CN101750872A - Mask cassette - Google Patents
Mask cassette Download PDFInfo
- Publication number
- CN101750872A CN101750872A CN200810185499A CN200810185499A CN101750872A CN 101750872 A CN101750872 A CN 101750872A CN 200810185499 A CN200810185499 A CN 200810185499A CN 200810185499 A CN200810185499 A CN 200810185499A CN 101750872 A CN101750872 A CN 101750872A
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- CN
- China
- Prior art keywords
- upper cover
- mask
- lower cover
- cover body
- mask cassette
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses a kind of mask cassette, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, upper cover body and lower cover cover the back and form one the 3rd accommodation space, wherein mask cassette is characterised in that: mask cassette has a plurality of support members and is disposed at respectively in unsettled mode on the corner of inside surface of upper cover body and lower cover, the two ends of these support members are connected with the adjacent dual-side in inside surface corner respectively and seal lamellar body to form one, and form a breach in the turning point of sealing lamellar body.When mask is deposited in the 3rd accommodation space of mask cassette, four corners of mask are positioned in the breach of unsettled support member, and when lid covers up and down, support member is held in the crest line of mask, by this steadiness that can guarantee mask, avoid unnecessary collision to cause mask to produce displacement or impaired.
Description
Technical field
The present invention relates to a kind of mask cassette, particularly about a kind of mask cassette that disposes a plurality of support members in the corner of mask cassette upper cover body and lower cover inside surface in unsettled mode respectively, in order to guarantee to deposit in the steadiness of the mask in the mask cassette, the mask of avoiding unnecessary collision to cause depositing in the mask cassette produces displacement or impaired.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photoetching technique (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need rely on photoetching technique.Photoetching technique is that the circuit that will design is made into the mask (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is by mask projection to silicon wafer (siliconwafer) the demonstration specific pattern that can expose.Because any dust granules (as particulate, dust or organism) that is attached on the mask all can cause the quality deterioration of projection imaging, the mask that is used to produce figure must keep absolute cleaning, therefore in general wafer technique, the environment that dust free room (clean room) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.Modern semiconductor technology all utilizes resistant to pollution mask cassette (reticle pod) to carry out the preservation and the transportation of mask, so that mask keeps clean.
Yet, when utilizing preservation that mask cassette carries out mask with transportation, need in mask cassette, to dispose a plurality of support members in order to support and to support mask, when mask is positioned over when preserving in the mask cassette, support member directly contacts with mask, thereby easy and mask friction generation static, cause mask impaired, when mask is positioned over when transporting in the mask cassette, then easily because of transporting the vibrations that produced in the way, causing mask to damage or break, therefore how to make support member have the advantage that electrostatic prevention destroys with against shock concurrently and have concurrently, is an important problem.
Summary of the invention
In order to address the above problem, fundamental purpose of the present invention is to provide a kind of mask cassette, it has a plurality of unsettled support members, and in order to guarantee to deposit in the steadiness of the mask in the mask cassette, the mask of avoiding unnecessary collision to cause depositing in the mask cassette produces displacement or impaired.
Another fundamental purpose of the present invention is to provide a kind of mask cassette, and when lid covered up and down, its support member was held in the crest line of mask, to reduce the contact area of support member and mask, avoided mask to be damaged.
Another fundamental purpose of the present invention is to provide a kind of mask cassette, make in integrated mode its support member, snap close piece and joint portion, therefore except having comparatively simple structure, also can reduce the part number, to reduce required consumed time of assembling and cost.
A fundamental purpose more of the present invention is to provide a kind of mask cassette, and its support member is disposed in the mask cassette in unsettled mode, can make support member have elasticity by this, can absorb the vibrations that produced when mask cassette transmits, and the buffering effect of mask one protectiveness is provided.
Another fundamental purpose of the present invention is to provide a kind of mask cassette, forms a pair of fin on its support member and contacts with the side of mask, can increase support member in side direction upper support mask strength.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, further comprises an Airtight gasket, can make mask cassette have preferable airtight effect.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, and the structure of its snap close piece can make the lid of mask cassette have light unlatching and the effect that fits tightly simultaneously, to reach a snap close function.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, the design of its first flange and second flange can make mask cassette have the function of piling up, reduce and deposit the required space of mask cassette, and first flange and second flange can pin down and interfere mutually, and the mask cassette after can avoiding piling up is crooked or topple over because of collision.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, and up and down the thickness of lid is suitable for it, makes lying against on the desktop that it can be firm.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, and it has keeping a foothold of symmetry, makes uprightly being placed on the desktop that it can be firm.
