CN2719769Y - Clean room transportation package for process chamber kit - Google Patents
Clean room transportation package for process chamber kit Download PDFInfo
- Publication number
- CN2719769Y CN2719769Y CN2004200492563U CN200420049256U CN2719769Y CN 2719769 Y CN2719769 Y CN 2719769Y CN 2004200492563 U CN2004200492563 U CN 2004200492563U CN 200420049256 U CN200420049256 U CN 200420049256U CN 2719769 Y CN2719769 Y CN 2719769Y
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- cabin
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
- B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Buffer Packaging (AREA)
Abstract
The utility model provides a purifying room transportation package device, which is useful for transporting the industrial art cabin assembly with a plurality of cabin elements with different shapes. The package device comprises a first rigid disk which is provided with a first wall rack and a plurality of first grooves which are extended outwards from the first wall rack. The first wall rack is provided with a first edge, the first rigid disk can be assembled to a second rigid disk in a dismountable way, and the second rigid disk is provided with a plurality of second grooves which are extended outwards from the second wall rack. The second rigid disk is provided with a second edge which is coupled with the first edge of the first rigid disk, and the space between the first edge and the second edge is sealed. A plurality of shape fitting units with different inner surface profiles are formed by the couple of the first grooves and the second grooves which face each other, and thus the inner surface profile of every shape fitting unit fits the outer surface profile of one of different cabin elements of the assembly, which causes the cabin elements in the shape fitting units to move least during transportation. The basic transparent part of the disk can also be used for observing the state of every cabin element in the industrial art cabin assembly.
Description
Technical field
The process tank external member (processchamber kit) that will have different elements that relates in one aspect to of the present utility model is transported to portable encapsulation in the decontamination chamber.
Background technology
Have many dissimilar encapsulation to be used for the process tank carry elements to decontamination chamber's environment, the environment particle content is controlled so that the processing of IC chip and telltale avoids polluting in the chamber of this environment.In one type encapsulation, the sealed plastic bag of individual tank element institute around, these plastic bags are embedded in the opening of foamed materials matrix (foam block matrix).In transporting container, the foamed materials matrix is fixed in the subassembly wrapper and is transported to distribution locations or the client place.The foamed materials of decontamination chamber is a kind of high compression, spongiform, polyethylene foam material, for example from the Zotefoam board " Plastazote LD-24 " of Ventura city, California FP Technologies.The foamed materials matrix comprises bonding to form a plurality of independent decontamination chamber's block of foam material of required opening shape mutually.Subassembly wrapper generally has with metal edges and connects and sidewall filled and process material matrix, that be made of plastics or other materials.Subassembly wrapper has handle to make things convenient for the carry elements that will pack to decontamination chamber's environment.
Traditional be packaged with a lot of problems with transportation with in decontamination chamber's environment, open this encapsulation and be associated.For example, traditional encapsulation generates pollutants usually and undesirably discharges gas in decontamination chamber's environment.Usually, transporting container is to break a seal outside the decontamination chamber, and takes out the in-to-in subassembly wrapper.When using decontamination chamber's foamed materials, the foamed materials matrix breaks a seal in decontamination chamber's environment usually.But, may grind the foamed materials of next or fritter and produce contaminant particles in such Kaifeng and when from block of foam material, taking out subassembly wrapper.In addition, decontamination chamber's foamed materials generally has the cellular structure of opening, and this cavernous structure has for example big or small about 10 to 100 microns aperture.The gas that is enclosed in these apertures can be discharged in decontamination chamber's environment.The adhesive linkage that is used for making up three-dimensional matrix between different block of foam material also can discharge gas or produce the polymerization contaminant particles.
In some cases, block of foam material itself can not be brought the decontamination chamber into, must and be transported into the decontamination chamber with single packing element bag Kaifeng like this.Between this delivery period, the flexible plastic that is used for forming around the single component sealable encapsulation may split and make internal part be polluted by external environment condition.It also is difficult being stored in decontamination chamber's environment soft plastic bag for last use, because their are poorly stacked and may be punctured.And, only be the behavior that single component transports certain distance will be increased drop and the danger of defective component.
Another problem has occurred, because foamed materials and outer case do not allow the visual inspection to its inside contained thing.For example, if cabin element ruptures or be cracked, when in decontamination chamber's environment, opening box, just can find this breakage usually in the osed top box.And in an intermediate transportation point, for example the component distribution warehouse is not opened container and is polluted component just can't be checked potted element before being transported to client situation.In addition, the customs inspection of the strictness that relates in the international transport requires to open this container and checks inner contained thing to allow the custom house officer, and this inspection need may opened sealing in the hostile environment, and may make parts go out of use once transporting to thereupon.
Also have another problem, label is attached in traditional foamed materials encapsulation because be difficult to.Usually, by engrave mill and in the foamed materials container recessed zone of processing, and spread thick epoxy resin layer at depression.Then label is pasted on the thick epoxy resin layer.But this epoxy material is in environment under low pressure or when being heated to even may discharging gas during room temperature.In addition, foamed materials may split in engraving the process of milling, and produces defective encapsulation thus.
Another problem has appearred when the process tank external member that will have many different cabins elements that are mutually related is transported or transported.For example, external member may comprise that the different piece of liner makees the lining of technology bulkhead face.In these liners quilt cleanings routinely of the operating period in cabin, refurbish or replacing, so need transport the relevant liner component of a cover usually simultaneously.When this external member is packed separately and is transported, just need ressemble external member in Distribution Center or client place, this has wasted resource and has caused the assembling of off-square parts sometimes.When this problem with traditional encapsulation Kaifeng and when being transported to a plurality of individual components of external member in the decontamination chamber has further worsened, wherein they are put with other element mistakes at once or have mixed, if especially they have been deposited a period of time before use.Being stored in the decontamination chamber is that to reduce standing time in cabin desired, and this is by more bringing realization with it immediately when component failure maybe needs to clean.Unsealing or loosening kit of parts also may be lost or be stolen.
Therefore, such encapsulation is desired, and promptly it allows responsive cabin component to be transported to decontamination chamber's environment safely from maker.It also is desired that described encapsulation keeps the airtight sealing to external environment condition.Expect that in addition described encapsulation can easily label.Also the encapsulation that had of expectation allows the visual inspection of internal part is not taken apart sealing or opened encapsulation.Also expectation is transported and is deposited the relevant parts of a cover and discerns them on demand.And expect that described encapsulation can be fit to anti-detachment, sealing, lock or other instruments.
Summary of the invention
It is useful that the transportation encapsulation of a kind of decontamination chamber transports directly in decontamination chamber's environment the process tank external member that will have a plurality of difformities cabin element.Described encapsulation comprises first rigid disk, and first rigid disk has first ledge and from outward extending a plurality of first grooves of first ledge, first ledge has first limit.Second rigid disk can be from the first dish dismounting.Second dish has second ledge, and second ledge has second limit, and first limit of second limit and first dish is coupled and forms sealing betwixt.Second dish also has from outward extending a plurality of second grooves of second ledge.When these two dishes are assembled together, form a plurality of suitable shape unit by paired first and second grooves of facing mutually with different inner surface profile.The inner surface profile of each suitable shape unit is matched with the outer surface profile of cabin element, the feasible mobile minimum of cabin element in its suitable shape unit during transportation.At least a portion of first or second dish is a substantially transparent, the feasible state that can partly observe each cabin element of process tank external member by described substantially transparent.
Description of drawings
To understand these and other features of the present utility model, aspect and advantage better from the following drawings, explanation and claim, and provide these accompanying drawings to illustrate exemplary characteristics of the present utility model and should not be used for limiting the utility model, wherein:
Fig. 1 is the decomposition diagram of transportation encapsulation, shows first and second dishes of facing mutually with the groove that defines one group of suitable shape unit, and described suitable shape unit is used for fixing the process tank external member with different cabins element;
Fig. 2 is the decomposition diagram with dish of sidewall, and described sidewall comprises detachable panel;
Fig. 3 A is the decomposition cross sectional representation that comprises the transportation encapsulation of a pair of matching disc, and described dish has defined a plurality of suitable shapes unit, and wherein the inner surface profile that each had all conforms to the outer surface profile of the specific cabin element of process tank external member;
The transportation that Fig. 3 B shows Fig. 3 A is encapsulated in around the cabin element and assembles dish, the in-to-in air is discharged by valve outlet port and by the air of valve inlet input clean dried or the scheme drawing after the unreactable gas;
Fig. 4 is the cross sectional representation with groove of cell wall, and described cell wall has relative elasticity nick, and described nick applies the power inwards with cabin element location when being compressed; With
Fig. 5 shows the cross sectional representation of the accumulation transportation encapsulation of the accumulation joint that cooperatively interacts and respective notches.
The specific embodiment
Usually, encapsulation 20 comprises double-type first and second dishes 50,60, they when being assembled together such as Fig. 3 B and ground shown in Figure 5 face mutually.Here graphic encapsulation 20 only is according to example embodiment of the present utility model, and should not be used for limiting scope of the present utility model.Dish 50,60 is made of with the material that bears the external impact between the delivery period enough hard, and has the surface of smooth, flexible and on-granulated, and this surface encapsulates unlike foamed materials, can not discharge individual particle when wearing and tearing mutually with the surface of cabin element 24a-f.Preferably, dish 50,60 surface is continuously, the complete sum atresia, and not when receiving cabin element 24a-f or will be placed in the individual particle that can peel off when cabin element 24a-f in the dish 50,60 breaks a seal.For example in one form, dish 50,60 smooth and resilient surfaces can have the r.m.s. roughness less than about 10 microinchs.The paired dish that assembles 50,60 comes the cabin element 24a-f of receiving process cabin external member 22 as the container of supporting oneself, even can have built-in handlebar cabin element 24a-f is transported directly in the decontamination chamber.The paired dish 50,60 that assembles also can be in the sealing of decontamination chamber and is preserved a period of time in the stable environment, and only when the cabin element 24a-f that need use immediately in the process tank, just take apart, further reduced thus coiling any pollution of 50,60 middle deck element 24a-f.
Generally speaking, first dish 50 comprises that first ledge (ledge), 52, the first limits 54 with first limit 54 can be coupled to corresponding second limit 64 of second dish, 60 second ledge 62.Ledge 52,62 can be the flat or angled strip rigid material that is parallel to each other.Ledge 52,62 also may be molded to have circle, the framework of square or rectangular shape.Limit the 54, the 64th, flat and be parallel to each other substantially, and peripheral one-body molded around dish 50,60.Each limit 54,64 has enough width to allow limit 54,64 and mutually combine and to form face seal.Usually, limit the 54, the 64th, smooth and continuous, but as described below they also can have from its extended sealing projection.Also can use other forms on limit 54,64, for example coil relatively in 50,60 with center shaft or the centre plane of cabin element 24a-f, limit 54,64 tiltables become the acute angle and the obtuse angle of coupling.
As shown in Figure 2, in first dish 50, a plurality of first groove 56a-f outwards stretch out downwards from first ledge 52.In this form, first ledge 52 is open frame of rectangle, and it extends around the first groove 56a-f or even can be around the first groove 56a-f.The first groove 56a-f each all moulding and being sized to have the inner space that suitable shape ground holds a part of process tank element 24a-f.When different groove 56a-f moulding be sized to when holding different process tank element 24a-f, depression is separated with marker space 120a-e in the vertical.For example, groove 56a may be molded to the single depression with the outline that conforms to a process tank element 24a part of holding in groove 56a.Groove 56a-f also may be molded to has a plurality of depressions, for example has the recessed of different radii or width, makes these depressions become mutually continuously the bonded assembly one with the different annular diameters of accommodation chamber element 24a-f.
Similarly, second dish 60 also has from second ledge, the 62 outwardly directed second groove 66a-f.When two dishes 50,60 assemble, as Fig. 3 B and shown in Figure 5, the second specific groove 66a has relatively defined unique unit 92a in the face of the first specific groove 56a, and it has the inner surface profile 93a of the outer surface profile 94a that conforms to specific cabin element 24a.Like this, the inner capacities that the suitable shape unit 92a-f of each uniqueness has is contoured for firmly fixing a predetermined cabin element 24a-f, so that the lateral or vertical mobile minimum of this cabin element 24a-f in unit 92a-f during transportation, because the profile of unit 92a-f closely mates the profile of this cabin element 24a-f.After this manner, a plurality of suitable shape unit 92a-f with different inner surface profile 93a-f comes moulding by the relative double-type first and second groove 56a-f, 66a-f.The inner surface profile 93a-f of each suitable shape unit 92a-f closely mates the outer surface profile 94a-f of cabin element 24a-f.For example, the inner surface profile 93a of a discrete cell 92a may be molded to the profile of the outer surface profile 94a that closely follows cabin element 24a, has an appointment 5 to about 30 mm clearance between these two surperficial 93a, 94a.But other gap lengths also are fine, and the size in this gap depends on that needs will this specific cabin element 24a be fixed on the tightness degree among the unit 92a.
For example, the double-type first and second groove 56a-f, 66a-f are plastic, sizing and separating to hold one group of cabin element 24a-f of the external member 22 of forming the process tank relevant portion, and these relevant portions have common function or common assembly purpose.For example, can be configured for fixing all be the different cabin element 24a-f of process tank cover arrangement 22 parts for groove 56a-f, 66a-f.One type process tank external member 22 comprises the different piece of the different part charges of wall liner for example with the interior bulkhead or the steam separator (gas distributor) of cover part.Another example of external member 22 is the substrate in the winding technologe cabin and the concentric ring assembly arranged, for example arcing ring (shadow ring), outer shroud (outer ring) and suction plate (pumping plate).Another kind of external member 22 can comprise focusing ring (focus ring), cabin side wall spacer and substrate holding ring (substrate clamping ring).Each cabin element 24a-f of external member 22 fits into the suitable shape unit 92a-f of the coupling that is formed by the double-type first and second groove 56a-f, 66a-f.
Can separate by marker space 120a-e by the paired first and second groove 56a-f of coupling, the individual unit 92a-f that 66a-f forms, these marker spaces are sized between adjacent cells, keep enough gaps so that the cabin element 24a-f among each unit 92a-f during transportation can not be in contact with one another.120a-e plastic and sizing in marker space is so that when dish 50,60 was coupled, unit 92a-f isolated mutually.But, discharge and Purge gas from unit 92a-f for convenience, 120a-e also plastic and sizing in marker space allows the gas communication between unit 92a-f, so that the gas among the unit 92a-f can discharge from the single output of connecting the whole unit assembly, and change from single input similarly.Suitable gap length depends on the size of adjacent compartment element 24a-f, for example can be from about 5 millimeters to about 40 millimeters.But, also can use other gap lengths, this depends on the tightness degree that a cabin element 24a-f need be fixed among the unit 92a-f.
In one form, second dish, 60 the second groove 66a-f has the shape identical substantially with the first groove 56a-f of first dish 50, and when these two dishes 50,60 combine that the second groove 66a-f is next and put with the relation that becomes mirror image with the first groove 56a-f.Because they have identical substantially shape, two dishes 50,60 of this form all can use the single mould with same transverse facial contour as described below to make more economically.And this form is particularly useful to the cabin element 24a-f that carries radial symmetry, for example cylinder or axisymmetric cabin element 24a-f.Identical shape refers to identical cross-sectional profiles substantially, but an additional features that can be useful on other purposes in the profile, for example Tu Chu handle or other features.
In another form, one or more among the first and second groove 56a-f, the 66a-f have cell wall 178a-b, and its moulding is with when cabin element 24b places groove 56b, and the mechanical bias power that applies is inwards come at the sealed cabin element 24b of single or multiple contact points place.Cell wall 178a-b can have the nick 180 that stretches inwards, and as shown in Figure 4, nick 180 is compressed when cabin element 24b places groove 56b.As a result, nick 180 applies elastic bias force inwards at the contact point place with cabin element 24b, and this power is securely fixed in cabin element 24b among the groove 56b, makes with the surface of cabin element 24b direct contact minimum simultaneously.Relative cell wall 178a-b also can have the cabin element 24b that relative nick 180a-b is opposite among the groove 56b and apply opposing force.Also can use additive method to apply this power inwards, for example be installed on the outside face of groove 56b flexible loop structure, metal spring, spring clip (all not shown), and be added to the flexible material pad that groove 56b in-to-in is compatible with the decontamination chamber at suitable point with its mild compression.A kind of like this form is good to the surface of sealed cabin element 24a-f or cabin element 24a-f, this surface be frangible or during transportation on the inside face of cell wall 178a-b wearing and tearing the time damage easily.
In one form, rigid sidewalls 96a-d is provided with at least one that support first or second dish 50,60.Sidewall 96a-d stretches around dish 50,60 and has enough big height and is stretched among groove 56a-f, the 66a-f outside any one degree of depth.Sidewall 96a-d also can be constructed with the vertical or bevelled profile of during transportation keeping rigidity.In one form, sidewall 96a-d comprises the smooth wall of cardinal principle perpendicular to the plane of ledge 52,62.This flat wall mask have stretch in all four side direction of wall around around flange to improve the shearing strength value of side wall construction.Also can use other structures that improve rigidity to improve the intensity of sidewall 96a-d, for example pattern of cross coupling or hexagonal cells.Sidewall 96a-d also can be made by composite material, other insert materials is for example arranged to improve the epoxy resin of structural rigidity.
In one form, sidewall 96a-d comprises one group of detouchable panel 100a-d.Each detachable panel 100a-d can have identical substantially shape, makes available single mould make panel 100a-d.In Fig. 2, illustrate and have identical shaped one group of suitable four panel 100a-d.Each panel 100a-d comprises the flange 101a-d at right angle, and its major side wall surface from panel 100a-d is recessed, and fits into the slit 102a-d of the corresponding coupling under dish 50 circumferences.The ledge 52 of the dish 50 of the groove 56 that band outwards stretches places on four adjacent sidewall panel 100a-d so that each flange 101a-d of sidewall panel 100a-d fits into corresponding slit 102a-d under ledge 52 lower surfaces.One group of screw 103a-1 be connected folder 105a-h and can be used to panel 100a-d is connected to ledge 52 or interconnect.
The limit part 54,64 of first or second dish 50,60 can be coupled to together to form airtight sealing 107 between dish.Two airtight sealings 107 that coil between 50,60 allow cabin element 24a-f wherein to carry out pollution-free transportation.For example in one form, shown in Fig. 3 B, one or more limit 54,64 of dish 50,60 has the groove 108a-b that can hold packing ring 112a-b, and packing ring 112a-b for example is O type ring or the sealing of other flexible polymers.The snap close joint 84a-d that is installed to first dish 50 the snap close 82a-d and is installed to second dish 60 allows two the packing ring 112a-b places of dish 50,60 between two dishes 50,60 sealed, to keep two airtight sealings 107 between the dish, as Fig. 3 B and shown in Figure 5.Snap close 82a-d can be traditional snap close of plastic strip for example, and it has the ripply flexible pivot section 122a-d of the panel 100a-d that is installed to first dish 50, and has the overhanging claw-like part 123a-d from pivot section 122a-d.During use, claw-like part 123a-d changes outside pivot and is afterburning to the end of the snap close joint 84a-d on the panel 100a-d that is installed to second dish 60.In another form, the spherical post of U-shaped of a series of projectioies is coupled to the corresponding bell recess on limit 54 of first dish 50 to form the sealing (not shown) betwixt in second dish, 60 the limit 64.In another form, second limit 64 have around flange, its respective slots that snaps in first limit 54 forms sealing (also not shown), and the dish 50,60 the engagement after, by drawing back two limits 54,64 they are separated from engagement.
The gas-tight seal of encapsulation 20 also can comprise first valve 140 that makes suitable shape unit group 92 exhausts of leak free, and second valve 144 of gas being introduced the unit 92 of exhaust.For example, first and second valves 140,144 can be the Schrader valves, and it allows to introduce or discharge gas when the spring loaded pin 148 at movement of valve 140,144 centers.First valve 140 can be connected to the pump 156 that makes the sealing unit exhaust, and second valve 144 can be connected to the air (CDA) of clean dried or unreactable gas are introduced gas supply device 160 in the sealed unit.Perhaps, also single valve can be used for exhaust and gas cleaning or filling function (not shown).
The relative part of sidewall 96a-d or detachable panel 100a-d also can have opposed facing one or more pairs of built-in handle opening 98a-d.Handle opening 98a-d permission operator lifts and will encapsulate like a cork 20 and is transported in decontamination chamber's environment.This handle opening 98a-d has superiority, because they do not stretch out the encapsulation 20 of having assembled, thereby takies decontamination chamber's storage space still less.Handle opening 98a-d easy fracture more not also during transportation.Handle opening 98a-d also can be fabricated onto among sidewall 96a-d or the detachable panel 100a-d easily, and needn't connect extra parts to dish 50,60.But, also can be on sidewall 96a-d or detachable panel 100a-d or coil other surfaces of 50,60 fixing outside the handle (not shown).
In use, one in the selective pan 50,60 as lower wall or basal disc, first dish 50 for example, and be placed on the running surface.Each cabin element 24a-f vertically inserts among of open slot 56a-f of lower wall 50.After filling dish 50, another dish 60 is as last dish or covering disk and cooperate to cover at cabin element 24a-f and stretch out on the part of groove 56a-f of lower wall 50.Be locked on the lower wall 50 will go up dish 60 with rear catch 82a-d and snap close joint 84a-d engagement.Now each cabin element 24a-f is positioned in and is customized to suitable shape and cooperates among the unit 92a-f of specific cabin element 24a-f, and isolates with other cabins element 24a-f.And, because cabin element 24a-f all is included in the single encapsulation 20, so the whole kit of parts of the easier placement of retail trader or client.In addition, when rigid disk 50,60 when small part is made of the polymeric material of substantially transparent, the cabin element 24a-f in the easier identification encapsulation 20 is promptly corresponding to those cabin elements of particular kit 22.
Preferably, dish 50,60 at least a portion or whole dish 50,60 are made of to allow being fixed on the visual inspection of dish 50,60 middle deck element 24a-f a kind of rigid material of going back substantially transparent.Substantially transparent refers to visible light translucent or transparent.For example, a kind of suitable transparent material can have the visible transmission ratio at least about 80%.But first the or second groove 56a-f, the 66a-f of assembling dish 50,60 also surface polishing to improve the clear degree of transmitted light and observation.Transparent part allows the operator of decontamination chamber visually to detect or the content of inspection dish 50-60 and do not break and open sealing.For example, in one form, have only the one or more materials among the first or second groove 56a-f, the 66a-f to constitute by substantially transparent, but also constituting by the material of substantially transparent all of two dishes 50,60.
The part of substantially transparent also allows identification label or element bar code to be attached to the inside of dish and still can see from the outside.This prevents to damage label in transportation or memory period.And the rigid surface of dish allows traditional label more easily to be attached on the dish, processes recess or wants special epoxide-resin glue needed and need not resemble in decontamination chamber's froth pulp.
A kind of suitable substantially transparent rigid material is thermal finalization (heatsetting) thermoplastic polymer such as high density polyethylene (HDPE), for example based on polyethylene terephthalate (PET), glycol modified PET (PETG), directed PET (O-PET) or PEN (PEN) or its mutual or with the poly-mer of the compound of other resins.Preferably, transparent rigid material is softening and be shaped to mouldable thermoplastic plastic of mold shape when when heating, glycol modified PET (PETG) for example, for example the PAL_G sheet a tree, used in making timber for boats of being made by the Palram of Israel Ramat Yohanan.Rigid disk 50,60 can be molded as single integration member from individual thermoplastic blanks plate (blank sheet) with traditional plastic moulding technology.Can utilize traditional thermoforming process and equipment, for example vacuum-assisted, auxiliary, the mechanical plug of air auxiliary (mechanical plug assist) or matched moulds are molded, and blank flat is thermoformed into thermal finalization thin-walled dish.
In a kind of method of manufacturing dish 50,60, place on the formpiston of dish or the former thermoplastic plate and heating, soften in the mould up to it.Exert pressure or pass through to descend to extract sheet material out by the shape of using relative matched mold, and fore-warming thermoplastic plate is drawn in the also heatable mould from mould.For example, if sheet material is heated and allows to soften in the former, so available formpiston comes to apply from the opposite side that is heated plate the relative pressure of suitable shape, and formpiston cool to room temperature and as auxiliary cooling die gradually.Thermoplastic plate is thermal finalization by following steps: keep in touch in enough a period of times conforming to the profile of mould fully with heated die surface, with the plate of moulding cool to room temperature gradually, the preform with dish shifts out mold cavity subsequently.Also can in mould, use vacuum to extract any limited air out.Subsequently can with the preform cutting of dish or otherwise moulding add handle opening 98a-d and other projections, and moulding forms snap close joint and other features.Sheet material must be heated on its Tg (glass transition temperature) and can the temperature spot of excessive sag on being positioned at mold cavity the time under.In the Heat forming process, be suitable in about 120 ℃ of sheet material temperature in about 240 ℃ scope.Mould can with wooden, resin or for example the metal of aluminium even steel make.Make a spot of dish at 50,60 o'clock, and can use for example wooden soft material.
Also can use multilayer board to replace single-skin panel.Multilayer board also can comprise the ground floor that the thermoplastic polymer by for example PETG constitutes and the second layer that is made of for example composite material of glass-epoxy plate.And, can the manufacturing dish 50,60 make that the parts of groove 56,66 for example are with the material manufacture of substantially transparent, and for example other parts of sidewall 96a-d or detachable panel 100a-d for example embed the glass fiber bundle plate in the epoxy resin with firmer or more crash-resistant material manufacture.
In another embodiment, dish 50,60 or coil the metal manufacturing of a part of 50,60 with for example aluminium or steel.But this embodiment does not allow to see the state of element 24a-f after transporting that clear the ship, or checks the label that is arranged in dish 50,60.Like this, dish 50,60 can be made Chengdu and have non-transparent part, for example be connected to the nontransparent ledge 52,62 of groove 56a-f, the 66a-f of substantially transparent so that by the transparent wall of groove 56a-f, 66a-f still can see groove 56a-f, 66a-f in cabin element 24a-f.
In yet another embodiment, the part of dish 50,60 dyes according to the color of selecting from the color coding table, and this tabular has gone out the parts number of different colors and corresponding external member 22 or cabin element 24a-f.For example, the substantially transparent of dish 50,60 partly can be dyeed, maybe will coil 50,60 for example opaque section dyeing of another part.Color can comprise from any visible wavelength of color spectrum and comprise white or black.The color coding tabular goes out the single color that is associated with corresponding process tank external member 22, cabin element 24a-f or process application.For example, this table can be listed blueness and be associated with aluminium etching cabin process kit, and yellow or the orange-yellow cabin external member that is used for copper.The spare part that this color coding allows the operator of decontamination chamber to differentiate like a cork and correctly identification is used for specific cabin or application.As a result, needn't open encapsulation 20 sealing and check cabin element 24a-f determining their function, and can keep the integraty of cabin element 24a-f for more time.
The tabulation of color coding table also can will have identical cabin element 24a-f but be used in process tank external member 22 and different color-associations in the different process application, and these different process application for example are mutually incompatible.For example, aluminium and copper-connection manufacturing process are all used the process tank external member 22 that comprises basic identical cabin element 24a-f.But, in case such process tank external member 22 has been used in the process tank of the first kind of finishing first process application, then it can not use in the process tank of second type of serving another process application again, because it may pollute second process tank.This situation occurs usually at this moment, and the external member 22 of the cabin element 24a-f that has promptly used in a process tank for example is used for the cabin of al deposition or etching, is sent to the maker place and cleans or refurbish.Cabin element 24a-f be cleaned or refurbish after, their are sent back to client place.At that time, encapsulation 20 color codings that will be used for cabin element 24a-f are used to show former aluminium, make cabin element 24a-f can unexpectedly not be used for copper deposition or etching cabin or technology.
Therefore, the utility model provides a kind of transportation encapsulation 20, and it allows for example process tank element 24a-f of element external member 22 is transported directly to client's the decontamination chamber from maker or Distribution Center.Encapsulation 20 is reusable, because impervious panel surface of rigidity can easily be cleaned. Dish 50,60 is owing to have a smooth surface, and it does not have the granular particles that can be worn away easily, and make pollute minimum.And each suitable shape unit 92a-f of suitable shape encapsulation 20 can be used to keep the specific cabin element 24a-f of process tank external member 22, and conforms to the shape of cabin element 24a-f so that breaking between the delivery period is minimum.In addition, the transparent part of unit 92a-f allows encapsulating the visual inspection of 20 contents, and to the inspection of each cabin element 24a-f, and do not open sealing and contaminated articles.
Though described in detail the utility model for its preferred form, other forms also are fine.For example, unit 92a-f can be merged together and form the continuous volume with different radii district, can transport the individual tank element with complicated outside face pattern.In addition, can be other purposes and customize the shape of individual unit 92a-f, for example they not may be molded to and transport that the recessed of corresponding shaping is complementary in the container with the contacted outline of component.Therefore, the claim explanation to preferred form that should not be limited to here to be comprised.
Claims (13)
1. decontamination chamber's transportation encapsulation that is used for the process tank external member, described process tank external member has a plurality of difform cabins element, it is characterized in that described encapsulation comprises:
(a) first rigid disk has:
First ledge with first limit; With
From outward extending a plurality of first grooves of described first ledge;
(b) second rigid disk can be from the described first dish dismounting, and described second dish has:
Second ledge with second limit, described first limit of described second limit and described first ledge is coupled and forms sealing betwixt; With
From outward extending a plurality of second grooves of described second ledge,
The a plurality of suitable shape unit that wherein has different inner surface profile is formed by paired first and second grooves of facing mutually, the inner surface profile of each suitable shape unit is matched with the outer surface profile of cabin element, the feasible mobile minimum of during transportation described cabin element in its suitable shape unit, and
At least a portion of wherein said first or second dish is a substantially transparent, the feasible state that can partly observe each cabin element of described process tank external member by described substantially transparent.
2. transportation as claimed in claim 1 encapsulation, wherein said first and second grooves of facing mutually have essentially identical inner surface profile and come and put with the relation of mutual mirror image.
3. transportation encapsulation as claimed in claim 1, at least one in wherein said first or second dish comprises rigid sidewalls, described sidewall has the height greater than the degree of depth of any one described suitable shape unit.
4. transportation as claimed in claim 3 encapsulation, wherein the relative part of sidewall each all comprise a handle opening.
5. transportation encapsulation as claimed in claim 4, wherein said sidewall comprises one group of detachable panel that can be coupled to together.
6. transportation encapsulation as claimed in claim 1, at least one in wherein said first or second groove has the cell wall that is shaped to the mechanical bias power that applies inwards, when described cabin element is arranged in described groove described element is fixed on the contact point place.
7. transportation as claimed in claim 1 encapsulation is included in described first or second dish groove at least one the described limit, and the washer sealing in described groove, to form airtight sealing between described first and second dishes.
8. transportation encapsulation as claimed in claim 1 comprises that snap close and snap close joint are to be locked into described first and second dishes together.
9. transportation encapsulation as claimed in claim 1, wherein said substantially transparent partly is colored.
10. decontamination chamber's transportation encapsulation that is used for the process tank external member, described process tank external member has a plurality of difform cabins element, it is characterized in that described encapsulation comprises:
(a) dish of first rigidity and substantially transparent has:
First framework with first limit; With
From outward extending a plurality of first grooves of described first framework;
(b) dish of second rigidity and substantially transparent can be from the described first dish dismounting, and described second dish has:
Second framework with second limit; With
From outward extending a plurality of second grooves of described second framework, described second groove has and the essentially identical inner surface profile of described first groove;
(c) washer sealing is in the groove in described first or second framework; With
(d) snap close on described first dish and the snap close joint on described second dish,
Wherein be coupled to together and described latching on the described snap close joint when closed when described first and second dishes, between described two dishes, form airtight sealing;
The a plurality of suitable shape unit that wherein has different inner surface profile is formed by paired first and second grooves of facing mutually, the inner surface profile of each suitable shape unit is matched with the outer surface profile of cabin element, the feasible mobile minimum of during transportation described cabin element in its suitable shape unit, and
First or second dish of wherein said substantially transparent allows to observe the state of each cabin element of described process tank external member by it.
11. transportation encapsulation as claimed in claim 10, in wherein said first or second dish at least one comprises rigid sidewalls, described sidewall has the height greater than the degree of depth of any one described suitable shape unit, and described sidewall comprises the one group of detachable panel that is coupled to together.
12. transportation as claimed in claim 11 encapsulation, wherein the relative part of sidewall each all comprise a handle opening.
13. transportation encapsulation as claimed in claim 10, at least one in wherein said first or second groove has the cell wall that is shaped to the mechanical bias power that applies inwards, when the cabin element is arranged in described groove described element is fixed on the contact point place.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/609,138 US20040262187A1 (en) | 2003-06-26 | 2003-06-26 | Clean room transportation package for process chamber kit |
| US10/609,138 | 2003-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2719769Y true CN2719769Y (en) | 2005-08-24 |
Family
ID=33540775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004200492563U Expired - Fee Related CN2719769Y (en) | 2003-06-26 | 2004-04-20 | Clean room transportation package for process chamber kit |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20040262187A1 (en) |
| JP (1) | JP3106174U (en) |
| KR (1) | KR200350413Y1 (en) |
| CN (1) | CN2719769Y (en) |
| TW (1) | TWM255401U (en) |
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| GB2422658A (en) * | 2005-01-31 | 2006-08-02 | Titude Ltd 4 | A method of flushing gas into an out of a sealable enclosure |
| US20060283770A1 (en) * | 2005-06-03 | 2006-12-21 | Applied Materials, Inc. | Transportation fixture and package for substrate rack |
| US20070241027A1 (en) * | 2006-04-12 | 2007-10-18 | Taiwan Fu Hsing Industrial Co., Ltd. | Lock-packing box structure |
| EP2449304B1 (en) | 2009-06-30 | 2017-03-01 | Roylan Developments Limited | Apparatus for purging containers for storing sensitive materials |
| US9828128B1 (en) | 2014-12-17 | 2017-11-28 | X Development Llc | On-demand protective structures for packaging items in a container |
| US9840347B1 (en) | 2014-12-17 | 2017-12-12 | X Development LLX | Adhering modular elements for packaging structures |
| CN107472656A (en) * | 2017-07-25 | 2017-12-15 | 中国科学院上海光学精密机械研究所 | Glass pieces sealing packaging box |
| USD864713S1 (en) * | 2018-10-01 | 2019-10-29 | Flashbay Electronics Hong Kong Limited | Packaging box |
| CN208813756U (en) * | 2018-10-19 | 2019-05-03 | 北京京东方光电科技有限公司 | A kind of VR pack box |
| US11377288B1 (en) * | 2020-02-15 | 2022-07-05 | Meko Outdoors Inc. | Portable cordless fan carrying case |
| WO2022204588A1 (en) * | 2021-03-26 | 2022-09-29 | Bae Systems Information And Electronic Systems Integration Inc. | Clip and lid system for a chip tray |
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-
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- 2003-06-26 US US10/609,138 patent/US20040262187A1/en not_active Abandoned
-
2004
- 2004-02-26 KR KR20-2004-0005106U patent/KR200350413Y1/en not_active IP Right Cessation
- 2004-03-17 TW TW093204049U patent/TWM255401U/en not_active IP Right Cessation
- 2004-04-20 CN CN2004200492563U patent/CN2719769Y/en not_active Expired - Fee Related
- 2004-06-25 JP JP2004003719U patent/JP3106174U/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3106174U (en) | 2004-12-16 |
| TWM255401U (en) | 2005-01-11 |
| US20040262187A1 (en) | 2004-12-30 |
| KR200350413Y1 (en) | 2004-05-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050824 Termination date: 20130420 |