M255401 捌、新盤說明： 【新型所屬之技術領域】 本新獾的一特點關於用以傳輸一具有不 室配件至一潔淨室的可攜式盒。 【先前技術】 許多不同型式之包裝係用以傳輸處理室 淨室環境中’該室係環境中之周圍微粒内容 允許無污染地處理積體電路晶片與顯示器 中，個別的室組件係被密封塑膠袋圍繞而疊 發泡塊狀母體物内。該發泡塊母體物係被固 且在一運送容器中運送至批發商地點或客戶 件係一高度壓縮、海綿狀、聚乙烯發泡材料 國加州 Ventura的FP科技公司，Zetefoam LD-24”。該發泡塊母體物至少包含潔淨室 塊，其係彼此連結以形成需求之挖空形狀。 具有與金屬邊緣接合之塑料或其他材質的側 泡之塊狀母體物。該組件盒具有把手，以有 裝之組件至潔淨室環境。 習知之包裝在有關傳輸此包裝且在潔淨 包裝上會有一些問題。例如，習知包裝經常 土兄中產生污染及不符合需求之逸氣。通常， 潔淨室外拆封，且移出内部之組件盒。當使 件時，該發泡塊狀母體物經常係在潔淨室環 同組件之處理 組件進入一潔 物經控制，以 。在一種包裝 置於一挖空的 設於一組件盒 。潔淨室發泡 ，諸如來自美 之 “Plastozote 發泡件之個別 該組件盒通常 璧，且填充發 助於傳輸經包 室環境開啟此 會在潔淨室環 速送容器係在 用潔淨室發泡 境内拆封。然 M255401 而在此拆封且將組 或該發泡的小塊可 發泡件通常具有一 約1 0至1 0 〇微米。 環境中。用以產生 層也可逸出氣體或 在一些情況下 淨室中，因此個別 中。在此傳輸中， 軟質塑料可能破裂 淨室環境内儲存軟 為其等不易堆疊且 件一段距離之行動 因為該發泡材 物而會產生進一步 矣且件破裂或有缺陷 發現該破裂。再者， 處，已包裝組件之 該容器且污染該組 嚴袼的海關檢查會 物’此時必然會在 該零件在完成行程 又因為難以附 題。通常，會藉由史 件零件從發泡塊中移出_，個別的顆粒 被搓離且產生污染微粒。再者，潔淨室 多孔之開放式蜂窩結構，孔尺寸（例如） 陷於此等孔中之氣體可逸出進入潔淨室 三維結構母體物之發泡件隔塊間的黏結 產生聚合物污染微粒。 ，該塊件之發泡材料本身不能被帶進潔 的密封組件袋必須拆封而後帶入潔淨室 用以圍繞個別組件以形成該可密封盒之 ’造成内部零件受外部環境污染。在潔 質塑膠袋以供最後使用也是較困難，因 可能被戳破。再者，只攜行該等個別組 會有掉落與損壞該零件之危險。 料與外盒不能允許目視檢查其内之内容 之問題。例如，如果在該封閉盒内的室 ’通常在潔淨室環境中打開盒子後才會 在一中間轉送點（諸如一零件分發庫房） 狀態在運送至消費者前，無法在不打開 件下加以檢驗。此外，在國際間轉送時 要求打開此容器以允許關員驗證該内容 可能不利的環境破壞密封，且可能造成 前持續地遭到刮傷。 著標籤於習知發泡盒上而會產生另一問 δ槽將一下凹區域加工至該發泡容器内， 4 M255401 而後施加一厚環氧格^ ja #从 ^ <巩樹月曰層於該凹處内。接著 該厚環氧樹脂層。麸而，&后也匕 然而，此厚環氧樹脂材料可 環境中或當被加熱i I 、田士 “、、至甚至室溫時逸出氣體。此 材在路程中可能碎冑，因此產生有缺陷之包裝。 曰傳輸或運迗具有彼此相關之一些不同室組 理室配件時會產生另一問題。例如，該配件可至 襯層之不同部以作為該處理室壁之襯層。此 般係在該室操作時加以定期潔淨、刷新或替換，^ 需要同時運送相關襯層零件之配件。t此配件係： 裝與運送’會需要在一分發中心或消費者所在幻 配件’浪費資源且有時導致零件之不正確組裝。^ 拆裝習知包裝且傳輸一配件之個別組件進入潔淨^ 形惡化’在其中該等零件會造成誤放或與其他組子 特別是如果在使用前需儲存一些時間時。儲存在3 係希望藉由當一組件失效或需要潔淨時立即更換， 室之停工時間。未密封或鬆散之零配件也可能遺失 因此，需求具有一包裝，該包裝允許一敏感七 件可安全地從製造廠傳輸至一潔淨室環境。同時霄 裝維持對外部環境之氣密密封。進一步需求該包| 標示。同時需求具有允許目視檢查内部零件而不座 或打開該包裝之包裝。也需求傳輸與儲存一套相职 視需要時可加以辨識。再者，需求該包裝能夠與右 帶、密封件、鎖或其他構件適配之包裝。 灸標籤至 I 一低壓 該發泡 •的一處 包含~ 麵*層+ 此通常 開地包 組裝該 問題當 時會更 >昆淆， 淨室内 以減低 乞遭竊。 室組零 求該包 可易於 壞密封 零件且 竄改膠 M255401 【新型内容】 一潔淨室傳輸盒係用以傳輸具有複數個不同形 件的一處理室配件直接進入一潔淨室環境。該盒至 具有一包括~第一邊框之第一架板的一第一堅固匣 數個從該第一架板向外延伸之第一凹槽。一第二堅 可從該第一匣分離。該第二匣具有一包括一第二邊 二架板，該第二邊框與該第一架板之第一邊框耦合 間形成一密封。該第二匣也具有複數個從該第二架 延伸之第一四槽。當該二匣組裝在一起時，複數個 同内表面形狀之順形凹穴係藉由將成對之第一與第 面對面而形成。各順形凹穴之内表面形狀匹配一室 外表面^/狀，以使當傳輸時在該順形凹穴中之室組 動會最小。該第一或第二匣的至少一部份係實質上 以使該處理至配件之各室組件的狀態，可經由該實 明部份觀察到。 【實施方式】 一可攜式傳輪盒20係用以傳輸與儲存一處 22 ’其具有—些不同室組件W-f。盒20允許室！ 被直接傳輸進人—潔淨室環境，@不曝露於該環 壞密封。室組# 24a-f係該處理室、平台與氣體 部份的零件，其等係用於積體電路(諸如半導體晶 顯示器)之製造。室組件24a_f係對灰塵微粒之污 且當曝露於外部周遭環境時有時可能易於損壞， 狀室組 少包含 ’及複 固匣係 框之第 以在其 板向外 具有不 二凹槽 組件之 件的移 透明， 質上透 室配件 卜 24a-f 且不破 應器之 與平面 敏感， 如因為 6 M255401 來自空氣的氧化或由水蒸氣造成之腐蝕。 大體上，盒20至少包含一對第一與第一 當其等組裝在一起時，係如第3b盥第 匣50 60， 面對面。在此顯示之盒2。只是依照：新=示相反且彼此 實施例，且不應被用以限制本新型之範脅。一代表性具體 一足夠堅固之材料製造，以在傳輸時承：外！ ：〇、60係由 有一光滑、彈性且不粗較之表面，在與衝擊，且具 面磨擦時不會釋出個別的 欢、，，且件24a-f之表 該匣50、60之表面係連 皿。較佳的是， 、只不破裂且非多？丨认 一室組件24a-f或在拆裝 夕孔性，且當容置 #哪裝置於匣5〇、6〇内 時，不會出現可剝落之 至組件24a-f 別顆粒。在一型+丄 50、00之光滑與彈性 主武中，（例如）匣 rrniQw^ ^ 、 面可具有少於約10檄蚪夕的士拍 (rms)粗度。經組裝成 儆吋之均方根 之匿50、60功能兔 之谷器，以容置室组佚 為—可自行站立 可内建把手以傳輸室44Γ的一處理室配件22,且甚至 對之匣50、60也可在〜4a-f直接進入潔淨室。組裝成 達-段時間，1只有/封與穩定之環境内儲存在潔淨室 24a-f時才拆裝，因此 至内使用室組件 24a-f受污染。 壤-步減少在E 5。、60内之室組件 大體上，第一 g $ 览 ^ 至少包含一具有一第一 546¾ 一第一架板52，該笫〜* 運札《 ：>4的 邊框54可耦合至一第-兩楚 二架板62的相對應— 第一 E 60之第 平行由替Ιϋβ 第—邊框64。架板52、62可為彼此 千灯由堅固材料锢忐令 .-.^ . 平面或有角度之條帶。架板52、62 也可成形為一呈有圓彤 ν、方形或矩形之框架。邊框54、64 7 M255401 係平面狀且實質上彼此平行，且係圍繞匣50、60之周邊成 一體。各邊框54、64具有足夠之寬度以允許邊框54、64 相互結合形成一表面密封。大體上，邊框54、64係光滑且 連續，然而其等也可如上述具有從其延伸之密封突出件。 也可使用其他型式之邊框5 4、6 4，（例如）邊框5 4、6 4相 對於裝載於匣 5 0、6 0之室組件2 4 a - f的一中心軸或中心 面，可傾斜或以互相匹配之銳角與鈍角成斜度。 在第一匣50中，複數個第一凹槽56 a-f從該第一架板 52向外且向下延伸，如第2圖所示。在此型式中，第一架 板5 2係一繞（或甚而可圍住）第一凹槽5 6 a- f延伸之矩形開 口框架。第一凹槽56a-f係各具形狀且其等之尺寸可形成 一内容積，其形狀與尺寸能吻合地容置一室組件24 a-f之 部份。當不同凹槽56a-f具有之形狀及尺寸係容納不同室 組件24a-f時，該等凹處係以隔離件部份120a至b軸向分 隔。例如，一凹槽5 6 a可經成形以具有一單一凹處，該凹 處吻合一被容置於凹槽56a的處理室組件24a之部份的外 部形狀。凹槽5 6a-f也可經成形以具有複數個凹處，例如 具有不同半徑或寬度之凹面，其等係經整合彼此連續地連 貫在一起，以容納室組件24a-f的不同圓周直徑。 同樣地，第二匣60也具有複數個從第二架板62向外 延伸之第二凹槽66a-f。當二匣50、60組裝時（如第3b與 5圖所示），一特定第二凹槽66a相對地面向一特定第一凹 槽56a以界定一獨特的凹穴92a，該凹穴92a具有與一特 定室組件 24a的一外部表面形狀 94a吻合之内表面形狀 8 M255401 …因此’各獨特之順形凹穴92a-f具有經成形以穩固地 失持預疋至2件24a-f之内容積輪廓，以使在凹穴92a-f 中的室組件24a-f在傳輪中之橫向或垂直運動最小，因為 凹八92a-f之輪廓係緊密地匹配室組件24a_f的輪廓。依此 方式’複數個具有不同内表面形狀93a-f之順形凹穴92a-f 係由成對之面對面第一與第二凹槽56a-f、66a-f形成。各 順形凹穴92a-f之内表面形狀93a-f緊密地匹配一室組件 24a-f的外部表面形狀94a-f。例如，一特定凹穴92a之内 表面形狀93a可經成形以緊密地隨著一室組件24a之外表 面形狀94a的輪廓，其中介於二表面93 a、94a間之間隙約 5至約3 0亳米。然而，其他間隙尺寸也可行，間隙之尺寸 視需要多緊密地將該特定室組件24a固定於凹穴92a中而 定。 例如’成對之第一與第二凹槽56a-f、66a-f可經成形、 定尺寸與隔開以容納一組室組件24a-f，其等組成具有共同 功能或共同組裝目的之處理室的相關零件之配件22。例 如，凹槽56a-f、66a-f可經構成以固定全部為一處理室配 件總成22零件的不同室組件24a-f。一處理室配件22之型 式含有（例如）用以覆蓋内部室壁一部份的一壁襯層之不同 片段部份’或氣體分配器的不同部位。配件2 2的另一實例 係在一處理室中繞一基板置放之同心環（諸如一遮護環、外 環與抽吸盤）等的一總成。又另一配件22可包括一對焦 壞、一至侧璧槪層與一基板夾環。該配件22之各室組件 24a-f藉由〜對第一與第二凹槽56a-f、66a-f適配於一匹配 M255401 之順 別凹 以維 内之 之形 隔離 隔離 通， 的單 一適 可從 係視 中而 上與 50、 第一 型式 形狀 有徑 室組 該等 突出 形凹穴92a-f中。 由成對匹配之第一與第二凹槽56a_f、66& £形成之個 穴92a-f可由隔離件部份120a_e分隔開，其等經成形 持在鄰近凹穴間的一足夠間隙，使得在各凹穴92a f 室組件24a-f在傳輸中不會彼此接觸。隔離部份12〇&_6 狀與尺寸使得當匿5〇、6〇耦合時，凹穴92af係彼此 。然而，為有助於氣體從凹穴92af中排出與清淨， 部份12〇a-et形狀與尺寸允許氣體在mu間流 因此在……之空氣可從_進入整個凹穴總成 :輸出口排出’且同樣地從-單-輸入口更換空氣。 :之間隊係視相鄰室組件2…尺寸而定且 毫米至約40毫来。然而，其他間隙尺寸也可行， :要多緊密地將一室心牛24a_f固定於—凹穴 在-型式中，第二匣6〇之第二凹槽“ 第…。之第一凹槽56a_"目同 也具有實質 ⑼係連結在—起時，第二凹…係二且當二昆 凹槽56a-f併罟囡a a笪且古电、兄射關係與 f併置。因為其專具有實質上相同开，壯… 的"匣50、6〇可更經濟地使用一具有如/ 此 之單-模具製造…，此型式係特別有：相同斷面 向對稱性之室組件24 a-f(諸如圓柱形），、泉載具 件24a-f。實質上相同之形狀意指相同斷面广對稱的 形狀之一可具有額外地特徵^，諸如_用*复 然而 件或其他特徵。 、，、他目的之 10 M255401 在又另一型式中，一或多數之第一與第二凹槽56a-f、 6 6a-f具有的凹槽壁l78a-f，係經成形以當室組件24b置於 凹槽56b内時’在單一或多接觸點處施加一向内機械偏壓 力以固定一室組件24b。凹槽壁178a_i)可具有一向内延伸 之凹處180(如第4圖所示），係當一室組件24b置於該凹 槽56b内時受壓縮。結果，凹處18〇施加一彈性向内偏壓 力於與室組件24b之接觸點處，以與室組件2仆直接接觸 之最小面積將室組件24b穩固地夾持在凹槽56b内。相對 面之凹槽壁nsa-b也可具有相對之凹處l8〇ab，以施加反 向力於置於㈣56b中之室組件24b。也可用其他施加此 :向内力之方法，例如柔性環結構、金屬彈簧、卡簧(未顯 示）專裝δ又於凹槽56b之外表面以救料从 M稍微地加以壓縮，以及在 適當點供應予凹槽56b内部之潔淨室相容柔性材料製成之 墊。此-型式係有利於在傳輸中固定室組件24"= 向凹槽壁178a-b的内表面時易 或备t 24a-f的一表面。 碎次易於損壞之室組件 在一型式中，會提供堅固之側 第…0、60中至少一者。側壁96a 克按第-或 且具有足夠大之高度以延伸超過任何凹槽Μ 60延伸， 深度。侧壁96a-d也經建構以罝有 f 66a-f之 性之垂直或傾斜形狀。在一型式办 ϋ在傳輪時維持堅固 飞中，側壁96 一垂直架板52、62之平面的一竇暂τ 至少包含 、 負平面璧。兮见 沿該壁所有四個側面向内延伸k — A 面壁具有 ^ 圍繞周、惠 進側壁結構之剪力強度。也可使 °狀件，以增 外的堅固性增強結構 11 M255401 (諸如交叉樑或六角形單位圖案），以增強側壁96a-d的強 度。側壁96a-d也可由一複合材料製造，諸如具有其他增 進結構堅固性之内嵌材料的環氧樹脂。 在一型式中，側壁 9 6 a - d至少包含一組可移式面板 100a-d。各可移式面板100a-d可具有實質上相同形狀，因 此面板100 a-d可從一單一模具製造出。一組具有相同形狀 之適當四面板100a-d係顯示於第2圖。各面板100a-d至 少包含一由面板 100a-d之主側壁面向下凹之直角唇狀件 101 a-d，且係適配位於匣 50之周邊下的一對應匹配槽 1 02a-d中。具有向外延伸凹槽56a之匣50的一架板52係 置於四個相鄰側壁面板100a-d上，因此側壁面板 100a-d 之各唇狀件 101 a-d會適配架板 52下表面中的一對應槽 102a-d。