CN101582373B - Gas charging equipment and gas inlet port device - Google Patents
Gas charging equipment and gas inlet port device Download PDFInfo
- Publication number
- CN101582373B CN101582373B CN2008100995211A CN200810099521A CN101582373B CN 101582373 B CN101582373 B CN 101582373B CN 2008100995211 A CN2008100995211 A CN 2008100995211A CN 200810099521 A CN200810099521 A CN 200810099521A CN 101582373 B CN101582373 B CN 101582373B
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- pedestal
- storing unit
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- inlet port
- gas
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Abstract
The invention relates to gas charging equipment and a gas inlet port device thereof. The gas charging equipment is connected with a gas supply device so as to be used for guiding the gas into a semiconductor component or light shield storing device with a gas inlet part. The gas charging equipment comprises a supporting seat and at least one gas inlet port device, wherein the supporting seat is used for supporting the storing device; the gas inlet port device is arranged on the supporting seat and corresponds to the gas inlet part of the storing device; and the gas is filled into the storing device from the gas inlet port device. The gas inlet port device is provided with a first base, a second base, a first elastic element, a fixing element and a switching device, wherein the first base and the second base are respectively provided with a through hole, and the through hole of the first base corresponds to the through hole of the second base; the first elastic element is used for keeping the gas tightness, is arranged on the second base and corresponds to the contact part of the gas inlet part of the storing device; the fixing element is used for fixing the elastic element on the second base; and the switching device is arranged in the through holes of the first base and the second base and is used for controlling the gas which enters or is discharged from the gas inlet port device.
Description
Technical field
The invention relates to a kind of charger and air inlet port device, particularly relevant for a kind of in order to gas is imported at least one in order to the charger in the storing unit of depositing semiconductor subassembly or light shield.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photolithography techniques is played the part of important role, so long as about graphical definition, all need be dependent on photolithography techniques.Photolithography techniques is that the circuit that will design is made into the light shield with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to the silicon wafer demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organic substance) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, and the silicon wafer that is throwed or other semiconductor projectile also must keep absolute quietness, therefore in general disk technology, the environment that dust free room all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.
Therefore, modern semiconductors technology all utilizes resistant to pollution storing unit to carry out the preservation and the transportation of light shield and semiconductor subassembly, so that light shield and semiconductor subassembly keep clean.Storing unit is to be used to deposit light shield or semiconductor subassembly in semiconductor technology, carrying and the transmission between board in order to light shield and semiconductor subassembly, and the contacting of isolated light shield and semiconductor subassembly and atmosphere, avoid light shield or semiconductor subassembly to be changed by contaminating impurity.Therefore, in advanced person's semiconductor factory, can require the cleanliness factor of those storing units will meet machinery standard interface (Standard Mechanical Interface usually; SMIF), that is to say and keep cleanliness factor at Class below 1.So charging into gas in those storing units is one of means that solve at present.
Therefore, storing unit need connect charger again, makes gas import those storing units by charger.In the past when storing unit with after charger is connected, be positioned on the charger storing unit or alternate manner no matter be, make charger begin gas is imported storing unit, mostly use artificial opening ways, progressive afterwards for using induction installation, when sensing storing unit and be arranged on the charger, can open the gas filling function automatically.
In the process of gas filling, no matter be to use artificial opening ways or open inflation automatically, all be the structure that increases the action of technology or increase equipment by induction installation, it all is to increase cost.Again or place incorrectly when storing unit, and artificial or inductor still begins inflation, then will cause gas leak, also is to increase cost.In addition, when storing unit separated with aerating device, if it is improper manually to stop the control mode of gas filling, or induction installation then can't stop inflation when not having correct induction, and gas continues to supply, and also will cause the increase of cost.
Summary of the invention
The invention provides a kind of charger and air inlet port device, to solve the problem of gas leak in the known technology.
For achieving the above object, charger provided by the invention is connected with feeder, has in the semiconductor subassembly or photomask storage device of air feeding part in order to gas is imported.Charger includes bearing and at least one air inlet port device of carrying this storing unit, be located on the bearing and with the air feeding part of storing unit, gas is filled from air inlet port device and is entered in the storing unit.
Air inlet port device has first pedestal, second pedestal, first elastic component, fixture and switching device.First pedestal and second pedestal all have a through hole, and its etc. through hole corresponding.First elastic component, in order to keep air-tightness, be located on second pedestal and corresponding to the air feeding part contact position of this storing unit.Fixture is in order to be fixed in elastic component on second pedestal.And switching device is located in the hole of this first pedestal and second pedestal, in order to the gas of this air inlet port device of control turnover.
