CN104888551B - The filter membrane component of isolated carrier box - Google Patents
The filter membrane component of isolated carrier box Download PDFInfo
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- CN104888551B CN104888551B CN201410078671.XA CN201410078671A CN104888551B CN 104888551 B CN104888551 B CN 104888551B CN 201410078671 A CN201410078671 A CN 201410078671A CN 104888551 B CN104888551 B CN 104888551B
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- Prior art keywords
- filter membrane
- carrier box
- ring
- membrane component
- isolated carrier
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Abstract
The present invention discloses the filter membrane component of a kind of isolated carrier box, comprise a retainer ring, a closely sealed part, a support member, a filter membrane and a lid, described retainer ring comprises a ring bodies and an internal projecting ring, described internal projecting ring have one in annular distance, described closely sealed part comprises a butting section and a cervical region, described butting section is mobilizable to be resisted against on described internal projecting ring, and described support member comprises a support ring and several ribs.It is sealed at inside described interior annular distance by described butting section, simultaneously by the described closely sealed part of ribs pushing and withstanding, the air-tightness of described filter membrane component can be improved.
Description
Technical field
The invention relates to the filter membrane component of a kind of isolated carrier box, especially in regard to one can increase into
Air inflow during gas operation and improve the filter membrane component of bubble-tight isolated carrier box.
Background technology
In semiconductor processing, automatic material transport system (Automated Material Handling
System, AMHS) and isolation input and output material standard mechanical interface (Standard Mechanical Interface,
SMIF) equipment is often used for wafer (wafer) with photomask (photomask) in the dimension of non-use period
Protecting and transport, it not only can replace Traditional Man carrying, reduce building and maintenance cost of dust free room equipment,
The cleanliness factor of wafer and photomask can also be promoted, reach superelevation and produce yield, therefore in recent years, AMHS with
It is the standard device specification of international semiconductor factory that SMIF has been listed in.
As it has been described above, for avoiding damage to wafer or photomask, general employing wafer cassette or optical mask box are protected
Protect wafer or photomask, and in box filling noble gas to prevent wafer or photomask from producing oxidation and ruining
Damage.Refer to Fig. 1, shown in 2, it discloses a kind of existing optical mask box 1, described optical mask box 1
Bottom has several filling device 12 connecting gas tube 11, in being provided with in each filling device 12
Empty passage 13, and one end of hollow channel 13 is for being provided with opening and closing part 14, described opening and closing part 14 is by multiple
The loose-leaf of number tool elastic displacement is formed, and the other end away from opening and closing part is provided with guide ramp, profit
With the hollow channel 13 set by filling device 12 and opening and closing part 14, make gas tube 11 can carry out being intended to
Stretched into filling gas in optical mask box 1 by opening and closing part 14 during air inlet operation.
But, utilize described gas tube 11 to penetrate described hollow channel 13, then by described opening and closing part 14
Stretching into the design in described optical mask box 1, its adaptation is the most not enough, causes the dust in air, fines
Deng foreign body along with affecting its cleanliness factor in the described optical mask box of inflation 1, and then jeopardize photomask use
In quality and the yield of wafer production, furthermore, the caliber of described gas tube 11 is by described hollow channel
The restriction of 13 also can affect the aeration speed to described optical mask box 1 and efficiency.
Therefore, it is necessary to provide the filter membrane component of a kind of isolated carrier box, to solve existing for prior art
Problem.
Summary of the invention
In view of this, the present invention provides the filter membrane component of a kind of isolated carrier box, to solve prior art
The problem that adaptation is not enough.
Present invention is primarily targeted at the filter membrane component that a kind of isolated carrier box is provided, utilize butting section
Can be sealed at inside interior annular distance, simultaneously by the pushing and withstanding of ribs, the air-tightness of filter membrane component can be improved also
Simplify air inlet and the structure given vent to anger.
For reaching the object defined above of the present invention, one embodiment of the invention provides the filter of a kind of isolated carrier box
Membrane module, is arranged on a passage of the bottom of an isolated carrier box, and it is solid that described filter membrane component comprises one
Determine ring, a closely sealed part, a support member, a filter membrane and a lid, described retainer ring comprise a ring bodies and
One internal projecting ring, described ring bodies is arranged on the passage of the bottom of described isolated carrier box and has a ring
Shape hole, described internal projecting ring extends inside the annular aperture of described ring bodies, and annular distance in having, described
Closely sealed part comprises a butting section and a cervical region, and described butting section is movable up and down is resisted against described internal projecting ring
On, described cervical region downwardly extends from described butting section and gos deep in described interior annular distance, and wherein said cervical region has
Having a central shaft hole, and several radial direction side opening, described radial direction side opening connects with described central shaft hole, described
Support member is placed on described ring bodies, and described support member comprises a support ring and several ribs, described
Ribs radially inside extends internally from described support ring and is resisted against described butting section, and described filter membrane is placed
On described support member, described lid is placed on described filter membrane, and described lid comprises several top side
Hole.
