2 is transferred to a semiconductor manufacturing factory or the like. The thin plate supporting container 1 carried into the semiconductor manufacturing factory or the like is removed from the lid 4 and replaced with a dedicated lid in the semiconductor manufacturing factory or the like, and then carried into the manufacturing process.

  At this time, the upper portion of the groove plate 3 attached in the container body 2 is supported by the upper fitting portion 55. The upper fitting piece 58 of the groove plate 3 is fitted to the upper fitting piece 57. As a result, the abutment surface 58A abuts against the abutment surface 57A in a state where the abutment surface 57B of the upper fitting piece 57 and the abutment surface 58B of the upper mating piece 58 abut, so that the groove plate 3 Is reliably supported on the container body 2 side. As a result, the groove plate 3 does not rotate at the support portion and is reliably supported, and the groove plate 3 is positioned in the front-rear direction. Thereby, deformation, such as a bending of the groove plate 3, is suppressed and the groove plate 3 is supported in an exact position.

  The lower part of the groove plate 3 is supported by the lower fitting part 56.

  First, the vertical positioning means 65 positions the groove plate 3 in the vertical direction. The lower end surface of the lower plate portion 69 of the vertical direction positioning means 65 is fitted into the fitting notch 68A of the vertical direction support piece 68 to accurately position the groove plate 3 in the vertical direction.

  At this time, the notch 71 on the groove plate 3 side of the left and right direction positioning means 66 is fitted into the left and right direction support piece 72 on the container body 2 side to position the groove plate 3 in the left and right direction.

  Further, the front-rear direction support piece 73 of the front-rear direction positioning means 67 contacts the lower portions of the side wall surfaces 2C, 2D of the container body 2 to position the groove plate 3 in the front-rear direction.

  At this time, the locking piece 76 of the stopper 75 is fitted into the locking projection 77, and the groove plate 3 is supported so as not to fall upward.

  Accordingly, the groove plate 3 can be accurately positioned by the upper fitting portion 55 and the lower fitting portion 56 and can be easily fixed. When removing the groove plate 3, the locking piece 76 is pulled forward to shift the groove plate 3 upward. Thereby, the groove plate 3 can be removed easily.

  Further, since the plate piece 50 of the groove plate 3 is curved along the periphery of the semiconductor wafer S from the back side to the intermediate position, and from the intermediate position to the entrance / exit side is formed along the container body 2 side. The semiconductor wafer S can be smoothly taken in and out of the container body 2 and contact with the plate piece 50 of the semiconductor wafer S can be prevented.

  The thin plate supporting projections 52 for supporting the semiconductor wafer S are provided on the back side and the loading / unloading port side of the plate piece 50, and the thin plate supporting projections 52 on the loading / unloading port side are intersected with the inner edge of the plate piece 50 and the periphery of the semiconductor wafer S. Since it is provided in the vicinity, the semiconductor wafer S inserted into the container body 2 can be stably supported.

  The gasket 80 of the lid body 4 has an elastic force that the contact portion 82 has when the lid body 4 is pushed by a portion 82A raised above the contact portion 82 in a state where the lid body 4 is attached to the container body 2. Thus, the outer peripheral edge closely contacts the container body 2 side. Thereby, even when the gasket 80 is bent and a gap is generated between the gasket 80 and the container main body 2 as it is, the outer peripheral edge portion can be securely adhered to the container main body 2 side. Thereby, the gap between the gasket 80 and the container body 2 is sealed.

  Further, in the base end support portion 81, the seal piece 83 abuts on the lid body 4 side, and elastic deformation due to the abutment of the seal piece 83 is absorbed by the annular groove 84, so that the gasket 80 and the lid body 4 Seal the gap. Further, the portion 82A raised above the contact portion 82 is also in close contact with the lid body 4 to seal between the gasket 80 and the lid body 4.

  Since the gap between the cover plate portion 45 of the container body 2 and the lower end of the semiconductor wafer S accommodated in the container body 2 is set to about 3 mm, the container body 2 is downsized. When the container main body 2 is downsized, the thin plate supporting container 1 itself is downsized. Thereby, when it packs, the clearance gap between the bottom part of the thin-plate support container 1 and a packaging box will become large. For this reason, the buffer material of this large gap can be thickened, and the shock absorbing ability against an impact such as dropping can be greatly improved.

