CN1977198A - 用于制造具有整体对准部件的光波导组件的方法 - Google Patents

用于制造具有整体对准部件的光波导组件的方法 Download PDF

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Publication number
CN1977198A
CN1977198A CNA200580021993XA CN200580021993A CN1977198A CN 1977198 A CN1977198 A CN 1977198A CN A200580021993X A CNA200580021993X A CN A200580021993XA CN 200580021993 A CN200580021993 A CN 200580021993A CN 1977198 A CN1977198 A CN 1977198A
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CN
China
Prior art keywords
waveguide
substrate
alignment
layer
alignment feature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA200580021993XA
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English (en)
Chinese (zh)
Inventor
特里·L·史密斯
张俊颖
鲁泰什·D·帕里克
杰里米·K·拉尔森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
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3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN1977198A publication Critical patent/CN1977198A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
CNA200580021993XA 2004-06-29 2005-04-28 用于制造具有整体对准部件的光波导组件的方法 Pending CN1977198A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/879,716 2004-06-29
US10/879,716 US20050284181A1 (en) 2004-06-29 2004-06-29 Method for making an optical waveguide assembly with integral alignment features

Publications (1)

Publication Number Publication Date
CN1977198A true CN1977198A (zh) 2007-06-06

Family

ID=34971934

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA200580021993XA Pending CN1977198A (zh) 2004-06-29 2005-04-28 用于制造具有整体对准部件的光波导组件的方法

Country Status (6)

Country Link
US (1) US20050284181A1 (enExample)
EP (1) EP1761812A1 (enExample)
JP (1) JP2008505355A (enExample)
KR (1) KR20070045204A (enExample)
CN (1) CN1977198A (enExample)
WO (1) WO2006007022A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101688951B (zh) * 2007-06-26 2012-03-07 松下电工株式会社 光学模块
CN107655923A (zh) * 2017-10-13 2018-02-02 电子科技大学 一种实现输出方向大角度可调的太赫兹波传输聚束系统
WO2023087305A1 (zh) * 2021-11-22 2023-05-25 华为技术有限公司 一种芯片、光纤阵列单元及通信系统

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4931799B2 (ja) * 2004-03-22 2012-05-16 ケーエルエー−テンカー コーポレイション 基板の特徴を測定する、または分析のために基板を準備する方法およびシステム
TW201303397A (zh) * 2004-06-16 2013-01-16 Hitachi Chemical Co Ltd 光導波管型光模組以及光導波管型間距變換器
EP1894047A1 (en) * 2005-06-24 2008-03-05 3M Innovative Properties Company Optical device with cantilevered fiber array and method
US7491287B2 (en) * 2006-06-09 2009-02-17 3M Innovative Properties Company Bonding method with flowable adhesive composition
US7822300B2 (en) * 2007-11-20 2010-10-26 Aptina Imaging Corporation Anti-resonant reflecting optical waveguide for imager light pipe
CN101910899A (zh) * 2007-11-30 2010-12-08 3M创新有限公司 用于制备光学导波器的方法
CH700471B1 (de) * 2009-02-17 2013-07-31 Vario Optics Ag Verfahren zur Herstellung einer elektro-optischen Leiterplatte mit Lichtwellenleiterstrukturen.
US12057332B2 (en) 2016-07-12 2024-08-06 Ayar Labs, Inc. Wafer-level etching methods for planar photonics circuits and devices
US11101617B2 (en) 2018-07-16 2021-08-24 Ayar Labs, Inc. Wafer-level handle replacement
CN114026479B (zh) * 2019-06-17 2024-04-12 艾尤纳公司 光纤阵列到波导的无源对准配置
US11774689B2 (en) 2021-10-25 2023-10-03 Globalfoundries U.S. Inc. Photonics chips and semiconductor products having angled optical fibers

