CN203707098U - Adhesion structure of isolation type carrying box - Google Patents
Adhesion structure of isolation type carrying box Download PDFInfo
- Publication number
- CN203707098U CN203707098U CN201420097795.8U CN201420097795U CN203707098U CN 203707098 U CN203707098 U CN 203707098U CN 201420097795 U CN201420097795 U CN 201420097795U CN 203707098 U CN203707098 U CN 203707098U
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- China
- Prior art keywords
- convex ring
- ring body
- carrier
- closed structure
- annular gasket
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002955 isolation Methods 0.000 title abstract description 4
- 230000000994 depressogenic effect Effects 0.000 claims description 8
- 239000007789 gas Substances 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 description 7
- 239000012528 membrane Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- Packaging Frangible Articles (AREA)
Abstract
The utility model discloses an adhesion structure of an isolation type carrying box. The adhesion structure comprises a base, an annular pad and an upper cover. The annular pad is provided with a lower convex ring body and a lower bearing portion. The upper cover comprises a top wall, a side wall and an adhesion ring. The adhesion ring is provided with an upper bearing portion and an upper convex ring body. The upper bearing portion abuts against the lower convex ring body and the upper convex ring body abuts against the lower bearing portion, so that during air inlet operation, the leakage opportunity of the internal gases in the isolation carrying box can be reduced.
Description
Technical field
The invention relates to a kind of closed structure of isolated carrier box, especially in regard to a kind of closed structure that can improve bubble-tight isolated carrier box.
Background technology
Normal automatic material transport system (the Automated Material Handling System that uses in semiconductor work Arts at present, AMHS) with isolation input and output material standard mechanical interface (Standard Mechanical Interface, SMIF) equipment, its by isolated carrier box carry out wafer (wafer) and photomask (photomask) in the maintenance of non-use period with transport, not only can replace Traditional Man carrying, reduce building and maintenance cost of dust free room equipment, can also promote the cleanliness factor of wafer and photomask, reach superelevation and produce yield, therefore in recent years, isolated carrier box has become handbarrow indispensable in semiconductor factory dust free room.
As mentioned above, for avoiding destroying wafer or photomask, be generally to adopt wafer cassette or optical mask box to protect wafer or photomask, and filling inert gas is damaged to prevent wafer or photomask from producing oxidation in box.Refer to shown in Fig. 1, it discloses a kind of existing optical mask box 1, described optical mask box 1 comprises a base 13 and a upper cover 14, the bottom of described base 13 has several filling devices 12 that connect gas-filled tube, utilize described filling device 12 to make the gas-filled tube can be to optical mask box 1 filling gas in the time wanting to carry out air inlet operation, to promote the cleanliness factor of wafer and photomask.
But, because described base 13 is to fasten by groove in base and upper cover sidewall each other with upper cover 14, the joint of described groove in base and upper cover sidewall still has gap, while resulting in air inlet operation, gas easily releases from gap and causes air-tightness not good, the further air pressure of impact described optical mask box 1 inside, and cannot be in the process of air inlet operation, inflation reaches predetermined atmospheric pressure value rapidly.
Therefore, be necessary to provide a kind of isolated carrier box, to solve the existing problem of prior art.
Summary of the invention
In view of this, the invention provides a kind of closed structure of isolated carrier box, to solve the not good problem of the existing air-tightness of prior art.
Main purpose of the present invention is to provide a kind of isolated carrier box, utilizes lower convex ring body against upper carrier and upper convex ring body against lower carrier, can improve the air-tightness of isolated carrier box.
For reaching aforementioned object of the present invention, one embodiment of the invention provides a kind of closed structure of isolated carrier box, comprise a base, one annular gasket and a upper cover, described annular gasket is placed on described base, and a periphery of described annular gasket has convex ring body and once carrier, described upper cover is resisted against on described annular gasket, and described upper cover comprises a roof, one sidewall and a closely sealed ring, described sidewall from a periphery of described roof to downward-extension, described closely sealed ring horizontally outward extends from an end periphery of described sidewall, wherein said closely sealed ring has on one convex ring body on carrier and, described upper carrier use for described lower convex ring body against, described upper convex ring body is resisted against described lower carrier.
