TWM481217U - Sealing structure of isolation-type conveying box - Google Patents

Description

Closed structure of isolated transport box

The present invention relates to an adhesive structure of an isolated carrying case, and more particularly to an adhesive structure of an isolated carrying case capable of improving airtightness.

In today's semiconductor manufacturing processes, Automated Material Handling System (AMHS) and Standard Mechanical Interface (SMIF) equipment are used in the semiconductor process. The wafer and reticle are used during the non-use period by the isolated carrier. Maintenance and transportation can not only replace traditional manual handling, reduce the cost of construction and maintenance of clean room equipment, but also improve the cleanliness of wafers and reticle to achieve high production yield. Therefore, in recent years, isolated handling The box has become an indispensable handling tool in the clean room of semiconductor factories.

In today's semiconductor manufacturing processes, Automated Material Handling System (AMHS) and Standard Mechanical Interface (SMIF) equipment are used in the semiconductor process. The wafer and reticle are used during the non-use period by the isolated carrier. Maintenance and transportation can not only replace traditional manual handling, reduce the cost of construction and maintenance of clean room equipment, but also improve the cleanliness of wafers and reticle to achieve high production yield. Therefore, in recent years, isolated handling The box has become an indispensable handling tool in the clean room of semiconductor factories.

However, since the base 13 and the upper cover 14 are engaged with each other through the base groove and the upper cover side wall, there is still a gap between the base groove and the upper cover side wall joint, resulting in During the air intake operation, the gas easily leaks out from the gap to cause poor airtightness, further affecting the air pressure inside the photomask case 1, and cannot be quickly inflated to a predetermined air pressure value during the air intake operation.

Therefore, it is necessary to provide an isolated carrying case to solve the problems of the conventional technology.

The main purpose of the present invention is to provide an isolated carrying case, which can improve the airtightness of the isolated carrying case by using the lower convex ring body against the upper receiving portion and the upper convex ring body against the lower receiving portion.

In order to achieve the above purpose, the present invention provides an adhesive structure of an isolated carrying case, comprising a base, an annular gasket and an upper cover, the annular gasket is placed on the base, and one of the circumferences of the annular gasket has a convex ring body and a lower receiving portion, the upper cover abuts against the annular gasket, and the upper cover comprises a top wall, a side wall and a close ring extending downward from a periphery of the top wall, the side wall The abutment ring extends horizontally outward from a bottom periphery of the side wall, wherein the abutment ring has an upper receiving portion and an upper convex ring body, wherein the upper receiving portion is for the lower convex ring body to abut, the upper convex portion The ring body abuts against the lower receiving portion.

In an embodiment of the present invention, the circumference of the annular gasket sequentially forms the lower convex ring body and the lower receiving portion, and the lower receiving portion extends horizontally outward from the lower convex ring body; The upper receiving portion and the upper convex ring body are formed in sequence, and the upper convex ring body extends horizontally outward from the upper receiving portion.

In an embodiment of the present invention, the circumference of the annular gasket sequentially forms the lower receiving portion and the lower convex ring body, and the lower convex ring body extends horizontally outward from the lower receiving portion; and the closely fitting ring corresponds to Forming the upper convex ring body and the upper receiving portion, the upper receiving portion extends horizontally outward from the upper convex ring body.

In one embodiment of the present invention, the lower convex ring body has an inverted U-shaped longitudinal section.

In an embodiment of the present invention, the upper convex ring body has a U-shaped longitudinal section.

In an embodiment of the present invention, the upper cover further includes at least one recess formed in at least one corner of the top wall.

In an embodiment of the present invention, the upper cover further includes a rectangular recess formed in the center of the top wall.

In an embodiment of the present invention, the base has a top surface and a recessed ring portion formed on an outer peripheral side of the top surface for the annular gasket to be placed.

In an embodiment of the present invention, the annular spacer further has a stepped portion extending from one end of the stepped portion to be spaced apart from the base.

In an embodiment of the present invention, the annular spacer further has an extension portion extending from the other end of the step portion and extending into the base.

As described above, the upper receiving portion abuts against the lower convex ring body and the upper convex ring body abuts against the lower receiving portion, and when the air intake operation is performed, the internal gas leakage of the isolated carrying case can be reduced. The opportunity, in turn, increases its airtightness, while allowing the isolated carrying case to rapidly inflate to a predetermined air pressure value during the intake operation.

