JP4615242B2 - Rotating blade replacement time determination method and cutting device - Google Patents

Description

  The present invention relates to a method for determining a replacement timing of a rotary blade in a cutting process in which a thin plate-like workpiece is cut into a lattice shape and divided. The present invention also relates to a cutting device that interrupts cutting when the rotating blade reaches the replacement time.

  As a cutting tool, a thin plate-shaped workpiece is cut into a lattice shape and divided into a grid shape. The cutting tool has a diameter of 2 inches to 4 inches (about 5 cm to 10 cm), a thickness of about 0.2 mm, and a disk-shaped substrate. There is a processing method using a rotating blade in which diamond abrasive grains are fixed with a binder. Such a rotating blade is gradually worn out when abrasive grains are consumed or fallen when the workpiece is cut. When the amount of wear of the rotating blade increases, it becomes impossible to give a sufficient depth of cut to the workpiece. As a result, when a thin plate-shaped workpiece such as a semiconductor wafer or a package module is cut, a product such as a semiconductor chip or an IC package after being divided is cracked or chipped.

  For this reason, in this type of cutting, the cutting position is increased by changing the height position of the rotating blade according to the progress of wear of the rotating blade, or the rotating blade with advanced wear is replaced with another rotating blade. Have been to. A worn rotating blade can be reused by truing. When the rotating blade finally reaches the service limit (life), replace the rotating blade with a new rotating blade.

  Therefore, it is necessary to replace the rotating blade at an appropriate replacement time. However, when the operator determines the state of wear of the rotating blade by looking at the cutting blade of the rotating blade or workpiece after cutting and increases the cutting depth or replaces the rotating blade, the criteria for determination are ambiguous. In addition, considerable skill is required for the worker and automation is hindered. Since the life of the rotating blade is one of the important factors directly related to the processing efficiency and the processing result, many methods for determining the replacement time of the rotating blade without depending on the operator are considered.

  As a widely used method, there is a method of determining based on the machining length or the number of cuttings. Assuming that the degree of wear of the rotating blade is proportional to the amount of cutting, the amount of wear of the rotating blade with respect to the predetermined machining length (cutting distance) or the number of cuts per unit of workpiece or cutting line when actually cut The replacement time of the rotating blade can be determined simply based on the machining length or the number of cuttings (see Patent Document 1 and Patent Document 2). This method does not require a special device for determining the state of wear of the rotating blade, and can be easily implemented. However, since the situation in which the rotating blade is worn fluctuates and results vary, a safe value that the rotating blade still has sufficient cutting ability must be used as a criterion for determining the replacement time. In other words, it is disadvantageous in that the life of the rotating blade must be estimated to be considerably low to determine the replacement time, and the rotating blade cannot be used sufficiently effectively.

  For these reasons, in recent years, it has become common to determine the replacement time by detecting the state of wear of the rotating blade. There are two methods for determining the replacement time of a rotating blade: a method that indirectly detects the state of wear of the rotating blade and determines the replacement time, and a method that directly measures the amount of wear of the rotating blade and determines the replacement time. is there.

  The method of indirectly detecting the state of wear of the rotating blade and determining the replacement time basically estimates the amount of wear of the rotating blade from the state and result of cutting. Specifically, for example, the method of detecting the state of wear of the rotating blade from the state of the processing part of the workpiece (see Patent Document 3), the sound and vibration during processing, the load on the spindle, etc. A method for determining the state of wear (see Patent Document 4) is known. Since these methods indirectly detect the state of wear of the rotating blade, it is possible to detect the state of wear of the rotating blade at all times during machining and not to interrupt the machining for measurement. Is possible. Further, a measuring device for measuring the wear amount of the rotating blade is not necessary. On the other hand, since the state of wear of the rotating blade is indirectly determined, it is difficult to quantitatively represent the amount of wear of the rotating blade, and the life of the rotating blade is determined based on a safe and reliable value as a criterion for determining the life. Must be estimated to be considerably low, and the replacement time must be determined, which is disadvantageous in that the rotating blades cannot be used effectively.

  As a method of determining the replacement time by directly measuring the wear amount of the rotating blade, there are known a method of measuring the wear amount by the contact detection means and a method of measuring the wear amount by the optical detection means. Specifically, the method for measuring the amount of wear by the contact detection means is to detect that the rotating blade is brought into contact with the measurement table and is electrically conducted, and the difference between the current position and the intended position is detected. Alternatively, the amount of wear on the intended rotating blade is measured from the difference in the amount of movement (Patent Document 5). Although the measurement of the amount of wear by the contact detection means has the advantage of being able to measure the amount of wear of the rotating blade with a relatively simple configuration, the rotating blade and detector may be damaged during measurement, and the required measurement accuracy is achieved. On the other hand, there are disadvantages such as that the measurement error is relatively large, the processing must be interrupted for measurement, measurement time is required, and the life of the measuring device is relatively short due to wear of the detector.

  More specifically, the measurement of the amount of wear by the optical detection means is based on a method for determining breakage and life from the incident angle and the amount of received light of the reflected light (see Patent Document 6 and Patent Document 7), and the amount of received light of the transmitted light. There is a method for measuring the amount of wear (see Patent Document 8) or a method for observing a shadow or the like obtained when the rotating blade shields light (see Patent Document 9). The method of measuring the wear amount by the optical detection means is excellent in that the wear amount can be quantitatively detected with high accuracy. However, since there is a possibility of erroneous detection due to contamination of the measurement region, reliability is lacking, and many improvements have been attempted (see Patent Document 10).

