KR200350413Y1 - Clean room transportation package for process chamber kit - Google Patents

Abstract

The clean room transfer package is useful for transferring a process chamber kit having a plurality of chamber components of different shapes. The package has a first ledge having a first rim and a plurality of first troughs extending outward from the first ledge and extending outwardly from the second ledge. And a first rigid tray detachably assembled to a second rigid tray having a plurality of second trough portions. The second tray has a second rim which engages with the first rim of the first tray to form a seal. A plurality of conformal cells having different inner face cross-sectional shapes are formed by facing a pair of first and second trough portions, each conformal cell being one of the different chamber components of the kit. The cross-sectional shape of the inner surface coincides with the cross-sectional shape of the outer surface, thereby minimizing the movement of chamber components within the conformal cell during transfer. In addition, the state of the chamber components of each of the process chamber kits can be observed through the substantially transparent portion of the tray.

Description

CLEAN ROOM TRANSPORTATION PACKAGE FOR PROCESS CHAMBER KIT}

One aspect of the present invention relates to a mobile package for transferring a process chamber kit having different components into a clean room.

Various types of packages are used to transfer process chamber components to a clean room environment, a room that controls the atmospheric particle content in a clean room environment to process integrated circuit chips and displays without contamination. In one such package, the individual chamber components are surrounded by a sealed plastic bag that fits within the cutout of the foam block matrix. The foam block matrix is fixed in a component box and shipped to a distributor or customers in a shipping container. Clean room foam is a highly compressed sponge, polyethylene foam material, for example Zotefoam's "Plastazote LD-24" from FP Technologies, Ventura, CA. The foam block matrix comprises individual blocks formed of clean room foam bonded together to form the required cutout shape. Component boxes typically have sidewalls formed of plastic or other material that are joined by a metal rim and filled with a block matrix formed of foam. The component box has a handle that is convenient for transporting the packaged components to a clean room environment.

Conventional packages suffer from several problems associated with transporting and opening such packages in a clean room environment. For example, conventional packages often produced contaminants and released undesirable gases within the clean room environment. Typically, the shipping container is unpacked outside of the clean room and the internal component box is removed. When clean room foam is used, the foam block matrix is often unpacked in a clean room environment. However, during this unpacking or separation of components of the component from the foam block, individual particles or small debris in the foam fell by friction to create contaminant particles. Clean room foams also typically have a porous open cell structure, for example, with pores on the order of about 10 to 100 microns. Gas trapped in these pores can be released into the clean room environment. The bonding layer between independent blocks formed of foam used to create a three-dimensional block matrix also releases gas or produces polymeric contaminant particles.

In some cases, the foam material forming the block itself should not be introduced into the cleanroom, so that the packages of the individually sealed component bags were unpacked and transported to the cleanroom. During this transfer, the soft plastic used to form the sealable package around the individual component parts may rupture and contaminate the internal components by the external environment. Storing the soft plastic bags in a clean room environment for ultimate use was also difficult because the plastic bags could not be easily stacked and could be perforated. In addition, even the simple act of transporting individual component parts to some distance increased the risk of falling and damaging the parts.

An additional problem arises because the foam material and the outer box do not allow visual inspection of the contents inside. For example, if the chamber components break or break in a closed box, the above breakage could not be found before opening the box in a clean room environment. In addition, at intermediate transfer points, such as parts interim delivery, it was not possible to inspect the condition of the components in the package without opening the container and contaminating the component parts before shipping to customers. In addition, rigorous customs inspections, which are included in international shipments that require the opening of such containers to allow customs officials to verify their contents, require the seals to be destroyed in potentially harmful environments and, thus, parts are scratched after sailing. There was also.

Another problem arises because it is difficult to attach a label to a foam package of the prior art. Typically, the recess is machined inside the foam container by routing, and a thick epoxy layer is applied to the recess. The label was then fixed with a thick epoxy layer. However, such epoxy materials released gas when heated to a low pressure environment or to room temperature. Also during the routing process, the foam was broken, resulting in a package defect.