In one embodiment of this invention, described butting section has several radial groove, and described ribs is divided
The most downward-sloping contact is on described radial groove.
In one embodiment of this invention, described retainer ring also has bulge loop on, from described ring bodies
End face upwardly extends and has annular distance on, and described support member is placed in described upper annular distance.
In one embodiment of this invention, the internal diameter of described upper annular distance is more than the internal diameter of described annular aperture, institute
State the internal diameter internal diameter more than described interior annular distance of annular aperture.
In one embodiment of this invention, the diameter outside the diameter of described lid and described upper bulge loop is mutually
Join.
In one embodiment of this invention, the described top side opening of described lid is formed at the top of described lid
Face and an intersection of side.
In one embodiment of this invention, described butting section has the outer ring surface of an arc-shaped.
In one embodiment of this invention, described support member also has a cross rib, is arranged on described
Inside support ring.
In one embodiment of this invention, the outer ring surface of described ring bodies is an inclination of from top to bottom undergauge
Face.
In one embodiment of this invention, the diameter outside the diameter of described filter membrane and described support ring is mutually
Join.
As it has been described above, the present invention can be sealed at inside described interior annular distance by described butting section, pass through simultaneously
The pushing and withstanding of described ribs, improves the air-tightness of described filter membrane component and simplifies air inlet and the structure given vent to anger.
It addition, by described upper annular distance, annular aperture, the design of interior annular distance, gas is passed through institute by described passage
State radially side opening, bigger space can be had to enter described isolated carrier box inside and increase in air inlet operation
Time intake efficiency.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of an existing isolated carrier box.
Fig. 2 is the phantom of an existing isolated carrier box.
Fig. 3 is the three-dimensional exploded view of the filter membrane component of the isolated carrier box of one embodiment of the invention.
Fig. 4 is the sectional view of the filter membrane component of the isolated carrier box of one embodiment of the invention.
Fig. 5 is the filter membrane component of one embodiment of the invention isolated carrier box sectional view when holding one's breath.
Fig. 6 is the sectional view during filter membrane component air inlet of the isolated carrier box of one embodiment of the invention.
Detailed description of the invention
The explanation of following embodiment is graphic with reference to add, may be used to enforcement in order to illustrate the present invention
Specific embodiment.Furthermore, the direction term that the present invention is previously mentioned, the most upper and lower, top, the end, front,
Afterwards, left and right, inside and outside, side, surrounding, central authorities, level, laterally, vertically, longitudinally, axially,
Radially, the superiors or orlop etc., be only the direction with reference to annexed drawings.Therefore, the direction of use is used
Language is to illustrate and understand the present invention, and is not used to limit the present invention.
Refer to Fig. 3, shown in 4, the filter membrane component 100 of the isolated carrier box of one embodiment of the invention,
Described isolated carrier box 2 is in order to deposit the structure of the storing unit of semiconductor element or photomask, described
Filter membrane component 100 is arranged on a passage 21 of the bottom of described isolated carrier box 2, described filter membrane group
Part 100 comprises retainer ring 3, closely sealed part 4, support member 5, filter membrane 6 and a lid 7, this
Invention is by the detail structure of each element, assembled relation and operation principles thereof are detailed below.
Refer to Fig. 3, shown in 4, described retainer ring 3 comprises ring bodies 31, internal projecting ring 32 and
Upper bulge loop 33, wherein said ring bodies 31 is arranged on the passage of the bottom of described isolated carrier box 2
In 21, and described ring bodies 31 has an annular aperture 311；Described internal projecting ring 32 is from described ring bodies 31
Annular aperture 311 inside inwardly and downwardly extend, and described internal projecting ring 32 have one in annular distance 321；Institute
State bulge loop 32 and upwardly extend from the end face of described ring bodies 31, and described upper bulge loop 33 has ring on
Hole 331, and an inner top surface of described upper bulge loop 32 is preferably an inside and downward-sloping infundibulate and tilts
Face.Described support member 5 is placed in described upper annular distance 331 and the outside of described support member 5 is by being attached to
Stating the inner side of annular distance 331, the internal diameter of wherein said upper annular distance 331 is interior more than described annular aperture 311
Footpath, the internal diameter of described annular aperture 311 is more than the internal diameter of described interior annular distance 321.It addition, described ring bodies
The outer ring surface of 31 is an inclined plane of from top to bottom undergauge, in order to the inner side of passage described in tight fit 21
Face.