  In the attachment / detachment mechanism 12 that supports the top flange 5 and the carrying handle 6, when the top flange 5 or the like is attached, the fitting rail 29 </ b> B is fitted to the fitting rail portion 29 </ b> A, and the sliding portion 31 is attached to the support portion 30. The top flange 5 and the like are slid to the back side by fitting. As a result, the abutting portion 36 of the back locking claw 34 A is locked to the locking projection 33, and the abutting portion 38 of the front locking claw 34 B is locked to the locking projection 33. Thereby, the top flange 5 etc. can be attached easily.

  When removing, the support bar 39 of the front locking claw 34B is lifted with a finger to remove the contact portion 38 from the locking projection 33, and the top flange 5 and the like are shifted to the front. Thereby, the top flange 5 etc. can be removed easily.

  At this time, since the support part 30 and the sliding part 31 are set so that the near side is narrow and the back side is wide, the sliding part 31 can be easily fitted to the support part 30.

  Further, since the movement of the top flange 5 and the like is supported by the fitting rail portion 29A and the fitting rail 29B, the top flange 5 can be moved smoothly and can be easily attached and detached.

  When a strong force is applied in the direction in which the top flange 5 etc. is pulled out due to an abnormal impact such as the thin plate support container 1 being dropped with the top flange 5 etc. attached, the front side locking claw 34B side The support bar 39 is stretched to prevent the top flange 5 and the like from coming off. At this time, since the abutting portion 38 of the front side locking claw 34B is provided on the container body 2 side, which is the counterpart member side, from the proximal end portion of the support rod portion 39, the abutting portion 38 has the locking projection 33. It does not come off because it is pressed in the direction of deeply biting into. As a result, even if a strong force due to impact or the like is applied to the top flange 5 or the like, the support bar portion 39 is stretched and the top flange 5 or the like is reliably supported without the contact portion 38 coming out of the locking projection 33. To prevent falling out.

  In the latch mechanism 86, when the lid body 4 is attached to the container body 2, the lid body 4 is lifted by holding the grip portion 91 of the first arm portion 87 by hand and covered from the upper side of the container body 2. At this time, since the first arm portion 87 is set to 90 ° with respect to the second arm portion 88 and the second arm portion 88 is set to 35 ° with respect to the container body 2, the grip portion 91 has the first and second portions. The arm portion 88 is positioned in the lateral direction of the lid body 4 in a state where the arm portion 88 is rotated to the limit, and can be easily lifted up in the optimal state. The lid 4 is put on the container body 2 with the grip 91. Next, the holding portion 91 is pushed down while being held by hand. As a result, the locking claw 90 at the base end of the first arm portion 87 abuts on the container body 2 side, and the lid body 4 is fixed to the container body 2.

  When removing the lid from the container body, the grip 91 of the first arm 87 is held by hand and opened to both sides. As a result, the locking claw 90 at the base end portion of the first arm portion 87 is detached from the container body 2 side, and the lid 4 is unfixed. The lid 4 is lifted by holding the grip portion 91 as it is. At this time, the second arm portion 88 rotates to the position where the locking claw 90 of the base end portion does not contact the container body 2 in a state where the first arm portion 87 is rotated to the limit. Even when lifted up, the claw 90 for locking does not come into contact with the container body 2 and the lid 4 can be easily removed.

  As described above, since the grip portion 91 is supported at a position where the lid body 4 is easily held in the lateral direction and the locking claw 90 is opened to a position where it does not contact the container body 2, the lid body 4 can be easily attached and detached. Can do.

  The semiconductor wafer S fitted into the fitting groove 97 of the thin plate pressing member 94 is sandwiched and supported by the fitting groove 97 formed at an acute angle. When the fitting groove 97 is formed at an acute angle, the outer peripheral edge of the semiconductor wafer S enters the fitting groove 97, so that the semiconductor wafer S is sandwiched by the fitting groove 97 and is reliably supported. As a result, even when a strong impact is applied to the thin plate support container 1, the fitting groove 97 can sandwich the periphery of the semiconductor wafer S to suppress rotation and displacement, and can be reliably supported.