Another problem has arisen when transporting or shipping a process chamber kit having a plurality of different chamber components associated with one another. For example, the kit may include other portions formed of liners that align the walls of the process chamber. These liners were regularly cleaned, wiped back or replaced during operation of the chamber, so it was often necessary to ship the related liner parts of a kit at the same time. When these kits were packaged and shipped separately, the kits needed to be reassembled at the distribution center or production site, wasting resources and sometimes improperly assembling parts. The problem is that when unpacking a conventional package and transporting the individual components of a kit to a clean room, the problem is caused by misplaced or mixed with other components, especially if they are stored for some time before use. Worse. Storage in a clean room is desirable in order to reduce the downtime of the chamber in that component parts can be replaced immediately in case of failure or cleaning is required. Unsealed or loose parts kits could also be lost or stolen.

It is therefore desirable to have a package that enables the safe transfer of sensitive chamber component parts from a manufacturer to a clean room environment. Also preferred are packages that maintain an airtight seal from the external environment. Also preferred are packages that can be easily labeled. It is also desirable to have a package that can visually inspect internal components without breaking the seal of the package or opening the package. It is also desirable to transport and store kits of related parts so that they can be identified as needed. Also preferred is a package that can engage with equipment protection tape, seals, locks or other means.

The clean room transfer package of the present invention is useful for directly transferring a process chamber kit having a plurality of chamber components of different shapes. The package has a first ledge having a first rim and a plurality of first troughs extending outward from the first ledge. The second rigid tray is detachable from the first tray. The second tray has a second ledge having a second rim that engages with the first rim of the first ledge and forms a seal therebetween. The second tray also has a plurality of second trough portions extending outward from the second ledge portion. A plurality of conformal cells having cross-sectional shapes of different inner surfaces are formed by facing a pair of first and second trough portions when the two trays are assembled together. The cross-sectional shape of the inner surface of each conformal cell coincides with the cross-sectional shape of the outer surface of the chamber component so that movement of the chamber component inside the conformal cell during transportation is minimized. At least a portion of the first tray or the second tray is substantially transparent so that the state of the chamber components of each of the process chamber kits can be observed through the substantially transparent portion of the tray.

1 is a conveyance showing a first tray and a second tray facing each other with troughs defining a set of conformal cells holding a process chamber kit having different chamber components. Exploded perspective view of the package.

2 is an exploded perspective view of a tray having a side wall including a removable panel;

3A illustrates a transfer comprising a pair of matched trays defining conformal cells each having a cross-sectional shape of an inner surface that matches a cross-sectional shape of an outer surface of a particular chamber component of the process chamber kit. Schematic exploded cross section of the package.

(B) of FIG. 3 (a), after assembling the tray around the chamber components, the internal air is discharged through the valve outlet and the purged and dried air or inert gas is introduced through the valve inlet. Showing the conveyance package of the product.

4 is a schematic cross-sectional view of a trough portion with a trough wall that faces an inwardly forceful dimple that holds the chamber component in place when compressed;

5 is a schematic cross-sectional view of a stacked transfer package showing the stacked tabs and corresponding recesses engaged with each other.

* Description of the symbols for the main parts of the drawings *

20: mobile transfer package

22: process chamber kit

24a-f: chamber components

50, 60: tray

52, 62: cash register

54, 64: Rim

56a-f, 66a-f: Trough section

92a-f: cell

The movable transfer package 20 is useful for transporting and storing the process chamber kit 22 having a plurality of different chamber components 24a-f. The package 20 allows the chamber components 24a-f to be transferred directly to the clean room environment without being exposed to the clean room environment and without breaking the seal. Chamber components 24a-f are components that are part of process chambers, platforms, and gas supplies, and are used to fabricate integrated circuits such as semiconductor wafers or flat panel displays. Chamber components 24a-f are susceptible to contamination by dust particles and are often damaged when exposed to an external atmospheric environment such as oxidation in the air or corrosion by water vapor.

