JP2955936B2 - Dicing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus for cutting a semiconductor wafer (work) in a grid pattern.

[0002]

2. Description of the Related Art A dicing apparatus includes a cutting blade.
Is a device for rotating a semiconductor wafer at high speed to cut a semiconductor wafer into dice. The blade is covered with a flange cover (cover) except for a cut portion, and
A pair of nozzles are provided on the flange cover, and cutting water is jetted from these nozzles to both surfaces of the blade during cutting of the workpiece.

[0003] The flange cover is divided into two parts in order to replace the blade. The conventional flange cover is divided into two parts with a plane perpendicular to the rotation axis of the blade as a boundary surface, and among these covers, the first cover located on the motor side is fixed to a fixing member such as a motor,
Another second cover is fastened to the first cover by bolts. The first and second covers are provided with the nozzles one by one. In other words, if the flange cover is integral, the nozzle obstructs and the blade cannot be replaced, so that when replacing the blade, the second cover is removed from the first cover to eliminate the problem caused by the nozzle. doing.

[0004] The flange cover is provided with a detector for optically detecting breakage of the blade in a non-contact manner. The detector includes a light emitting element and a light emitting unit including the optical system, and a light receiving element and a light receiving unit including the optical system, and is attached with a blade interposed therebetween.
That is, the light emitting unit is attached to the first cover,
The light receiving unit is attached to the second cover.

[0005]

However, the conventional dicing apparatus has a disadvantage in that the replacement of the blade is very troublesome because the second cover must be removed from the first cover every time the blade is replaced. . The present invention has been made in view of such circumstances, and provides a dicing apparatus capable of easily performing replacement of a cutting blade without trouble.

[0006]

According to the present invention, in order to attain the above object, a cutting blade is covered with a cover, and the cutting blade is rotated at a high speed to cut a workpiece into a predetermined shape. In a dicing apparatus that injects liquid from a nozzle toward both surfaces of a cutting blade during cutting of a workpiece, the cover is divided into two parts, and the divided first and second covers are parallel to a rotation axis of the cutting blade. It is characterized in that the cutting blade can be exchanged by rotating the first cover or the second cover and retreating the nozzle from the cutting blade by rotatably connecting through a suitable shaft.

According to the first aspect of the present invention, the divided first cover and the second cover are rotatably connected via an axis parallel to the rotation axis of the cutting blade. The nozzle can be retracted from the cutting blade only by rotating. Therefore, according to the present invention, the replacement of the cutting blade can be easily performed without trouble. According to the second aspect of the present invention, the damage detection means of the cutting blade is configured as a unit integrating the light emitting part and the light receiving part, and the damage detection means is attached to the first cover or the second cover. In addition, a troublesome positioning operation of the light projecting unit and the light receiving unit can be omitted. That is, if the light-emitting part and the light-receiving part are separate bodies, relative positioning when attaching to the cover is extremely difficult and it takes a long time. You only need to position it,
Positioning when attaching to the cover becomes very easy.

The invention according to claim 2 is achieved by connecting the first cover and the second cover rotatably via an axis parallel to the rotation axis of the cutting blade. If the second cover is connected via an axis perpendicular to the rotation axis of the cutting blade, this cannot be achieved because the light emitting unit and the light receiving unit must be separately provided.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dicing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a perspective view of a dicing apparatus 10 according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of the dicing apparatus 10 shown in FIG. The dicing apparatus 10 shown in these figures is an apparatus for finely aligning a work 16 bonded to a cutting table 12 via an adhesive sheet 14 and then cutting the work 16 into a dice by a blade 18 rotating at high speed. When the work 16 is cut, a pair of cleaning water jet nozzles 2
Cleaning water and cutting water are sprayed from the nozzles 0 and 20 and the cutting water injection nozzle 22 onto both surfaces of the blade 18 during cutting of the workpiece to cool and clean the blade 18.

As shown in FIG. 2, the drive motor 24 of the blade 18 has a spindle 26 having a tapered surface formed with a tapered surface, and an inner peripheral tapered surface 28A of a flange 28 fitted into the tapered surface 26A of the spindle 26. Flange 28 is attached. The flange 28
Is fixed to the spindle 26 by tightening a flange fixing nut 30 screwed to the spindle 26. A hub 32 formed in a donut shape is fitted into the outer peripheral portion of the flange 28, and the blade 18 is fixed to the outer peripheral portion of the hub 32, and the blade 18 is brought into contact with a support surface 28 B of the flange 28. I have. The hub 3
2 is a hub fixing nut 34 screwed to the flange 28.
Is fixed to the flange 28 by tightening, so that the blade 18 is attached to the hub 32 and the flange 28.
Is fixed between the support surface 28B and the support surface 28B.