Refer to Fig. 3, shown in 4, described closely sealed part 4 comprises butting section 41 and a cervical region 42, described
The bottom surface of butting section 41 is preferably inside and downward-sloping taper inclined plane, its movable up and down against
On the inner top surface (infundibulate inclined plane) of described internal projecting ring 32, and described butting section 41 has several footpath
To the outer ring surface (sign) of groove 411 and an arc-shaped, described outer ring surface is described ring-type in order to be close to close
The inner side in hole 311.In the present embodiment, described radial groove 411 is radial is formed at described butting section
The end face of 41, is interconnected, and preferably in cross；Described cervical region 42 is downward from described butting section 41
Extending and go deep in described interior annular distance 321, wherein said cervical region 42 has a central shaft hole 421 and several
Radially side opening 422, it is internal that wherein said central shaft hole 421 is axially formed at described cervical region 42, described footpath
Then it is connected with described central shaft hole 421 to side opening 422, and extends radially outwardly to be opened on described neck
The outer peripheral face in portion 42.It addition, described central shaft hole 421 does not extend upwardly to described butting section 41.
Refer to Fig. 3, shown in 4, described support member 5 is placed on described ring bodies 31, and described
Support member 5 comprises a support ring 51, several ribs 52 and a cross rib 53, described ribs 52
Radially inside extend internally from described support ring 51, and described ribs 52 tilts contact separately down and exists
On the described radial groove 411 of described butting section 41, described cross rib 53 is arranged on described support ring
Inside 51, in order to strengthen the overall structure of described support member 5.
Refer to Fig. 3, shown in 4, described filter membrane 6 is placed on support ring 51 top of described support member 5,
Diameter outside the diameter of wherein said filter membrane 6 and described support ring 51 matches, in order to make described filter membrane
6 can be closely sealed with support member 5, and described filter membrane 6 may utilize composite fibre and makes, and therefore has many suitable
Micropore when aperture.When air stream is by described filter membrane component 100, at least can be by described filter membrane 6
Micropore cross the micronic dust in air filtering and impurity.
Refer to Fig. 3, shown in 4, described lid 7 is placed on described filter membrane 6 and by system in described epirelief
Ring 33 top, wherein said lid 7 comprises several tops side opening 71, and described top side opening 71 is formed at
The end face of described lid 7 and an intersection of side.It addition, the diameter outside described lid 7 is with described
Diameter outside upper bulge loop 33 matches, in order to make the described lid 7 can be closely sealed with upper bulge loop 33；Institute
State the external diameter then with described filter membrane 6 and support member 5 of the internal diameter of concave space in bottom lid 7 to match,
In order to make described filter membrane 6 and support member 5 can closely sealed be assembled in described interior concave space.
Refer to Fig. 3, shown in 4, according to above-mentioned structure, as it is shown in figure 5, when described filter membrane component
100 are in when holding one's breath state, the radial direction of the butting section 41 of closely sealed part 4 described in described ribs 52 pushing and withstanding
On groove 411, make the bottom surface (taper inclined plane) of described butting section 41 by making at described internal projecting ring 32
On inner top surface (infundibulate inclined plane), now, described radial direction side opening 422 gos deep in described interior annular distance 321
Be close to its hole wall, thus extraneous air cannot internal with described isolated carrier box 2 connect, make described in every
It is internally formed from formula carrier box 2 and holds one's breath.On the other hand, as shown in Figure 6, when utilizing gas tube (such as the 2nd
Figure) etc. instrument the cervical region 42 of described closely sealed part 4 is pushed up to time, the butting section 41 of described closely sealed part 4
Ribs 52 described in pushing and withstanding, make described ribs 52 slightly move up.Now, described radial direction side opening
422 hole walls leaving described interior annular distance 321 because of rising, the bottom surface (taper of the most described butting section 41
Inclined plane) inner top surface (infundibulate inclined plane) of described internal projecting ring 32 is also left because of rising, and then outside making
Portion's air connects by described radial direction side opening 422 and top side opening 71 are internal with described isolated carrier box 2,
Described passage 21 can be internal by described filter membrane component 100 air inlet to described isolated carrier box 2.
Refer to Fig. 3, shown in 4, by above-mentioned design, utilize described butting section 41 can be sealed at institute
State inside interior annular distance 321, simultaneously by the pushing and withstanding of described ribs 52, described filter membrane component can be improved
The air-tightness of 100 also simplifies air inlet and the structure given vent to anger.It addition, utilize the internal diameter of described upper annular distance 331
More than the internal diameter of described annular aperture 311, the internal diameter of described annular aperture 311 is more than described interior annular distance 321
The design of internal diameter, gas by described radial direction side opening 422, is i.e. had bigger space by described passage 21
Enter described isolated carrier box 2 internal, its intake efficiency when air inlet operation can be effectively increased.
