CN201196950Y - Inflation equipment and air inlet apparatus - Google Patents
Inflation equipment and air inlet apparatus Download PDFInfo
- Publication number
- CN201196950Y CN201196950Y CNU2008201127796U CN200820112779U CN201196950Y CN 201196950 Y CN201196950 Y CN 201196950Y CN U2008201127796 U CNU2008201127796 U CN U2008201127796U CN 200820112779 U CN200820112779 U CN 200820112779U CN 201196950 Y CN201196950 Y CN 201196950Y
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- pedestal
- inlet port
- air inlet
- port device
- order
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Abstract
The utility model discloses aeration equipment connected with a gas supply device, which is used to lead gas into a storage device of a semiconductor assembly or a light shield, wherein the storage device is provided with at least one gas inlet part. The aeration equipment comprises at least one supporting base and at least one gas inlet port device, wherein the supporting base is used to support the storage device; and the gas inlet port device is arranged on the supporting base corresponding to the gas inlet part of the storage device, and comprises a base, an elastic part, and a fixing part, wherein the base is provided with a through hole which runs through the base and is used for gas to pass through; the elastic part is arranged on the base, corresponds to the position where the elastic part contacts the gas inlet part, and is used to maintain air tightness; and the fixing part is arranged on the base and is used to fix the elastic part.
Description
Technical field
The utility model relates to a kind of charger and air inlet port device, particularly relevant for a kind of in order to gas is imported at least one in order to the charger in the storing unit of depositing semiconductor subassembly or light shield.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques is played the part of important role, so long as about graphical definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to the Silicon Wafer demonstration specific pattern that can expose by light shield.Owing to anyly be attached to the quality deterioration that dust granules on the light shield such as particulate, dust or organic substance all can cause projection imaging, the light shield that is used to produce figure must keep absolute cleaning, and the Silicon Wafer that is throwed or other semiconductor projectile also must keep absolute quietness, therefore in general silicon wafer process, the environment that dust free room all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.
Therefore, modern manufacture of semiconductor all utilizes resistant to pollution storing unit to carry out the preservation and the transportation of light shield and semiconductor subassembly, so that light shield and semiconductor subassembly keep clean.Storing unit is to be used to deposit light shield or semiconductor subassembly in manufacture of semiconductor, carrying and the transmission between board in order to light shield and semiconductor subassembly, and the contacting of isolated light shield and semiconductor subassembly and atmosphere, avoid light shield or semiconductor subassembly to be changed by contaminating impurity.Therefore, in advanced person's semiconductor factory, can require the cleanliness factor of these storing units will meet machinery standard interface (StandardMechanical Interface usually; SMIF), that is to say and keep cleanliness factor at Class below 1.So charging into gas in these storing units is one of the present means that solve.Therefore, technology in the past is with the external charger of these storing units, makes gas import these storing units by charger.
Charger no matter be to use which kind of inflation mode or means, all needs just gas filling to be entered the part of storing unit in air inlet port device, sets up gas check, is a kind of " flexible plastics part " (o-ring seal) mostly.Charger is in the past set up gas check, announce patent No. 5879458 as United States Patent (USP), United States Patent (USP) is announced patent No. 6042651, United States Patent (USP) is announced patent No. 6221163, United States Patent (USP) is announced shown in No. 6368411 patent, its adding method is directly this flexible plastics part to be embedded on the air inlet port device mostly, the loss of gas when its purpose is to prevent to inflate, yet this kind method, easy consume along with the flexible plastics part, and influence the effect of whole air inlet port device, even need eliminate and change whole air inlet port device, cause the increase of cost.Though gas check is in order to reach the effect that makes air inlet port device and storing unit driving fit, using the flexible plastics part is best choice, because of it has elasticity, can adjust easily; Yet gas check can be a kind of cost of extra increase because of fixedly not causing waste also if only be embedded at air inlet port device merely.
In view of this, charger provided by the utility model is at prior art ameliorator in addition.
The utility model content
The purpose of this utility model provides a kind of charger and air inlet port device, and for solving the problem that prior art exists, the utility model provides a kind of charger, is combined by bearing and air inlet port device.Wherein, air inlet port device includes pedestal, elastic component and fixture, has a through hole on the pedestal and runs through, and passes through with supplied gas; Elastic component is located on this pedestal, in order to keep air-tightness; And fixture, be located on this pedestal, in order to fix this elastic component.