  Further, since the presser band 96 is formed in a waveform along the periphery of the semiconductor wafer S, even if the semiconductor wafer S is detached from the fitting groove 97, the presser band 96 does not enter between the presser bands 96.

  In the main body positioning means 11, the V-shaped groove plate piece 15 is detachably attached to the support base 16, so that it can be mounted on the mounting protrusion on the mounting base inside the semiconductor manufacturing process regardless of the material of the container main body 2. The V-shaped groove plate piece 15 is formed of a material that is easy to slide. When the fitting groove 13 of the main body positioning means 11 is fitted to the fitting protrusion of the mounting table in the semiconductor manufacturing process by the V-shaped groove plate piece 15 using this slippery material, the thin plate supporting container 1 slides smoothly. Can be accurately positioned.

  Since the V-shaped groove plate piece 15 can be detachably attached to the support base 16, it can be easily replaced according to the material of the mating protrusion.

[Modification]
(1) In the said embodiment, although the gasket 80 was provided in the cover body 4 side, you may provide in the container main body 2 side. Also in this case, the same operations and effects as the above embodiment can be achieved.

(2) In the above embodiment, four upper fitting pieces 57 of the upper fitting portion 55 are provided, but it is also possible to provide only two at both ends. It is set as appropriate according to the size and required strength. Also in this case, the same operations and effects as the above embodiment can be achieved.

(3) In the above embodiment, 272 sliding support means are provided, but three or more may be used. Although two guide rails 29 are provided, one or three or more may be used. Also in this case, the same operations and effects as the above embodiment can be achieved.

(4) In the above embodiment, the support 16 of the main body positioning means 11 is formed so as to constitute a part of the fitting groove 13, but may be formed so as to constitute the entire fitting groove 13. .

[effect]
As described above in detail, the thin plate support container of the present invention has the following effects.

(1) An upper fitting piece abuts on the groove plate side to suppress the rotation of the groove plate, and performs positioning of the groove plate in the front-rear direction, and the contact surface is a groove plate. A support surface that supports the groove plate in a state of being in contact with the side, and the upper mating piece abuts the contact surface of the upper fitting piece and suppresses the rotation of the groove plate. A flat surface-like contact surface for positioning in the direction and a support surface that is in contact with the support surface of the upper fitting piece and the contact surface is in contact with the contact surface on the other side. Therefore, the groove plate can be reliably supported without rotating, and the groove plate can be accurately positioned in the front-rear direction. Thereby, deformation, such as a bending of a groove plate, is suppressed and a groove plate can be supported in an exact position.

(2) An upper fitting portion that supports the upper portion of the groove plate on the container body side, and a lower fitting portion that supports the lower portion on the container body side, and the lower fitting portion of the groove plate Since it has a vertical positioning means for positioning in the vertical direction, a horizontal positioning means for positioning in the horizontal direction, and a longitudinal positioning means for positioning in the longitudinal direction, the lower part of the groove plate can be accurately positioned. Can be supported.

(3) A vertical positioning means is provided in the lower part of the opposing side wall surfaces in the container main body, and is fitted to the lower part of the groove plate and abuts on the lower end portion thereof in the vertical direction of the groove plate. Since the vertical support piece for positioning is provided, the lower portion of the groove plate can be accurately positioned and supported in the vertical direction.

(4) A left-right positioning means is provided in a notch provided in a lower portion of the groove plate and in a lower portion of each side wall surface facing in the container body, and is fitted in the notch in the lower portion of the groove plate. In addition, since the groove plate is provided with a left-right support piece that positions the groove plate in the left-right direction, the lower portion of the groove plate can be accurately positioned and supported in the up-down direction.

(5) A front / rear direction support piece provided with a front / rear direction positioning means extending to the lower surface side of the groove plate and contacting the lower portion of the side wall surface of the container body to position the groove plate in the front / rear direction. Therefore, the lower part of the groove plate can be accurately positioned and supported in the front-rear direction.