一組螺絲103a-l與結合卡座105a-h可用以相互結 合面板100a-d與架板52。 第一與第二匣50、60之邊框54、64可被耦合在一起， 以在該等匣中形成氣密密封107。二匣50、60間之氣密密 封1 07提供在其内之室組件24a至f的無污染傳輸。例如， 在一型式中，一或多數匣50、60之邊框54、64具有可容 置一墊片112 a-b (諸如Ο形環或其他軟質聚合物密封件）之 溝槽108a-b，如第3b圖所示。裝附至第一匣50之閃鎖82a-d 與裝附至第二匣60之閂鎖鍵84a-d允許二匣50、60在匣 50、60間之墊片112a-b處密封，以維持在其間之氣密密 封107，如第3b與第5圖所示。閂鎖82a-d可為一習知之 閂鎖，諸如一具有一波狀彈性鉸鏈部份122a-d裝附至第一 12 M255401 匣50之面板l〇〇a_d的塑料條帶，與一具有從鉸鏈部严 122a-d向外延伸之爪部份123a-d。在使用中，爪部份η〕习 樞轉出且用力覆蓋至裝附於第二匣6〇面板l〇〇 d d之閂鎖 鍵8 4a-d的末端。在另一型式中，在第二匣6〇之邊框 内一系列高起的U形球狀樁，會耦合至第一匣 I邊框 54内的相對應鐘狀凹件，以在其間形成一密封（未顯示） 在又另一型式中，第二邊框64具有一周邊唇狀件， 丨丁 Γ扣入 第一邊框54中的一對應槽申以形成密封（也未顯示），且在 E 50、60喷合後，可藉由將二邊框54、64拉離開後解除 嚙合狀態。 * 盒20之氣密密封型式也可包括一用以將該組密封順 形凹穴92排出空氣的第一閥140，及一用以將空氣導入已 排氣之凹穴92的第二閥144。例如，第一與第二閥14〇、 W4可為Schrader閥，該閥當該等閥140、144中心的一彈 簧加載銷148轉位時，可允許氣體導入或排出。第一閥14〇 可連接至一將密封之凹穴排氣的泵156，而第二閥144可 連接至一導入潔淨乾空氣（CDA)或鈍氣進入密封凹穴内之 氣體供應器16〇。或者是，可使用一單一閥用於排氣與氣 體清淨或填充之功能（未顯示）。 側壁96a-d(或可移式面板lOOa — d)的相對部份也可具 有一或多數彼此相對之内建把手挖空部份98a_d。把手挖 a部伤9 8 a - d允许操作員提起且易於傳輸盒2 〇至潔淨室環 境。此把手挖空部份98a-d因為不會突出已組裝盒2〇外而 具有優勢，且因此佔用較少之潔淨室儲存空間。把手挖空 13 M255401 1:二在傳輪中較能防止破損。把手挖空部份㈣ 令易製造於側壁96a-d或可移式面板i〇〇a d中 結合其他額外零件至S5GH而，也可將外部把^M255401 Description of the new disk: [Technical field to which the new type belongs] A feature of this new device is to transport a portable box with room accessories to a clean room. [Previous technology] Many different types of packaging are used to transfer the clean room environment of the processing room. 'The surrounding particles in the room environment allow the pollution-free processing of integrated circuit chips and displays. Individual room components are sealed with plastic. The bag is surrounded and stacked inside the foamed block-shaped matrix. The foam block precursor is fixed and shipped to a wholesaler's location in a shipping container or a customer piece is a highly compressed, sponge-like, polyethylene foam material. FP Technology Corporation, Ventura, California, Zetefoam LD-24 ". The foam block precursor includes at least a clean room block, which is connected to each other to form a desired hollowed-out shape. A block-shaped precursor having side bubbles of plastic or other materials joined to a metal edge. The component box has a handle to Installed components to the clean room environment. Conventional packaging has some problems in transporting this packaging and in clean packaging. For example, conventional packaging often produces contamination and unsatisfactory outgassing in soil. Usually, clean outdoor Unpack and remove the inner component box. When making parts, the foamed block-shaped parent body is often tied to the clean room ring and the processing components of the component enter a clean room to be controlled. In a package placed in a hollowed out It is located in a component box. Clean room foam, such as individual "Plastozote foam parts" from the United States. The component box is usually 璧, and the filling is to help transport the environment through the package room. In this case, the fast delivery container will be unsealed in the clean room foaming area. However, M255401 is here unpacked and the foamed pieces or foamable pieces usually have a thickness of about 10 to 100 microns. Environment. The layers used to generate the gas can also escape or in some cases clean rooms, and therefore individually. During this transmission, the soft plastic may rupture. The storage in the clean room environment is such that it is not easy to stack and the pieces move at a distance because the foamed material will cause further cracks and the pieces are cracked or defective. The crack is found. In addition, the container of the packaged component and contaminated the strict customs inspection meeting ’will inevitably cause the part to complete the journey and it is difficult to attach it. Usually, the historical parts are removed from the foam block, and individual particles are rubbed away and contaminated particles are generated. Furthermore, the clean room is a porous and open honeycomb structure, and the pore size (for example) of the gas trapped in these holes can escape into the clean room. The adhesion between the foamed part partitions of the three-dimensional structure precursor generates polymer pollution particles. The foamed material of the block itself cannot be brought into the clean sealed component bag and must be unsealed and then brought into a clean room to surround individual components to form the sealable box, causing internal parts to be polluted by the external environment. It is also more difficult to clean the plastic bag for final use, as it may be punctured. Furthermore, carrying only those individual groups would risk dropping and damaging the part. Materials and boxes cannot allow visual inspection of the contents. For example, if the room in the closed box is usually opened in a clean room environment, an intermediate transfer point (such as a parts distribution warehouse) cannot be placed without opening before shipping to the consumer. test. In addition, this container is required to be opened during international transfers to allow customs officers to verify that the content may adversely damage the seal and may cause continuous previous scratches. The label is on the conventional foam box and another question δ groove will be generated. The concave area is processed into the foam container, 4 M255401, and then a thick epoxy grid is applied ^ ja #from ^ < Gong Shuyue Yue layer in the recess Inside. This thick epoxy layer is followed. Bran, & after, however, this thick epoxy material can escape gas in the environment or when heated i I, Tian Shi, to even room temperature. This material may break up during the journey, so there is a Defective packaging. Another problem arises when transporting or transporting parts with different compartments that are related to each other. For example, the parts can go to different parts of the lining as the lining of the processing chamber wall. It is regularly cleaned, refreshed or replaced while operating in this room. ^ The accessories of the related lining parts need to be transported at the same time. T This