In one embodiment of this invention, the periphery of described annular gasket sequentially forms described lower convex ring body and lower carrier, and described lower carrier horizontally outward extends from described lower convex ring body; And described closely sealed ring correspondence sequentially forms described upper carrier and upper convex ring body, and described upper convex ring body horizontally outward extends from described upper carrier.
In one embodiment of this invention, the periphery of described annular gasket sequentially forms described lower carrier and lower convex ring body, and described lower convex ring body horizontally outward extends from described lower carrier; And described closely sealed ring correspondence sequentially forms described upper convex ring body and upper carrier, and described upper carrier horizontally outward extends from described upper convex ring body.
In one embodiment of this invention, described lower convex ring body has the vertical section of a reverse U shape.
In one embodiment of this invention, described upper convex ring body has the vertical section of a U font.
In one embodiment of this invention, described upper cover also comprises at least one depressed part, and described depressed part is formed at least one corner of described roof.
In one embodiment of this invention, described upper cover also comprises a rectangular recess, and described rectangular recess is formed on described roof central authorities.
In one embodiment of this invention, described base has an end face and a depression ring portion, and described depression ring portion is formed on an outer circumferential side of described end face, and uses for described annular gasket and place.
In one embodiment of this invention, described annular gasket also has an end difference, described lower convex ring extend from one end of described end difference and with described base separately.
In one embodiment of this invention, described annular gasket also has the portion of stretching into, and extends and stretches in described base from the other end of described end difference.
As mentioned above, be resisted against described lower carrier by described upper carrier against described lower convex ring body and described upper convex ring body, in the time that air inlet operation is carried out, can reduce the chance that the internal gas of described isolated carrier box leaks, and then improve its air-tightness, make described isolated carrier box simultaneously in the process of air inlet operation, can inflate rapidly the atmospheric pressure value that reaches predetermined.
Brief description of the drawings
Fig. 1 is the three-dimensional exploded view of an existing optical mask box.
Fig. 2 is the three-dimensional exploded view of the isolated carrier box of one embodiment of the invention.
Fig. 3 is the side-looking exploded view of the isolated carrier box of one embodiment of the invention.
Fig. 4 is the side-looking constitutional diagram of the isolated carrier box of one embodiment of the invention.
Fig. 5 is the vertical view of the isolated carrier box of one embodiment of the invention.
Fig. 6 is the partial side view of the isolated carrier box of another embodiment of the present invention.
Fig. 7 is the partial side view of the isolated carrier box of further embodiment of this invention.
Embodiment
The explanation of following embodiment is graphic with reference to what add, can be in order to the specific embodiment of implementing in order to illustrate the present invention.Moreover, the direction term that the present invention mentions, such as upper and lower, top, the end, front, rear, left and right, inside and outside, side, around, central authorities, level, laterally, vertically, longitudinally, axially, radially, the superiors or orlop etc., be only the direction with reference to annexed drawings.Therefore, the direction term of use is in order to illustrate and to understand the present invention, but not in order to limit the present invention.
Please refer to shown in Fig. 2,3, the isolated carrier box 100 of one embodiment of the invention, comprise a base 2, several locating part 3, several filter membrane component 4, an annular gasket 5 and a upper cover 6, described isolated carrier box 100 is for example optical mask box or wafer cassette, its As is in order to deposit the structure of storing unit of photomask or semiconductor element (as wafer), and the present invention is by the detail structure, assembled relation and the operation principles thereof that below describe each element in detail.
Continuous with reference to shown in Fig. 2,3, described base 2 has an end face 21 and a depression ring portion 22, and described depression ring portion 22 is formed on an outer circumferential side of described end face 21, and uses for described annular gasket 5 and place.
Continuous with reference to shown in Fig. 2,3, described locating part 3 is arranged on described base 2, in the present embodiment, described locating part 3 is provided with three, wherein two locating part 3 intervals are relative, and another locating part 3 is configured in the adjacent side of described two locating parts 3, therefore, in the time putting into a slice photomask in described base 2, can be by semiconductor element or photomask described in described locating part 3 fixed supports.