The present invention is been described by by above-mentioned related embodiment, but above-described embodiment only implements the present invention
Example.It must be noted that, it has been disclosed that embodiment be not limiting as the scope of the present invention.Contrary,
The amendment and the equalization that are contained in the spirit and scope of claims arrange and are all included in the scope of the present invention.
Claims (10)
1. a filter membrane component for isolated carrier box, is arranged on a passage of the bottom of an isolated carrier box,
It is characterized in that: described filter membrane component comprises:
One retainer ring, comprises: a ring bodies, be arranged on the bottom of described isolated carrier box passage and
There is an annular aperture；And an internal projecting ring, extend inside the annular aperture of described ring bodies, and have one
Interior annular distance；
One closely sealed part, comprises: a butting section, movable up and down is resisted against on described internal projecting ring；And a neck
Portion, downwardly extends from described butting section and gos deep in described interior annular distance, and wherein said cervical region has in one
Arbor hole, and several radial direction side opening, described radial direction side opening connects with described central shaft hole；
One support member, is placed on described ring bodies, and described support member comprises: a support ring；And several
Stake rib, radially inside extends internally from described support ring and is resisted against described butting section；
One filter membrane, is placed on described support member；And
One lid, is placed on described filter membrane, and described lid comprises several tops side opening.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described butting section
Having several radial groove, described ribs tilts contact separately down on described radial groove.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described retainer ring
Also there is bulge loop on, upwardly extend and have annular distance on from the end face of described ring bodies, described
Support member is placed in described upper annular distance.
The filter membrane component of isolated carrier box the most as claimed in claim 3, it is characterised in that: described upper annular distance
Internal diameter more than the internal diameter of described annular aperture, the internal diameter of described annular aperture is more than the internal diameter of described interior annular distance.
The filter membrane component of isolated carrier box the most as claimed in claim 3, it is characterised in that: described lid
Diameter outside diameter and described upper bulge loop matches.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described lid
Described top side opening is formed at the end face of described lid and an intersection of side.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described butting section
There is the outer ring surface of an arc-shaped.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described support member
Also there is a cross rib, be arranged on inside described support ring.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described ring bodies
The inclined plane that outer ring surface is from top to bottom undergauge.
The filter membrane component of isolated carrier box the most as claimed in claim 1, it is characterised in that: described filter membrane
Diameter outside diameter and described support ring matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410078671.XA CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410078671.XA CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104888551A CN104888551A (en) | 2015-09-09 |
| CN104888551B true CN104888551B (en) | 2016-08-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410078671.XA Active CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7334264B2 (en) * | 2019-04-26 | 2023-08-28 | インテグリス・インコーポレーテッド | substrate container |
| US20230099075A1 (en) * | 2021-09-28 | 2023-03-30 | Entegris, Inc. | Purge port filter support |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201107546Y (en) * | 2007-10-09 | 2008-08-27 | 家登精密工业股份有限公司 | Metal light shield box and filtration apparatus thereof |
| CN101609260A (en) * | 2008-06-16 | 2009-12-23 | 亿尚精密工业股份有限公司 | The shielded air inlet and outlet structure of load moving container |
| CN201796874U (en) * | 2010-08-26 | 2011-04-13 | 中芯国际集成电路制造(上海)有限公司 | Front opening type wafer transportation box |
| CN203724931U (en) * | 2014-03-05 | 2014-07-23 | 耀连科技有限公司 | Filter membrane assembly of isolated type handling box |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201331103A (en) * | 2012-01-31 | 2013-08-01 | Gudeng Prec Ind Co Ltd | Check valve |
-
2014
- 2014-03-05 CN CN201410078671.XA patent/CN104888551B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201107546Y (en) * | 2007-10-09 | 2008-08-27 | 家登精密工业股份有限公司 | Metal light shield box and filtration apparatus thereof |
| CN101609260A (en) * | 2008-06-16 | 2009-12-23 | 亿尚精密工业股份有限公司 | The shielded air inlet and outlet structure of load moving container |
| CN201796874U (en) * | 2010-08-26 | 2011-04-13 | 中芯国际集成电路制造(上海)有限公司 | Front opening type wafer transportation box |
| CN203724931U (en) * | 2014-03-05 | 2014-07-23 | 耀连科技有限公司 | Filter membrane assembly of isolated type handling box |
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| Publication number | Publication date |
|---|---|
| CN104888551A (en) | 2015-09-09 |
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