(6) Since the stopper is provided at the lower part of the groove plate so as to be locked to the container main body side and prevent the groove plate from being pulled upward, it is possible to support the groove plate and prevent the groove plate from being pulled upward.

(7) Some of the plate pieces constituting the groove plate are curved along the periphery of the semiconductor wafer up to the vicinity of the entrance / exit of the semiconductor wafer. In this case, since the plate inlet / outlet side largely protrudes toward the semiconductor wafer, the possibility of contact when the semiconductor wafer is taken in / out increases. In order to solve this, it is necessary to expand the loading / unloading port side of the plate piece to the container body side. In this case, the support position of the semiconductor wafer is the back side and the intermediate position, and in the vicinity of the loading / unloading port. Is no longer supported and becomes unstable.

  For this, the groove plate is formed by arranging a plurality of plate pieces that support the plurality of thin plates one by one, and the plate piece extends from the back side of the container body to the inlet / outlet side of the thin plate. It is provided to be bent along the periphery of the thin plate from the back side to the intermediate position, and is formed along the container body side from the intermediate position to the inlet / outlet side. A thin plate supporting protrusion for supporting the thin plate is provided on the mouth side, and a thin plate supporting protrusion on the loading / unloading port side is provided in the vicinity of the intersection of the inner edge of the plate piece and the peripheral edge of the thin plate. Since the thin plate supporting projections provided near the intersection of the back side and the inner edge of the plate piece and the peripheral edge of the thin plate support the thin plate, the thin plate can be stably supported.

(8) A gasket is provided between the lid body and the container body, and the gasket is fitted to the lid body side or the container body side to support the whole, and from the base end support section The abutting portion is formed to extend from the base end support portion in the form of a bowl, and the middle portion is raised upward and the outer peripheral edge portion is lowered downward. When the intermediate portion is pressed against the lid body or the main body side in a state where the outer peripheral edge is in contact with the container main body side or the lid body side, the outer peripheral edge is formed by the elastic force of the contact portion. Since the portion is in close contact with the container body or the lid body, the airtightness can be improved between the lid body and the container body.

(9) A seal piece provided on the inner side of the upper side surface of the base end support portion of the gasket and extending upward to come into contact with the lid body side or the container body side, and provided on the outer side of the seal piece. Since the annular groove for absorbing the deformation is provided, the airtightness can be improved between the gasket and the lid.

(10) Since the bottom plate portion of the container body is set to a clearance of about 3 mm from the lower end of the thin plate housed in the container body, the height of the container body can be reduced.

(11) Since the height of the container main body is reduced by the amount of the gap between the bottom plate portion of the container main body and the lower end of the thin plate accommodated therein, the thin plate supporting container can be reduced in size and packed. In this case, the buffer material to be packed can be thickened, and the shock absorbing capacity can be greatly improved.

(12) The locking means of the attachment / detachment mechanism includes a locking projection provided on one or the other member and a locking claw provided on the other or one member, It comprises a contact part that contacts the locking projection and a support bar part that supports the contact part, and the support bar part is directed toward the mating member and toward the front side of the sliding support means. Since it is formed to extend, it is possible to prevent the top flange and the like from falling off due to an impact.

(13) Since the abutment portion of the locking claw is provided on the mating member side from the base end portion of the support rod portion, the abutment portion will not come off from the locking projection, and the top flange or the like It can be prevented from falling off due to an impact.

(14) Since the support portion and the slide portion of the slide support means are provided in parallel, and the interval between the front side and the back side is set narrow, the back side is set wide. Can be detached.

(15) Since a guide rail for guiding the mutual sliding of the two members supported by the sliding support means and positioning in a direction orthogonal to the sliding direction is provided, the top flange is guided by the guide rail. Etc. can be easily attached and detached.

