KR20070045204A - 일체식 정렬 특징부를 가진 광도파관 조립체를 제조하기위한 방법 - Google Patents

일체식 정렬 특징부를 가진 광도파관 조립체를 제조하기위한 방법 Download PDF

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Publication number
KR20070045204A
KR20070045204A KR1020077002014A KR20077002014A KR20070045204A KR 20070045204 A KR20070045204 A KR 20070045204A KR 1020077002014 A KR1020077002014 A KR 1020077002014A KR 20077002014 A KR20077002014 A KR 20077002014A KR 20070045204 A KR20070045204 A KR 20070045204A
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KR
South Korea
Prior art keywords
waveguide
substrate
cladding layer
layer
alignment feature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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KR1020077002014A
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English (en)
Korean (ko)
Inventor
테리 엘. 스미쓰
준-윙 항
루테쉬 디. 패릭
제레미 케이. 라센
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Publication of KR20070045204A publication Critical patent/KR20070045204A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
KR1020077002014A 2004-06-29 2005-04-28 일체식 정렬 특징부를 가진 광도파관 조립체를 제조하기위한 방법 Ceased KR20070045204A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/879,716 2004-06-29
US10/879,716 US20050284181A1 (en) 2004-06-29 2004-06-29 Method for making an optical waveguide assembly with integral alignment features

Publications (1)

Publication Number Publication Date
KR20070045204A true KR20070045204A (ko) 2007-05-02

Family

ID=34971934

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077002014A Ceased KR20070045204A (ko) 2004-06-29 2005-04-28 일체식 정렬 특징부를 가진 광도파관 조립체를 제조하기위한 방법

Country Status (6)

Country Link
US (1) US20050284181A1 (enExample)
EP (1) EP1761812A1 (enExample)
JP (1) JP2008505355A (enExample)
KR (1) KR20070045204A (enExample)
CN (1) CN1977198A (enExample)
WO (1) WO2006007022A1 (enExample)

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TW201303397A (zh) * 2004-06-16 2013-01-16 Hitachi Chemical Co Ltd 光導波管型光模組以及光導波管型間距變換器
EP1894047A1 (en) * 2005-06-24 2008-03-05 3M Innovative Properties Company Optical device with cantilevered fiber array and method
US7491287B2 (en) * 2006-06-09 2009-02-17 3M Innovative Properties Company Bonding method with flowable adhesive composition
JP5156502B2 (ja) * 2007-06-26 2013-03-06 パナソニック株式会社 光モジュール
US7822300B2 (en) * 2007-11-20 2010-10-26 Aptina Imaging Corporation Anti-resonant reflecting optical waveguide for imager light pipe
CN101910899A (zh) * 2007-11-30 2010-12-08 3M创新有限公司 用于制备光学导波器的方法
CH700471B1 (de) * 2009-02-17 2013-07-31 Vario Optics Ag Verfahren zur Herstellung einer elektro-optischen Leiterplatte mit Lichtwellenleiterstrukturen.
US12057332B2 (en) 2016-07-12 2024-08-06 Ayar Labs, Inc. Wafer-level etching methods for planar photonics circuits and devices
CN107655923B (zh) * 2017-10-13 2019-05-03 电子科技大学 一种实现输出方向大角度可调的太赫兹波传输聚束系统
US11101617B2 (en) 2018-07-16 2021-08-24 Ayar Labs, Inc. Wafer-level handle replacement
CN114026479B (zh) * 2019-06-17 2024-04-12 艾尤纳公司 光纤阵列到波导的无源对准配置
US11774689B2 (en) 2021-10-25 2023-10-03 Globalfoundries U.S. Inc. Photonics chips and semiconductor products having angled optical fibers
WO2023087305A1 (zh) * 2021-11-22 2023-05-25 华为技术有限公司 一种芯片、光纤阵列单元及通信系统

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US3765969A (en) * 1970-07-13 1973-10-16 Bell Telephone Labor Inc Precision etching of semiconductors
US3774987A (en) * 1972-06-27 1973-11-27 Bell Electric Research Ltd Coupling of lasers to optical fibres
US3994559A (en) * 1975-12-22 1976-11-30 International Business Machines Corporation Bidirectional guided mode optical film-fiber coupler
US4210923A (en) * 1979-01-02 1980-07-01 Bell Telephone Laboratories, Incorporated Edge illuminated photodetector with optical fiber alignment
JPS5784408A (en) * 1980-11-13 1982-05-26 Nec Corp Optical distributing circuit
US5046763A (en) * 1990-02-01 1991-09-10 Teleflex Incorporated Quick connect hose coupling assembly
JPH04313710A (ja) * 1990-03-14 1992-11-05 Fujitsu Ltd 光導波路部品の製造方法
FR2661516B1 (fr) * 1990-04-27 1992-06-12 Alcatel Fibres Optiques Composant d'optique integree et procede de fabrication.
US5175781A (en) * 1991-10-11 1992-12-29 United Technologies Corporation Attaching optical fibers to integrated optic chips
US5217568A (en) * 1992-02-03 1993-06-08 Motorola, Inc. Silicon etching process using polymeric mask, for example, to form V-groove for an optical fiber coupling
DE59306756D1 (de) * 1992-03-07 1997-07-24 Minnesota Mining & Mfg Verfahren zum Herstellen von Bauelementen für Lichtwellenleiternetze und nach diesem Verfahren hergestellte Bauelemente
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
JP2798583B2 (ja) * 1993-06-08 1998-09-17 日本電気株式会社 光デバイスの製造方法
EP0631159A1 (de) * 1993-06-18 1994-12-28 Siemens Aktiengesellschaft Anordnung zur optischen Kopplung eines planaren optischen Wellenleiters und einer optischen Faser und Verfahren zur Herstellung eines für eine solche Anordnung geeigneten planaren Wellenleiters
US5357593A (en) * 1993-10-12 1994-10-18 Alliedsignal Inc. Method of attaching optical fibers to opto-electronic integrated circuits on silicon substrates
US5432338A (en) * 1993-10-28 1995-07-11 Alliedsignal Inc. Silicon opto-electronic integrated circuit for fiber optic gyros or communication
JPH0829638A (ja) * 1994-05-12 1996-02-02 Fujitsu Ltd 光導波路・光ファイバ接続構造及び光導波路・光ファイバ接続方法並びに光導波路・光ファイバ接続に使用される光導波路基板及び同基板の製造方法並びに光導波路・光ファイバ接続に使用されるファイバ基板付き光ファイバ
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US5600745A (en) * 1996-02-08 1997-02-04 Industrial Technology Research Institute Method of automatically coupling between a fiber and an optical waveguide
KR100265789B1 (ko) * 1997-07-03 2000-09-15 윤종용 광섬유수동정렬방법
US6756185B2 (en) * 2000-05-09 2004-06-29 Shipley Company, L.L.C. Method for making integrated optical waveguides and micromachined features
US20030035643A1 (en) * 2001-08-17 2003-02-20 Photon-X, Inc. Structure for attaching an optical fiber to a planar waveguide and method thereof

Also Published As

Publication number Publication date
US20050284181A1 (en) 2005-12-29
CN1977198A (zh) 2007-06-06
EP1761812A1 (en) 2007-03-14
JP2008505355A (ja) 2008-02-21
WO2006007022A1 (en) 2006-01-19

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