Continuous with reference to shown in Fig. 2,3, described filter membrane component 4 is arranged on several air vent holes 20 of described base 2, and the filter membrane of wherein said filter membrane component 4 can utilize composite fibre to make, and therefore has the micropore in many suitable apertures.In the time that air stream passes through described filter membrane component 4, at least can be by micronic dust and the impurity in the micropore filtered air of filter membrane.
Please refer to shown in Fig. 3,4, described annular gasket 5 is hollow ring, and corresponding being placed in the depression ring portion 22 of described base 2, and a periphery of described annular gasket 5 has convex ring body 51 and once carrier 52.In the present embodiment, described annular gasket 5 is a plastic cement annular gasket, and the periphery of described annular gasket 5 sequentially forms described lower convex ring body 51 and lower carrier 52 from inside to outside, and described lower carrier 52 horizontally outward extends from described lower convex ring body 51, wherein said lower convex ring body 51 has the vertical section of a reverse U shape, and the height of described lower convex ring body 51 is greater than the height of the end face 21 of described base 2, in order to described upper cover 6 against described lower convex ring body 51.
Please refer to Fig. 3, 4, shown in 5, described upper cover 6 is resisted against on described annular gasket 5, and described upper cover 6 comprises a roof 61, one sidewall 62 and a closely sealed ring 63, wherein said sidewall 62 from a periphery of described roof 61 to downward-extension, described closely sealed ring 63 horizontally outward extends from an end periphery of described sidewall 62, described closely sealed ring 63 has on one convex ring body 632 on carrier 631 and, in the present embodiment, described closely sealed ring 62 sequentially forms described upper carrier 631 and upper convex ring body 632 from inside to outside, with the described lower convex ring body 51 of correspondence and lower carrier 52, make described upper carrier 631 can for described lower convex ring body 51 against, described upper convex ring body 632 is resisted against described lower carrier 52, and described upper convex ring body 632 has the vertical section of a U font.In addition, as shown in Figure 5, described upper cover 6 also comprises two depressed parts 64 (or only arranging) and a rectangular recess 65, described depressed part 64 is respectively formed at two corners of described roof 61, described rectangular recess 65 is formed on described roof 61 central authorities, described depressed part 64 and rectangular recess 65 are that the inside of reducing described isolated carrier box 100 holds gas volume, and then improve intake velocity and efficiency.
Please refer to shown in Fig. 6, except the present embodiment, described annular gasket 5 and closely sealed ring 63 also can be designed to, the periphery of described annular gasket 5 sequentially forms described lower carrier 52 and lower convex ring body 51 from inside to outside, described lower convex ring body 51 horizontally outward extends from described lower carrier 52, and described closely sealed ring 62 from inside to outside correspondence sequentially form described upper convex ring body 632 and upper carrier 631, described upper carrier 631 horizontally outward extends from described upper convex ring body 632, make described upper carrier 631 can for described lower convex ring body 51 against, described upper convex ring body 632 is resisted against described lower carrier 52.
Please refer to shown in Fig. 7, except the present embodiment, described annular gasket 5 can be designed to also have an end difference 53 and and stretch into portion 54, described lower convex ring 51 extend from one end of described end difference 53 and with described base 2 separately, with so that described closely sealed ring 63 while covering with described lower convex ring 51, described lower convex ring 51 can have the space of downward buffering, and make annular gasket 5 and closely sealed ring 63 more tight, the described portion 54 that stretches into extends and stretches in described base 2 from the other end of described end difference 53, the chance that reduces skew in order to described annular gasket 5 is strengthened being fixed on described base 2.
Please refer to shown in Fig. 4, according to above-mentioned structure, when the upper cover 6 of described isolated carrier box 100 is combined on described base 2, described annular gasket 5 by clipping therein, and described upper carrier 631 is against described lower convex ring body 51, and described upper convex ring body 632 is resisted against described lower carrier 52, described isolated carrier box 100 is had by upper carrier 631 and lower convex ring body 51 and one contact closely sealed inner ring against what form, and one contact closely sealed outer ring by upper convex ring body 632 and lower carrier 52 against what form, in the time that air inlet operation is carried out, can and contact closely sealed outer ring by the closely sealed inner ring of described contact, reduce the chance that the internal gas of described isolated carrier box 100 leaks, and then improve its air-tightness.