Key is switching device, includes the pipe portion and the extensible member of hollow, and purpose is with mechanical structure putting or taking-up and the turnover of control gaseous along with storing unit.One end of hollow tube portion is fixed in second pedestal, the other end has an expansion section, can be fastened in first pedestal, seals the through hole of this first pedestal thus, this pipe portion is provided with at least one hole near the part of expansion section, enters the hollow space of this pipe portion in order to supplied gas; In addition, extensible member is located on the outside of pipe portion, is arranged between second pedestal and first pedestal; When storing unit is positioned on the bearing, the air feeding part of storing unit contacts with air inlet port device, the weight of storing unit will make second pedestal move down, driving switching device moves down and makes its expansion section and first base-separation, the hole of pipe portion is exposed, make gas be flowed into switching device thus and charge into to storing unit; When this storing unit left this bearing, this extensible member can be with this second pedestal lifting, and the position of the through hole of sealing first pedestal is replied in the expansion section that drives pipe portion.
Say a bit in detail that again charger provided by the invention is connected with a feeder, in order to gas is imported at least one in order in the storing unit of depositing semiconductor subassembly or light shield, this storing unit has at least one air feeding part, and this charger comprises:
At least one bearing is in order to carry this storing unit; And
At least one air inlet port device is located on this bearing and the position corresponding with this storing unit air feeding part, and wherein, this air inlet port device includes:
One first pedestal has a through hole;
One second pedestal is located on this first pedestal, also has the through hole of a through hole corresponding to this first pedestal;
One first elastic component, be located on this second pedestal and corresponding to the air feeding part contact position of this storing unit, in order to keep air-tightness;
One fixture is fixedly arranged on this second pedestal, in order to this first elastic component is fixed in this second pedestal;
One switching device is located in the through hole of this first pedestal and this second pedestal, and in order to the gas of this air inlet port device of control turnover, it includes:
The pipe portion of one hollow, one end of this pipe portion is fixed in this second pedestal, and the other end has an expansion section, can be fastened in the through hole that this first pedestal seals this first pedestal thus, this pipe portion is provided with at least one hole near the part of this expansion section, enters the hollow space of this pipe portion in order to supplied gas;
One extensible member is located on the outside of this pipe portion, is arranged between this second pedestal and this first pedestal;
Wherein, when this storing unit is arranged on this bearing, the air feeding part of this storing unit contacts with this air inlet port device, the weight of this storing unit will make this second pedestal move down, driving this switching device moves down and makes this expansion section and this first base-separation, the hole of this pipe portion is exposed, make gas be flowed into this switching device thus and charge into to this storing unit;
When this storing unit left this bearing, this extensible member can be with this second pedestal lifting, and the position of the through hole of this first pedestal of sealing is replied in the expansion section that drives this pipe portion.
Described charger, wherein the affixed mode of this fixture and this second pedestal is blocking or spiral.
Described charger, wherein the affixed mode of the pipe portion of this switching device and this second pedestal is blocking or spiral.
Described charger wherein can be provided with one second elastic component on the expansion section of this switching device in addition, to keep the air-tightness between this switch dress system and this first pedestal.
Described charger, wherein this first pedestal includes at least one locking position in addition, engages with this bearing with at least one locking part.
Described charger, wherein this first pedestal is connected with this feeder.
Described charger, wherein the connected mode of this first pedestal and this feeder is blocking or spiral.
Air inlet port device provided by the invention, be located on the bearing of a charger, this charger in order to gas is imported at least one place on this bearing in order to deposit the storing unit of semiconductor subassembly or light shield, this storing unit has at least one air feeding part, and wherein this air inlet port device includes:
One first pedestal has a through hole;
One second pedestal is located on this first pedestal, also has the through hole of a through hole corresponding to this first pedestal;
One first elastic component, be located on this second pedestal and corresponding to the air feeding part contact position of this storing unit, in order to keep air-tightness;
One fixture is fixedly arranged on this second pedestal, in order to this first elastic component is fixed in this second pedestal;
One switching device is located in the through hole of this first pedestal and this second pedestal, and in order to the gas of this air inlet port device of control turnover, it includes:
The pipe portion of one hollow, one end of this pipe portion is fixed in this second pedestal, and the other end has an expansion section, can be fastened in the through hole that this first pedestal seals this first pedestal thus, this pipe portion is provided with at least one hole near the part of this expansion section, enters the hollow space of this pipe portion in order to supplied gas;
One extensible member is located on the outside of this pipe portion, is arranged between this second pedestal and this first pedestal;
Wherein, when this storing unit is arranged on this bearing, the air feeding part of this storing unit contacts with this air inlet port device, the weight of this storing unit will make this second pedestal move down, driving this switching device moves down and makes this expansion section and this first base-separation, the hole of this pipe portion is exposed, make gas be flowed into this switching device thus and charge into to this storing unit;
When this storing unit left this bearing, this extensible member can be with this second pedestal lifting, replied the position of the through hole of this first pedestal of sealing with the expansion section of this moving pipe portion.
Described air inlet port device wherein can be provided with one second elastic component on the expansion section of this switching device in addition, to keep the air-tightness between this switch dress system and this first pedestal.
Described air inlet port device, wherein this first pedestal is connected with this feeder.
Effect of the present invention is:
1) tool switching device air inlet port device of the present invention can the turnover of control gaseous along with the placement of storing unit and taking-up, does not need in addition with Artificial Control or sets up inductor, to reach automation control and cost-effective effect.
2) tool switching device air inlet port device of the present invention, can along with the placement of storing unit with from and the turnover of control gaseous can not cause leaking of gas, can reach cost-effective effect.
Description of drawings
Fig. 1 is the schematic diagram of charger.
Fig. 2 A and Fig. 2 B are the schematic diagrames of air inlet port device.
Fig. 3 A and Fig. 3 B are the schematic diagrames of first elastic component.
Fig. 4 A and Fig. 4 B are the affixed mode schematic diagrames of the fixture and second pedestal.
Fig. 5 A and Fig. 5 B are the pipe portion of switching device and the schematic diagram of the affixed mode of second pedestal.
Fig. 6 is the schematic diagram of switching device.
Fig. 7 A and Fig. 7 B are the schematic diagrames of first pedestal.
Fig. 8 A to Fig. 8 C is the schematic diagram that first pedestal is connected with feeder.
Primary clustering symbol description in the accompanying drawing:
Bearing 2
Air inlet port device 5
Through hole 511
Locking part 513
Through hole 521
First elastic component 53
First elastic component and air inlet end mouth part contact position 531
Second elastic component 64
Embodiment
Because the present invention discloses a kind of charger with air inlet port device, wherein some that are used are about the detailed manufacturing or the processing procedure of light shield, semiconductor subassembly, storing unit or aerating device, be to utilize prior art to finish, so in following explanation, do not do complete description.And the accompanying drawing in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the schematic diagram relevant with feature of the present invention.
At first, please consult Fig. 1 earlier, the schematic diagram of charger 1 of the present invention.Charger 1 is connected with feeder 3, and in order to gas is imported at least one in order in the storing unit 4 of depositing semiconductor subassembly or light shield, storing unit 4 has at least one air feeding part 41.This charger 1 comprises at least one bearing 2, in order to carrying storing unit 4; And at least one air inlet port device 5, be located on the bearing 2 and with storing unit 4 air feeding part 41 corresponding positions, gas is filled from air inlet port device 4, enters in the storing unit 4 through air feeding part 41.
Then, see also Fig. 2 A, air inlet port device 5 includes: first pedestal, 51, the second pedestals, 52, the first elastic components 53, fixture 54, and switching device 6.First pedestal 51 has a through hole 511; Second pedestal 52 is located on this first pedestal 51, also has the through hole 521 of a through hole 521 corresponding to first pedestal 51; First elastic component 53 is located on second pedestal 52 and with the air feeding part 41 of storing unit 4 and is contacted, in order to keep air-tightness; Fixture 54 is fixedly arranged on second pedestal 52, in order to fix first elastic component 53 in second pedestal 52; Switching device 6 is located in the through hole 511,521 of first pedestal 51 and second pedestal 52, in order to the gas of this air inlet port device 5 of control turnover.Switching device 6 includes the pipe portion 61 and extensible member 63 of hollow.One end of pipe portion 61 is fixed in second pedestal 52, and the other end has expansion section 62, and expansion section 62 can be fastened in first pedestal 51, seals the through hole 511 of first pedestal 51 thus; Pipe portion 61 is provided with at least one hole 612 near the part of expansion section 62, enters the hollow space of pipe portion 61 in order to supplied gas; Extensible member 63 is located on the outside of pipe portion 61, is arranged between second pedestal 52 and first pedestal 51; When storing unit 4 is positioned on the bearing 2, the air feeding part 41 of storing unit 4 contacts with this air inlet port device 5, the weight of storing unit 4 will make second pedestal 52 move down, driving switching device 6 moves down, make the expansion section 62 of switching device 6 separate with first pedestal 51, the hole 612 of pipe portion 61 is exposed, make gas be able to thus and then charge into to storing unit 4 from hole 612 inflow pipe portions 61, see also shown in Fig. 2 B, this enters the state of unlatching for air inlet port device, and air can enter air inlet port device 5; When storing unit 4 left this bearing 2, this extensible member 63 can be with these second pedestal, 52 liftings, and the position of the through hole 511 of sealing first pedestal 51 is replied in the expansion section 62 that drives pipe portion 61, and gas can't enter air inlet port device 5 this moment.(being returned to the off-position of Fig. 2 A)
See also Fig. 3 A and Fig. 3 B, first elastic component 53 in the air inlet port device 5 can be plane (Fig. 3 A) or cambered surface (Fig. 3 B) with the contact position 531 of the air feeding part 41 of storing unit 4.