In general, the package 20 includes a pair of first and second trays 50 and 60 that face and face each other when assembled together as shown in FIGS. 3B and 5. The package 20 shown in the present invention is merely an exemplary embodiment according to the present invention, and should not be used to limit the scope of the present invention. The trays 50, 60 are made of a material that is strong enough to withstand external impacts during transport, and unlike the foam package, the trays 50, 60 are smooth, resilient and are not granular surfaces, so that the trays 50, 60 have no bearing on the surfaces of the chamber components 24a-f. It does not generate individual particles when rubbed. The surfaces of the trays 50, 60 are continuous, unbroken and non-porous, and when receiving chamber components 24a-f or chamber components located within the trays 50, 60 ( It is desirable that there are no individual particles that separate and come off when unpacking 24a-f). In one embodiment, for example, the smooth and resilient trays 50, 60 surface have an rms roughness of about 10 micro inches or less. The assembled pair of trays 50, 60 serve as a self-contained container for holding the process chamber kit 22 formed of the chamber components 24a-f, and the chamber components 24a-f into the clean room. It may have a built-in handle for direct transport. The assembled pair of trays 50, 60 may also be stored for a period of time in a sealed and stable environment in a clean room, disassembled only if you want to use the chamber components 24a-f immediately in the process chamber. Thus, any contamination of the chamber components 24a-f in the trays 50, 60 can be further reduced.

In general, the first tray 50 has a first rim 54 which engages the second rim 64 of the second ledge 62 of the corresponding second tray 60. One ledge part 52 is included. The ledge portions 52, 62 are parallel to each other and may be flat or angled strip materials formed of a rigid material. The ledge portions 52, 62 may also be formed in a circular, square or rectangular frame shape. Rims 54 and 64 are planar, substantially parallel to each other, and integrally formed along the outer periphery of trays 50 and 60. Each rim 54, 64 has a width sufficient for the rims 54, 64 to join together to form a surface seal. Rims 54 and 64 are generally smooth and continuous, but may also have seals protruding therefrom, as described below. Other embodiments of the rims 54, 64 may also be used, for example, the rims 54, 64 may have a central axis or center plane of the chamber components 24a-f carried in the trays 50, 60. It may be inclined or inclined at a matching acute or obtuse angle.

In the first trays 50 and 60, the plurality of first trough portions 56a-f extend outwardly and downwardly from the first ledge portion 52, as shown in FIG. 2. In this embodiment, the first ledge portion 52 is a rectangular open frame that extends or even surrounds the first trough portions 56a-f. The first trough portions 56a-f are each formed in a shape and size having an internal volume of a shape and size to match and accommodate a portion of the chamber components 24a-f. In the case of forming different trough portions 56a-f in a shape and size to accommodate the other process chamber components 24a-f, the depressions are vertically separated into the separation regions 120a-b. For example, the trough portion 56a may be formed to have a single depression that matches the external cross-sectional shape of a portion of the process chamber component 24a received within the trough portion 56a. The troughs 56a-f may also have different radii or widths integrated into one another so as to be received continuously into each other to accommodate the annular diameters of the different chamber components 24a-f. It may be formed to have a plurality of depressions such as recesses.

Similarly, the second tray 60 also has second trough portions 66a-f extending outward from the second ledge portion 64. When the two trays 50 and 60 are assembled, as shown in FIGS. 3B and 5, the specific second trough portion 66a faces the specific first trough portion 56a. And define a unique cell 92a having an inner surface cross-sectional shape 93a that coincides with the outer surface cross-sectional shape 94a of the particular chamber component 24a. Thus, each unique conformal cell 92a-f is within the cell 92a-f during transport since the contours of the cells 92a-f reliably match the contours of the chamber components 24a-f. It has an internal volume contour formed in a shape that reliably fixes certain chamber components 24a-f to minimize horizontal or vertical movement of the chamber components 24a-f. In this way, a plurality of conformal cells 92a-f having different inner surface cross-sectional shapes 93a-f are provided with a pair of first trough portions 56a-f and second trough portions 66a-f. ) Is formed by facing each other. The inner face cross-sectional shape 93a-f of each conformal cell 92a-f is reliably matched with the outer face cross-sectional shape 94a-f of the chamber components 24a-f. For example, the inner surface cross-sectional shape 93a of a particular cell 92a is the outer surface cross section of the chamber component 24a with a gap of about 5 to about 30 mm between the two surfaces 93a and 94a. It can be formed to reliably follow the outline of the shape 94a. However, other gap sizes are also possible, and the size of the gap depends on how tightly it is desirable to maintain the particular chamber component 24a in the cell 92a.