Therefore, main purpose of the present utility model is to provide a kind of elastic component that is provided with can eliminate the air inlet port device of changing, and can directly eliminate and change elastic component, need not change whole air inlet port device, to save cost.
A purpose more of the present utility model is to provide a kind of air inlet port device that is provided with fixture, and fixing elastic component is to reach effect easy to use.
A purpose more of the present utility model is to provide a kind of air inlet port device with elastic component of circular arc contact portion, makes contact-making surface driving fit more, reduces the risk of gas leak.
A purpose more of the present utility model is to provide a kind of air inlet port device with elastic component of plane contact part, makes contact-making surface driving fit more, reduces the risk of gas leak.
The technical solution of the utility model is: a kind of charger, be connected with a feeder, and in order to gas is imported at least one in order in the storing unit of depositing semiconductor subassembly or light shield, this storing unit has at least one air feeding part; This charger comprises:
At least one bearing is in order to carry this storing unit; And
At least one air inlet port device is to be located on this bearing and the position corresponding with this storing unit air feeding part, and this air inlet port device includes:
One pedestal has a through hole and runs through this pedestal, and supplied gas is passed through;
One elastic component, be located on this pedestal and corresponding to this air feeding part contact position, in order to keep air-tightness; And
One fixture is located on this pedestal, in order to fix this elastic component.
Described charger, wherein the pedestal of this air inlet port device includes at least one locking part in addition, engages with this bearing with at least one locking part.
Described charger, wherein this locking part has a locking head, and this air inlet port device comprises an elastic device in addition, is located between the locking head and this pedestal of this locking part, but uses so that the relative position elasticity adjustment of this air inlet port device and this bearing.
Described charger, wherein the elastic component of this air inlet port device is into circular-arc with the air feeding part contact portion of this storing unit.
Described charger, wherein the elastic component of this air inlet port device is into plane with the air feeding part contact portion of this storing unit.
Described charger, wherein the fixture of this air inlet port device is to be located on this pedestal in the trip mode.
Described charger, wherein the fixture of this air inlet port device is to be located in a spiral manner on this pedestal.
Described charger, wherein the pedestal of this air inlet port device includes an adjustment part in addition, can adjust crack between this bearing and this pedestal.
Described charger, wherein this adjustment part can be provided with at least one hole, in order to engage with this pedestal or this bearing.
Described charger, wherein this adjustment part can be provided with at least one hole, in order to alleviate the weight of this adjustment part.
A kind of air inlet port device is located on the bearing of a charger, this charger be in order to gas is imported at least one place on this bearing in order to deposit the storing unit of semiconductor subassembly or light shield, this storing unit has at least one air feeding part; This air inlet port device includes:
One pedestal has a through hole and runs through this pedestal, and supplied gas is passed through;
One elastic component, be located on this pedestal and corresponding to this air feeding part contact position, in order to keep air-tightness; And
One fixture is located on this pedestal, in order to fix this elastic component.
The beneficial effects of the utility model are that a kind of elastic component that is provided with that provides can be eliminated the air inlet port device of changing, and can directly eliminate and change elastic component, need not change whole air inlet port device, to save cost.The utility model provides a kind of air inlet port device that is provided with fixture, and fixing elastic component is to reach effect easy to use.The utility model provides a kind of air inlet port device with elastic component of circular arc contact portion, makes contact-making surface driving fit more, reduces the risk of gas leak.
Description of drawings
Fig. 1 is the schematic diagram of the utility model charger;
Fig. 2 A and Fig. 2 B are the schematic diagrames of the utility model elastic component;
Fig. 3 A to Fig. 3 F is the schematic diagram of the utility model fixture set-up mode;
Fig. 4 A and Fig. 4 B are the locking part schematic diagrames of the utility model pedestal;
Fig. 5 A to Fig. 5 C is the schematic diagram of the utility model adjustment part.