The present invention also has a fundamental purpose to be to provide a kind of mask cassette, and it disposes the baffle plate that can place inscription plate or bar code, and the design of its plate washer can prevent that mask cassette from standing upside down when placing, the dropping of inscription plate or bar code.
According to above-mentioned purpose, the invention provides a kind of mask cassette, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, this upper cover body and this lower cover respectively have an outside surface and an inside surface, upper cover body and lower cover cover the back and form one the 3rd accommodation space, wherein mask cassette is characterised in that: mask cassette has a plurality of support members are disposed at the inside surface of upper cover body and lower cover respectively in unsettled mode corner, the two ends of these support members are connected with the adjacent dual-side in inside surface corner respectively and seal lamellar body to form one, and form a breach in the turning point of sealing lamellar body.When mask is deposited in the 3rd accommodation space of mask cassette, four corners of mask are positioned in the breach of support member, and when lid covered up and down, support member was held in the crest line of mask, by this steadiness that can guarantee mask, avoid unnecessary collision to cause mask to produce displacement or impaired.
Description of drawings
Fig. 1 is the stereographic map of mask cassette;
Fig. 2 A is that the upper cover body of mask cassette is separated side view with lower cover;
Fig. 2 B is that the upper cover body and the lower cover of mask cassette covers side view;
Fig. 3 is the upper cover body of mask cassette and the explosive view of lower cover and Airtight gasket;
Fig. 4 A is that the upper cover body protuberance of mask cassette separates partial enlarged drawing with the lower cover Airtight gasket;
Fig. 4 B is that the upper cover body protuberance of mask cassette combines partial enlarged drawing with the lower cover Airtight gasket;
Fig. 5 A is that the upper cover body and the lower cover latch part of mask cassette opened synoptic diagram;
Fig. 5 B is that the upper cover body and the lower cover latch part of mask cassette closed synoptic diagram;
Fig. 5 C is that the upper cover body and the lower cover of mask cassette covers the shackle sides view;
Fig. 6 A is the upper cover body of mask cassette and the top perspective view that lower cover piles up;
Fig. 6 B is the upper cover body of mask cassette and the below stereographic map that lower cover piles up;
Fig. 6 C is the upper cover body of mask cassette and the side view that lower cover piles up;
Fig. 7 is the upper cover body of mask cassette and the side view that lower cover keeps flat;
Fig. 8 A is the upper cover body of mask cassette and the stereographic map that lower cover is directly put;
Fig. 8 B is the upper cover body of mask cassette and the stereographic map that lower cover is directly put;
Fig. 9 is the synoptic diagram of mask cassette baffle plate;
Figure 10 is the stereographic map of mask cassette.
[main element symbol description]
1 mask cassette
10 upper cover body
11 outside surfaces
12 inside surfaces
121 bolsters
13 header fields
14 first flanges
20 lower covers
21 outside surfaces
22 inside surfaces
23 bottom parts
24 second flanges
30 masks
31 Airtight gaskets
32 protuberances
33 joint portions
34 pins
35 first latch part
351 the one ㄇ type swash plates
352 the 2nd ㄇ type swash plates
353 lock buckling grooves
36 second latch part
361 snap close hook parts
362 locking boards
363 first inclined-planes
364 second inclined-planes
37 keep a foothold
38 baffle plates
40 support members
41 central turning points
42 breach
The 42a inclined-plane
43 first sides
44 second sides
45 fins
Embodiment
Because the present invention discloses a kind of mask cassette, particularly a kind of mask cassette that disposes a plurality of support members in the corner of mask cassette upper cover body and lower cover inside surface in unsettled mode respectively, in order to guarantee to deposit in the steadiness of the mask in the mask cassette, the mask of avoiding unnecessary collision to cause depositing in the mask cassette produces displacement or impaired.Because some masks that the present invention used or the detailed manufacturing or the processing procedure of mask cassette are to utilize prior art to reach, so in following explanation, do not do complete description.And graphic in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with feature of the present invention.