For example, the pair of first and second trough portions 56a-f, 66a-f form the kit 22 as a related part of a process chamber having a common function or common assembly purpose. And a shape, size, and spacing for receiving a set of chamber components 24a-f. For example, the trough portions 56a-f and 66a-f may be configured to hold other chamber components 24a-f that are all parts of the process chamber kit assembly 22. One example of a process chamber kit 22 includes, for example, a divided other wall liner portion that protects a portion of the interior chamber wall or another portion of the gas distributor. One example of another kit 22 is a concentric ring assembly, such as a shadow ring, an outer ring and a pumping plate, around the substrate in the process chamber. Another kit 22 may include a focus ring, chamber sidewall liners, and a substrate engagement ring. Each chamber component 24a-f of the kit 22 is a matching conformal cell formed of a pair of first and second trough portions 56a-f, 66a-f. Meshes with (92a-f).

The individual cells 92a-f, which are formed in matching pairs of the first and second trough portions 56a-f and 66a-f, are chamber components 24a-f within each cell 92a-f. ) Are separated by separation regions 120a-e that are sized to maintain sufficient gap between adjacent cells so that they do not touch each other during transportation. The separation regions 120a-e may be formed in a shape and size in which the cells 92a-f may be separated from each other when the trays 50 and 60 are coupled. However, to facilitate gas discharge and purge from the cells 92a-f, the separation zones 120a-e draw air from the cells 92a-f from a single outlet that accesses the entire cell assembly. It may also be shaped and sized to allow gaseous fluid communication between cells 92a-f to evacuate and likewise be replaceable from a single input. Appropriate gap size is determined by the size of adjacent chamber components 24a-f, and may be, for example, on the order of about 5 mm to about 40 mm. However, other gap sizes may also be used, depending on how tight the gap is to retain the chamber components 24a-f in the cells 92a-f.

In one embodiment, the second trough portion 66a-f of the second tray 60 has substantially the same shape as the first trough portion 56a-f of the first tray 50. When the two trays 50 and 60 are joined together, they are arranged in parallel in a mirror relationship to the first trough portions 56a-f. Since these shapes are substantially the same, both trays 50 and 60 of this embodiment can be manufactured more economically using a single mold having the same cross-sectional shape as described in detail below. . This embodiment is also particularly useful for transporting radially symmetric chamber components 24a-f, such as cylindrical or axially symmetric chamber components 24a-f. Substantially identical shapes mean the same cross-sectional shape, but one of the cross-sectional shapes may have additional shapes, such as protrusions or other shapes used for other purposes.

In yet another embodiment, the one or more first and second trough portions 56a-f, 66a-f are unitary when the chamber component 24b is positioned inside the trough portion 56b. It has trough walls 178a-b formed into a shape that applies a mechanical bias force therein to maintain the chamber component 24b at the contacts or plurality of contacts. The trough walls 178a-b are internally extending dimples 180 that are compressed when the chamber component 24b is positioned inside the trough portion 56b, as shown in FIG. 4. ) Thus, the dimple 180 is at the contact with the chamber component 24b which holds the chamber component 24b firmly inside the trough portion 56b to the minimum surface which is in direct contact with the chamber component 24b. The spring force is biased internally. The facing trough walls 178a-b also have opposing dimples 180a-b that exert forces in opposite directions on the chamber component 24b located in the trough portion 56b. In addition, as another method of applying such an inward force, for example, a flexible ring structure, a metal spring, a spring clamp (not shown) mounted on the outer surface of the trough portion 56b and weakly pressed. And a pad formed of a clean room compatible flexible material that is attached to the interior of the trough portion 56b at a suitable point. Such an embodiment provides for the surface of chamber components 24a-f or chamber components 24a-f that are brittle or easily damaged when rubbed against the inner surface of trough walls 178a-b during transport. It is advantageous to maintain.

In one embodiment, the rigid sidewalls 96a-d are provided to support at least one of the first tray or the second tray 50, 60. The side walls 96a-d extend around the trays 50 and 60 and have a height large enough to extend beyond the depth of any one of the trough portions 56a-f and 66a-f. The side walls 96a-d also have a vertical cross-sectional shape or an inclined cross-sectional shape that maintains rigidity during transport. In one embodiment, the sidewalls 96a-d include a substantially planar wall perpendicular to the plane of the ledge portions 52, 62. The planar wall has an outer circumferential lip that extends inward along all four sides of the wall to improve the shear strength of the sidewall structure. In addition, other rigidity enhancement structures, such as, for example, cross beams or patterns formed in hexagonal units, may be used to improve the strength of the sidewalls 96a-d. The side walls 96a-d may also be made of a composite such as an epoxy resin using other embedded materials that can improve structural rigidity.