1‧‧‧mask box

12‧‧‧Filling device

13‧‧‧Base

14‧‧‧Upper cover

100‧‧‧Isolated carrying case

2‧‧‧Base

20‧‧‧vents

21‧‧‧ top surface

22‧‧‧ recessed ring

3‧‧‧Limited parts

4‧‧‧Filter module

5‧‧‧ ring gasket

51‧‧‧ Lower convex ring

52‧‧‧ Under the Ministry of Undertaking

53‧‧‧Steps

54‧‧‧Into the Department

6‧‧‧Upper cover

61‧‧‧ top wall

62‧‧‧ side wall

63‧‧‧Mixed ring

631‧‧‧Upper Department

632‧‧‧Upper convex ring

64‧‧‧Depression

65‧‧‧Rectangular groove

Fig. 1 is an exploded perspective view of a conventional photomask case; Fig. 2 is an exploded perspective view of an isolated carrying case according to an embodiment of the present invention; FIG. 3 is a side elevational view of the isolated transport case of the present embodiment; FIG. 4 is a side view combination view of the isolated transport case of the present embodiment; FIG. 5 is a view of an embodiment of the present invention. Top view of the isolated transport case; Fig. 6: partial side view of the isolated transport case of another embodiment of the present invention; and Fig. 7: partial side view of the isolated transport case of still another embodiment of the present invention.

In order to make the above and other objects, features and advantages of the present invention more comprehensible, the preferred embodiment of the present invention will be described in detail below. Furthermore, the directional terms mentioned in this creation, such as upper, lower, top, bottom, front, rear, left, right, inner, outer, side, surrounding, central, horizontal, horizontal, vertical, vertical, axial, Radial, uppermost or lowermost, etc., only refer to the direction of the additional schema. Therefore, the directional terminology used is used to describe and understand the creation, and is not intended to limit the creation.

Referring to Figures 2 and 3, the isolated transport case 100 of the present embodiment comprises a base 2, a plurality of limiting members 3, a plurality of filter modules 4, a ring spacer 5 and an upper cover 6. The isolated transport case 100 is, for example, a photomask case or a wafer cassette, which is used for storing a structure of a photomask or a storage device of a semiconductor component (such as a wafer). The detailed construction of each component will be described in detail below. , assembly relationship and its operating principle.

Referring to Figures 2 and 3, the base 2 has a top surface 21 and a recessed ring portion 22 formed on an outer peripheral side of the top surface 21 for the annular spacer 5 Place.

With reference to the second and third figures, the limiting members 3 are disposed on the base 2. In the embodiment, the limiting members 3 are provided with three, wherein the two limiting members 3 are spaced apart, and the other two are spaced apart from each other. One The limiting member 3 is disposed on the adjacent side of the two limiting members 3, so that when a photomask is placed on the base 2, the semiconductor component or light can be fixedly supported by the limiting members 3. cover.

Referring to Figures 2 and 3, the filter modules 4 are disposed on a plurality of vents 20 of the base 2, wherein the filter membranes of the filter modules 4 can be made of mixed fibers, and thus have many suitable Microporosity of the pore size. When air flows through the membrane module 4, at least fine particles and impurities in the air can be filtered by the micropores of the membrane.

Referring to Figures 3 and 4, the annular spacer 5 has a hollow annular shape and is correspondingly placed on the recessed ring portion 22 of the base 2. The peripheral edge of the annular spacer 5 has a lower convex ring body 51 and a lower portion. The receiving part 52. In this embodiment, the annular gasket 5 is a plastic annular gasket, and the circumference of the annular gasket 5 sequentially forms the lower convex ring body 51 and the lower receiving portion 52 from the inside and the outside, and the lower receiving portion 52 extends horizontally outward from the lower convex ring body 51, wherein the lower convex ring body 51 has an inverted U-shaped longitudinal section, and the height of the lower convex ring body 51 is greater than the height of the top surface 21 of the base 2, The upper cover 6 abuts against the lower convex ring body 51.

The upper cover 6 abuts against the annular spacer 5, and the upper cover 6 includes a top wall 61, a side wall 62 and a close ring 63, wherein the side wall 62 is self-contained. A peripheral edge of the top wall 61 extends downwardly from the bottom periphery of the side wall 62. The adhesive ring 63 has an upper receiving portion 631 and an upper convex ring body 632. In the embodiment, the sealing ring 62 sequentially forms the upper receiving portion 631 and the upper protruding ring body 632 from the inside to the outside, so as to correspond to the lower convex ring body 51 and the lower receiving portion 52, so that the upper receiving portion 631 can be provided. The lower convex ring body 51 abuts against the lower receiving portion 52, and the upper convex ring body 632 has a U-shaped longitudinal section. In addition, as shown in FIG. 5, the upper cover 6 further includes two recessed portions 64 (or only one) and a rectangular recess 65, and the recessed portions 64 are respectively formed at two corners of the top wall 61. Rectangular groove 65 is formed In the center of the top wall 61, the recessed portions 64 and the rectangular recesses 65 are used to reduce the internal volume of the air in the isolated transport case 100, thereby improving the intake speed and efficiency.

Referring to FIG. 6 , in addition to the embodiment, the annular spacer 5 and the adhesive ring 63 can also be designed such that the circumference of the annular spacer 5 sequentially forms the lower receiving portion 52 from the inside and the outside. a lower convex ring body 51, the lower convex ring body 51 extends horizontally outward from the lower receiving portion 52, and the close-contact ring 62 sequentially forms the upper convex ring body 632 and the upper receiving portion 631 from the inside to the outside, which The upper receiving portion 631 extends horizontally outward from the upper convex ring body 632 such that the upper receiving portion 631 can abut against the lower convex ring body 51 , and the upper convex ring body 632 abuts against the lower receiving portion 52 .