[primary clustering symbol description]
Charger 0
Bearing 1
Air inlet port device 2
Contact portion 221
Fixture 23
Through hole 24
Locking part 25
Locking part 251
Hole 261262
Embodiment
Because the utility model is the charger that discloses a kind of air inlet port device, wherein some that are used are about the detailed manufacturing or the processing procedure of light shield, semiconductor subassembly, storing unit or aerating device, be to utilize prior art to reach, so in following explanation, do not do complete description.And graphic in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the schematic diagram relevant with the utility model feature.
At first, the utility model is to disclose a kind of charger, is to be connected with a feeder (icon does not disclose), and its purpose is gas is imported the storing unit of depositing light shield or semiconductor subassembly, this kind storing unit has at least one air feeding part, and gas part since then passes in and out storing unit.
See also Fig. 1, this is the schematic diagram of the utility model charger.Charger 0 includes at least one bearing 1 and at least one air inlet port device 2, and bearing 1 is in order to carrying storing unit 5, and air inlet port device 2 is in order to joining with the air feeding part 51 of this storing unit 5, and gas filling is entered this storing unit 5.The technical characterictic that the utility model disclosed is this air inlet port device 2.Air inlet port device 2 is located on the bearing 1, and corresponds to the air feeding part 51 of this storing unit 5, and it includes pedestal 21, elastic component 22 and fixture 23.Pedestal 21 has that a through hole 24 runs through, pass through in order to supplied gas, and elastic component 22 is to contact with the air feeding part 51 of storing unit 5 that its purpose is to keep air-tightness, when air inlet port device 2 imports storing unit 5 with gas, elastic component 22 can prevent that gas from releasing; Fixture 23 is that so that elastic component 22 is maintained fixed the position, on the other hand, elastic component 22 is not embedded on the pedestal 21 in order to fixing elastic component 22, therefore can eliminate at any time and change, and can take off elastic component 22 as long as take off fixture 23, to promote the convenience on using.Except that this, a bead 27 can be set, on pedestal 21 to increase the fixing of elastic component 22.
Then, see also Fig. 2 A and Fig. 2 B, this is the schematic diagram of elastic component 22.Elastic component 22 is generally a kind of flexible plastics part O-ring seal, be a kind of ring-type object, itself and storing unit 5 air feeding part 51 contact portions 221, can be circular-arc shown in Fig. 2 A, or be plane shown in Fig. 2 B, when being arranged to when plane, its scope that can contact is wider, can reach preferable airtight effect.
See also Fig. 3 A to Fig. 3 F, this is the schematic diagram of fixture 23 set-up modes.Fixture 23 is to be arranged on the pedestal 21, in order to fix this elastic component 22, its method has many kinds, can the trip mode be arranged on this pedestal or setting in a spiral manner, Fig. 3 A is that fixture 23 is fixed circular-arc elastic component 22 on pedestal 21 in the trip mode, Fig. 3 B be fixture 23 with trip mode fixed pan shape elastic component 22 on pedestal 21, Fig. 3 C is the disassembly diagram that fixture 23 combines with pedestal 21 trip modes.Fig. 3 D is that fixture 23 is fixed circular-arc elastic component 22 in a spiral manner on pedestal 21, and Fig. 3 E be fixture 23 fixed pan shape elastic component 22 is on pedestal 21 in a spiral manner, Fig. 3 F is the disassembly diagram that fixture 23 combines with pedestal 21 spiral way.Its difference is looked closely the needs of use and is different.
Then, see also Fig. 4 A, be arranged on the bearing 1 in order to make air inlet port device 2, the pedestal 21 of air inlet port device 21 can be provided with locking part 25 again, with locking part 251 this pedestal 21 is engaged on the bearing 1 again.Wherein locking part 251 has a locking 252, see also Fig. 4 B, can set up an elastic device 253 again on the air inlet port device 2, be located at 21 of the locking 252 of this locking part 251 and this pedestals, but with so that the relative position elasticity adjustment of this air inlet port device 2 and this bearing 1, when bearing 1 or storing unit 5 inclination or not timings, this air inlet port device 21 can be adjusted thereupon, can not cause because of tilting or just not causing gas leak.
In order to reach demand,, can set up adjustment part 26 again to adjust crack between bearing 1 and the pedestal 21, shown in Fig. 5 A and Fig. 5 B if need to adjust crack between bearing 1 and the pedestal 21.Adjustment part 26 can be provided with at least one hole 261 again, in order to engage with pedestal 21 or bearing 1; Adjustment part 26 also can be provided with at least one hole 262, in order to alleviate adjustment part 26 weight own, shown in Fig. 5 C.