See also Fig. 4 A and Fig. 4 B, the affixed mode of the fixture 54 and second pedestal 52 can be that blocking (Fig. 4 A) or spiral (Fig. 4 B) mode are affixed.
See also Fig. 5 A and Fig. 5 B, the affixed mode of the pipe portion 61 of switching device 6 and second pedestal 52 is blocking (Fig. 5 A) or spiral (Fig. 5 B).
See also Fig. 6, on the expansion section 62 of switching device 6 second elastic component 64 can be set in addition, with the air-tightness of 51 of maintained switch device 6 and first pedestals.
See also Fig. 7 A, first pedestal 51 can comprise at least one locking position 512 in addition, engages with this bearing 2 with at least one locking part 513.In addition, locking part 513 has a locking 5131, see also Fig. 7 B, can set up an elastic device 514 again on the air inlet port device 5, be located at 51 of the locking 5131 of this locking part 513 and this first pedestals, but with so that the relative position elasticity adjustment of this air inlet port device 5 and this bearing 2, when bearing 2 or storing unit 4 tilts or not timings, this air inlet port device 5 can be adjusted thereupon, can not cause because of tilting or just not causing gas leak.
See also Fig. 8, first pedestal 51 is connected with feeder 3, and its connected mode can be the mode of blocking (Fig. 8 A and Fig. 8 B) or spiral (Fig. 8 C).
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Simultaneously above description should be understood and be implemented for those skilled in the art, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the claim scope of the present patent application.
Claims (10)
1. a charger is connected with a feeder, and in order to gas is imported at least one in order in the storing unit of depositing semiconductor subassembly or light shield, this storing unit has at least one air feeding part, and this charger comprises:
At least one bearing is in order to carry this storing unit; And
At least one air inlet port device is located on this bearing and the position corresponding with this storing unit air feeding part, it is characterized in that this air inlet port device includes:
One first pedestal has a through hole;
One second pedestal is located on this first pedestal, also has the through hole of a through hole corresponding to this first pedestal;
One first elastic component, be located on this second pedestal and corresponding to the air feeding part contact position of this storing unit, in order to keep air-tightness;
One fixture is fixedly arranged on this second pedestal, in order to this first elastic component is fixed in this second pedestal;
One switching device is located in the through hole of this first pedestal and this second pedestal, and in order to the gas of this air inlet port device of control turnover, it includes:
One hollow tube portion, an end of this pipe portion is fixed in this second pedestal, and the other end has an expansion section, be fastened in this first pedestal, seal the through hole of this first pedestal thus, this pipe portion is provided with at least one hole near the part of this expansion section, enters the hollow space of this pipe portion in order to supplied gas;
One extensible member is located on the outside of this pipe portion, is arranged between this second pedestal and this first pedestal;
Wherein, when this storing unit is arranged on this bearing, the air feeding part of this storing unit contacts with this air inlet port device, the weight of this storing unit will make this second pedestal move down, driving this switching device moves down and makes this expansion section and this first base-separation, the hole of this pipe portion is exposed, make gas be flowed into this switching device thus and charge into to this storing unit;
When this storing unit left this bearing, this extensible member can be with this second pedestal lifting, and the position of this first pedestal through hole of sealing is replied in the expansion section that drives this pipe portion.
2. charger according to claim 1 is characterized in that, the affixed mode of this fixture and this second pedestal is blocking or spiral.
3. according to the described charger of claim 1, it is characterized in that the pipe portion of this switching device and the affixed mode of this second pedestal are blocking or spiral.
4. according to the described charger of claim 1, it is characterized in that, one second elastic component is set on the expansion section of this switching device in addition, to keep the air-tightness between this switching device and this first pedestal.