Referring to FIG. 7, in addition to the present embodiment, the annular spacer 5 can be designed to have a stepped portion 53 and an extending portion 54 extending from one end of the stepped portion 53. When the bottom ring 2 is spaced apart from the base 2 to cover the lower ring 51, the lower ring 51 can have a downward buffering space, and the ring spacer 5 and the sealing ring 63 are further To be tight, the extending portion 54 extends from the other end of the step portion 53 and extends into the base 2 for reinforcing the annular spacer 5 to the base 2 to reduce the chance of deflection.

Referring to FIG. 4, according to the above structure, when the upper cover 6 of the isolated transport case 100 is assembled on the base 2, the annular spacer 5 is sandwiched therein, and the upper receiving portion 631 is abutted. The lower convex ring body 51 and the upper convex ring body 632 abut against the lower receiving portion 52, so that the isolated transport case 100 has a contact tight contact formed by the upper receiving portion 631 and the lower convex ring body 51 abutting The inner ring and a contact tight outer ring formed by the upper convex ring body 632 and the lower receiving portion 52 abut against each other when the air intake operation is performed, the inner ring and the contact outer ring are contacted through the contact, thereby reducing the The opportunity for the internal gas of the isolated transport case 100 to leak out increases the airtightness.

With the above design, the upper receiving portion 631 is used to abut against the lower convex ring body 51. And the upper convex ring body 632 abuts against the lower receiving portion 52, and when the air intake operation is performed, the chance of the internal gas leakage of the isolated transport case 100 can be reduced, thereby improving the airtightness of the isolated transport case 100. At the same time, the isolated transport case 100 can be quickly inflated to a predetermined air pressure value during the air intake operation. Further, the two corners of the top wall 61 are formed by the recessed portions 64, whereby the volume of the internal air volume of the isolated transport case 100 can be reduced, and the intake speed and efficiency can be improved.

Although the present invention has been disclosed in its preferred embodiments, it is not intended to limit the present invention, and anyone skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. The scope of protection is subject to the definition of the scope of the patent application.

100‧‧‧Isolated carrying case

2‧‧‧Base

21‧‧‧ top surface

22‧‧‧ recessed ring

3‧‧‧Limited parts

4‧‧‧Filter module

5‧‧‧ ring gasket

51‧‧‧ Lower convex ring

52‧‧‧ Under the Ministry of Undertaking

6‧‧‧Upper cover

61‧‧‧ top wall

62‧‧‧ side wall

63‧‧‧Mixed ring

631‧‧‧Upper Department

632‧‧‧Upper convex ring

Claims (10)

An adhesive structure of an isolated carrying case comprises: a base; a ring spacer disposed on the base, a peripheral edge of the annular spacer having a lower convex ring body and a lower receiving portion; and an upper cover abutting against The upper cover includes: a top wall; a side wall extending downward from a periphery of the top wall; and a close ring extending horizontally outward from a bottom periphery of the side wall, wherein the close The ring has an upper receiving portion for the lower convex ring body to abut, and an upper convex ring body for abutting against the lower receiving portion. The close-knit structure of the isolated transport case according to the first aspect of the invention, wherein the circumference of the annular gasket sequentially forms the lower convex ring body and the lower receiving portion, the lower receiving portion is horizontal from the lower convex ring body Extending outwardly; and the abutting ring sequentially forms the upper receiving portion and the upper convex ring body, and the upper convex ring body extends horizontally outward from the upper receiving portion. The close-knit structure of the isolated transport case according to the first aspect of the invention, wherein the circumference of the annular gasket sequentially forms the lower receiving portion and the lower convex ring body, and the lower convex ring body is horizontal from the lower receiving portion. Extending outwardly; and the abutting ring sequentially forms the upper convex ring body and the upper receiving portion, and the upper receiving portion extends horizontally outward from the upper convex ring body. The close-knit structure of the isolated carrying case according to claim 1, wherein the lower convex ring body has an inverted U-shaped longitudinal section. The close-knit structure of the isolated carrying case as described in claim 1 of the patent scope, The upper convex ring body has a U-shaped longitudinal section. The close-knit structure of the isolated transport case of claim 1, wherein the upper cover further comprises at least one recess formed in at least one corner of the top wall. The close-fitting structure of the isolated carrying case according to claim 1 or 6, wherein the upper cover further comprises a rectangular groove formed in the center of the top wall. The close-knit structure of the isolated transport case of claim 1, wherein the base has a top surface and a recessed ring portion, and the recessed ring portion is formed on an outer peripheral side of the top surface for The annular gasket is placed. The close-fitting structure of the isolated transport case of claim 1, wherein the annular spacer further has a stepped portion extending from one end of the stepped portion to be spaced apart from the base. The close-fitting structure of the isolated carrying case of claim 9, wherein the annular spacer further has an extending portion extending from the other end of the step and extending into the base.