The above is preferred embodiment of the present utility model only, is not in order to limit the right of applying for a patent of the present utility model; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the novel spirit that discloses of the utility model and change or modification, all should be included in the following claim.
Claims (10)
1. a charger is connected with a feeder, and in order to gas is imported at least one in order in the storing unit of depositing semiconductor subassembly or light shield, this storing unit has at least one air feeding part; It is characterized in that this charger comprises:
At least one bearing is in order to carry this storing unit; And
At least one air inlet port device is located on this bearing and the position corresponding with this storing unit air feeding part, and this air inlet port device includes:
One pedestal has a through hole and runs through this pedestal, and supplied gas is passed through;
One elastic component, be located on this pedestal and corresponding to this air feeding part contact position, in order to keep air-tightness; And
One fixture is located on this pedestal, in order to fix this elastic component.
2. according to the described charger of claim 1, it is characterized in that the pedestal of this air inlet port device includes at least one locking part in addition, engage with this bearing with at least one locking part.
3. charger according to claim 2, it is characterized in that this locking part has a locking head, this air inlet port device comprises an elastic device, be located between the locking head and this pedestal of this locking part, but use so that the relative position elasticity adjustment of this air inlet port device and this bearing.
4. according to the described charger of claim 1, it is characterized in that the elastic component of this air inlet port device is divided into circular-arc with the air feeding part contact site of this storing unit or becomes plane.
5. according to the described charger of claim 1, it is characterized in that the fixture of this air inlet port device is to be located on this pedestal in the trip mode.
6. according to the described charger of claim 1, it is characterized in that the fixture of this air inlet port device is to be located in a spiral manner on this pedestal.
7. charger according to claim 1 is characterized in that the pedestal of this air inlet port device includes an adjustment part, can adjust crack between this bearing and this pedestal.
8. charger according to claim 7 is characterized in that this adjustment part is provided with at least one hole, in order to engage with this pedestal or this bearing.
9. charger according to claim 7 is characterized in that this adjustment part is provided with at least one hole, in order to alleviate the weight of this adjustment part.
10. an air inlet port device is located on the bearing of a charger, this charger in order to gas is imported at least one place on this bearing in order to deposit the storing unit of semiconductor subassembly or light shield, this storing unit has at least one air feeding part; It is characterized in that this air inlet port device includes:
One pedestal has a through hole and runs through this pedestal, and supplied gas is passed through;
One elastic component, be located on this pedestal and corresponding to this air feeding part contact position, in order to keep air-tightness; And
One fixture is located on this pedestal, in order to fix this elastic component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201127796U CN201196950Y (en) | 2008-05-21 | 2008-05-21 | Inflation equipment and air inlet apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201127796U CN201196950Y (en) | 2008-05-21 | 2008-05-21 | Inflation equipment and air inlet apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201196950Y true CN201196950Y (en) | 2009-02-18 |
Family
ID=40416580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201127796U Expired - Lifetime CN201196950Y (en) | 2008-05-21 | 2008-05-21 | Inflation equipment and air inlet apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201196950Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108725939A (en) * | 2018-05-03 | 2018-11-02 | 安徽企路石工程技术开发有限公司 | A kind of quick despatch packaging system |
| CN108725938A (en) * | 2018-05-03 | 2018-11-02 | 安徽企路石工程技术开发有限公司 | A kind of box for material circulation gas generator for air bag |
-
2008
- 2008-05-21 CN CNU2008201127796U patent/CN201196950Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108725939A (en) * | 2018-05-03 | 2018-11-02 | 安徽企路石工程技术开发有限公司 | A kind of quick despatch packaging system |
| CN108725938A (en) * | 2018-05-03 | 2018-11-02 | 安徽企路石工程技术开发有限公司 | A kind of box for material circulation gas generator for air bag |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180316 Address after: The central road Tucheng Chinese Taiwan New Taipei 4 No. 2 8 floor 5 Patentee after: Home board automation Limited by Share Ltd Address before: Taiwan County, Taipei, China Patentee before: Jiadeng Precise Industry Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090218 |