accessory is: loading and shipping 'will require a distribution center or a consumer's magic accessory' wasting resources and Sometimes it leads to incorrect assembly of parts. ^ Disassembling conventional packaging and transporting individual components of an accessory into cleanliness ^ Deterioration 'In which such parts will cause misplacement or other groups, especially if they need to be stored before use Some time. Stored in the 3 Series. Hope that by replacing the unit immediately when a component fails or needs to be cleaned, the downtime of the room. Unsealed or loose parts may also be lost. Therefore, the need to have A package that allows a sensitive seven pieces to be safely transferred from the manufacturing plant to a clean room environment. At the same time, the package maintains an air-tight seal against the external environment. Further requirements for this package | labeling. At the same time, it is required to allow visual inspection of internal parts Without the seat or open the packaging of the package. It is also necessary to transfer and store a set of related products that can be identified as needed. Furthermore, it is required that the package can be matched with the right belt, seal, lock or other components. Label to I. A low-pressure foaming area contains ~ surface * layer + This usually opens the ground bag to assemble the problem at that time will be more confusion, clean the room to reduce begging. The room group can easily find the bag. Bad seal parts and tamper-resistant adhesive M255401 [New content] A clean room transfer box is used to transfer a processing room accessory with a plurality of different shaped pieces directly into a clean room environment. The box has a first frame including a first frame. A first sturdy box of a shelf board has a plurality of first grooves extending outward from the first shelf board. A second sturdy can be separated from the first box. The second box has a second box including a second There are two side plates, and a seal is formed between the second frame and the first frame of the first frame. The second box also has a plurality of first four slots extending from the second frame. When the two boxes are assembled When together, a plurality of cis-shaped cavities with the same inner surface shape are formed by pairing the first and second facing surfaces. The shape of the inner surface of each cis-shaped cavity matches an outdoor surface ^ / The movement of the chamber group in the cis-shaped cavity is minimal during transmission. At least a part of the first or second box is substantially in the state of processing the chamber components of the accessory through the actual part [Embodiment] A portable wheel box 20 is used to transport and store a 22 'which has some different room components Wf. The box 20 allows the room! To be directly transferred into the human-clean room environment, @ 不 EXPOSED TO THE RING BAD SEAL. 室 组 # 24a-f is the processing chamber, platform and gas parts, which are used in the manufacture of integrated circuits (such as semiconductor crystal displays). The chamber assembly 24a_f is contaminated by dust particles and may be easily damaged when exposed to the external surrounding environment. The chamber assembly rarely includes the first and second components of the fixing box frame, which have a unique groove assembly on the outer plate. The components are transparent, and the quality of the chamber accessories is 24a-f, and it is not sensitive to the surface of the reactor, such as 6 M255401 due to oxidation from air or corrosion caused by water vapor. Generally, the box 20 includes at least a pair of first and first boxes, such as the 3rd and second boxes 50 and 60, when they are assembled together, face to face. Box 2 shown here. Just according to: new = shows the opposite and each other embodiment, and should not be used to limit the scope of the new model. A representative concrete made of a sufficiently sturdy material to bear during transmission: outside! 〇 、 60 is composed of a smooth, elastic and non-roughened surface, which will not release individual hues when rubbed with impact, and surface friction, and the surface of the box 50, 60 of the pieces 24a-f Tied Dish. It's better, but not broken and not much?丨 It is recognized that the one-chamber components 24a-f may be porous during disassembly and assembly, and when the device # is housed in the box 50 or 60, there will be no particles that can peel off to the components 24a-f. In the smooth and elastic main martial arts of a type + 丄 50, 00, for example, the box rrniQw ^ ^, the surface may have a taxi beat (rms) thickness of less than about 10 days. Assembled into a 儆 inch root mean square hidden 50 and 60 function rabbit trough, taking the accommodation chamber group 佚 as a stand-up, built-in handle, a processing chamber accessory 22 with a transmission chamber 44Γ, and even for it The cassettes 50 and 60 can also directly enter the clean room at ~ 4a-f. Assembled for a period of time, 1 is only disassembled when it is stored in clean rooms 24a-f in a sealed / stable and stable environment, so the internal use room components 24a-f are contaminated. Soil-step reduction at E 5. In general, the components of the room within 60, the first g $ ^ ^ includes at least one having a first 546 ¾ a first shelf plate 52, which 笫 ~ * transport frame 54: > 4 can be coupled to a first- Correspondence of the two Chu Erjia plates 62—the first parallel E 60 and the second parallel frame 62. The shelf plates 52, 62 can be mutually ordered. The lamps are ordered by a solid material .