Please refer to Fig. 1, it is according to a preferred embodiment synoptic diagram of mask cassette of the present invention.As shown in Figure 1, a kind of mask cassette 1, comprise that a upper cover body 10 and with first accommodation space has the lower cover 20 of second accommodation space, upper cover body 10 respectively has an outside surface 11 with lower cover 20,21 and one inside surface 12,22, the outside surface 11 of upper cover body 10 has a header field 13, the outside surface 21 of lower cover 20 has a bottom part 23, upper cover body 10 covers the back with lower cover 20 and forms one the 3rd accommodation space, and the header field 13 of upper cover body 10 is corresponding with the bottom part of lower cover 20 23, wherein mask cassette 1 is characterised in that: mask cassette 1 has a plurality of support member 40 unsettled corners that are disposed at upper cover body 10 inside surfaces 12 and lower cover 20 inside surfaces 22, the two ends of support member 40 respectively with inside surface 12, the adjacent dual-side in 22 corners connects to form a sealing lamellar body, the opposite end of this sealing lamellar body is connected with the dual-side that extend in the corner of upper cover body 10 inside surfaces 12 and lower cover 20 inside surfaces 22 respectively, and in this sealing lamellar body form a turnover 41 near centre, wherein side of the central turning point 41 of this sealing lamellar body has a breach 42.
According to above-mentioned, the breach 42 of support member 40 is the center with central turning point 41, form the shape of a symmetry, this symmetric shape can be the U type, V-type, half shape such as polygonal, and the symmetric shape of the disclosed support member 40 of Fig. 1 is half hexagonal shape, it is a preferred embodiment of the present invention, the both sides of the symmetry of the breach 42 of this polygonal support member 40 respectively have a first side 43 and a second side 44, and first side 43 can form the inclined-plane 42a of about 30 degree to 150 degree with second side 44, therefore, when mask 30 is placed in the box body, the bottom of the side of mask 30 can contact with the second side 44 with inclined-plane 42a, and first side 43 then can contact with the side of mask 30; In addition, the relative left and right sides of the central turning point 41 of support member 40 can form the angle of about 30 degree to 150 degree.Because support member 40 is unsettled upper cover body 10 inside surfaces 12 in the mask cassette 1 or the corner of lower cover 20 inside surfaces 22 of being disposed at, make support member 40 and 12 of upper cover body 10 inside surfaces and and 22 of lower cover 20 inside surfaces form a space, design by this space makes support member 40 that the space of upper and lower displacement can be arranged, so can absorb the vibrations that produced when mask cassette 1 transmits, the buffering effect of mask 30 1 protectiveness is provided; In addition, for avoid support member 40 and 12 of upper cover body 10 inside surfaces and and the space of 22 of lower cover 20 inside surfaces too big, cause the too much displacement of support member 40, and may make mask 30 out of trim or may destroy the joint of support member 40 and mask cassette 1 box body, so the present invention further in support member 40 and 12 of upper cover body 10 inside surfaces and and the space of 22 of lower cover 20 inside surfaces below, dispose at least one bolster 121, size by this adjustable space, be noted that especially bolster 121 is positioned at the below of the central turning point 41 of support member 40.
Then, the present invention can be extended out a fin 45 in the side that support member 40 has breach 42, and this fin 45 is the center balanced configuration with central turning point 41; So after the upper cover body 10 of mask cassette 1 covered with lower cover 20, this fin 45 can contact with the side of mask 30, can increase support member 40 in side direction upper support mask 30 strength.Illustrate further, when all disposing support member 40 on the relative position of upper cover body 10 and the inside surface 12,22 of lower cover 20, after the upper cover body 10 of mask cassette 1 covers with lower cover 20, can make the fin 45 be positioned on upper cover body 10 support members 40 contact with the side of interlace mode with mask 30 with fin 45 on being positioned at lower cover 20 support members 40, therefore, when mask cassette 1 in transportation, two fins 45 that all have in each corner of mask 30 support, so can increase support member 40 significantly in side direction upper support mask 30 strength.
And support member 40 of the present invention is made with the mode that mask cassette 1 is formed in one, and therefore except having comparatively simple structure, also can reduce the part number, to reduce required consumed time of assembling and cost.
Please continue with reference to figure 1, when mask is deposited in the 3rd accommodation space of mask cassette 1, four corners of mask 30 are positioned in the breach of support member 40, then please refer to Fig. 2 A and Fig. 2 B, when upper cover body 10 and lower cover 20 cover, support member 40 is held on the crest line of mask 30, can guarantee the steadiness of mask by this, avoid unnecessary collision to cause mask to produce displacement or impaired, in addition, because mask 30 only limits to the crest line part with the area that support member 40 is contacted, therefore can reduce the contact area of mask 30 and support member 40, avoid mask 30 to be damaged.
Please refer to Fig. 3, mask cassette 1 of the present invention can further comprise an Airtight gasket 31, Airtight gasket 31 is located at the opening part of upper cover body 10 first accommodation spaces or the opening part of lower cover 20 second accommodation spaces, can make mask cassette 1 have preferable airtight effect by this, this Airtight gasket 31 can be a hollow annular solid or a solid annular solid, and material then is that the material of an elastic material (as rubber) is made; Mask cassette 1 of the present invention can further comprise a protuberance 32 and be located at the opening part of upper cover body 10 first accommodation spaces or the opening part of lower cover 20 second accommodation spaces; Please refer to Fig. 4 A and Fig. 4 B, when upper cover body 10 and lower cover 20 covered, protuberance 32 can press Airtight gasket 31, can make mask cassette 1 reach airtight effect by this.
Please refer to Fig. 3, mask cassette 1 of the present invention can further comprise the side that at least one pair of joint portion 33 is divided into upper cover body 10 and lower cover 20, this articulates with pin 34 mutually to joint portion 33, and joint portion 33 is made with the mode that mask cassette 1 is formed in one, and therefore has comparatively simply structure.
Please refer to Fig. 5 A, mask cassette 1 of the present invention can further comprise the side that at least one pair of snap close piece is divided into upper cover body 10 and lower cover 20, snap close piece has one first latch part 35 and one second latch part 36, first latch part 35 is located at a side of upper cover body 10, second latch part 36 is located at a side of lower cover 20, and first latch part 35 is roughly corresponding with second latch part 36, and the mode that this snap close piece and mask cassette 1 are formed in one is made, therefore has comparatively simply structure.First latch part 35 has one the one ㄇ type swash plate 351 and one the 2nd ㄇ type swash plate 352, this ㄇ type swash plate is tripartite closed side and the formed ㄇ type of side's open sides swash plate, extend to lower cover 20 directions from a side of upper cover body 10 closed side of the one ㄇ type swash plate 351, and be orthogonal to the open sides of the 2nd ㄇ type swash plate 352 in T type mode roughly, therefore a ㄇ type swash plate 351 and the 2nd ㄇ type swash plate 352 roughly form a lock buckling groove 353 in the orthogonal place.Second latch part 36 has a pair of catches hook part 361 and a locking board 362, locking board 362 is located between the pair of catches hook part 361 and roughly is orthogonal to pair of catches hook part 361, this one side body and function that snap close hook part 361 is roughly a triangle body and triangle body is to be connected with lower cover 20, the dihedron of triangle body is respectively roughly orthogonal of one first inclined-plane 363 and 364, the first inclined-planes 363, one second inclined-plane and locking board 362.Please refer to Fig. 5 B and Fig. 5 C, when upper cover body 10 and lower cover 20 cover, locking board 362 can wear lock buckling groove 353, one end of the 2nd ㄇ type swash plate 352 can slide along first inclined-plane 363 of snap close hook part 361, make the direct place of T type of win ㄇ type swash plate 351 and the 2nd ㄇ type swash plate 352 can fasten snap close hook part 361, the one ㄇ type swash plate 351 fits in first inclined-plane 363, the 2nd ㄇ type swash plate 352 is fitted and is held in second inclined-plane 364, by this upper cover body 10 and lower cover 20 can be fitted closely, to reach a snap close function; When desiring to open mask cassette 1, gently press locking board 362 and the 2nd ㄇ type swash plate 352, promptly can singlehandedly easily open mask cassette 1.
Please refer to Fig. 6 A and Fig. 6 B, mask cassette 1 of the present invention can further comprise at least one first flange 14 and at least one second flange 24, first flange 14 is located at the header field 13 (as shown in Figure 6A) of upper cover body 10, second flange 24 is located at the bottom part 23 (shown in Fig. 6 B) of lower cover 20, wherein first flange 14 and second flange 24 are a ring type structure (as rectangle), or segmentation is equipped on the corner of upper cover body 10 or lower cover 20, the area size of the area size of 14 corrals of first flange and the second flange corral, 24 corrals is unequal in addition, and in preferred embodiment of the present invention, the zone of 14 corrals of first flange of upper cover body 10 is little than the zone of 24 corrals of second flange of lower cover 20, then please refer to Fig. 6 C, in semiconductor technology, in order effectively to utilize space in the factory, therefore mask cassette 1 can be piled up, and via the design of first flange 14 of the present invention and second flange 24, mask cassette 1 is had outside the function of piling up, can reduce again and deposit the required space of mask cassette 1, and first flange 14 and second flange 24 can pin down and interfere mutually, and the mask cassette 1 after also can avoiding piling up by this is crooked or topple over because of collision.
Please refer to Fig. 7, upper cover body 10 thickness and lower cover 20 thickness of mask cassette 1 of the present invention are roughly the same, and first flange, 14 thickness and second flange, 24 thickness also can be roughly the same, therefore spread out when being placed on the desktop when the upper cover body 10 of mask cassette 1 and lower cover 20, can be fully smooth in desktop, can not cause the warpage of monolateral upper cover body 10 or lower cover 20, make mask cassette 1 be able to firm lying against on the desktop.
Please refer to Fig. 8 A and Fig. 8 B, mask cassette 1 of the present invention can further comprise at least one pair of keeps a foothold and 37 is located on the two relative symmetrical sides of 1 outside surface 11,21 of mask cassette, so mask cassette 1 is able to firm uprightly being placed on the desktop.
Please refer to Fig. 9, mask cassette 1 of the present invention can further comprise at least one baffle plate 38 and be located on the mask cassette 1, its configuration mode can be arranged at the header field 13 of mask cassette 1 upper cover body 10 in pairs, or can ㄇ font mode be arranged on the side of mask cassette 1 upper cover body 10, wherein baffle plate 38 is the rectangular structure of a L type, and an end of the rectangular structure of this L type is connected with mask cassette 1, when therefore in baffle plate 38, placing inscription plate or bar code (bar code), if mask cassette 1 stands upside down when placing, can prevent to engrave the dropping of plate or bar code.
Except that above-mentioned, the upper cover body 10 and lower cover 20 external forms of mask cassette 1 of the present invention can be the design of quadrilateral cube (as shown in Figure 1) or octagon cube (as shown in figure 10), also are covered by in the interest field of the present invention.
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the claim of the present invention.
Claims (10)
1. mask cassette, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, this upper cover body and this lower cover respectively have an outside surface and an inside surface, this outside surface that this outside surface of this upper cover body has a header field and this lower cover has a bottom part, this upper cover body and this lower cover cover the back and form one the 3rd accommodation space, and the header field of this upper cover body partly is corresponding with the bottom of this lower cover, it is characterized in that:
This mask cassette has a plurality of support members and is disposed at respectively in unsettled mode on the corner of inside surface of this upper cover body and this lower cover, and the two ends of these support members are connected with the adjacent dual-side in this inside surface corner respectively to form a sealing lamellar body.
2. mask cassette as claimed in claim 1 is characterized in that: this support member and this mask cassette are formed in one and make.
3. mask cassette as claimed in claim 1 is characterized in that: the turning point of this sealing lamellar body forms a breach, the symmetrical shape that the breach of this support member is formed centrally in this turning point being.
4. mask cassette as claimed in claim 3 is characterized in that: comprise that further at least one fin extends a side that has this breach from this support member.
5. mask cassette as claimed in claim 1 is characterized in that: further comprise an Airtight gasket and be located at the opening part of this upper cover body first accommodation space or the opening part of this lower cover second accommodation space.