In one embodiment, the sidewalls 96a-d include a set of removable panels 100a-d. Since each removable panel 100a-d has substantially the same shape, the panels 100a-d can be manufactured from a single mold. A suitable set of four panels 100a-d having the same shape is shown in FIG. 2. Each panel 100a-d is recessed from a major side wall of the panel 100a-d and is a right lip 101a-engaged with a corresponding mating slot 102a-d below the perimeter of the tray 50. d). The ledge portion 52 and the outwardly extending trough portion 56 of the tray 50 are positioned above four adjacent sidewall panels 100a-d, so that each lip portion 101a of the sidewall panels 100a-d is positioned. -d) engages into corresponding slots 102a-d in the bottom surface of ledge 52. A set of screws 103a-l and coupling clamps 105a-h can be used to couple panels 100a-d to ledge 52 or to each other.

Rim portions 54 and 64 of the first and second trays 50 and 60 are joined together to form an airtight seal 107 between the trays. The airtight seal 107 between the two trays 50, 60 prevents the interior chamber components 24a-f from being contaminated during transfer. For example, in one embodiment, the rims 54, 64 of one or more trays 50, 60 are gaskets, such as O-rings or other soft polymeric seals, as shown in FIG. 3 (b). It has grooves 108a-b that can accommodate 112a-b. The latches 82a-d attached to the first tray 50 and the latches 84a-d attached to the second tray 60 have two trays as shown in FIGS. 3B and 5. 50 and 60 are sealed in the gaskets 112a-b between the trays 50 and 60 to hold the airtight seal 107 therebetween. The latches 82a-d may be latches of the prior art, such as plastic strips having corrugated flexible hinge portions 122a-d attached to the panels 100a-d of the first tray 50. It has a claw 123a-d extending outward from 122a-d. In use, the claw portions 123a-d are bent outward to exert a force on the ends of the latch tabs 84a-d attached to the panels 100a-d of the second tray 60. In another embodiment, a series of raised U-shaped bulbous pillars in the rim 64 of the second tray 60 are shaped like corresponding bells in the rim 54 of the first tray 50. Coupling with the recesses forms a seal between them (not shown). In another embodiment, the second rim 64 has an outer lip lip (not shown) that snaps into a corresponding slot of the first rim 54 to form a seal, the trays 50 and 60. ) Can be separated from the engagement by pulling and separating the two rims 54, 64.

In addition, the package 20 of the hermetically sealed embodiment includes a first valve 140 for discharging the sealed conformal cell 92 and a second valve for introducing gas into the discharged cell 92. 144). For example, the first and second valves 140 and 144 are Schrader valves that introduce or discharge gas when a spring-loaded pin 148 is disposed in the center of the valves 140 and 144. ) The first valve 140 may be connected to a pump 156 for discharging the sealed cell, the second valve 144 may be a gas supply for introducing clean dry air (CDA) or inert gas into the sealed cell. And may be connected to 160. Alternatively, a single valve may be used for both the discharge and purge or fill function of the gas (not shown).

The opposing portions of the sidewalls 96a-d or the removable panels 100a-d may also have one or more pairs of built-in handle cutouts 98a-d facing each other. Handle cutouts 98a-d allow the operator to lift the package 20 and easily transport it to a clean room environment. Such handle cutouts 98a-d are useful because they do not extend out of the assembled package 20, thus taking up less storage space in the clean room. Handle cutouts 98a-d also better resist breakage during transfer. The handle cutouts 98a-d can also be easily fabricated inside the side walls 96a-d or the removable panels 100a-d without bonding additional components to the trays 50, 60. However, external handles may also be attached (not shown) on the sidewalls 96a-d or the removable panels 100a-d or on other surfaces of the trays 50, 60.