(16) A latch mechanism is engaged with the container body side to fix the lid body to the container body, and is rotatably supported by the lid body and the first arm section A second arm part rotatably supported, and the first arm part is provided at a base end part thereof, and a locking claw that abuts on the container main body side, and a tip part provided at the distal end part. The first and second arm portions are composed of a gripping portion positioned in the lateral direction of the lid body in a state in which the first arm portion is rotated to the limit, and the second arm portion is in a state in which the first arm portion is rotated to the limit. Since the locking claw at the base end portion rotates to a position where it does not contact the container body, the lid can be easily attached to and detached from the container body.

(17) Since the first arm portion opens 90 ° with respect to the second arm portion and the second arm portion opens 35 ° with respect to the container body, the first arm portion contacts the container body. While being able to prevent, the holding | grip part can be supported in the position where it is easy to hold | maintain the cover body of the horizontal direction.

(18) A thin plate pressing member is provided on the back surface of the lid body to hold and support the upper part of the thin plate stored in the container body when the lid body is attached to the container body. A fitting groove for fitting and supporting the thin plates one by one is provided, and the bottom of the fitting groove is formed at an acute angle so as to sandwich the peripheral edge of the thin plate, so that the thin plate can be reliably supported. .

(19) A thin plate pressing member is provided on the back surface of the lid body to hold and support the upper part of the thin plate stored in the container body when the lid body is attached to the container body. A plurality of presser bands are provided in parallel, and each presser band is held in contact with the peripheral edge of the thin plate to support each thin plate one by one at a predetermined interval. The presser band is formed in a waveform along the peripheral edge of the thin plate. Therefore, it is possible to prevent the thin plate from entering between the presser bands.

(20) V-shaped groove provided with body positioning means for positioning the whole at the bottom of the container body in a horizontally placed state, the body positioning means being provided in three directions at three locations on the bottom of the container body Since the V-shaped groove plate piece and the support base that supports the V-shaped groove plate piece are configured, a V-shaped groove plate piece made of a material different from that of the container body can be attached.

(21) Since the V-shaped groove plate piece is made of a material having a small surface frictional resistance, the thin plate supporting container can be accurately positioned by sliding smoothly with respect to the fitting protrusion of the mounting table.

(22) Since the V-shaped groove plate piece is detachably attached to the support base, the V-shaped groove plate piece can be easily replaced with a different material depending on the material or the like of the mating protrusion.

It is a perspective view which shows the thin plate support container which concerns on embodiment of this invention in a cross-sectional state. It is a perspective view which shows the thin plate support container which concerns on embodiment of this invention. It is a perspective view which shows the thin plate support container which concerns on embodiment of this invention from the bottom face side. It is a perspective view which shows the support stand of a main body positioning means. It is a perspective view which shows the state which attached the V-shaped groove plate piece to the support stand of a main body positioning means. It is a perspective view which shows the V-shaped groove plate piece of a main body positioning means. It is a perspective view which shows the V-shaped groove plate piece of a main body positioning means from the bottom face side. It is a cross-sectional perspective view which shows the state which attached the V-shaped groove plate piece to the support stand of the main body positioning means. It is a perspective view which shows the top flange which concerns on embodiment of this invention. It is a perspective view which shows the top flange which concerns on embodiment of this invention from the bottom face side. It is a fragmentary perspective view which shows the container main body which concerns on embodiment of this invention. It is a perspective view which shows the top flange side of the attachment / detachment mechanism which concerns on embodiment of this invention. It is a cross-sectional perspective view which shows the attachment state of the top flange to a container main body. It is a perspective view which shows the attachment state of the top flange to a container main body. It is a principal part perspective view which shows the attachment state of the top flange to a container main body. It is principal part sectional drawing which shows the state by which the groove plate was attached to the container main body. It is a perspective view which shows a groove plate. It is a top view which shows a groove plate. It is an enlarged view which shows a groove plate from a plane direction. It is a perspective view which shows the upper fitting part of a container main body. It is a perspective view which shows the lower fitting part of a container main body. It is an enlarged plan view which shows the upper fitting part of a container main body. It is an expansion perspective view which shows the lower fitting part of a container main body. It is a perspective view which shows a thin plate pressing member. It is a top view which shows a thin plate pressing member. It is sectional drawing called the fitting groove | channel of a thin plate pressing member. It is a perspective view which shows a latch mechanism. It is a perspective view which shows the stopper of a latch mechanism. It is principal part sectional drawing which shows a gasket. It is principal part sectional drawing which shows the base end support part of a gasket.