-. ^. Flat or angled strips. The shelf plates 52, 62 may also be formed into a frame having a round shape, a square shape, or a rectangular shape. The frames 54, 64 7 M255401 are planar and substantially parallel to each other, and are integrated around the periphery of the boxes 50, 60. Each of the frames 54 and 64 has a sufficient width to allow the frames 54 and 64 to be combined with each other to form a surface seal. In general, the bezels 54, 64 are smooth and continuous, but they may also have sealing protrusions extending therefrom as described above. Other types of frames 5 4, 6 4 can also be used, for example, the frames 5 4, 6 4 can be tilted relative to a central axis or center plane of the chamber assembly 2 4 a-f loaded in the box 50, 60. Or at an oblique angle that matches the obtuse angle. In the first box 50, a plurality of first grooves 56a-f extend outward and downward from the first frame plate 52, as shown in FIG. In this version, the first shelf plate 5 2 is a rectangular opening frame extending around (or even surrounding) the first groove 5 6 a-f. The first grooves 56a-f each have a shape and their dimensions can form an inner volume, and the shape and the size can accommodate the parts of the one-chamber assembly 24a-f. When the different grooves 56a-f have shapes and sizes that accommodate different chamber components 24a-f, the recesses are axially separated by spacer portions 120a-b. For example, a groove 56a may be shaped to have a single recess that conforms to the outer shape of a portion of the processing chamber assembly 24a received in the groove 56a. The grooves 56a-f may also be shaped to have a plurality of recesses, such as concave surfaces having different radii or widths, which are integrated and continuous with each other to accommodate different circumferential diameters of the chamber assemblies 24a-f. Similarly, the second cassette 60 also has a plurality of second grooves 66a-f extending outwardly from the second frame plate 62. When the two cassettes 50, 60 are assembled (as shown in Figures 3b and 5), a specific second groove 66a faces a specific first groove 56a oppositely to define a unique cavity 92a. The cavity 92a has The inner surface shape 8 M255401 which matches an outer surface shape 94a of a specific chamber component 24a. Therefore, each of the unique cis-shaped recesses 92a-f has a content that is shaped to stably pretend to 2 pieces 24a-f The contours of the chamber components 24a-f in the recesses 92a-f are minimized, because the contours of the recesses 92a-f closely match the contours of the chamber components 24a-f. In this manner, a plurality of cis-shaped recesses 92a-f having different inner surface shapes 93a-f are formed by pairs of first and second grooves 56a-f, 66a-f facing each other. The inner surface shape 93a-f of each cis-shaped recess 92a-f closely matches the outer surface shape 94a-f of the one-chamber assembly 24a-f. For example, the inner surface shape 93a of a specific cavity 92a may be shaped to closely follow the contour of the outer surface shape 94a of the one-chamber component 24a, wherein the gap between the two surfaces 93a, 94a is about 5 to about 30. Barley. However, other gap sizes are possible, and the size of the gap depends on how tightly the particular chamber assembly 24a is fixed in the recess 92a. For example, 'the pair of first and second grooves 56a-f, 66a-f may be shaped, sized, and spaced to accommodate a set of chamber components 24a-f, which constitute processing having a common function or common assembly purpose Room related accessories 22. For example, the recesses 56a-f, 66a-f may be configured to hold different chamber assemblies 24a-f that are all 22 parts of a processing chamber assembly assembly. A type of processing chamber fitting 22 contains, for example, different sections of a wall lining to cover a portion of the interior chamber wall or different parts of the gas distributor. Another example of the fitting 22 is an assembly of concentric rings (such as a shield ring, an outer ring and a suction plate) placed around a substrate in a processing chamber. Yet another accessory 22 may include a focusing lens, a lateral layer, and a substrate clamping ring. The chamber components 24a-f of the accessory 22 are isolated from each other by fitting the first and second grooves 56a-f, 66a-f to a matching recess of M255401. Appropriate from the perspective of the system and 50, the first type of shape has a radial chamber group such protruding recesses 92a-f. The cavities 92a-f formed by the paired first and second grooves 56a_f, 66 & £ may be separated by spacer parts 120a_e, which are shaped to hold a sufficient gap between adjacent cavities so that The chamber assemblies 24a-f in each of the recesses 92af do not contact each other during transmission. The shape and size of the isolated part 120 & _6 are such that the recesses 92af are connected to each other when the 50 and 60 are coupled. However, in order to help the gas to be discharged and cleaned from the cavity 92af, the shape and size of part 120a-et allows the gas to flow between mu and therefore the air in can enter the entire cavity assembly from: Vent 'and similarly change the air from the -single-input port. : The lineup depends on the size of the adjacent chamber assembly 2 ... and the millimeter to about 40 millimeters. However, other gap sizes are also feasible: how tightly should a one-chamber heart cow 24a_f be fixed to the -cavity in the -type, the second groove of the second box 60, "the first groove 56a_ " The project also has a substantial connection, when the second concave ... is two and when the two Kun grooves 56a-f are parallel to 罟 囡 aa 笪 and the ancient electricity, brother-radiation relationship is juxtaposed with f. The same open, strong ... box 50, 60 can be used more economically with a single-mold manufacturing like this, this type is particularly: the same cross-section symmetry chamber assembly 24 af (such as cylindrical ), Spring carrier parts 24a-f. Substantially the same shape means that one of the broadly symmetrical shapes of the same cross section may have additional features such as _ use * complex parts or other features. No. 10 M255401 In yet another version, one or most of the first and second grooves 56a-f, 66a-f have groove walls l78a-f that are shaped to fit the chamber assembly 24b into the groove 56b internal time 'applies an inward mechanical biasing force at a single or multiple contact points to secure a chamber component 24b. The groove wall 178a_i) may An inwardly extending recess 180 (as shown in FIG. 4) is compressed when a chamber component 24b is placed in the groove 56b. As a result, the recess 18o applies an elastic inward biasing force to the chamber. At the contact point of the module 24b, the chamber module 24b is firmly held in the groove 56b with a minimum area of direct contact with the chamber module 2. The groove wall nsa-b on the opposite side may also have an opposite recess 18. ab to apply a reverse force to the chamber component 24b placed in ㈣56b. Other methods of applying this can also be applied: for example, a flexible ring structure, a metal spring, a snap spring (not shown), and a delta δ in the groove 56b. The outer surface is slightly compressed with M from the rescue material, and is supplied at a suitable point to a pad made of a clean room compatible flexible material inside the groove 56b. This -type is advantageous for fixing the chamber assembly during transmission 24 " = The surface of the groove wall 178a-b is easy to be prepared or a surface of t 24a-f. The chamber component which is easily broken is in a type that will provide at least one of the strong side ... 0, 60. Side wall 96a gram press-or-and with a height large enough to extend beyond any groove M 60 extension Depth. Side walls 96a-d are also constructed to have a vertical or oblique shape with the characteristics of f 66a-f. In a type of operation to maintain a solid flight while passing the wheel, the side walls 96 are a plane of vertical frame plates 52, 62 A sinus temporary τ contains at least the negative plane 璧. It is seen that the k-A surface wall extends inward along all four sides of the wall. The wall has a shear strength of ^ around the periphery and benefits the side wall structure. Increased rigidity reinforcement structure 11 M255401 (such as cross beams or hexagonal unit patterns) to enhance the strength of the side walls 96a-d. The side walls 96a-d may also be made of a composite material, such as epoxy resin with other embedded materials that increase the structural robustness. In one type, the side walls 9 6 a-d include at least one set of movable panels 100 a-d. Each of the movable panels 100a-d may have substantially the same shape, and thus the panels 100a-d may be manufactured from a single mold. A set of suitable four panels 100a-d having the same shape is shown in FIG. Each panel 100a-d includes at least a right-angled lip 101a-d recessed from the main side wall of the panel 100a-d, and fits in a corresponding matching groove 102a-d located below the periphery of the box 50. A shelf plate 52 of the box 50 having an outwardly extending groove 56a is placed on four adjacent side wall panels 100a-d, so each lip 101 ad of the side wall panels 100a-d will fit the lower surface of the shelf plate 52 One of them corresponds to the grooves 102a-d. A set of screws 103a-l and coupling holders 105a-h can be used to bond the panels 100a-d and the shelf plate 52 to each other. The frames 54, 64 of the first and second cassettes 50, 60 may be coupled together to form an air-tight seal 107 in the cassettes. The airtight seal 107 between the two boxes 50 and 60 provides a pollution-free transmission of the chamber assemblies 24a to f inside it. For example, in one version, the frames 54, 64 of one or more of the cassettes 50, 60 have grooves 108a-b that can accommodate a gasket 112ab (such as an O-ring or other soft polymer seal), such as Figure 3b. The flash locks 82a-d attached to the first case 50 and the latch keys 84a-d attached to the second case 60 allow the second cases 50, 60 to be sealed at the gaskets 112a-b between the cases 50, 60, to An air-tight seal 107 maintained therebetween is shown in Figs. 3b and 5. The latches 82a-d may be a conventional latch, such as a plastic strip having a wave-shaped elastic hinge portion 122a-d attached to the panel 100a_d of the first 12 M255401 box 50, and a plastic strip Hinge portions 122a-d extend outwardly from the claw portions 123a-d. In use, the claw portion η] is pivoted out and covered firmly to the ends of the latch keys 8 4a-d attached to the second box 60 panel 100 d d. In another type, a series of raised U-shaped spherical piles in the frame of the second box 60 will be coupled to the corresponding bell-shaped recesses in the frame 54 of the first box I to form a seal therebetween. (Not shown) In yet another version, the second frame 64 has a peripheral lip, which is snapped into a corresponding slot in the first frame 54 to form a seal (also not shown), and at E 50 After spraying, 60, you can release the meshing state by pulling the two frames 54 and 64 away. * The air-tight seal type of the box 20 may also include a first valve 140 for exhausting the air from the group of sealed forward cavities 92, and a second valve 144 for introducing air into the vented cavity 92 . For example, the first and second valves 140, W4 may be Schrader valves, which allow gas to be introduced or discharged when a spring-loaded pin 148 in the center of the valves 140, 144 is indexed. The first valve 14o may be connected to a pump 156 that exhausts the sealed cavity, and the second valve 144 may be connected to a gas supply 16 that introduces clean dry air (CDA) or blunt gas into the sealed cavity. Alternatively, a single valve can be used for exhaust and gas cleaning or filling functions (not shown). The opposite portions of the side walls 96a-d (or the removable panels 100a-d) may also have one or more built-in handle cutouts 98a-d opposite each other. Hand digging a part injury 9 8 a-d allows the operator to lift and easily transport the box 20 to the clean room environment. This handle cutout 98a-d is advantageous because it does not protrude outside the assembled box 20, and therefore takes up less clean room storage space. Hollow out the handle 13 M255401 1: Second, it is better to prevent damage in the transfer wheel. The handle is hollowed out so that it can be easily manufactured in the side wall 96a-d or the removable panel i〇〇a d. Combine other additional parts to the S5GH, and can also be used to externally ^
設在於側壁9 6 dI銘々 U 或叮移式面板1〇〇a-d，或£ 5〇 6〇 t 他表面上（未顯示）。 八 第一：用Sol ’ Ε 5〇、6〇中之一被選定為下方或底E(例如 置於一工作面上。各室組件24a-f被筆直地 欲入…〇之開口凹槽56a-f中。在填滿E 5〇後，另一 E 6〇係用作上方或覆蓋昆，且適配在延伸超過E 50之凹 槽56a-f的室組件24以上。閃鎖82以接著喷合閃鎖鍵 ““以將…。鎖定於下昆5〇上。各室組件㈣現被 抓緊在一經修整以吻合地適配特定室組件2钝矸之凹穴 92a-f中，且與其他室組件24af隔離。再者，因為室組件 24a-f全都包含在一單一盒2〇中，因此使批發商或客戶易 於找到零件之整個配件。再者，當堅固之昆5〇、6〇係至少 邛伤由實質上透明聚合材料製造時，將易於辨識在盒Μ 内之室組件24a-f(如對應於一特定配件22者）。 堅固之匣50、60可由能在傳輸時提供堅固性的一些不 同材料製造，意即那些在形成s 5〇、6〇及在室組件 置於匣50、60中時足夠堅固，以吸收衝擊而不會損壞之材 料。當在IS0527標準（例如在每分鐘！毫米之速率）測量 下，匣50、60的堅固材料應具有至少約18〇〇Mpa之彈性 拉伸模數。 較佳的是，至少一部份之匣50、6〇或整個匣5〇、60 14 M255401 係由一也實質上透明之堅固材料製造，以允許目視檢驗夾 持於匣50、60内側之室組件24a-f。實質上透明意指其對 可見光係半透明或透明的。例如，一適用的透明材料可具 有至少約百分之八十的可見光穿透率。組合之匣50、60 的第一或第二凹槽56a-f、66 a-f也可為經拋光之表面，以 增進穿透光與觀看之清晰度。該等透明部份允許一潔淨室 操作員目視地偵測或檢驗匣50、60之内容物而不須破壞性 地打開密封件。例如在一型式中，只有一或多數第一或第 二凹槽56a-f、66a-f係由實質上透明材料製造，然而，整 個匣50、6〇也可由實質上透明材料製造。 該等透明部份也允許識別標籤（或組件條碼）被貼在匣 之内侧而仍可從外部看到。此避免在傳輸或儲存中損壞標 籤。同時，匣之堅固表面允許習知標籤易於貼在匣上，無 須如在潔淨室中發泡件產品所需之加工成形凹處或特別的 環氧樹脂膠。 適用之實質透明堅固材料係一諸如高密度聚乙烯之加 熱固定式熱塑性聚合物，例如以聚對苯二甲酸乙二酯 (PET)、聚對苯二甲酸改良乙二酯（glyc〇1_m〇dified ρΕΤ， PETG)、定向PET(O-PET)或聚對蕃二甲酸二乙酯（pEN)為 架構之聚合物’或其等相互混合或與其他樹脂之混合物。 較佳的是’該實質透明材料係一可模造之材料，當加熱時 軟化以形成一模具形狀，諸如聚對苯二曱酸改良乙二酯 (PETG)(例如由以色列Ramat Yohanan之palram公司製造 的PAL一G板）。堅固之匣50、6〇可使用習知塑料模造技藝 15 M255401 從一熱塑性材料的一單張空白板經模造成一體成形的單 件。可使用習知加熱成形方法與設備（諸如真空輔助、氣壓 輔助、機械插栓辅助或匹配之模具）加熱該空白板成形為熱 固性、薄壁之匣。 在一製造匣50、60之方法中，一熱塑性板料係置於該 匣之公或母模上，且加熱直到其軟化沉入模具中。藉由使 用一相反之匹配模具形狀加壓或藉由在模具底部抽真空而 將經預熱的熱塑性板料拉進模具（其也可被加熱）。例如， 如果該板被加熱且允許軟化沉入一母模，則可使用一公模 以施加一順形之相對壓力於被加熱板料之其他側上，且該 公模可逐漸地冷卻至室溫作為一第二冷卻模。該熱塑性板 係藉由維持接觸該加熱模具表面達一段足夠時間以充分地 吻合模具形狀’逐漸地冷卻已成形之板至室溫，且接著將 預成形之匣移開模穴。可經由模具施加真空以抽出任何陷 於其中之空氣。預成形之匣接著可經修整或其他方式成形 以增加把手挖空部份98a-d，及其他突出部份與形狀以形 成一鎖定鍵與其他特徵。該板置於模穴時應被加熱至其 Tg(玻璃轉態溫度）上及在過度地垂陷之點下。在熱成开/製 程中，板適合溫度在約攝氏120度至約240度之範圍門。 模具可由木材、樹脂或諸如鋁或甚至鋼之金屬製造。對於 製造少量之匣5 0、60，可使用諸如木材之軟性材料。 除使用單層板料外，也可使用多層板。多層板也可包 括一由一熱塑性聚合物（如PET G)組成之第一層，及一由一 複合材料（如玻璃纖維環氧樹脂板）組成之第二層。同時， 16 M255401 匣 由 式 内 部 允 50 諸 52 經 色 應 之 半 可 處 色 聯 員 件 定 該 50、60之製造方式可使得一部份（例如凹槽56、66)係 實質透明材料製造，而其他部份（諸如側壁96a-d或可移 面板100 a-f)係由一更堅固或更強之材料製造（諸如一片 嵌於環氧樹脂之玻璃纖維束）製造。 在一替代性具體實施例中，匣50、60或匣50、60之 份係由金屬（諸如鋁或鋼）製造。然而，此具體實施例不 許在後續運送看到匣50、60内部之狀態，或檢驗置於匣 、6 0内之標籤。因此，匣5 0、6 0允許製有非透明部位， 如結合至一實質透明凹槽5 6a-f、66a-f的非透明架板 、62，使得在凹槽56a-f、66a-f内的室組件24a f仍可 由凹槽56a-f、66a-f的之透明壁看到。 在又另一具體實施例中，匣5 0、ό 0之部份可依照從一 碼表中選出之顏色上色，該色碼表列出不同顏色與相對 之配件22或室組件24a-f的零件號碼。例如，匣50、60 實質透明部份可被上色，或匣5〇、6〇的另一部份（諸如 透明郤伤）可被上色。該顏色可包括來自彩色光譜之任何 目光波長，且包括白或黑色。該色碼表列出與一相對應 至配件22、室組件24a-f或處理應用相關聯之個別顏 〇如該表可列出藍色係與鋁蝕刻處理室配件2 2相關 且只或板色用於銅室配件。此色碼允許一潔淨室操作 易於區分且正確地辨識用於一特定室或應用之備用零 。因此’不必破壞盒2〇之密封以檢視室組件24a-f而決 八力月b且至組件24a-f之整體性可保持達一長時間。 色碼表矣@ ， 早也可與具有相同室組件24a_f但用於不同 17 M255401 處理應用（例如彼此不相容）之處理室配件 2 2的不同顏色 聯結。例如，鋁與銅互連線製造處理二者均使用至少包含 基本上相同室組件24a-f之處理室配件22。然而，一旦此 一處理室配件 22 已被用於施行一第一處理應用之第一型 處理室後，其不再能被用於施行另一處理應用的第二型處 理應用中，因為其可能污染該第二處理室。此狀況之發生 通常是在已被用於一處理室（諸如用於鋁沈積或蝕刻之室） 之室組件24a-f的配件22被送至製造廠潔淨或刷新。在室 組件24a-f被潔淨或刷新後，其將被送回客戶處。在此時， 用於室組件24a-f之盒20被編上色以指出先前之鋁應用， 因此室組件24a-f不會被意外地用在銅沈積或蝕刻室或處 理中。 盒20也可具有堆疊鍵170與可彼此適配之對應凹處 1 74，因此可在潔淨室的一列中堆疊一個以上之盒 20。例 如，一第一盒20之第一匣50的上表面可具有四個位於表 面四個角落之鍵170，及在第二匣60之下表面有對應凹處 174,如第5圖所示。當第一盒20係堆疊於第二盒22上時， 第二盒21之四個鍵170會適配於第一盒20之底面中的對 應凹處174。此鍵與凹處之配合允許堆疊之盒20、21彼此 適配，因此當儲存在潔淨室時不會不穩定。 因此，本新型提供允許傳輸處理室組件24a-f(諸如組 件22的一配件）之傳輸盒20，從製造商或分發中心直接進 入客戶之潔淨室。盒20因為其堅固不可滲透性匣之表面易 於潔淨而係可再使用。匣5 0、6 0藉由一沒有易於剝離之顆 18 M255401 粒狀微粒的光滑表面而使污染最少。同時，各順形盒2〇 之順形凹穴92a-f可用於維持一處理室配件22之特定室組 件24a-f，且係吻合室組件24a_f之形狀，以使在傳輸時使 破損最少。此外，凹穴92a-f之透明部位允許目視檢查盒 20之内谷物，及檢驗各室組件24a-f而不致破壞性地打開 密封件且污染該等物件。 雖然本新型已以其相關較佳型式或其他可能之型式詳 加說明。例如，凹穴92a_f可被併在一起以形成一具有不 同輻射狀區段之連續容積，以允許傳輸一具有複雜外部表 面形狀之單一室組件。此外，個別凹穴92a f之形狀可經 修整用於其他目的，例如其未接觸該室零件之外部形狀， 可經成形以配合在-運送容器内的—對應形狀凹處。因 此，隨附之申請專利範圍應不受限於本文中包含之較佳型 式。 【圖式簡單說明】 …本新型此等與其他特徵、特點與優點可從被提供用以 本新i代表1±特徵之圖#、說明與隨附巾請專利範圍 更加瞭解，且不應被用以限制本新型，其中： 第1圖係一傳輸盒之爆炸壯+础面 s -、乍版立體圖，顯示具有界定一組順 形凹穴之凹槽的；^日m # . ^ 曰幻相對第一與第二匣，用於固定具有 不同室組件之處理室配件； 第2圖係具有至少包含 J移式面板之一側壁的一匣之爆炸 狀立體圖； 19 M255401 第 3 a圖係一至少包含一對相匹配之匣的傳輸盒之爆炸狀 斷面簡圖，該等匣界定各具有一内表面形狀之順形 凹穴，其内表面形狀符合一處理室配件之特定室組 件的外表面形狀； 第3b圖顯示第3a圖之傳輸盒，在組裝圍繞該室組件之匣 後，經由一閥出口排出内部空氣，且經由一閥入口 輸入潔淨與乾燥空氣或鈍氣；Set on the side wall 9 6 dI Ming U or bite-type panel 100a-d, or £ 5600 t on the surface (not shown). Eight first: one of Sol 'E 50, 60 is selected as the bottom or bottom E (for example, placed on a work surface. Each chamber component 24a-f is straightly inserted into the opening groove 56a of ... -f. After filling E 50, another E 60 series is used as an upper or covering Kun, and fits above the chamber assembly 24 extending beyond the grooves 56a-f of E 50. The flash lock 82 continues Spray lock button "" to lock ... on Xia Kun 50. Each chamber component is now grasped in a recess 92a-f which is trimmed to fit the specific chamber component 2 bluntly, and is The other chamber components 24af are isolated. Furthermore, because the chamber components 24a-f are all contained in a single box 20, it makes it easier for the wholesaler or customer to find the entire part of the part. Furthermore, when the sturdy Kun 50, 60 At least when the sting is made of a substantially transparent polymeric material, the chamber components 24a-f (such as those corresponding to a specific accessory 22) within the box M will be easily identifiable. The sturdy boxes 50, 60 may be provided to provide robustness during transmission. Made of a number of different materials, meaning those that are strong enough to form s 50, 60, and when the chamber assembly is placed in a cassette 50, 60 to Materials that absorb impact without damaging. When measured under IS0527 standards (for example, at a rate of per minute! Mm), the sturdy materials of the boxes 50, 60 should have an elastic tensile modulus of at least about 18,000 MPa. Better Yes, at least a part of the cassette 50, 60 or the entire cassette 50, 60 14 M255401 is made of a solid material that is also substantially transparent to allow visual inspection of the chamber assembly 24a held inside the cassettes 50, 60 -f. Substantially transparent means that it is translucent or transparent to visible light. For example, a suitable transparent material may have a visible light transmittance of at least about eighty percent. The first or The second grooves 56a-f, 66 af may also be polished surfaces to improve the clarity of the penetrating light and viewing. These transparent portions allow a clean room operator to visually detect or inspect the cassettes 50, 60 The contents need not be destructively opened. For example, in one version, only one or most of the first or second grooves 56a-f, 66a-f are made of a substantially transparent material. However, the entire box 50 , 60 can also be made of substantially transparent materials. Some also allow identification labels (or component barcodes) to be attached to the inside of the box and still visible from the outside. This avoids damaging the label during transport or storage. At the same time, the solid surface of the box allows conventional labels to be easily attached to the box There is no need to process the recesses or special epoxy glue required for foaming products in clean rooms. A suitable substantially transparent and strong material is a heat-fixed thermoplastic polymer such as high density polyethylene, such as polymer Polyethylene terephthalate (PET), polyethylene terephthalate modified (glyc〇1_m〇dified ρET, PETG), oriented PET (O-PET) or polyethylene terephthalate (pEN) It is a framework polymer 'or the like mixed with each other or with other resins. It is preferred that the substantially transparent material is a moldable material that softens to form a mold shape when heated, such as polyethylene terephthalate-modified ethylene glycol (PETG) (e.g., manufactured by Palram Corporation, Ramat Yohanan, Israel) PAL-G board). The sturdy boxes 50, 60 can be molded using conventional plastic molding techniques. 15 M255401 A single blank sheet of a thermoplastic material is warped into a single unit. The blank plate can be heated to form a thermoset, thin-walled box using conventional heating forming methods and equipment (such as vacuum assist, air pressure assist, mechanical plug assist, or matching molds). In a method of making cassettes 50, 60, a thermoplastic sheet is placed on a male or female mold of the cassette and heated until it softens and sinks into the mold. The pre-heated thermoplastic sheet is drawn into the mold (which can also be heated) by pressing with an opposite matching mold shape or by applying a vacuum at the bottom of the mold. For example, if the plate is heated and allowed to soften and sink into a female mold, a male mold may be used to apply a relative relative pressure on the other side of the sheet being heated, and the male mold may gradually cool to the chamber. Warm as a second cooling mold. The thermoplastic sheet is gradually cooled to room temperature by maintaining contact with the surface of the heated mold for a sufficient time to fully conform to the mold shape ', and then the pre-formed box is removed from the mold cavity. A vacuum can be applied through the mold to extract any trapped air. The pre-formed box can then be trimmed or otherwise shaped to add handle cutouts 98a-d, and other protruding parts and shapes to form a locking key and other features. The plate should be heated to its Tg (glass transition temperature) when placed in the cavity and below the point of excessive sag. In the thermoforming process, the panel is suitable for doors with a temperature in the range of about 120 ° C to about 240 ° C. The mold can be made of wood, resin, or metal such as aluminum or even steel. For making a small number of boxes 50, 60, a soft material such as wood can be used. In addition to single-layer sheets, multilayer boards can also be used. The multilayer board may also include a first layer composed of a thermoplastic polymer (e.g., PET G) and a second layer composed of a composite material (e.g., a fiberglass epoxy board). At the same time, the 16 M255401 box is made of semi-inner and 50-color-removable color couplers. The manufacturing method of the 50 and 60 can make a part (such as the grooves 56 and 66) made of substantially transparent materials. Other parts (such as the side walls 96a-d or the movable panel 100 af) are made of a stronger or stronger material (such as a piece of fiberglass bundle embedded in epoxy resin). In an alternative embodiment, the cassette 50, 60 or parts of the cassette 50, 60 are made of a metal such as aluminum or steel. However, this embodiment does not allow the status of the inside of the cassettes 50, 60 to be seen in subsequent shipments, or the labels placed in the cassettes, 60 to be inspected. Therefore, the boxes 50 and 60 allow non-transparent parts, such as non-transparent frame plates 62 coupled to a substantially transparent groove 56a-f, 66a-f, so that the grooves 56a-f, 66a-f The inner chamber assembly 24af is still visible through the transparent walls of the recesses 56a-f, 66a-f. In yet another specific embodiment, the parts of the cassettes 50 and 6 can be colored according to a color selected from a code table that lists different colors and relative accessories 22 or chamber components 24a-f. Part number. For example, the substantially transparent portions of the boxes 50, 60 may be colored, or another portion of the boxes 50, 60 (such as transparent but wound) may be colored. The color can include any gaze wavelength from the color spectrum and can include white or black. The color code table lists the individual colors associated with a component 22, chamber assembly 24a-f, or processing application. If the table can list the blue color is related to the aluminum etching process chamber accessories 2 2 and only or plate Color is used for copper room accessories. This color code allows a clean room operation to easily distinguish and correctly identify spare zeros for a particular room or application. Therefore, it is not necessary to break the seal of the box 20 to inspect the chamber components 24a-f, and the integrity of the components 24a-f can be maintained for a long time. The color code table 矣 @ can also be linked with different colors of the processing chamber accessories 2 2 with the same chamber components 24a_f but used for different 17 M255401 processing applications (for example, incompatible with each other). For example, both aluminum and copper interconnect manufacturing processes use processing chamber fittings 22 that include at least substantially the same chamber assemblies 24a-f. However, once this processing chamber accessory 22 has been used in a first type processing chamber for a first processing application, it can no longer be used in a second type processing application in another processing application because it may Contaminate the second processing chamber. This condition typically occurs when the fittings 22 of the chamber components 24a-f that have been used in a processing chamber, such as a chamber for aluminum deposition or etching, are sent to a manufacturing plant for cleaning or refreshing. After the chamber assemblies 24a-f have been cleaned or refreshed, they will be returned to the customer. At this time, the cartridges 20 for the chamber assemblies 24a-f are colored to indicate previous aluminum applications, so the chamber assemblies 24a-f cannot be accidentally used in a copper deposition or etching chamber or process. The box 20 may also have stacking keys 170 and corresponding recesses 1 74 which can be adapted to each other, so that more than one box 20 can be stacked in a row in the clean room. For example, the upper surface of the first box 50 of a first box 20 may have four keys 170 located at the four corners of the surface, and corresponding recesses 174 on the lower surface of the second box 60, as shown in FIG. When the first box 20 is stacked on the second box 22, the four keys 170 of the second box 21 are adapted to the corresponding recesses 174 in the bottom surface of the first box 20. The cooperation of this key with the recess allows the stacked boxes 20, 21 to fit into each other, so it will not be unstable when stored in a clean room. Accordingly, the present invention provides a transfer box 20 that allows transfer of processing chamber components 24a-f (such as an accessory to component 22), directly from the manufacturer or distribution center into the customer's clean room. The box 20 is reusable because the surface of its sturdy, impermeable box is easy to clean. Boxes 50 and 60 minimize contamination by a smooth surface with no easily peelable 18 M255401 granular particles. At the same time, the cis-shaped recesses 92a-f of each cis-shaped box 20 can be used to maintain a specific chamber component 24a-f of a processing chamber fitting 22 and conform to the shape of the chamber components 24a-f to minimize damage during transmission. In addition, the transparent portions of the recesses 92a-f allow visual inspection of the grains inside the box 20, and inspection of each chamber assembly 24a-f without destructively opening the seals and contaminating such items. Although the new model has been described in detail in terms of its related better form or other possible forms. For example, the pockets 92a-f can be combined together to form a continuous volume with different radial segments to allow the transmission of a single-chamber assembly with a complex external surface shape. In addition, the shape of the individual recesses 92a f can be modified for other purposes, for example, the external shape of the parts that have not touched the chamber can be shaped to fit in the corresponding shape recesses in the transport container. Therefore, the scope of the accompanying patent application should not be limited to the preferred forms contained herein. [Brief description of the drawings]… These new and other features, characteristics, and advantages can be provided from the drawings that represent the 1 ± feature of the new model #, descriptions and accompanying towels. Please understand the scope of the patent more, and should not be Used to limit the new model, where: Figure 1 is a blast + base surface s of a transmission box-the first version of the three-dimensional view, showing the grooves defining a set of cis-shaped recesses; ^ 日 m #. ^ 幻 幻Relative to the first and second boxes, used to fix processing chamber accessories with different chamber components; Figure 2 is an exploded perspective view of a box with at least one side wall of a J-movable panel; 19 M255401 Figure 3a is a A schematic exploded cross-section view of a transfer box containing at least a pair of matching boxes that define cis-shaped recesses each having an inner surface shape that conforms to the exterior of a particular chamber component of a processing chamber accessory Surface shape; Figure 3b shows the transfer box of Figure 3a. After assembling the box surrounding the chamber assembly, the internal air is exhausted through a valve outlet, and clean and dry air or inert gas is input through a valve inlet;
第4圖係具有包括相對面具彈性凹處之匣壁的一匣之斷面 簡圖，其當受壓時會施加一固定一室組件於定位之 向内力；及 第5圖經堆疊之傳輸盒的斷面簡圖，顯示該堆疊鍵與彼此 適配的對應凹處。 【元件代表符號簡單說明】FIG. 4 is a schematic cross-sectional view of a box including a box wall with a relatively recessed recess in the mask, which when pressed exerts an inward force that fixes a one-chamber assembly in position; and FIG. 5 is a stacked transmission box A simplified cross-section view of the corresponding recesses of the stacking keys that fit into each other. [Simple description of component representative symbols]
20 傳輸盒 21 第二傳輸盒 22 處理室配件 24a-f 處理室組件 50 第一匣 52 第一架板 54 第一邊框 56a-f 第一凹槽 60 第二匣 62 第二架板 64 第二邊框 66a-f 第二凹槽 82a-d 閂鎖 84a-d 閂鎖鍵 92a-f 凹穴 93a 内表面形狀 94a 外表面形狀 96a-d 側壁 98a-d 挖空部份 100a- d面板 20 M25540120 Transfer box 21 Second transfer box 22 Processing chamber accessories 24a-f Processing chamber assembly 50 First box 52 First frame plate 54 First frame 56a-f First groove 60 Second box 62 Second frame plate 64 Second Frame 66a-f Second groove 82a-d Latch 84a-d Latch key 92a-f Cavity 93a Inner surface shape 94a Outer surface shape 96a-d Side wall 98a-d Hollow out part 100a-d Panel 20 M255401
lOla-d 唇狀件 102a-d 槽 103a-l 螺絲 105a-b 卡座 107 密封 108 a-b 溝槽 112a-b 墊片 120a-b 隔離部份 122a-d 鉸鏈部份 123a-d 爪部份 140 第一閥 144 第二閥 148 鎖 156 泵 160 氣體供應器 170 堆疊鍵 174 凹處 178a-f 凹槽壁 180 凹處lOla-d lip 102a-d groove 103a-l screw 105a-b holder 107 seal 108 ab groove 112a-b gasket 120a-b isolation portion 122a-d hinge portion 123a-d claw portion 140 section One valve 144 Second valve 148 Lock 156 Pump 160 Gas supply 170 Stack key 174 Recess 178a-f Recess wall 180 Recess
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