In use, one of the trays 50, 60, for example the first tray 50, is selected as the lower or base tray and positioned on the work surface. Each chamber component 24a-f is inserted into one of the open troughs 56a-f of the lower tray 50 in a vertical state. After filling the tray 50, the other tray 60 becomes an upper or cover tray, which extends out of the trough portions 56a-f of the lower tray 50. -f) over the part of the. Thereafter, the latches 82a-d are engaged with the latch tabs 84a-d to lock the upper tray 60 onto the lower tray 50. Each chamber component 24a-f is now fitted to engage a particular chamber component 24a-f and is secured in a cell 92a-f that is separate from the other chamber component 24a-f. . In addition, since all chamber components 24a-f are contained within a single package 20, the distributor or customer can more easily locate parts of the entire kit. In addition, where at least a portion of the rigid trays 50, 60 are formed of a substantially transparent polymer material, it becomes easy to identify the chamber components 24a-f corresponding to the particular kit 22 in the package 20.

Rigid trays 50, 60 are formed in a number of different materials that provide suitable stiffness to transport, ie trays 50, 60 and allow chamber components 24a-f to be located in trays 50, 60. It can be made of a material that is strong enough to absorb the impact without breaking when it is made. The rigid material of the trays 50, 60 should have an elastic tensile modulus of at least about 1800 Mpa as measured for example at 1 mm / min under ISO 527.

Preferably at least a portion of the trays 50, 60 or the entirety of the trays 50, 60 are substantially such that they can permit visual inspection of the chamber components 24a-f held inside the trays 50, 60. It is formed of a transparent rigid material. Substantially transparent means translucent or transparent to visible light. For example, a suitable transparent material has a visible light transmittance of at least about 80%. In addition, the surface of the first trough portion or the second trough portions 56a-f and 66a-f of the assembled trays 50 and 60 may be polished to improve the clarity of the transmitted light and the field of view. The transparent portion allows the operator of the clean room to visually grasp or inspect the contents of the trays 50 and 60 without opening and breaking the seal. For example, in one embodiment, only one or more of the first or second trough portions 56a-f, 66a-f are formed of a substantially transparent material, but also both trays 50, 60. May be formed of a substantially transparent material.

The substantially transparent portion also allows the identification label or component's barcode to remain visible from the outside with the barcode attached to the inside of the tray. This prevents damage to the label during transport or storage. The rigid surface of the tray also allows the labels of the prior art to be easily attached onto the tray without the need for machined recesses or special epoxy adhesives required for clean room foam products.

Suitable substantially transparent and rigid materials are, for example, polyethylene terephthalate (PET), glycol modified PET (PETG), directional PET (O-PET), or polyethylene naphthalate (PEN), or mixed with one another or with other resins. Thermoplastic polymers, such as high density polyethylene, such as polymers based on preformed polymers and the like. Preferably, the transparent, rigid material is softened when heated with polyethylene terephthalate glycol (PETG), such as PAL_G sheet manufactured by Palram, Ramat Yohanan, Israel. A moldable thermoplastic material that is soften to form the shape of a mold. Rigid trays 50 and 60 can be molded from a single blank sheet formed of thermoplastic material into a single integral part using conventional plastic molding techniques. The blank sheet can be thermoformed into thin-walled trays that have been thermally cured using equipment such as conventional thermoforming and vacuum assisted, air assisted, mechanical plug assisted, or mating molds.

In one of the trays 50 and 60 recipes, the thermoplastic sheet is placed over the female mold or male mold of the tray and heated until it softens into the mold. The preheated thermoplastic sheet is inserted into the mold and heated likewise by using the shape of the opposing mating mold or by applying pressure by removing the sheet from under the mold. For example, when the sheet is heated to soften into the female mold, the male is used to apply isotropically opposite pressure on the other side of the heated sheet, the mold gradually cools to room temperature and functions as a secondary cooling mold. The thermoplastic sheet is thermoformed by maintaining contact with the heated mold surface over a sufficient time to fully match the cross-sectional shape of the mold, after which tray preforms are removed from the mold cavity. It is also possible to evacuate the air by applying a vacuum to the mold. The tray preform is then trimmed or machined to add handle cutouts 98a-d and other protrusions and lock tabs and shapes to form other shapes. The sheet must be heated above the Tg (glass transition temperature), and below the glass transition temperature, it is excessively struck during positioning over the mold cavity. In thermoforming, the sheet temperature is preferably in the range of about 120 ° C to about 240 ° C. The mold may be formed of wood, resin or metal such as aluminum or even steel. In order to manufacture a small amount of trays 50 and 60, a soft material such as wood can be used.