JP-A-7-273070 (pages 3 to 4) Japanese Patent Laid-Open No. 7-201780 (pages 3 to 4) Japanese Patent No. 3280747 (page 3) Japanese Patent Laid-Open No. 8-167583 (page 3) JP 9-94820 A (page 3) Japanese Utility Model Publication No. 60-123210 Microfilm (Pages 18-22) JP 2002-176012 A (pages 4 to 5) JP 7-276244 A (page 4) Japanese Patent Laid-Open No. 10-177773 (pages 3 to 4) Japanese Patent No. 2879445 (pages 4-5)

  From the viewpoint of quantitatively measuring the wear amount of the rotating blade with higher accuracy, a method of measuring and judging the wear amount by an optical detection means is desirable. However, the measurement of the amount of wear by the optical detection means requires that the cleaning operation of the detection means in the measurement region be complicated in order to prevent erroneous detection due to contamination of the measurement region. In order not to be affected by contamination by cutting fluid or cutting waste, the optical detection means can be installed at a position away from the rotating blade, for example, on the processing table. Since it is necessary to move to the optical detection means, the measurement time is longer and the processing efficiency is lowered.

  In order to determine the replacement time of the rotating blade, it is basically necessary to compare the determination reference value with the measured wear amount. However, the state of wear of the rotating blade varies and the results vary. For this reason, in order to determine the replacement time more accurately, it is necessary to increase the number of times of measurement with respect to the machining amount. However, since cutting must be interrupted at the time of measurement, increasing the number of times of measurement increases the machining efficiency. descend. If you try to reduce the number of measurements to prevent a reduction in machining efficiency, it will be more difficult to set a criterion value, and you will have to use a relatively safe value as a criterion for determining the service life, and you will not be able to use the rotating blade sufficiently effectively. .

  As described above, the technology relating to the determination of the replacement time of the rotating blade has been advanced by many inventions, but there is room for further improvement. An object of the present invention is to provide an improved rotating blade replacement timing determination method and a cutting apparatus that can easily and accurately determine the replacement timing of a rotating blade and prevent the machining efficiency from being reduced as much as possible. And

The rotating blade replacement time determination method according to the present invention is a cutting process in which a thin plate-like workpiece is cut into a lattice shape and divided, and the actual cutting length is set to the limit machining length at which the rotating blade wears up to the limit wear amount that can be processed. in replacement time and determines the rotation blade replacement-timing determining method of rotating blades when the processing length is reached, and setting a limit working length defined as the determination reference value which is a measure, measured at less than the limit working length of the defined A unit measurement machining length having the longest possible value within a range in which the reliability of the workpiece is guaranteed is set in one or more units of the workpiece or cutting line unit, and one or more predetermined by the measurement machining length and recording the data measured by the wear amount of wear of the rotating blades each terminate the processing of the object to be cut or cutting lines, as predicted by the least squares method on the basis of the data of the recorded amount of wear A step of resetting the limit working length calculated to calculate the limit working length as the determination reference value, and determining the replacement timing of the rotary blades when the actual machining length reaches the determination reference value that has been reconfigured , Comprising.

In addition, the method of determining the replacement time of the rotating blade according to the present invention is a cutting process in which a thin plate-like workpiece is cut into a grid and divided, and the actual processing length is set to the limit processing length at which the rotating blade is worn to the limit wear amount. There in determining rotating blade replacement timing and the exchange timing of the rotating blades determination method when it reaches a first step of setting a determination reference value which is a measure of the limit working length defined, and total working length of the object to be cut If the specified limit machining length is less than or equal to the total machining length by comparing the specified limit machining length, this is possible within a range that is shorter than the specified limit machining length and guarantees the reliability of measurement of different values. a second step of setting the wear rate for the judgment reference value at a plurality of measurement processing length both measurement processing length of the plurality setting in units of cutting lines as little as one measurement of a plurality of measurement processing length Addition The next prediction based on the amount of wear of the rotary blade by measuring a third step of recording the data of the wear amount, the data of the set wear rate and the recorded amount of wear when it reaches the length Calculate the measured machining length and reset the calculated measured machining length as the next measured machining length, and calculate the critical machining length predicted by the least square method based on the recorded wear amount data The fifth process of resetting the calculated limit machining length as a judgment reference value, and when the actual machining length reaches the reset judgment standard value while repeating the third process to the fifth process And a sixth step of determining when it is time to replace the rotating blade.

The cutting apparatus according to the present invention is a cutting process in which a thin plate-like workpiece is cut into a grid and divided, and the cutting is performed when the actual processing length reaches the limit processing length at which the rotating blade is worn to the limit wear amount. In a cutting device configured to interrupt processing, a wear amount measuring device for optically measuring the amount of wear of a rotating blade, a storage device for storing data on the amount of wear measured by the wear amount measuring device, and a regulation means for setting a criterion value limit processing length as a guide, the unit or cleavage of one or more object to be cut longer possible value to the extent that the reliability of the measurement is less than the prescribed limit working length is guaranteed Means for causing the wear amount measuring device to measure the wear amount each time the machining of one or more workpieces or cutting lines predetermined by the unit measurement work length set in units of lines is finished, and the measured wear amount Remember the data And means for storing the location, means for resetting the limit working length limit working length is calculated to calculate predicted on the basis of the data of the amount of wear is stored as the determination reference value, the actual working length again Means for interrupting the cutting process when the set judgment reference value is reached.

In addition, the cutting device of the present invention is a cutting process in which a thin plate-like workpiece is cut into a grid and divided, and when the actual machining length reaches the limit machining length at which the rotating blade wears to the limit wear amount In the cutting device configured to interrupt the cutting process, a wear amount measuring device for optically measuring the wear amount of the rotary blade, and a storage device for storing the wear amount data measured by the wear amount measuring device, The means for setting the judgment reference value with the specified limit machining length as a guide, and the total machining length of the workpiece to be compared with the prescribed limit machining length, and the prescribed limit machining length is equal to or less than the total machining length both determined at a plurality of measurement processing length when a plurality of measurement processing length as small as possible within a range where reliability is assured measurement of different values shorter than the limit working length defined when set in units of the cutting line Reference value Means for setting the wear rate to be performed, and when the measured machining length of one of a plurality of measured machining lengths is reached, the wear amount measuring device measures the wear amount of the rotating blade and stores the wear amount data in the storage device And means for calculating the next predicted measured machining length based on the set wear rate and stored wear amount data, and resetting the calculated measured machining length as the next measured machining length; Means for calculating a predicted limit machining length based on the stored wear amount data, and resetting the calculated limit machining length as a judgment reference value; and a judgment criterion in which the actual machining length is reset. Means for interrupting the cutting process when the value is reached, and an arithmetic unit including the arithmetic unit.

  The wear amount measuring device has a light projecting portion and a light receiving portion arranged to face each other with a rotating blade interposed therebetween, a detection device that moves integrally with the rotating blade, and a diameter of the rotating blade relative to the rotating blade. A driving device that reciprocates in the direction, a movement control device that controls the positioning of the driving device, an air supply device that supplies compressed air to the measurement site from a direction perpendicular to the direction of light irradiation from the light projecting unit, and detection And a measuring device that measures the amount of wear of the rotating blade based on the amount of light received by the device.

  According to a first aspect of the present invention, there is provided a method for determining a rotating blade replacement time, wherein a determination reference value is set with reference to a specified limit working length based on a limit wear amount preliminarily estimated from a rotating blade and a workpiece. Processing. Then, the amount of wear of the rotating blade is measured every time a predetermined number of cuts are completed, the limit machining length is calculated by the least square method from the measured data of the amount of wear, and the criterion value set as a guideline is restored. Set. Therefore, the operator can set the specified limit machining length as it is as the determination reference value, and can set the determination reference value more easily. Further, since the determination reference value is reset according to the actual situation of wear of the rotating blade, a more accurate determination reference value is reset regardless of variations in the amount of wear of the rotating blade. As a result, the working efficiency is improved.

  Also, every time a workpiece or a predetermined number of cutting lines are machined, the wear amount of the rotating blade is measured and the wear amount data is recorded, and the limit machining length is calculated from the wear amount measurement data by the least square method. Reset the criterion value. Therefore, the number of measurements can be reduced as much as possible. In addition, since the determination reference value is reset according to the actual situation of wear of the rotating blade, it is possible to more accurately determine the replacement timing of the rotating blade. As a result, the processing efficiency is excellent, and the rotating blade can be used more effectively, thereby improving the productivity.

  According to a second aspect of the present invention, there is provided a method for determining a rotating blade replacement time, wherein a determination reference value is set with reference to a specified limit machining length based on a limit wear amount preliminarily estimated from a rotating blade and a workpiece. Processing. Then, every time the machining of the measurement machining length that is set arbitrarily is completed, the wear amount of the rotating blade is measured, and the limit machining length is calculated from the measurement data of the wear amount by the least square method and set as a guideline. To reset. Therefore, the operator can set the specified limit machining length as it is as the determination reference value, and can set the determination reference value more easily. In addition, since the determination reference value is reset according to the actual situation of wear of the rotating blade, a more accurate determination reference value is set regardless of variations in the amount of wear of the rotating blade. As a result, the working efficiency is improved.

  In addition, a wear rate with respect to a judgment reference value at an arbitrarily set measurement machining length is set, and when the measurement machining length is reached, the wear amount is measured, and the set wear rate and the measured wear amount are measured. The next measured machining length is calculated based on the data, and the next measured machining length that is arbitrarily set is reset to the calculated measured machining length. Therefore, since the wear amount is measured by appropriately changing the measured machining length (measurement time point) according to the actual situation of wear of the rotating blade, the rotating blade, in particular, regardless of variations in the amount of wear of the rotating blade. Even when the wear is severe and it is difficult to measure in units of workpieces, the number of measurements can be reduced as much as possible, and the replacement timing of the rotating blade can be determined more accurately. As a result, the processing efficiency is excellent, and the rotating blade can be used more effectively, thereby improving the productivity.

  The cutting device according to claim 3 of the present invention causes the wear amount measuring device to measure the wear amount every time processing of the workpiece or the predetermined number of cutting lines is finished, and stores the wear amount data in the storage device. The limit machining length is calculated corresponding to the amount of wear at that time, the determination reference value is reset, and when the determination reference value is reached, the machining is interrupted and the rotating blade is replaced. Therefore, the operator can easily set the determination reference value by simply setting the determination reference value as a guideline and resetting the appropriate determination reference value corresponding to the state of wear of the rotating blade. A more accurate determination reference value is set regardless of variations in the amount of wear of the rotating blade. In addition, the number of measurements can be reduced as much as possible. As a result, the working efficiency is improved, the processing efficiency is excellent, the rotating blade can be used more effectively, and the productivity is improved.

  Further, the cutting device according to claim 4 of the present invention calculates a wear rate at each measured machining length by arbitrarily setting a plurality of measured machining lengths that are shorter than the specified limit wear length and different from each other, and wear rate Next, the next measured machining length arbitrarily set based on the wear amount data measured at the measured machining length is changed to the calculated measured machining length. Then, based on the stored wear amount data, the limit machining length is calculated corresponding to the wear amount at that time, the determination reference value is reset, and the processing is interrupted when the determination reference value is reached. In this configuration, the rotating blade is replaced. As a result, the working efficiency is improved, the processing efficiency is excellent, the rotating blade can be used more effectively, and the productivity is improved. Therefore, the operator can easily set the determination reference value by simply setting the determination reference value as a guideline and resetting the appropriate determination reference value corresponding to the state of wear of the rotating blade. Regardless of variations in the amount of wear of the rotary blade, a more accurate determination reference value is set even when the wear of the rotary blade is severe and it is difficult to measure in units of workpieces. In addition, the number of measurements can be reduced as much as possible. As a result, the working efficiency is improved, the processing efficiency is excellent, the rotating blade can be used more effectively, and the productivity is improved.

  According to a fifth aspect of the present invention, there is provided a wear amount measuring apparatus for a cutting device, wherein the optical detection device moves integrally with the rotary blade, and reciprocates in the radial direction of the rotary blade with respect to the rotary blade for accurate positioning. The configuration is controlled. Therefore, it is not necessary to move the rotating blade to a position away from the measurement, and the time required for the measurement can be made relatively short. Further, the rotating blade can be measured with an accuracy of μm. Further, the wear amount measuring apparatus is configured to supply air to the measurement site from a direction perpendicular to the light irradiation direction from the light projecting unit. Therefore, the measurement site is not easily contaminated with the cutting fluid or cutting waste, and the measurement result is highly reliable and excellent in workability. The wear amount measuring device is configured to measure the wear amount based on the amount of transmitted light received. Therefore, the rotating blade can be measured more accurately than the measurement using reflected light, and the reliability of the measurement result is improved. As a result, there is an effect of further improving working efficiency and processing efficiency. And it has the effect of improving the reliability of the cutting apparatus of the structure which estimates a limit machining length based on the amount of wear obtained by actual measurement during a process, and resets a determination reference value.

  FIG. 1 shows the main processes of the preferred embodiment of the present invention. The embodiment shown in FIG. 1 is shown so that two different rotating blade replacement time determination methods can be selectively implemented. The first method is performed when the specified limit machining length of the rotary blade is longer than the total machining length of the workpiece, and the second method is when the limit machining length is shorter than the total machining length. carry out. However, it can be modified to implement only one of them. Each of the first method and the second method will be described with reference to FIG.

  Prior to cutting, it is required that necessary parameter data is input to the control device (S1). The operator sets a predetermined limit machining length, which is a general value, at which the rotating blade is worn to a limit wear amount that can be machined, as a determination reference value. Further, the operator inputs the size of the workpiece (total processing length and cutting line length). The service life of the rotating blade varies depending on the material (type) of the rotating blade and the workpiece, but the method for determining the replacement timing of the rotating blade according to the present invention is based on the criteria for the state of wear of the rotating blade that varies with the progress of processing Since the value is reset, the operator is not required to input a strict criterion value.

  Specifically, the specified limit machining length of the rotating blade can be, for example, an average value of a plurality of actually measured machining or a specification value provided by the manufacturer. However, even with the same type of rotating blade, the amount of wear varies, and the number of workpieces that can be processed before the rotating blade reaches the replacement time differs depending on the thickness and material of the workpiece. Therefore, preferably, for example, a database in which a predetermined criterion value is obtained by actual measurement corresponding to the combination of the rotating blade and the workpiece is provided, and the operator controls the type of the rotating blade and the workpiece. By selecting and inputting to the apparatus, the specified limit machining length and total machining length or cutting line length can be extracted and set from the database. According to this method, the burden on the operator is further reduced, and appropriate parameter data can be set.

Controller acquires data of total working length L ₂ of the object to be cut that is set (S2). The first method is effective when the rotating blade can process a plurality of workpieces, in other words, when the specified limit machining length of the rotating blade is longer than the total machining length of the workpiece. In addition, the second method is effective when the rotating blade is heavily worn and one workpiece cannot be processed with one rotating blade. In the embodiment, since the first method and the second method can be selectively performed, this process is required. However, when only one of the methods is performed, this process is not necessary.

Next, the control unit acquires data limit working length L ₁ that is set (S3). Then, the control device, the total working length _{L 2} and a limit working length (determination reference value) is compared with _{L 1} (S4). When the limit working length L ₁ is longer than the total working length L ₂ of the object to be cut is carried out the first method. Limit working length L ₁ is the time of the total working length L ₂ following object to be cut, to implement the second method. As described above, this process is also unnecessary when only one of the first method and the second method is performed.

Hereinafter, the process of the first method will be described. When the limit working length L ₁ is longer than the total working length L ₂ of the object to be cut, first, set the measurement processing length x _n (S5). Measurement processing length x _n is the unit measuring the processing length less than the limit working length L _1, which is only a single value. The measured machining length _xn indicates a measurement point (point) at which the machining is interrupted and the wear amount of the rotating blade is measured by the wear amount measuring device. Therefore, the set measurement machining length _xn is arbitrary, but it is not preferable that the machining is interrupted for measurement in the middle of the cutting line. Therefore, in one or more workpiece units or cutting line units. Is set. In addition, the smaller the number to be measured, the smaller the number of times that machining is interrupted for measurement and the shorter the machining time. Therefore, the longest possible value is as long as the measurement reliability is guaranteed. To be.

The embodiments, the total working length L ₂ of the object to be cut that acquires the measurement processing length x _n previously. The first method assumes a case where a plurality of workpieces can be machined without exchanging the rotating blade, so there is no problem even if the replacement timing of the rotating blade is determined in units of the workpiece. It can be said. Therefore, by setting the measured machining length as the total machining length of the workpiece, it is possible to use a preset default value, thereby reducing the labor of the operator or simplifying the control sequence. In addition, the work can be exchanged and the wear of the rotating blade can be measured simultaneously, which is efficient. However, there are rare cases where the life of the rotating blade is at most one workpiece, and in such a case, the measurement processing length is set in units of one or more cutting lines.

The current machining length L during cutting is always detected, accumulated and stored, and can be acquired when necessary (S6). The machining length L during machining is calculated based on the position data detected from the position detection device, or the movement amount is calculated by converting the pulse of the movement command output to the moving body. Is stored cumulatively.

When the current processing length L becomes determination reference value (limit machining length) L ₁ or interrupts the cutting as it reaches the replacement time of the rotating blade (S7). In this case, the measurement processing length x _n that is set is because it is below the limit working length L _1, before reaching the replacement time of the rotating blades, always once the amount of wear of the rotating blades is measured directly. On the other hand, when the current processing length L does not reach the determination reference value L _1, it is determined whether or not reached x _n to the current working length L is measured machining length (S8).

When the current machining length L reaches the measured machining length _xn , the machining is interrupted and the wear amount of the rotating blade is measured (S9). The wear amount is measured by using a wear amount measuring device provided with a detection device (sensor) that performs optical detection. In addition, the detection device moves integrally with the rotating blade, and reciprocates in the radial direction of the rotating blade with respect to the rotating blade, and is accurately positioned and controlled to measure the wear amount based on the amount of received light. The wear amount measuring device is used. A specific configuration of a suitable wear amount measuring device will be described later. The control device accumulates the measured wear amount in the storage device in association with the measured machining length (S10). Also, the number of measurements is counted.

Next, based on the wear amount data measured by the wear amount measuring device and stored in the storage device, the limit machining length predicted from the current wear state of the rotating blade is calculated by the least square method (S11). Assuming that the wear amount y and the machining length x are proportional to each other, and assuming that the slope of the linear function is a, the slope a is expressed by Equation 1.

Here, when the limit wear amount ε and the limit process length L ₁ are expressed by a linear function of the slope a in correspondence with the relationship between the wear amount and the process length, the limit is predicted. The machining length L ₁ is obtained by the least square method as shown in Equation 3 by substituting Equation 1 into Equation 2. FIG. 2 shows an example of an approximate straight line of the limit machining length predicted by the least square method based on 10 pieces of work pieces and 10 wear values. However, the limit wear amount and the limit machining length are each expressed as a ratio, the vertical axis is the wear rate, and the horizontal axis is the machining length rate.

  When the predicted limit machining length is obtained, the previously set limit machining length data is overwritten, and the calculated limit machining length is reset as a new criterion value (S12). In the above process, each time the amount of wear is measured, the expected judgment reference value (specified limit machining length) set as a guideline based on the actually measured amount of wear data corresponds to the state of wear of the rotating blade. Change settings. Therefore, as the wear amount data is accumulated, the determination reference value is continuously set based on the limit machining length that is adapted to the state of wear of the rotating blade that is not constant for each cutting process at that time. Therefore, even if there is a variation in the degree of wear of the rotating blade, a new judgment reference value is reset corresponding to the variation, and it is possible to determine the replacement timing of the rotating blade more accurately and to effectively use the rotating blade. it can.

Determining reference value (limit machining length) when reaching the L ₁ to replace the rotary blade (S13), it initializes the data of the wear amount stored in the storage device (S14). At this time, in the case where a database of prescribed criterion values by actual measurement corresponding to the combination of the rotating blade and the workpiece is provided, the value of the limit machining length finally obtained by the above-described process is used. It is possible to correct the stored data of the predetermined criterion value and re-register it in the database. As a result, each time the cutting process is repeated, the specified criterion value is updated so as to approach the preferred data that more closely matches the state of wear of the rotating blade in the actual cutting process, and the database is evolved, so that the reliability is higher. You can get a database.

  If machining continues after cutting is interrupted and the rotating blade is replaced, in other words, if there is a next workpiece to be machined, a new workpiece is placed on the rotary table and aligned. The above-described process is repeated, and the replacement timing of the rotary blade is determined in accordance with the state of wear of the rotary blade in the cutting process at that time.

Next, the process of the second method will be described. Total working length L ₂ and a limit working length (determination reference value) by comparing the L _1, if the limit working length L ₁ is less than the total working length L ₂ of the object to be cut, carrying out the second method ( S4). When the second method is performed, the operator inputs a plurality of measured machining lengths x ₁ ... X _n that are shorter than the prescribed limit machining length L ₁ that is initially set as a determination reference value and different from each other. Set (S16). Each measured machining length x ₁ ... X _n indicates a measurement time point (point), and thus is a different value, and the measured machining length x ₁ is the smallest value. Since the embodiment is designed so as to determine the replacement timing of the rotary blade in a second manner when the limit working length L ₁ than the total working length L ₂ of the object to be cut is short, measured machining length x ₁ ... x _n is the total working length L ₂ smaller than values of all object to be cut.

At this time, the plurality of measurement processing lengths x ₁ ... X _n are arbitrary, but the smaller the number to be measured, the smaller the number of times processing is interrupted for measurement, and the processing time can be shortened. The first measured machining length x ₁ is set to a relatively long value within a range in which the reliability of measurement is guaranteed, and the number of measured machining lengths from the first measured machining length x ₁ to the last measured machining length x _n ( The number of measurements) is reduced as much as possible.

Next, the control device calculates and sets the wear rate at each measured machining length (S17). The wear rate (%) at each measured processing length is obtained by Equation 4. Here, y is the wear amount, ε is the limit wear amount, x is the measured process length, and L ₁ is the limit process length. At this time, the operator can input a plurality of wear rates having different values less than or equal to the limit wear amount of the rotating blade, and the control device can be modified to calculate and set the measured machining length at each wear rate. is there. Since the wear rate is expressed by Equation 4, the measured machining length x corresponding to a certain wear rate η (%) is expressed by Equation 5. When the measurement machining length is initially set according to the wear rate (ratio), the operator can set parameters more sensibly, and the burden on the operator is reduced.

Then, the control unit sets the measurement processing length x ₁ of the first arrival in the plurality of measurement processing lengths of different values set the measurement processing length x _n of monitoring performed the cutting (S18). The current machining length L during cutting is always detected, accumulated and stored, and can be acquired when necessary (S19). The machining length L during machining is calculated based on the position data detected from the position detection device, or the movement amount is calculated by converting the pulse of the movement command output to the moving body. Is stored cumulatively.

When the current processing length L becomes determination reference value (limit machining length) L ₁ or interrupts the cutting as it reaches the replacement time of the rotating blades (S20). In this case, the measurement processing length x _n that is set is because it is below the limit working length L _1, before reaching the replacement time of the rotating blades, always once the amount of wear of the rotating blades is measured directly. On the other hand, the current working length L when not reach the determination reference value L ₁ determines whether the current processing length L has reached the measurement processing length x _n (S21). First measurement processing length x _n to start cutting a new rotary blade is a first measurement processing length x ₁ which is initially set.

When the current machining length L reaches the measured machining length _xn , the machining is interrupted and the wear amount of the rotating blade is measured (S22). As already described, the wear amount is measured by using a wear amount measuring device including a detection device that performs optical detection. Then, the control device accumulates and stores the measured wear amount in the storage device in association with the measured machining length (S23). Also, the number of measurements is counted.

Next, based on the set wear rate data and the recorded wear amount data, a measured machining length next to the reached measured machining length is calculated (S24). Since it is assumed that the n + 1-th expected measured machining length x _{n + 1} reaches the limit wear amount ε when the limit machining length L ₁ , the wear rate η _{n + 1} can be expressed as in Equation 6, so Substituting 3 and obtained by Equation 7.

Assuming that the measured machining length x ₁ and the wear amount are y ₁ in the first measurement (n = 1), the expected machining length x ₂ of the next measurement (n + 1 = 2) is It is expressed as follows. Specifically, for example, at this time, the limit machining length is 100 mm, the limit wear amount is 100 μm, the wear rate at the measurement process length x ₁ is 70%, and the wear rate at the next measurement process length x ₂ is 90%. Then, since the measurement processing length x ₁ when the wear rate of 70% is 70 mm, if the wear amount detected at that time was 80 [mu] m, the next measurement processing length x that is predicted will wear rate 90% ₂ becomes approximately 78.8 mm. The relationship between the measured machining length and the wear rate at this time is shown in FIG.

Then, the calculated measured machining length predicted to become the set wear rate is reset as the next measured machining length (S25). For example, when the measurement processing length set is x ₁ is the measurement processing length x ₁ that is set in the previously calculated measurement processing length as the next measurement processing length x ₂ to overwrite Reset the measurement machining length. In this way, even if there is a variation in the degree of wear of the rotating blade by changing and resetting the measured processing length according to the actual state of wear of the rotating blade, regardless of the initially set measuring processing length, The measurement is always performed at an appropriate measurement point, and it is possible to determine the replacement timing of the rotating blade more appropriately with the minimum necessary measurement, and there is an advantage that the rotating blade does not have a risk of exceeding the limit wear amount.

Next, based on the wear amount data measured by the wear amount measuring device and stored in the storage device, the limit machining length predicted from the current wear state of the rotary blade is calculated by the least square method (S26). The limit machining length L ₁ is obtained by Equation 3. For example, in the case of the specific example described above, as shown in FIG. 3, the measurement processing length is different from the time when the measurement processing length x ₂ is reset to 78.8 mm when the measurement processing length is 70 mm. It is updated to the data.

Then, when the obtained limit working length to be expected, by overwriting the data limit machining length set above, resetting the calculated limit working length as a new determination reference value L ₁ (S27 ). The above process set actually change the desired criterion value L ₁ which is set from the measured amount of wear of the data as a guide to the time corresponding to the state of wear of the rotary blade of the measurement of the amount of wear. Therefore, the limit machining length adapted to the state of wear of the rotating blade that is not constant for each cutting process is updated and set. Therefore, it is possible to more accurately determine the replacement time of the rotating blade, and to use the rotating blade more effectively.

  When the limit machining length is reached and the rotating blade is replaced (S13), the wear amount data stored in the storage device is initialized (S14). If machining continues after cutting is interrupted and the rotating blade is replaced, position the new rotating blade at the replaced position and repeat the process described above to determine the state of wear of the rotating blade at the time of cutting. Adapt to determine when to replace the rotating blade.

  FIG. 4 shows a suitable cutting device that can continuously process a thin plate-like workpiece while determining the replacement timing of the rotating blade more appropriately with the minimum measurement. Hereinafter, the configuration of the cutting apparatus of the present invention will be described with reference to FIG.

  The cutting device is composed of this machine and a control device. The cutting device includes a wear amount measuring device 4 that optically detects the cutting edge of the rotary blade 2 to measure the wear amount, a storage device 6 that stores data on the wear amount measured by the wear amount measuring device 4, and an arithmetic operation. A device 8 is provided. Moreover, the cutting device includes an input device 10 for inputting and setting parameter data, and a display device 12 for displaying appropriate data. The storage device 6 has a database in which a predetermined determination reference value based on actual measurement is given corresponding to the combination of the rotary blade 2 and the workpiece. Detailed descriptions of other components and members of the cutting apparatus shown in FIG. 4 are omitted.

The arithmetic unit 8 sets a specified limit machining length as a determination reference value, and also has a plurality of measured machining lengths that are shorter than the specified limit machining length and different from each other, and a wear rate with respect to a determination reference value at the plurality of measured machining lengths. Set. Specifically, the specified limit machining length input from the input device 10 is stored in the storage device 6 as a determination reference value for determining the replacement time of the rotary blade 2. A plurality of measured machining lengths and respective wear rates at each measured machining length are input from the input device 10 or calculated, and stored in the storage device 6. For the prescribed limit machining length, refer to the explanation of the method for determining the rotating blade replacement time of the present invention already described. In addition to the above, the arithmetic device 8 causes the storage device 6 to store parameter data input from the input device 10, for example, the total machining length of the workpiece.

  The arithmetic unit 8 causes the wear amount measuring device 4 to measure the wear amount every time processing of one or more predetermined workpieces or cutting lines is completed, and stores the measured wear amount data in the storage device 6. Let The arithmetic unit 8 calculates the next measured machining length based on the set wear rate and the recorded wear amount data, and resets the calculated measured machining length as the next measured machining length. Further, the arithmetic unit 8 calculates the limit machining length by the least square method based on the wear amount data stored in the storage device 6 and resets the calculated limit machining length as the determination reference value. Then, the arithmetic unit 8 interrupts the cutting process when the actual machining length reaches the reset criterion value.

  Further, the arithmetic unit 8 compares the set total machining length of the workpiece and the specified limit machining length of the rotary blade, and when the rotary blade has the ability to machine a plurality of workpieces, If the first method described is selected and the rotating blade does not have the ability to machine one workpiece without replacement, the second method is selected to determine when the rotating blade should be replaced. A means for making a determination;

  Next, a more specific configuration of the preferred wear amount measuring apparatus of the present invention will be described. FIG. 5 is a plan view of the rotating blade mounted on the blade cover provided at the tip of the spindle as viewed from the front, and shows a detection device of the wear amount measuring device. As shown in FIGS. 4 and 5, the wear amount measuring device 4 includes a light projecting unit 41 and a light receiving unit 42 that are disposed to face each other with the rotary blade 2 interposed therebetween, and detects that the wear amount measuring device 4 moves integrally with the rotary blade 2. The device 14, the drive device 16 that moves the detection device 14 in the radial direction of the rotary blade 2 with respect to the rotary blade 2, the movement control device 18 that controls the positioning of the drive device 16, and the light irradiation from the light projecting unit 41 An air supply device 20 that supplies air to the measurement site 43 from a direction perpendicular to the direction, and a measurement device 22 that measures the wear amount of the rotary blade 2 based on the amount of light received by the detection device 14. It becomes.

  The detection device 14 is provided on the blade cover 44 of the rotary blade 2. Therefore, the detection device 14 can move integrally with the rotating blade 2 when the rotating blade 2 moves by the relative movement of the moving body. Therefore, it is not necessary to move the rotating blade to the detection device located at a position away from the machining site every time the wear amount is measured, and the measurement time can be further shortened.

  The detection device 14 reciprocates in the radial direction of the rotary blade 2 by the driving device 16 controlled by the movement control device 18. The drive device 16 includes a servo motor 45. The servo motor 45 is moved by a movement command signal from the movement control device 18 and is compensated by a feedback signal from a position detector (not shown), and is positioned with high accuracy in units of μm. The The rotation of the servo motor 45 is transmitted to the rotating shaft 47 by the belt 46. The rotation of the rotary shaft 47 is converted into a linear motion by a screw mechanism (not shown), and the detection device 14 is moved in the radial direction A of the rotary blade 2. Therefore, it corresponds to the variation of the measurement part 43 due to the change of the diameter due to the replacement or wear of the rotating blade, and the light projecting part 41 and the light receiving part 42 are precisely positioned at the measurement part 2 even if the fluctuation is slight. be able to. Further, there is no need for the operator to adjust the position of the detection device, which is advantageous for automation.

The detection device 14 is a sensor that optically detects the wear amount, and directly and quantitatively measures the wear amount. The light projecting unit 41 and the light receiving unit 42 of the detection device 14 are arranged to face each other with the rotary blade 2 interposed therebetween, and the transmitted light from the light projecting unit 41 is received by the light receiving unit 42 and the received light amount is sent as detection data. . Then, the measuring device 22 measures the wear amount of the rotating blade 2 based on the received light amount of the transmitted light of the detecting device 14. Therefore, there is no risk of erroneous detection due to irregular reflection or the like unlike the measurement method using reflected light. Therefore, the wear amount can be measured more precisely and accurately.

The detection device 14 is provided on the upper side of the rotary blade 2. Therefore, the measurement part 43 including the light projecting part 41 and the light receiving part 42 can be arranged at a position farthest from the machining part 48 to which the cutting fluid is supplied. Further, the wear amount measuring device 4 is compressed air from the direction perpendicular to the light irradiation direction to the measurement site 43, specifically, toward the measurement site 43 from the upper side of the rotary blade 2 to the processing site 48. The air supply device 20 includes a supply pipe 49 such as a compressor (not shown) and a flexible hose. Accordingly, the cutting fluid and the cutting waste are less likely to enter the measurement site 43, and dirt is easily removed. Therefore, the measurement site can be more effectively prevented from being contaminated and cleaned, and the workability is excellent. Further, the possibility of erroneous detection can be further reduced, and the reliability of the detection device 14 can be increased. Further, as described above, the detection device 14 is located in the vicinity of the rotating blade 2, by the measurement site 43 is effectively cleaned, it can be used for breakage detection of rotating blades It is.

  As described above, the rotating blade replacement time determination method and cutting device of the present invention, as already mentioned some examples, change the order of the processes without departing from the technical idea of the present invention, Various changes can be made by replacing the apparatus, modifying a part of the process or apparatus, or combining another process or apparatus.

  The present invention is used in the field of manufacturing electronic components. Specifically, it is used for a cutting process in which a thin plate-like workpiece is cut into a lattice shape using a rotating blade and divided. The present invention is excellent in machining efficiency and work efficiency in cutting, and the rotating blade is effectively used to improve productivity.