5. according to the described charger of claim 1, it is characterized in that this first pedestal includes at least one locking position in addition, engage with this bearing with at least one locking part.
6. according to the described charger of claim 1, it is characterized in that this first pedestal is connected with this feeder.
7. charger according to claim 6 is characterized in that, the connected mode of this first pedestal and this feeder is blocking or spiral.
8. air inlet port device, be located on the bearing of a charger, this charger is connected with a feeder, place on this bearing in order to deposit the storing unit of semiconductor subassembly or light shield in order to gas is imported at least one, this storing unit has at least one air feeding part, and this air inlet end mouth is arranged at the position corresponding with the storing unit air feeding part, it is characterized in that, this air inlet port device includes:
One first pedestal has a through hole;
One second pedestal is located on this first pedestal, also has the through hole of a through hole corresponding to this first pedestal;
One first elastic component, be located on this second pedestal and corresponding to the air feeding part contact position of this storing unit, in order to keep air-tightness;
One fixture is fixedly arranged on this second pedestal, in order to this first elastic component is fixed in this second pedestal;
One switching device is located in the through hole of this first pedestal and this second pedestal, and in order to the gas of this air inlet port device of control turnover, it includes:
One hollow tube portion, an end of this pipe portion is fixed in this second pedestal, and the other end has an expansion section, be fastened in this first pedestal, seal the through hole of this first pedestal thus, this pipe portion is provided with at least one hole near the part of this expansion section, enters the hollow space of this pipe portion in order to supplied gas;
One extensible member is located on the outside of this pipe portion, is arranged between this second pedestal and this first pedestal;
Wherein, when this storing unit is arranged on this bearing, the air feeding part of this storing unit contacts with this air inlet port device, the weight of this storing unit will make this second pedestal move down, driving this switching device moves down and makes this expansion section and this first base-separation, the hole of this pipe portion is exposed, make gas be flowed into this switching device thus and charge into to this storing unit;
When this storing unit left this bearing, this extensible member can be with this second pedestal lifting, and the position of this first pedestal through hole of sealing is replied in the expansion section that drives this pipe portion.
9. according to the described air inlet port device of claim 8, it is characterized in that, one second elastic component is set on the expansion section of this switching device in addition, to keep the air-tightness between this switching device and this first pedestal.
10. according to the described air inlet port device of claim 8, it is characterized in that this first pedestal is connected with this feeder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100995211A CN101582373B (en) | 2008-05-13 | 2008-05-13 | Gas charging equipment and gas inlet port device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100995211A CN101582373B (en) | 2008-05-13 | 2008-05-13 | Gas charging equipment and gas inlet port device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101582373A CN101582373A (en) | 2009-11-18 |
| CN101582373B true CN101582373B (en) | 2010-11-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100995211A Expired - Fee Related CN101582373B (en) | 2008-05-13 | 2008-05-13 | Gas charging equipment and gas inlet port device |
Country Status (1)
| Country | Link |
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| CN (1) | CN101582373B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5440871B2 (en) * | 2010-08-20 | 2014-03-12 | 株式会社ダイフク | Container storage equipment |
| CN104235386B (en) * | 2013-06-19 | 2016-08-24 | 家登精密工业股份有限公司 | Air valve structure and apply the inflating seat of this air valve structure |
| CN109326545A (en) * | 2017-07-31 | 2019-02-12 | 富士迈半导体精密工业（上海）有限公司 | Gas filling device and gas-filling system for wafer cassette |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6401708B1 (en) * | 1999-02-26 | 2002-06-11 | Lg Electronics Inc. | Pressure sensing device in gas furnace and method for controlling operation thereof |
| CN1851861A (en) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | Vacuum chamber gas-filling system |
-
2008
- 2008-05-13 CN CN2008100995211A patent/CN101582373B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6401708B1 (en) * | 1999-02-26 | 2002-06-11 | Lg Electronics Inc. | Pressure sensing device in gas furnace and method for controlling operation thereof |
| CN1851861A (en) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | Vacuum chamber gas-filling system |
Non-Patent Citations (1)
| Title |
|---|
| JP昭57-137227A 1982.08.24 |
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| CN101582373A (en) | 2009-11-18 |
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Effective date of registration: 20180315 Address after: The central road Tucheng Chinese Taiwan New Taipei 4 No. 2 8 floor 5 Patentee after: Home board automation Limited by Share Ltd Address before: Taiwan County, Taipei, China Patentee before: Jiadeng Precise Industry Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20101103 Termination date: 20180513 |