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765969A (en) * 1970-07-13 1973-10-16 Bell Telephone Labor Inc Precision etching of semiconductors
US3774987A (en) * 1972-06-27 1973-11-27 Bell Electric Research Ltd Coupling of lasers to optical fibres
US3994559A (en) * 1975-12-22 1976-11-30 International Business Machines Corporation Bidirectional guided mode optical film-fiber coupler
US4210923A (en) * 1979-01-02 1980-07-01 Bell Telephone Laboratories, Incorporated Edge illuminated photodetector with optical fiber alignment
JPS5784408A (en) * 1980-11-13 1982-05-26 Nec Corp Optical distributing circuit
US5046763A (en) * 1990-02-01 1991-09-10 Teleflex Incorporated Quick connect hose coupling assembly
JPH04313710A (ja) * 1990-03-14 1992-11-05 Fujitsu Ltd 光導波路部品の製造方法
FR2661516B1 (fr) * 1990-04-27 1992-06-12 Alcatel Fibres Optiques Composant d'optique integree et procede de fabrication.
US5175781A (en) * 1991-10-11 1992-12-29 United Technologies Corporation Attaching optical fibers to integrated optic chips
US5217568A (en) * 1992-02-03 1993-06-08 Motorola, Inc. Silicon etching process using polymeric mask, for example, to form V-groove for an optical fiber coupling
DE59306756D1 (de) * 1992-03-07 1997-07-24 Minnesota Mining & Mfg Verfahren zum Herstellen von Bauelementen für Lichtwellenleiternetze und nach diesem Verfahren hergestellte Bauelemente
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
JP2798583B2 (ja) * 1993-06-08 1998-09-17 日本電気株式会社 光デバイスの製造方法
EP0631159A1 (de) * 1993-06-18 1994-12-28 Siemens Aktiengesellschaft Anordnung zur optischen Kopplung eines planaren optischen Wellenleiters und einer optischen Faser und Verfahren zur Herstellung eines für eine solche Anordnung geeigneten planaren Wellenleiters
US5357593A (en) * 1993-10-12 1994-10-18 Alliedsignal Inc. Method of attaching optical fibers to opto-electronic integrated circuits on silicon substrates
US5432338A (en) * 1993-10-28 1995-07-11 Alliedsignal Inc. Silicon opto-electronic integrated circuit for fiber optic gyros or communication
JPH0829638A (ja) * 1994-05-12 1996-02-02 Fujitsu Ltd 光導波路・光ファイバ接続構造及び光導波路・光ファイバ接続方法並びに光導波路・光ファイバ接続に使用される光導波路基板及び同基板の製造方法並びに光導波路・光ファイバ接続に使用されるファイバ基板付き光ファイバ
US5611014A (en) * 1994-12-07 1997-03-11 Lucent Technologies Inc. Optoelectronic device connecting techniques
JP2964941B2 (ja) * 1996-01-12 1999-10-18 日本電気株式会社 光デバイスの製造方法及び実装構造
US5600745A (en) * 1996-02-08 1997-02-04 Industrial Technology Research Institute Method of automatically coupling between a fiber and an optical waveguide
KR100265789B1 (ko) * 1997-07-03 2000-09-15 윤종용 광섬유수동정렬방법
US6756185B2 (en) * 2000-05-09 2004-06-29 Shipley Company, L.L.C. Method for making integrated optical waveguides and micromachined features
US20030035643A1 (en) * 2001-08-17 2003-02-20 Photon-X, Inc. Structure for attaching an optical fiber to a planar waveguide and method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101688951B (zh) * 2007-06-26 2012-03-07 松下电工株式会社 光学模块
CN107655923A (zh) * 2017-10-13 2018-02-02 电子科技大学 一种实现输出方向大角度可调的太赫兹波传输聚束系统
CN107655923B (zh) * 2017-10-13 2019-05-03 电子科技大学 一种实现输出方向大角度可调的太赫兹波传输聚束系统
WO2023087305A1 (zh) * 2021-11-22 2023-05-25 华为技术有限公司 一种芯片、光纤阵列单元及通信系统

Also Published As

Publication number Publication date
US20050284181A1 (en) 2005-12-29
EP1761812A1 (en) 2007-03-14
JP2008505355A (ja) 2008-02-21
KR20070045204A (ko) 2007-05-02
WO2006007022A1 (en) 2006-01-19

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