Explanation of symbols

  1: thin plate support container, 2: container body, 3: groove plate, 4: lid, 5: top flange, 6: carrying handle, 11: body positioning means, 12: attachment / detachment mechanism, 13, fitting groove, 15 : V-shaped groove plate piece, 16: support base, 17: frame, 18: inclined plate, 19: locking claw, 21: inclined support plate, 22: end support plate, 23: locking protrusion, 25 : Flange part, 26: main body part, 27: sliding support means, 28: locking means, 29: guide rail, 30: support part, 31: sliding part, 33: locking projection, 34: locking Claw, 36: contact part, 37: support bar part, 38: contact part, 39: support bar part, 44: foot part, 45: cover plate part, 50: plate piece, 51: support plate part, 52: Thin plate supporting projection, 54: handle 54, 55: upper fitting portion, 56: lower fitting portion, 57: upper fitting piece, 58: upper fitting piece, 61: ridge

Claims (5)

A container main body for storing a plurality of thin plates therein, a lid for closing the container main body, and a groove plate provided on opposite side walls of the container main body for supporting the thin plates stored inside from both sides. In the thin plate support container,
On the back surface of the lid body, a thin plate pressing member is provided to hold and support the upper part of the thin plate stored in the container body when the lid body is attached to the container body.
The thin plate holding member is provided with a fitting groove for fitting and supporting the thin plates one by one, and the fitting groove is formed so as to sandwich the periphery of the thin plate,
An attachment / detachment mechanism that removably supports one or both of a top flange for a transport machine or a handle for a person to hold on the container body;
The attachment / detachment mechanism includes a sliding support unit that slidably supports the container body and the top flange or the handle, and the two members that are slidably supported by the sliding support unit. And a locking means for locking so as not to shift,
The sliding support means comprises a support part provided on one member and a slide part provided on the other member and inserted into the support part from the near side to the back part,
The locking means comprises a locking projection provided on one or the other member, and a locking claw provided on the other or one member,
The locking claw comprises a contact portion that contacts the locking projection, and a support bar portion that supports the contact portion,
A thin plate support container, wherein the support bar portion is formed to extend toward the mating member and toward the front side of the sliding support means. A container main body for storing a plurality of thin plates therein, a lid for closing the container main body, and a groove plate provided on opposite side walls of the container main body for supporting the thin plates stored inside from both sides. In the thin plate support container,
On the back surface of the lid body, a thin plate pressing member is provided to hold and support the upper part of the thin plate stored in the container body when the lid body is attached to the container body.
The thin plate holding member is provided with a fitting groove for fitting and supporting the thin plates one by one, and the fitting groove is formed so as to sandwich the periphery of the thin plate,
A gasket is provided between the lid and the container body,
The gasket is composed of a base end support portion that is fitted to the lid body side or the container main body side and supports the whole, and an abutting portion formed to extend from the base end support portion,
The gasket consists of a base end supporting portion for supporting the whole is fitted on the lid side, a contact portion which is formed extending from the base end supporting portion,
The abutting portion is formed by spreading in a bowl shape around the base end support portion, and the intermediate portion is formed on the lid body side and the outer peripheral edge portion is folded back on the container body side ,
By the middle portion in a state where the outer peripheral portion is in contact with the container body side is pressed on the lid side, the outer peripheral edge portion by the elastic force possessed by the abutting portion is in close contact with the container body side A thin plate support container. In the thin plate support container according to claim 1,
A thin plate support container, wherein the abutment portion of the locking claw is provided closer to the mating member side than the base end portion of the support rod portion. In the thin plate support container according to claim 3 ,
A thin plate supporting container, wherein two supporting portions and two sliding portions of the sliding support means are provided in parallel, and the interval between the front side and the back side is set narrow and the back side is set wide. In the thin plate support container according to claim 3 or 4 ,
A thin plate support container provided with a guide rail for guiding the sliding of two members supported by the sliding support means and positioning in a direction orthogonal to the sliding direction.

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