6. mask cassette as claimed in claim 1, it is characterized in that: further comprise the side that at least one pair of snap close piece is divided into this upper cover body and this lower cover, this snap close piece has one first latch part and one second latch part, wherein this first latch part is located at a side of this upper cover body, this second latch part is located at a side of this lower cover, and this first latch part is corresponding with this second latch part.
7. mask cassette as claimed in claim 1 is characterized in that: further comprise at least one first flange and at least one second flange, this first flange is located at the header field of this upper cover body, and this second flange is located at the bottom part of this lower cover.
8. mask cassette as claimed in claim 1 is characterized in that: further comprise the limit, two opposite sides that at least one pair of is kept a foothold and is located at this mask cassette outside surface.
9. mask cassette, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, this upper cover body and this lower cover respectively have an outside surface and an inside surface, this outside surface that this outside surface of this upper cover body has a header field and this lower cover has a bottom part, this upper cover body and this lower cover cover the back and form one the 3rd accommodation space, and the header field of this upper cover body partly is corresponding with the bottom of this lower cover, it is characterized in that:
This mask cassette has a plurality of support members and is disposed at respectively in unsettled mode on the corner of inside surface of this upper cover body and this lower cover, and the two ends of these support members are connected with the adjacent dual-side in this inside surface corner respectively to form a sealing lamellar body.
10. mask cassette, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, this upper cover body and this lower cover respectively have an outside surface and an inside surface, this outside surface that this outside surface of this upper cover body has a header field and this lower cover has a bottom part, this upper cover body and this lower cover cover the back and form one the 3rd accommodation space, and the header field of this upper cover body partly is corresponding with the bottom of this lower cover, it is characterized in that:
This mask cassette has a plurality of support members and is disposed at respectively in unsettled mode on the corner of inside surface of this upper cover body and this lower cover, the two ends of these support members are connected with the adjacent dual-side in this inside surface corner respectively to form a sealing lamellar body, and form a breach with inclined-plane in the turning point of this sealing lamellar body, and extend a fin separately again in two edges of this breach.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810185499A CN101750872A (en) | 2008-12-16 | 2008-12-16 | Mask cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810185499A CN101750872A (en) | 2008-12-16 | 2008-12-16 | Mask cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101750872A true CN101750872A (en) | 2010-06-23 |
Family
ID=42478008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810185499A Pending CN101750872A (en) | 2008-12-16 | 2008-12-16 | Mask cassette |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101750872A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103781935A (en) * | 2011-08-25 | 2014-05-07 | 应用材料公司 | Corner cut mask |
| CN106102401A (en) * | 2016-07-21 | 2016-11-09 | 珠海格力电器股份有限公司 | Integrated electrical equipment box and there is its air-conditioner |
| CN104025405B (en) * | 2011-11-07 | 2017-03-22 | 株式会社自动网络技术研究所 | Electrical connection box |
| JP6975302B1 (en) * | 2020-07-23 | 2021-12-01 | 家登精密工業股▲ふん▼有限公司Gudeng Precision Industrial Co., Ltd | Mask case with guide member |
-
2008
- 2008-12-16 CN CN200810185499A patent/CN101750872A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103781935A (en) * | 2011-08-25 | 2014-05-07 | 应用材料公司 | Corner cut mask |
| CN103781935B (en) * | 2011-08-25 | 2017-07-11 | 应用材料公司 | To sedimentary in the mask structure on substrate, device and method |
| CN104025405B (en) * | 2011-11-07 | 2017-03-22 | 株式会社自动网络技术研究所 | Electrical connection box |
| CN106102401A (en) * | 2016-07-21 | 2016-11-09 | 珠海格力电器股份有限公司 | Integrated electrical equipment box and there is its air-conditioner |
| JP6975302B1 (en) * | 2020-07-23 | 2021-12-01 | 家登精密工業股▲ふん▼有限公司Gudeng Precision Industrial Co., Ltd | Mask case with guide member |
| CN113970876A (en) * | 2020-07-23 | 2022-01-25 | 家登精密工业股份有限公司 | Photomask box with guide member |
| JP2022022047A (en) * | 2020-07-23 | 2022-02-03 | 家登精密工業股▲ふん▼有限公司 | Mask case with guiding member |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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Application publication date: 20100623 |