By above-mentioned design, be resisted against described lower carrier 52 by described upper carrier 631 against described lower convex ring body 51 and described upper convex ring body 632, in the time that air inlet operation is carried out, can reduce the chance that the internal gas of described isolated carrier box 100 leaks, and then improve the air-tightness of described isolated carrier box 100, make described isolated carrier box 100 simultaneously in the process of air inlet operation, can inflate rapidly the atmospheric pressure value that reaches predetermined.In addition, be respectively formed at two corners of described roof 61 by described depressed part 64, the inside that can reduce described isolated carrier box 100 holds gas volume, and then improves intake velocity and efficiency.
The present invention is described by above-mentioned related embodiment, but above-described embodiment is only for implementing example of the present invention.Must be pointed out that, published embodiment does not limit the scope of the invention.On the contrary, be contained in the spirit of claims and the amendment of scope and impartial setting is included in scope of the present invention.
Claims (10)
1. a closed structure for isolated carrier box, is characterized in that: described closed structure comprises:
One base;
One annular gasket, is placed on described base, and a periphery of described annular gasket has convex ring body and once carrier; And
One upper cover, is resisted against on described annular gasket, and described upper cover comprises: a roof; One sidewall, from a periphery of described roof to downward-extension; And a closely sealed ring, horizontally outward extend from an end periphery of described sidewall, wherein said closely sealed ring has: carrier on, use for described lower convex ring body against; And convex ring body on, be resisted against described lower carrier.
2. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: the periphery of described annular gasket sequentially forms described lower convex ring body and lower carrier, and described lower carrier horizontally outward extends from described lower convex ring body; And described closely sealed ring correspondence sequentially forms described upper carrier and upper convex ring body, and described upper convex ring body horizontally outward extends from described upper carrier.
3. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: the periphery of described annular gasket sequentially forms described lower carrier and lower convex ring body, and described lower convex ring body horizontally outward extends from described lower carrier; And described closely sealed ring correspondence sequentially forms described upper convex ring body and upper carrier, and described upper carrier horizontally outward extends from described upper convex ring body.
4. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: described lower convex ring body has the vertical section of a reverse U shape.
5. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: described upper convex ring body has the vertical section of a U font.
6. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: described upper cover also comprises at least one depressed part, and described depressed part is formed at least one corner of described roof.
7. the closed structure of the isolated carrier box as described in claim 1 or 6, is characterized in that: described upper cover also comprises a rectangular recess, and described rectangular recess is formed on described roof central authorities.
8. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: described base has an end face and a depression ring portion, and described depression ring portion is formed on an outer circumferential side of described end face, and uses for described annular gasket and place.
9. the closed structure of isolated carrier box as claimed in claim 1, is characterized in that: described annular gasket also has an end difference, described lower convex ring extend from one end of described end difference and with described base separately.
10. the closed structure of isolated carrier box as claimed in claim 9, is characterized in that: described annular gasket also has the portion of stretching into, and extends and stretches in described base from the other end of described end difference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420097795.8U CN203707098U (en) | 2014-03-05 | 2014-03-05 | Adhesion structure of isolation type carrying box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420097795.8U CN203707098U (en) | 2014-03-05 | 2014-03-05 | Adhesion structure of isolation type carrying box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203707098U true CN203707098U (en) | 2014-07-09 |
Family
ID=51057497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420097795.8U Expired - Fee Related CN203707098U (en) | 2014-03-05 | 2014-03-05 | Adhesion structure of isolation type carrying box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203707098U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900568A (en) * | 2014-03-05 | 2015-09-09 | 耀连科技有限公司 | Seal structure of isolation-type carrying box |
-
2014
- 2014-03-05 CN CN201420097795.8U patent/CN203707098U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104900568A (en) * | 2014-03-05 | 2015-09-09 | 耀连科技有限公司 | Seal structure of isolation-type carrying box |
| CN104900568B (en) * | 2014-03-05 | 2018-05-04 | 耀连科技有限公司 | The closed structure of isolated carrier box |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |