CN104888551A - Filtration membrane assembly of separation type transportation box - Google Patents
Filtration membrane assembly of separation type transportation box Download PDFInfo
- Publication number
- CN104888551A CN104888551A CN201410078671.XA CN201410078671A CN104888551A CN 104888551 A CN104888551 A CN 104888551A CN 201410078671 A CN201410078671 A CN 201410078671A CN 104888551 A CN104888551 A CN 104888551A
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- Prior art keywords
- filter membrane
- ring
- carrier box
- membrane component
- isolated carrier
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Abstract
The present invention discloses a filtration membrane assembly of a separation type transportation box. The filtration membrane assembly comprises a fixed ring, a closed member, a support member, a filtration membrane and a cover body, wherein the fixed ring comprises annular body and an inner convex ring, the inner convex ring is provided with an inner ring hole, the closed member comprises an abutment portion and a neck portion, the abutment portion moveably bears against the inner convex ring, and the support member comprises a support ring and a plurality of support ribs. According to the present invention, the abutment portion is closed on the inner side of the inner ring hole and the support ribs push and eject the closed member so as to improve the airtightness of the filtration membrane assembly.
Description
Technical field
The invention relates to a kind of filter membrane component of isolated carrier box, especially in regard to a kind of increase air inlet operation time air inflow and improve the filter membrane component of bubble-tight isolated carrier box.
Background technology
In semiconductor processing, automatic material transport system (Automated Material Handling System, AMHS) with isolation input and output material standard mechanical interface (Standard Mechanical Interface, SMIF) equipment is often used to carry out wafer (wafer) and photomask (photomask) in the maintenance of non-use period and transport, it not only can replace Traditional Man carrying, reduce building and maintenance cost of dust free room equipment, the cleanliness factor of wafer and photomask can also be promoted, reach superelevation and produce yield, therefore in recent years, it is the standard device specification of international semiconductor factory that AMHS and SMIF has been listed in.
As mentioned above, for avoiding destroying wafer or photomask, general wafer cassette or the optical mask box of adopting protects wafer or photomask, and filling inert gas produces oxidation to prevent wafer or photomask and damages in box.Refer to Fig. 1, shown in 2, it discloses a kind of existing optical mask box 1, the bottom of described optical mask box 1 has several filling device 12 connecting gas tube 11, hollow channel 13 is provided with in each filling device 12, and one end of hollow channel 13 is for being provided with opening and closing part 14, described opening and closing part 14 is by being made up of the loose-leaf of plural tool elastic displacement, and the other end away from opening and closing part is provided with guide ramp, utilize the hollow channel 13 set by filling device 12 and opening and closing part 14, make gas tube 11 when for carrying out air inlet operation, filling gas in optical mask box 1 can be stretched into by opening and closing part 14.
But, described gas tube 11 is utilized to penetrate described hollow channel 13, the design in described optical mask box 1 is stretched into again by described opening and closing part 14, its adaptation is still not enough, the foreign matters such as the dust in air, fines are caused to affect its cleanliness factor along with in the described optical mask box 1 of inflation, and then jeopardize the quality and yield that photomask are used for wafer production, moreover the restriction that the caliber of described gas tube 11 is subject to described hollow channel 13 also can affect aeration speed to described optical mask box 1 and efficiency.
Therefore, be necessary the filter membrane component that a kind of isolated carrier box is provided, to solve the problem existing for prior art.
Summary of the invention
In view of this, the invention provides a kind of filter membrane component of isolated carrier box, to solve the problem of prior art adaptation deficiency.
Main purpose of the present invention is the filter membrane component providing a kind of isolated carrier box, utilizes butting section can be sealed at inside interior annular distance, simultaneously by the ejection of ribs, can improve the air-tightness of filter membrane component and the structure simplifying air inlet and give vent to anger.
For reaching aforementioned object of the present invention, one embodiment of the invention provides a kind of filter membrane component of isolated carrier box, be arranged on a passage of the bottom of an isolated carrier box, described filter membrane component comprises a retainer ring, one closely sealed, one support member, one filter membrane and a lid, described retainer ring comprises a ring bodies and an internal projecting ring, described ring bodies is arranged on the passage of the bottom of described isolated carrier box and has an annular aperture, described internal projecting ring extends inside the annular aperture of described ring bodies, and there is annular distance in, described closely sealed comprises a butting section and a neck, described butting section is movable up and down to be resisted against on described internal projecting ring, described neck gos deep in described interior annular distance from described butting section to downward-extension, wherein said neck has a central shaft hole, and several radial side opening, described radial side opening is communicated with described central shaft hole, described support member is placed on described ring bodies, described support member comprises a support ring and several ribs, described ribs extends radially inwardly and is resisted against described butting section inside described support ring, described filter membrane is placed on described support member, described lid is placed on described filter membrane, and described lid comprises several tops side opening.
In one embodiment of this invention, described butting section has several radial groove, and described ribs is respectively to having a down dip contact on described radial groove.
In one embodiment of this invention, described retainer ring also has bulge loop on, upwards extends and have annular distance on from the end face of described ring bodies, and described support member is placed in described upper annular distance.
In one embodiment of this invention, the internal diameter of described upper annular distance is greater than the internal diameter of described annular aperture, and the internal diameter of described annular aperture is greater than the internal diameter of described interior annular distance.
In one embodiment of this invention, the diameter outside the diameter of described lid and described upper bulge loop matches.
In one embodiment of this invention, the described top side hole of described lid is formed in the end face of described lid and an intersection of side.
In one embodiment of this invention, described butting section has the outer ring surface of an arc-shaped.
In one embodiment of this invention, described support member also has a cross rib, is arranged on inside described support ring.
In one embodiment of this invention, the outer ring surface of described ring bodies is an inclined plane of from top to bottom undergauge.
In one embodiment of this invention, the diameter outside the diameter of described filter membrane and described support ring matches.
As mentioned above, the present invention can be sealed at inside described interior annular distance by described butting section, simultaneously by the ejection of described ribs, improves the air-tightness of described filter membrane component and the structure simplifying air inlet and give vent to anger.In addition, by the design of described upper annular distance, annular aperture, interior annular distance, gas by described passage by described radial side opening, can have larger space enter described isolated carrier box inner and be increased in air inlet operation time intake efficiency.
Accompanying drawing explanation
Fig. 1 is the stereogram of an existing isolated carrier box.
Fig. 2 is the phantom of an existing isolated carrier box.
Fig. 3 is the three-dimensional exploded view of the filter membrane component of the isolated carrier box of one embodiment of the invention.
Fig. 4 is the sectional view of the filter membrane component of the isolated carrier box of one embodiment of the invention.
Fig. 5 is the sectional view of the filter membrane component of one embodiment of the invention isolated carrier box when holding one's breath.
Sectional view when Fig. 6 is the filter membrane component air inlet of one embodiment of the invention isolated carrier box.
Detailed description of the invention
The explanation of following embodiment is graphic with reference to what add, can in order to the specific embodiment implemented in order to illustrate the present invention.Moreover, the direction term that the present invention mentions, such as upper and lower, top, the end, front, rear, left and right, inside and outside, side, surrounding, central authorities, level, transverse direction, vertical, longitudinal direction, axis, radial direction, the superiors or orlop etc., be only the direction with reference to annexed drawings.Therefore, the direction term of use is in order to illustrate and to understand the present invention, and is not used to limit the present invention.
Please refer to shown in Fig. 3,4, the filter membrane component 100 of the isolated carrier box of one embodiment of the invention, described isolated carrier box 2 is in order to deposit the structure of the storing unit of semiconductor element or photomask, described filter membrane component 100 is arranged on a passage 21 of the bottom of described isolated carrier box 2, described filter membrane component 100 comprises a retainer ring 3, one closely sealed 4, support member 5, filter membrane 6 and a lid 7, and the present invention is by hereafter describing the detail structure of each element, assembled relation and operation principles thereof in detail.
Please refer to shown in Fig. 3,4, described retainer ring 3 comprises bulge loop 33 on ring bodies 31, internal projecting ring 32 and, and wherein said ring bodies 31 is arranged in the passage 21 of the bottom of described isolated carrier box 2, and described ring bodies 31 has an annular aperture 311; Described internal projecting ring 32 is inwardly and to downward-extension inside the annular aperture 311 of described ring bodies 31, and described internal projecting ring 32 has annular distance 321 in; Described upper bulge loop 32 upwards extends from the end face of described ring bodies 31, and described upper bulge loop 33 has annular distance 331 on, and an inner top surface of described upper bulge loop 32 is preferably an inside and downward-sloping infundibulate inclined plane.Described support member 5 is placed in described upper the annular distance 331 and outside of described support member 5 by being attached to the inner side of described upper annular distance 331, the internal diameter of wherein said upper annular distance 331 is greater than the internal diameter of described annular aperture 311, and the internal diameter of described annular aperture 311 is greater than the internal diameter of described interior annular distance 321.In addition, the outer ring surface of described ring bodies 31 is an inclined plane of from top to bottom undergauge, in order to the medial surface of passage described in tight fit 21.
Please refer to shown in Fig. 3,4, described closely sealed 4 comprises butting section 41 and a neck 42, the bottom surface of described butting section 41 is preferably inside and downward-sloping taper inclined plane, it is movable up and down is resisted against on the inner top surface (infundibulate inclined plane) of described internal projecting ring 32, and described butting section 41 has the outer ring surface (sign) of several radial groove 411 and an arc-shaped, described outer ring surface closes the inner side of described annular aperture 311 in order to be close to.In the present embodiment, the radial end face being formed in described butting section 41 of described radial groove 411, is interconnected, and better for cross; Described neck 42 gos deep in described interior annular distance 321 from described butting section 41 to downward-extension, wherein said neck 42 has a central shaft hole 421 and several radial side opening 422, it is inner that wherein said central shaft hole 421 is axially formed in described neck 42, described radial side opening 422 is connected with described central shaft hole 421, and extends radially outwardly to the outer peripheral face being opened on described neck 42.In addition, described central shaft hole 421 does not extend upwardly to described butting section 41.
Please refer to shown in Fig. 3,4, described support member 5 is placed on described ring bodies 31, and described support member 5 comprises a support ring 51, several ribs 52 and a cross rib 53, described ribs 52 extends radially inwardly inside described support ring 51, and described ribs 52 is respectively to having a down dip contact on the described radial groove 411 of described butting section 41, described cross rib 53 is arranged on inside described support ring 51, in order to strengthen the overall structure of described support member 5.
Please refer to shown in Fig. 3,4, described filter membrane 6 is placed on support ring 51 top of described support member 5, diameter outside the diameter of wherein said filter membrane 6 and described support ring 51 matches, in order to make described filter membrane 6 and support member 5 can be closely sealed, described filter membrane 6 can utilize composite fibre to make, and therefore has the micropore in many suitable apertures.When described filter membrane component 100 is crossed in air circulation, at least can by the micronic dust in the micropore filtered air of described filter membrane 6 and impurity.
Please refer to shown in Fig. 3,4, described lid 7 is placed on described filter membrane 6 and by built in described upper bulge loop 33 top, wherein said lid 7 comprises several tops side opening 71, and described top side opening 71 is formed in the end face of described lid 7 and an intersection of side.In addition, the diameter outside the diameter outside described lid 7 and described upper bulge loop 33 matches, in order to make described lid 7 can be closely sealed with upper bulge loop 33; In bottom described lid 7 one, the internal diameter of concave space then matches with the external diameter of described filter membrane 6 and support member 5, can closely sealedly be assembled in described interior concave space in order to make described filter membrane 6 and support member 5.
Please refer to shown in Fig. 3,4, according to above-mentioned structure, as shown in Figure 5, when described filter membrane component 100 be in hold one's breath state time, described in the ejection of described ribs 52 closely sealed 4 butting section 41 radial groove 411 on, make the bottom surface of described butting section 41 (taper inclined plane) by the inner top surface (infundibulate inclined plane) of described internal projecting ring 32, now, described radial side opening 422 gos deep into being close to its hole wall in described interior annular distance 321, thus extraneous air cannot be communicated with described isolated carrier box 2 inside, described isolated carrier box 2 inside is formed and holds one's breath.On the other hand, as shown in Figure 6, when utilize the instruments such as gas tube (as the 2nd figure) by as described in the neck 42 of closely sealed 4 upwards push against time, ribs 52 described in butting section 41 ejection of described closely sealed 4, makes described ribs 52 slightly move up.Now, described radial side opening 422 leaves the hole wall of described interior annular distance 321 because of rising, the inner top surface (infundibulate inclined plane) of described internal projecting ring 32 is also left in the bottom surface (taper inclined plane) of described butting section 41 because of rising simultaneously, and then extraneous air is communicated with described isolated carrier box 2 inside by described radial side opening 422 and top side opening 71, described passage 21 is namely inner to described isolated carrier box 2 by the air inlet of described filter membrane component 100.
Please refer to shown in Fig. 3,4, by above-mentioned design, utilize described butting section 41 can be sealed at inside described interior annular distance 321, simultaneously by the ejection of described ribs 52, the air-tightness of described filter membrane component 100 can be improved and the structure simplifying air inlet and give vent to anger.In addition, the internal diameter of described upper annular distance 331 is utilized to be greater than the internal diameter of described annular aperture 311, the internal diameter of described annular aperture 311 is greater than the design of the internal diameter of described interior annular distance 321, gas passes through described radial side opening 422 by described passage 21, namely there is larger space to enter described isolated carrier box 2 inner, effectively can increase its intake efficiency when air inlet operation.
The present invention is described by above-mentioned related embodiment, but above-described embodiment is only enforcement example of the present invention.Must it is noted that published embodiment limit the scope of the invention.Contrary, be contained in the spirit of claims and the amendment of scope and impartial setting and be included in scope of the present invention.
Claims (10)
1. a filter membrane component for isolated carrier box, is arranged on a passage of the bottom of an isolated carrier box, it is characterized in that: described filter membrane component comprises:
One retainer ring, comprises: a ring bodies, is arranged on the passage of the bottom of described isolated carrier box and has an annular aperture; And an internal projecting ring, extend inside the annular aperture of described ring bodies, and there is annular distance in;
One closely sealed, comprise: a butting section, be movable up and downly resisted against on described internal projecting ring; And a neck, go deep in described interior annular distance to downward-extension from described butting section, wherein said neck has a central shaft hole, and several radial side opening, and described radial side opening is communicated with described central shaft hole;
One support member, be placed on described ring bodies, described support member comprises: a support ring; And several ribs, extend radially inwardly inside described support ring and be resisted against described butting section;
One filter membrane, is placed on described support member; And
One lid, is placed on described filter membrane, and described lid comprises several tops side opening.
2. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: described butting section has several radial groove, and described ribs is respectively to having a down dip contact on described radial groove.
3. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: described retainer ring also has bulge loop on, upwards extends and have annular distance on from the end face of described ring bodies, and described support member is placed in described upper annular distance.
4. the filter membrane component of isolated carrier box as claimed in claim 3, is characterized in that: the internal diameter of described upper annular distance is greater than the internal diameter of described annular aperture, and the internal diameter of described annular aperture is greater than the internal diameter of described interior annular distance.
5. the filter membrane component of isolated carrier box as claimed in claim 3, is characterized in that: the diameter outside the diameter of described lid and described upper bulge loop matches.
6. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: the described top side hole of described lid is formed in the end face of described lid and an intersection of side.
7. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: described butting section has the outer ring surface of an arc-shaped.
8. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: described support member also has a cross rib, is arranged on inside described support ring.
9. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: the outer ring surface of described ring bodies is an inclined plane of from top to bottom undergauge.
10. the filter membrane component of isolated carrier box as claimed in claim 1, is characterized in that: the diameter outside the diameter of described filter membrane and described support ring matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410078671.XA CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410078671.XA CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104888551A true CN104888551A (en) | 2015-09-09 |
| CN104888551B CN104888551B (en) | 2016-08-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410078671.XA Active CN104888551B (en) | 2014-03-05 | 2014-03-05 | The filter membrane component of isolated carrier box |
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| Country | Link |
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| CN (1) | CN104888551B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020219361A1 (en) * | 2019-04-26 | 2020-10-29 | Entegris, Inc. | Purge connectors and modules for a substrate container |
| WO2023055692A1 (en) * | 2021-09-28 | 2023-04-06 | Entegris, Inc. | Purge port filter support |
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| CN201107546Y (en) * | 2007-10-09 | 2008-08-27 | 家登精密工业股份有限公司 | Metal light shield box and filtration apparatus thereof |
| CN101609260A (en) * | 2008-06-16 | 2009-12-23 | 亿尚精密工业股份有限公司 | The shielded air inlet and outlet structure of load moving container |
| CN201796874U (en) * | 2010-08-26 | 2011-04-13 | 中芯国际集成电路制造(上海)有限公司 | Front opening type wafer transportation box |
| US20130193033A1 (en) * | 2012-01-31 | 2013-08-01 | Pao-Yi Lu | Wafer box and photo mask box |
| CN203724931U (en) * | 2014-03-05 | 2014-07-23 | 耀连科技有限公司 | Filter membrane assembly of isolated type handling box |
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2014
- 2014-03-05 CN CN201410078671.XA patent/CN104888551B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201107546Y (en) * | 2007-10-09 | 2008-08-27 | 家登精密工业股份有限公司 | Metal light shield box and filtration apparatus thereof |
| CN101609260A (en) * | 2008-06-16 | 2009-12-23 | 亿尚精密工业股份有限公司 | The shielded air inlet and outlet structure of load moving container |
| CN201796874U (en) * | 2010-08-26 | 2011-04-13 | 中芯国际集成电路制造(上海)有限公司 | Front opening type wafer transportation box |
| US20130193033A1 (en) * | 2012-01-31 | 2013-08-01 | Pao-Yi Lu | Wafer box and photo mask box |
| CN203724931U (en) * | 2014-03-05 | 2014-07-23 | 耀连科技有限公司 | Filter membrane assembly of isolated type handling box |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020219361A1 (en) * | 2019-04-26 | 2020-10-29 | Entegris, Inc. | Purge connectors and modules for a substrate container |
| CN111863659A (en) * | 2019-04-26 | 2020-10-30 | 恩特格里斯公司 | Purge connector and module for substrate container |
| TWI764137B (en) * | 2019-04-26 | 2022-05-11 | 美商恩特葛瑞斯股份有限公司 | Purge connectors and modules for a substrate container |
| US11551957B2 (en) | 2019-04-26 | 2023-01-10 | Entegris, Inc. | Purge connectors and modules for a substrate container |
| WO2023055692A1 (en) * | 2021-09-28 | 2023-04-06 | Entegris, Inc. | Purge port filter support |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104888551B (en) | 2016-08-24 |
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