Instead of a single ply sheet, a multilayer ply sheet may be used. The multilayer ply sheet may also include a first ply composed of a thermoplastic polymer, such as PETG, and a second ply composed of a composite, such as a glass fiber epoxy sheet. In addition, the trays 50 and 60 may, for example, be made of a material that is substantially transparent to the side walls 96a-d or the removable panels 100a-d, while some of the troughs 56, 66 are made of a substantially transparent material. Other parts, such as, may be synthesized in an epoxy resin to be made of a more rigid or strong material, such as a glass fiber strand sheet.

In other embodiments, the trays 50, 60 or portions of the trays 50, 60 are made of metal such as aluminum or steel. However, this embodiment will not be able to observe the status of the chamber components 24a-f or inspect the labels located inside the trays 50, 60 after shipping. Thus, the trays 50 and 60 will continue to observe chamber components 24a-f in the troughs 56a-f and 66a-f through the transparent walls of the troughs 56a-f and 66a-f. Can be manufactured to have both opaque portions, such as opaque ledges 52 and 62, coupled to substantially transparent trough portions 56a-f and 66a-f.

In another embodiment, portions of the trays 50 and 60 may be colored according to a color selected from different colors and a color code table listing the part numbers of the corresponding kit 22 or chamber components 24a-f. Is numbered. For example, substantially transparent portions of trays 50 and 60 may be colored, and other portions, such as opaque portions of trays 50 and 60, may be colored. The color may include any color within the visible wavelength from the color spectrum, and may include black and white. The color code table lists the individual colors associated with the corresponding process chamber kit 22, chamber components 24a-f, or process application. For example, the table lists the blue associated with the aluminum etch chamber process kit or the yellow or orange associated with the copper chamber kit. This color code notation allows the operator of a clean room to easily identify and properly identify spare parts for use in a particular chamber or application. Thus, the seal of the package 20 is not broken to inspect the chamber components 24a-f to determine function, and the integrity of the chamber components 24a-f can be preserved for a long time.

The list of color codes is also the same chamber component, but may also associate different colors for process chamber kit 22 having chamber components 24a-f used for other process applications that are incompatible with each other. . For example, aluminum and copper wiring fabrication processes use process chamber kit 22 that includes substantially the same chamber components 24a-f. However, once such a process chamber kit 22 is used in a first type of process chamber performing a first process application, the second type of process used for other process applications is likely to contaminate the second process chamber. It can no longer be used in the chamber. This situation typically occurs when the kit 22 of chamber components 24a-f used in one of the process chambers, such as an aluminum deposition or etching chamber, is sent to a cleaning or purifying manufacturing apparatus. Chamber components 24a-f are returned to the customer after being cleaned or cleaned. At this time, the package 20 for the chamber components 24a-f is color coded to indicate a previous aluminum application, so that the chamber components 24a-f inadvertently become accidental in a copper deposition or etch chamber or process. It cannot be used.

Package 20 may also have stack tabs 170 and corresponding recesses 174 that engage each other to stack one or more packages 20 in a line in a clean room. As shown in FIG. 5, the upper surface of the first tray 50 of the first package 20 has four tabs 170 located at four corners of the surface, and corresponding ribs of the lower surface of the second tray 60. It may have a recess 174. In the case where the first package 20 is stacked over the second package 22, the four tabs 170 of the second package 21 have corresponding recesses 174 on the bottom surface of the first package 20. It meshes with me. The engagement of the tab with the recessed portion ensures that the stacked packages 20, 21 are interlocked with one another so that they do not become unstable when stored in a clean room.

The present invention thus enables the direct transfer of process chamber components 24a-f, such as kits of components 22, from a manufacturer or a delivery center to a customer's clean room. The package 20 is reusable because it can easily clean a solid and impermeable tray surface. The trays 50 and 60 have a smooth surface rather than a granular surface that can be easily peeled off by friction to minimize contamination. The conformal cells 92a-f of each conformal package 20 may also be used to hold specific chamber components 24a-f of the process chamber kit 22, and the shape of the chamber components 24a-f. In line with, the breakage during transport is minimized. The transfer of the cells 92a-f also allows visual inspection of the contents of the package 20 and inspection of each chamber component 24a-f without opening and breaking the seal and without contaminating the article.

