CN1956814A - Device and method for conditioning and monitoring of a saw blade - Google Patents
Device and method for conditioning and monitoring of a saw blade Download PDFInfo
- Publication number
- CN1956814A CN1956814A CNA2005800134128A CN200580013412A CN1956814A CN 1956814 A CN1956814 A CN 1956814A CN A2005800134128 A CNA2005800134128 A CN A2005800134128A CN 200580013412 A CN200580013412 A CN 200580013412A CN 1956814 A CN1956814 A CN 1956814A
- Authority
- CN
- China
- Prior art keywords
- saw blade
- supporting body
- sensor
- distributor
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D59/00—Accessories specially designed for sawing machines or sawing devices
- B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D59/00—Accessories specially designed for sawing machines or sawing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sawing (AREA)
- Dicing (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A device for separating the electric components arranged on a supporting body comprises a rotatable saw blade(2)with approximate circular cutting edge(11), at least one sensor(12)for detecting the approximate circular cutting edge(11), and a dispenser(7, 8, 10)for the medium; wherein the sensor(12)and the dispenser(7, 8, 10)are arranged on a common supporting body(6)which can moving along the guide device(5)respect to the saw blade(2). The present invention further relates to a method for separating the electric components arranged on the supporting body.
Description
Technical field
The present invention relates to a kind of device, it is used to separate the electronic component that is installed on the supporting body, and this device comprises: the rotatable saw blade that has the circular cutting edge; At least one is used to survey the sensor of circular cutting edge; With the distributor that is used for medium.The invention still further relates to a kind of method, be used for by saw blade that makes rotation and the supporting body that has the electronic component that Gong separates toward each other displacement separate the electronic component that is installed on the supporting body.
Background technology
The separation of electronic component, semiconductor particularly for example is equipped with by the saw blade processing of using rotation especially that the supporting body of electronic component takes place.Such supporting body also is known as lead-frame, wafer or plate usually.During process operation, other material also can be simultaneously separated, moulding material (form is the epoxy material that solidifies) for example, and electronic component is sealed by it.In the high mechanization processing of very expensive usually electronic component, it is crucial suitably controlling processing conditions between separation period, to allow to so to guarantee good processing result.Use sensor in the prior art for this purpose, can detect the size of saw blade with this sensor.Therefore, sensor moves relative to saw blade between the operation cycle that links to each other, and consequently the size of saw blade can be determined.Follow-up processing operation can be controlled according to the measured value of record thus, for example revises the Height Adjustment of saw blade or does not satisfy the saw blade of necessary restrictive condition with other saw blade replacement.The existing shortcoming that is used for the device of separating electronic components is suitable complexity of needs and labour-intensive operation.
Summary of the invention
The present invention is used for separating electronic components for its purpose provides improved device and improved method, can realize improved technology controlling and process in simple mode thus.
For this purpose, the invention provides a kind of device in type described in the introduction in early stage, it is characterized in that sensor and distributor are assembled on the common supporting body, this common supporting body can be along guider with respect to the saw blade displacement.Sensor is in this fracture that is suitable for measuring the diameter of saw blade and/or is used to survey circular cutting edge.Certainly, also can in device, place the sensor that two (even more than two) separate for this purpose.Sensor can be monitored saw blade and whether satisfy the minimum requirements specification.The formation of distributor can be to aim at the shower nozzle of circular cutting edge and/or medium is carried to shower nozzle (normally polynary) near the saw blade upper side position.Adopt this distributor can make cutting edge cooling and cleaning, and the part (sawdust, dust etc.) of discharging can be with cutting the time remove from supporting body, if supporting body is by when downside cuts at least.Special advantageous characteristic according to device of the present invention is that the desired displacement meeting of movable sensor (or a plurality of sensor) is used to locate one or more distributors simultaneously in useful mode usually.Need not carry out independent action for this purpose, the position of distributor will be adjusted simultaneously together with the displacement of sensor.So just may optimization place distributor, so just not need the extra work amount according to the saw blade size that sensor detects.When the diameter of for example saw blade reduced (can be caused by wearing and tearing), the sensor of surveying the saw blade size will be by the rotating shaft of the more close saw blade of displacement.Because be equipped with the common supporting body of detector and distributor, this displacement of detector also causes the forced displacement of distributor.So just may realize that distributor is with respect to the location of saw blade size always best.Will obtain the improvement on the technology controlling and process like this and need not the extra work amount.
Sensor preferably is in parallel with saw blade with the guider of the common supporting body of distributor.Under normal circumstances, the adjustment of sensor and distributor only need be carried out about the saw blade diameter variation.Therefore the free degree of adjusting (being the plane that the guider operation is passed through) is contemplated to be especially on the plane perpendicular to the saw blade rotating shaft, in other words, is parallel to the plane of saw blade exactly.
In another advantageous variant of foundation apparatus of the present invention, saw blade is arranged vertically and guider and this vertical direction angle at 45.Adopt the linear guide of this angle, be used to survey the detector of size, it is surveyed near saw blade has maximum sized position along horizontal line (in or 9 positions of clock) at 3, can rigidity assemble with distributor near cutting position, be bonded on the supporting body of electronic component at this cutting position saw blade, normally at the upside or the downside (12 or 6 points of clock) of saw blade, wherein the horizontal displacement of detector causes the distributor displacement of same distance in vertical direction.Therefore distributor will not have the intervention of complicated transmission with the mode displacement of optimum, this complexity transmission is the result of the saw blade vary in diameter that detects in the horizontal direction.
Sensor can be made in simple, reliable and cheap mode by discontinuous optical detector, thereby this discontinuous optical detector is cooperated with position indicator and determined the position in the time of can changing at the discrete value of optical detector.Such sensor is cheap and easy to get and be not to be easy to be subjected to interference effect.
In another embodiment variant, distributor comprises two polynary shower nozzles, and these two polynary shower nozzles are placed on the both sides of saw blade and are suitable for medium is carried to the position of close saw blade upside or downside.Like this, sawdust, dust or other pollutant just can for example be removed from the position of saw blade both sides by working medium (being generally flushing liquor).
In another embodiment variant, described device is provided with at least two rotatable saw blades, and these two rotatable saw blades are parallel to each other and arrange and be installed on the independent adjustable driving shaft.This saw blade preferably two all be provided with sensor and the distributor that is assembled on the common supporting body.In polynary (two) separator, have independent movable saw blade just, just need assemble required element in the mode of compactness.Make it become possibility according to common supporting body of the present invention, so the present invention can be applied to polynary separator with having superiority especially.On the contrary, apparatus of the present invention also can be used two or more saw blades that are assembled on the same driving shaft (being single rotating shaft).Be contained in saw blades groups under the situation of same axostylus axostyle, can advantageously use sensor and the used common supporting body of distributor into all assembling saw blades.
Also further expectation is, sensor links to each other with data processing unit and this data processing unit is suitable for accessory drive, by this drive unit, the supporting body measured value that can detect according to sensor is along the guider displacement jointly.Like this, the control of processing conditions just can be finished in the automation mode and need not complex control apparatus.According to the present invention, single driving can meet the demands.
The present invention also provides a kind of method, be used for by saw blade that makes rotation and the supporting body that has the electronic component that will separate toward each other displacement separate the electronic component that is installed on the supporting body, wherein use sensor to survey basic at least cutting edge for circular saw blade, survey based on this, be positioned by common displacement with the distributor that is used for medium with respect to the sensing device of saw blade location with respect to saw blade.Rely on the method, reference frame device of the present invention can be recognized foregoing advantage.
In the advantageous applications of the method, supporting body is processed simultaneously by two rotating saw blades, and the sensing device of two saw blades and distributor can separate displacements.In polynary separator, the detector of different saw blades and distributor are by each saw blade independent displacement.This can specialize in simple mode, if sensing device and distributor are along common guider displacement.
Description of drawings
The present invention will be further explained based on the non-limiting specific embodiment shown in figure below.Wherein:
Figure 1A shows according to schematic representation of apparatus of the present invention,
Figure 1B is the schematic diagram that the device among Figure 1A is in the change state, and
Fig. 2 shows the perspective view according to the device of Figure 1A and 1B.
The specific embodiment
Fig. 1 shows the device 1 that has saw blade 2, and it is used for separating electronic components (this is not shown).Saw blade 2 is rigidly connected with the rotating driveshaft 4 that has mounting flange 3.Be positioned at respect to the fixed position of driving shaft 4 be guider 5, bracing frame 6 can move along guider 5 according to arrow P 1.Bracing frame 6 carries the pipe 7 with slit 8, and the liquid that is provided by supply pipe 9 can spray from described slit 8.Be used in particular for removing sawdust by pipe 8 liquid that provide, this will further be illustrated among the figure below.Support frame as described above also carries nozzle 10, and the liquid that is provided by supply pipe 9 also can spray from this nozzle 10.Selectively, also can be that the independent supply (that is, separating with the supply 9 that is used for pipeline 8) that is used for nozzle 10 links to each other with device 1.Nozzle 10 is used in particular for spray liquid on the circular cutting edge 11 of saw blade 2.Bracing frame 6 also has detector 12, can detect with this detector 12 whether the latter is hidden by saw blade 2 or whether it vacates.Detectable signal from detector 12 is transmitted by holding wire 13.In the position of the bracing frame 6 shown in this figure, detector 12 is not hidden by saw blade 2.Pipe 7, nozzle 10 and detector 12 are rigidly connected mutually.Scale label 5a is arranged on the guider 5, and by this scale label, in the moment that changes from the signal of detector 12 when bracing frame 6 displacements, the position of bracing frame can be determined.Use this measure can determine the diameter DZ of saw blade.
Figure 1B shows device 1, but this sentences the electronic component that is used to separate 14 that schematically shows, and itself and supporting body are connected as a single entity and are fastening by executor 15.Figure can be clear that very much thus, and product 14 is cut at the upside of saw blade 2.Yet install 1 and also can adopt the mirror image form so that product can be cut at the downside of saw blade 2.Thereby layout have the pipe 7 of slit 8 make from the efficient liquid of slit 8 be sprayed onto on element 14 and the saw blade 2, to remove dust and other pollutant from cutting operation.In Figure 1B bracing frame 6 with respect to the position of bracing frame among Figure 1A 6 to bottom offset.In Figure 1B, bracing frame 6 is moved down into detector 12 and surpasses till cutting edge 11 1 segment distances of saw blade 2.The cutting edge excalation whether any saw blade 2 can be arranged at the cutting period detecting in the mode that breakage is surveyed at this locational detector 12.The result that detector 12 is in this position is, shower nozzle 10 and pipe 7 are in the operating position simultaneously, and they can play a role efficiently in this position.
Fig. 2 is the perspective view of the device 1 shown in the aforesaid figures.Can be clear that pipe 7 adopts dual form, it can carry out cleaning operation in the both sides of saw blade 2 like this.Can also see that driving shaft 4 is driven by the motor 16 that is in a fixed position.Sensor 12 links to each other with computer 19 and position determining component 17 (can be determined by the position of this member supporting frame 6 with respect to guider 5) by holding wire 13,18.For locating automatically and measuring (being recorded until the signal variation from detector 12 by move bracing frame 6 along guider 5), computer 19 can be controlled transmission device (cylinder or selectable spindle gearing) 20.Guider with respect to the horizontal plane 21 angles at 45 is placed, so detector 12 can cause the corresponding displacement of (at least basically) distributor 8,10 (slit 8 and nozzle 10 in the pipe 7) with respect to the displacement of cutting edge 11.
Should be clear, the present invention is not limited thereto locates the specific embodiment that illustrates and describe, and for those skilled in the art, it also is possible that self-evident many variations are within the protection domain of claims.
Claims (14)
1. be used to separate the device that is installed in the electronic component on the supporting body, comprise:
-rotatable saw blade, it has the cutting edge of circular,
-at least one sensor, be used to survey circular cutting edge and
-be used for the distributor of medium,
It is characterized in that described sensor and distributor are assemblied on the common supporting body, this common supporting body can be with respect to saw blade along the guider displacement.
2. device as claimed in claim 1 is characterized in that: guider is parallel with saw blade.
3. device as claimed in claim 2, it is characterized in that: saw blade is arranged vertically, and guider and this vertical direction angle at 45.
4. each described device in the claim as described above, it is characterized in that: sensor is suitable for measuring the diameter of saw blade.
5. each described device in the claim as described above, it is characterized in that: sensor is suitable for surveying the fracture in the circular cutting edge.
6. each described device in the claim as described above, it is characterized in that: sensor is to be formed by the discontinuous optical detector of cooperating with position indicator.
7. each described device in the claim as described above, it is characterized in that: distributor comprises the shower nozzle that is directed at the circular cutting edge place.
8. each described device in the claim as described above, it is characterized in that: distributor comprises shower nozzle, this shower nozzle is carried to position near the upside of saw blade with medium.
9. device as claimed in claim 8 is characterized in that: distributor comprises two polynary shower nozzles, and described two polynary shower nozzles are arranged on each side of saw blade, and is suitable for medium is carried to the position of the upside of close saw blade.
10. each described device in the claim as described above, it is characterized in that: described device is provided with at least two rotatable saw blades, and described two rotatable saw blades are parallel to each other and arrange and be installed on the independent adjustable driving shaft.
11. each described device in the claim as described above, it is characterized in that: sensor links to each other with data processing unit, this data processing unit is suitable for accessory drive, and by this drive unit, common supporting body can be according to the measured value that uses sensor to detect along the guider displacement.
12. be used to separate the method that is installed in the electronic component on the supporting body, this method by make rotating saw blade and the supporting body that has the electronic component that will separate toward each other displacement finish,
Wherein, the cutting edge of the saw blade of circular is surveyed by sensing device at least, surveys based on this, is positioned by the common displacement with respect to saw blade with respect to saw blade sensing device of locating and the distributor that is used for medium.
13. method as claimed in claim 12 is characterized in that: supporting body is processed simultaneously by two rotating saw blades, and the sensing device of described two rotating saw blades and distributor displacement independently of each other.
14. as claim 12 or 13 described devices, it is characterized in that: sensing device and distributor are along common guider displacement.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1026080A NL1026080C2 (en) | 2004-04-29 | 2004-04-29 | Device and method for conditioning and monitoring a saw blade. |
| NL1026080 | 2004-04-29 | ||
| NLNL1026080 | 2004-04-29 | ||
| PCT/NL2005/000318 WO2005105354A1 (en) | 2004-04-29 | 2005-04-28 | Device and method for conditioning and monitoring of a saw blade |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1956814A true CN1956814A (en) | 2007-05-02 |
| CN1956814B CN1956814B (en) | 2011-09-07 |
Family
ID=34967353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005800134128A Active CN1956814B (en) | 2004-04-29 | 2005-04-28 | Device and method for conditioning and monitoring of a saw blade |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JP2007534511A (en) |
| KR (1) | KR101255692B1 (en) |
| CN (1) | CN1956814B (en) |
| MY (1) | MY159395A (en) |
| NL (1) | NL1026080C2 (en) |
| TW (1) | TWI346596B (en) |
| WO (1) | WO2005105354A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI548500B (en) * | 2014-02-10 | 2016-09-11 | The cutting knife position sensing means |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2967618B2 (en) * | 1991-08-21 | 1999-10-25 | 株式会社東京精密 | Blade position detector |
| EP0532933B1 (en) * | 1991-08-21 | 1995-11-02 | Tokyo Seimitsu Co.,Ltd. | Blade position detection apparatus |
| JP3344733B2 (en) * | 1991-10-11 | 2002-11-18 | 株式会社アマダ | Chip removal equipment for sawing machines |
| CN1055649C (en) * | 1994-10-31 | 2000-08-23 | 株式会社阿马达 | Sawdust removing apparatus for sae machine |
| JP2955936B2 (en) * | 1998-03-06 | 1999-10-04 | 株式会社東京精密 | Dicing equipment |
| DE19905751A1 (en) * | 1999-02-11 | 2000-08-31 | Wacker Siltronic Halbleitermat | Inner hole saw and method for adjusting a nozzle and a sensor of an inner hole saw relative to a saw blade of the inner hole saw |
| JP4590058B2 (en) * | 2000-04-12 | 2010-12-01 | 株式会社ディスコ | Cutting blade detection mechanism of cutting equipment |
| JP2002217135A (en) * | 2001-01-19 | 2002-08-02 | Disco Abrasive Syst Ltd | Dicing saw |
| JP2002343745A (en) * | 2001-05-14 | 2002-11-29 | Tokyo Seimitsu Co Ltd | Dicing device |
| JP2002343746A (en) * | 2001-05-14 | 2002-11-29 | Tokyo Seimitsu Co Ltd | Dicing apparatus with interlock |
-
2004
- 2004-04-29 NL NL1026080A patent/NL1026080C2/en not_active IP Right Cessation
-
2005
- 2005-04-28 JP JP2007510639A patent/JP2007534511A/en active Pending
- 2005-04-28 KR KR1020067021830A patent/KR101255692B1/en active IP Right Grant
- 2005-04-28 WO PCT/NL2005/000318 patent/WO2005105354A1/en active Application Filing
- 2005-04-28 CN CN2005800134128A patent/CN1956814B/en active Active
- 2005-04-29 TW TW094113840A patent/TWI346596B/en active
- 2005-04-29 MY MYPI20051922A patent/MY159395A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW200603938A (en) | 2006-02-01 |
| MY159395A (en) | 2016-12-30 |
| JP2007534511A (en) | 2007-11-29 |
| KR101255692B1 (en) | 2013-04-17 |
| KR20070015175A (en) | 2007-02-01 |
| NL1026080C2 (en) | 2005-11-01 |
| CN1956814B (en) | 2011-09-07 |
| TWI346596B (en) | 2011-08-11 |
| WO2005105354A1 (en) | 2005-11-10 |
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Owner name: FICO CO.,LTD. Free format text: FORMER OWNER: FICO SINGULATION B. V. Effective date: 20080711 |
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Owner name: BESI NETHERLANDS B. V. Free format text: FORMER OWNER: FICO INTERNATIONAL B. V. Effective date: 20130819 |
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Owner name: FICO INTERNATIONAL B. V. Free format text: FORMER NAME: FICO B.V. |
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Address after: Holland Patentee after: FLYCO International Ltd. Address before: Holland Patentee before: Fico B.V. |
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Effective date of registration: 20130819 Address after: Holland Patentee after: BESI NETHERLANDS B.V. Address before: Holland Patentee before: FLYCO International Ltd. |