It is a flowchart which shows the process of the rotating blade replacement time determination method of this invention. It is a graph which shows the relationship between the wear rate in the rotating blade replacement | exchange time determination method of this invention, and the estimated limit process length. It is a graph which shows the relationship between the wear rate in the rotating blade replacement time determination method of this invention, and the estimated process length and limit process length estimated. It is a block diagram which shows the whole structure of the cutting device of this invention. It is the top view which looked at the rotary blade end which shows the detection apparatus of the abrasion amount measuring apparatus in the cutting device of this invention from the front.

Explanation of symbols

2 Rotating blade 4 Wear amount measuring device 6 Storage device 8 Computing device 10 Input device 12 Display device 14 Detection device 16 Driving device 18 Movement control device 20 Air supply device 22 Measuring device

Claims (5)

When cutting the thin plate-like workpiece into a grid and dividing it, the rotating blade is replaced when the actual working length reaches the limit machining length at which the rotating blade wears to the maximum wear limit that can be processed. In the method for determining the time to replace the rotating blade that is determined as the timing, it is possible to set the specified limit machining length as a criterion value to be used as a guide, and within the range in which measurement reliability is guaranteed within the specified limit machining length. Finishing the process of setting the unit measurement machining length of the longest value in units of one or more workpieces or cutting line units, and machining of one or more workpieces or cutting lines predetermined by the measurement machining length A step of measuring the wear amount of the rotating blade and recording the wear amount data every time, and calculating the limit machining length predicted by the least square method based on the recorded wear amount data Limit A rotary blade replacement comprising: resetting a machining length as the determination reference value; and determining a replacement timing of the rotary blade when an actual processing length reaches the reset determination reference value Time determination method. When cutting the thin plate-like workpiece into a grid and dividing it, the rotating blade is judged to be replaced when the actual working length reaches the limit machining length at which the rotating blade wears to the limit wear amount In the rotating blade replacement time determination method, the first step of setting the specified limit machining length as a criterion value to be used as a guide, and the total machining length of the workpiece to be compared with the specified limit machining length When the limit machining length is equal to or less than the total machining length, a plurality of measurement machining lengths that are as short as possible within a range that is shorter than the specified limit machining length and that guarantees the reliability of measurement of values different from each other can be expressed in units of cutting lines. in setting and both second step of setting the wear rate for the judgment reference value in the plurality of measurement processing length, the rotating blades when it reaches the one measurement process length of the plurality of measurement processing length Ma A third step of measuring the amount recorded data amount of wear, on the basis of the data of the set wear rate and the recorded wear amount to calculate the measurement processing length which is next predicted is the calculated A fourth step of resetting the measured machining length as the next measured machining length, and calculating the limit machining length predicted by the least square method based on the recorded wear amount data, and calculating the calculated limit machining The fifth step of resetting the length as the determination reference value, and the rotating blade when the actual machining length reaches the reset determination reference value while repeating the fifth step from the third step And a sixth step of determining the replacement time of the rotating blade. This is a cutting process that cuts and divides a thin plate-like workpiece into a lattice shape, and is configured so that the cutting process is interrupted when the actual machining length reaches the limit machining length at which the rotating blade wears to the limit wear amount. A wear amount measuring device for optically measuring the wear amount of the rotating blade; a storage device for storing the wear amount data measured by the wear amount measuring device; and a prescribed limit machining length as a guide And a means for setting a determination reference value as long as possible in the range of one or more workpieces or cutting lines as long as possible within a range in which the measurement reliability is guaranteed within the specified limit machining length. Means for causing the wear amount measuring device to measure the wear amount each time the machining of one or more workpieces or cutting lines determined in advance with a unit measurement work length is completed, and the measured wear amount data Storage device Means for storing the, means for resetting the limit working length is the calculated to calculate the limit working length which is predicted on the basis of the data of the amount of wear are the storage as the determination reference value, the actual working length Means for interrupting cutting when the reset criterion value is reached, and a cutting device comprising: This is a cutting process that cuts and divides a thin plate-like workpiece into a lattice shape, and is configured so that the cutting process is interrupted when the actual machining length reaches the limit machining length at which the rotating blade wears to the limit wear amount. A wear amount measuring device for optically measuring the wear amount of the rotating blade; a storage device for storing the wear amount data measured by the wear amount measuring device; and a prescribed limit machining length as a guide means for setting the determination reference value as a limit working length of the total working length and the case limit machining length of the defining by comparing the limit working length defined is less than the total working length of the provisions of the object to be cut wear to the determination reference value when the reliability is set a plurality of measurement processing length as small as possible within a range that is guaranteed in the unit of the cutting line in both the plurality of measurement processing length of the measurement of different values shorter than And setting the wear amount of the rotating blade to the wear amount measuring device when the measured process length of the plurality of measured process lengths is reached, and storing the wear amount data in the storage device And calculating the next predicted measured machining length based on the set wear rate and the stored wear amount data, and reset the calculated measured machining length as the next measured machining length. Means for calculating a predicted limit machining length based on the stored wear amount data, and resetting the calculated limit machining length as the determination reference value, A cutting device comprising: an arithmetic unit including: a means for interrupting the cutting process when the reset determination reference value is reached.   The wear amount measuring device has a light projecting portion and a light receiving portion arranged to face each other with the rotary blade interposed therebetween, a detection device that moves integrally with the rotary blade, and the detection device with respect to the rotary blade A drive device that reciprocates in the radial direction of the rotating blade, a movement control device that controls the positioning of the drive device, and supplies compressed air to the measurement site from a direction perpendicular to the light irradiation direction from the light projecting unit The cutting device according to claim 3, further comprising: an air supply device that performs measurement, and a measurement device that measures an amount of wear of the rotating blade based on a received light amount of transmitted light of the detection device.

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