Although the present invention has been described in detail in considerable detail in accordance with the preferred embodiment, other embodiments are possible. For example, the cells 92a-f may be integrated together to form a continuous volume having different radial cross sections to convey a single chamber component having a complex outer surface shape. The shape of the individual cells 92a-f is also adapted to suit other purposes, for example, an external cross-sectional shape that does not come into contact with the component parts, with recesses of corresponding shapes in the shipping container for the component parts. It may be formed in a shape that is combined with. Accordingly, the claims of the appended utility model registration claims are not limited to the details of the preferred embodiments contained herein.

According to the present invention, a portable package for transferring a process chamber kit having different components into a clean room is provided.

Claims (16)

In a clean room transfer package for a process chamber kit having a plurality of chamber components of different shapes, (a) a first rigid tray having a first ledge having a first rim and a plurality of first troughs extending outwardly from the first ledge; rigid tray, (b) detachable from the first tray, A second ledge portion having a second rim that engages with the first rim of the first ledge portion and forms a seal therebetween; A second rigid tray having a plurality of second trough portions extending outwardly from the second ledge portion, A plurality of conformal cells having different cross-sectional shapes of the inner surface are formed by facing the pair of first and second trough portions, and the cross-sectional shape of the inner surface of each of the conformal cells is formed by the chamber component. Matched with the cross-sectional shape of the outer surface to minimize movement of the chamber components within the conformal cell during transport, At least a portion of the first tray or the second tray is substantially transparent such that the state of each of the chamber components of the process chamber kit can be observed through the substantially transparent portion. The method of claim 1, And the first and second trough portions that face each other have substantially the same inner surface cross-sectional shape, and are disposed in parallel in a mirror relationship with respect to each other. The method of claim 1, At least one of the first tray or the second tray comprises a rigid sidewall having a height greater than the depth of any of the conformal cells. The method of claim 3, wherein And the opposite portions of the side walls each comprise a handle cut-out. The method of claim 4, wherein And said side wall comprises a set of removable panels that can be joined together. The method of claim 1, At least one of the first trough portion or the second trough portion is configured to apply a mechanical bias force therein to retain the chamber component at the contact when the component is positioned within the trough portion The transport package, characterized in that. The method of claim 1, A groove in the rim of at least one of the first tray or the second tray and a gasket seal in the groove to form an airtight seal between the first tray and the second tray. package. The method of claim 1, And a latch tab and a latch tab for locking the first tray and the second tray together. The method of claim 1, Wherein at least a portion of the first tray or the second tray is colored according to a color selected from a color code table having a color list and associated process chamber kits. The method of claim 9, Wherein said list of color codes has the same chamber components but relates different colors to process chamber kits used or to be used in different processes. The method of claim 9, And wherein said substantially transparent portion is colored. In a clean room transfer package for a process chamber kit having a plurality of chamber components of different shapes, (a) a first frame having a first rim, a rigid and substantially transparent first tray having a plurality of first troughs extending outwardly from the first frame, (b) detachable from the first tray, A second frame having a second rim, A substantially transparent second rigid tray having a plurality of second trough portions extending outwardly from the second frame and having a second trough portion having substantially the same cross-sectional shape of the first trough portion and the inner surface thereof; (c) a gasket seal in a groove of the first frame or the second frame, (d) a latch on the first tray and a latch tab on the second tray, The first tray and the second tray are joined together, and when the latch is engaged over the latch tab, an airtight seal is formed between the two trays, A plurality of conformal cells having different cross-sectional shapes of the inner surface are formed by facing the pair of first and second trough portions, and the cross-sectional shape of the inner surface of each of the conformal cells is formed by the chamber component. Matching pairs with the cross-sectional shape of the outer surface minimize the movement of the chamber components within the conformal cell during transfer, And wherein said substantially transparent first or second tray is capable of observing a state of each of the chamber components of said process chamber kit therethrough. The method of claim 12, At least one of the first tray or the second tray has a height greater than the depth of any of the conformal cells, the sidewalls comprising a set of removable panels that can be joined together . The method of claim 13, And the opposite portions of the sidewalls each comprise a handle cut-out. The method of claim 12, At least one of the first or second trough portion is shaped to apply a mechanical bias force therein to retain the chamber component at the contact when the component is positioned within the trough portion The transport package, characterized in that. The method of claim 12, Wherein at least a portion of the first tray or the second tray is colored according to a color selected from a color code table having a color list and associated process chamber kits.