As shown in FIG. 1, the blade 18 is covered by a flange cover 36 except for the cut portion. The flange cover 36 is divided into two parts, a first cover 38 and a second cover 40. The first cover 38 is fixed to a fixing member such as the drive motor 24. Blade 18
Is rotatably connected to the first cover 38 via a shaft 42 disposed parallel to the rotation axis 18A. Thereby, the second cover 40 is in the closed position shown by the solid line in FIG.
It is rotated in the range from the open position indicated by the two-dot chain line in FIG. When the second cover 40 is moved to the open position, the L-shaped cleaning water injection nozzles 20, 20 are retracted to the side from below the blade 18, so that the blade 18 can be replaced in this state. . A tube 44 for supplying cutting water to the cutting water injection nozzle 22 is connected to the first cover 38, and a tube for supplying cleaning water to the cleaning water injection nozzles 20, 20 to the second cover 40. 46 are connected.

Therefore, according to the dicing apparatus 10 configured as described above, the blade 18 can be replaced only by moving the second cover 40 to the open position, and the replacement of the blade 18 can be performed without trouble. It can be done easily. On the other hand, there is a device for efficiently cutting a workpiece by arranging two dicing devices 10 and simultaneously driving these dicing devices 10 and 10. In this device, two rotation axes are coaxially coincident with each other.
Two dicing machines 10, 10 are arranged and
The work is cut by moving the dicing devices 10 and 10 in a direction approaching each other or in a direction away from each other. In this case, when the two dicing devices 10 and 10 move to the closest positions, in the conventional dicing device, there is a limit in the approach distance because the bolts for fastening the two divided covers interfere with each other, In the present embodiment, since it is not restricted by the bolt, it can be approached to the limit.

Incidentally, the second cover 40 shown in FIG. 1 is provided with a damage detecting device 50 for detecting the damage of the blade 18. As shown in FIGS. 2 and 4, the damage detection device 50 includes a light emitting unit 58 including an LED 52, a condensing lens 54, and a prism 56 that form an optical system of the LED 52.
Light receiving element 60 and condenser lens 6 constituting the optical system
2. It is configured as a unit in which a light receiving section 66 composed of a prism 64 is integrated.

As shown in FIG. 4, the LED 52 and the light receiving element 60 are provided in a cylindrical casing 68, and the storage section 7 partitioned by an inner cylinder 70 of the casing 68.
2, 74 are provided separately. The condenser lens 54 of the light emitting section 58 is provided with a lens barrel 7 fitted in the housing section 72.
The prism 56 is fixed to the casing 68 and the inner cylinder 70 below the condenser lens 54. The condenser lens 62 of the light receiving section 66 is provided in a lens barrel 78 fitted in the storage section 74, and a prism 64 is fixed to the casing 68 and the inner cylinder 70 below the condenser lens 62. .

Accordingly, the light emitted from the LED 52 is condensed by the condenser lens 54 and guided to the prism 56, and is reflected by the prism 56 in the horizontal direction by 90 degrees to be guided to the prism 64. And the prism 6
The light guided to 4 is reflected upward by 90 degrees by the prism 64, and then condensed by the condenser lens 62 to form an image on the light receiving surface of the light receiving element 60. In this way, in the damage detection device 50, the light projecting portion 58 and the light receiving portion 66 are positioned in the casing 68 in advance so that the light from the LED 52 is imaged on the light receiving surface of the light receiving element 60.

A threaded rod 80 is provided through the inner cylinder 70. In addition, a screw rod 8 is provided at the upper end of the screw rod 80.
A knob 82 for rotating the shaft 80 is provided, and a spring 84 is inserted between the screw rod 80 and the inner cylinder 70. As shown in FIG. 2, the damage detection device 50 configured as described above has a through hole 40A formed in the second cover 40.
The light emitting portion 58 is fitted into the through hole 40B, and the light receiving portion 6 is inserted into the through hole 40B.
6 is fitted to the second cover 40 by fitting. When the screw rod 80 is turned with the knob 80 and the male screw portion 81 of the screw rod 80 is screwed into the screw hole 40C formed in the second cover 40, the casing 68 is pushed by the knob 82 to emit light. Unit 58 and light receiving unit 66
Can be pushed inside the second cover 40. By adjusting the pushing amount, the damage detecting device 50 is positioned at the position shown in FIG. 2 where the damage of the blade 18 can be detected. It should be noted that the play generated by the gap between the second cover 40 and the damage detection device 50 can be absorbed by the urging force of the spring 84.

Therefore, according to the damage detecting device 50, since the light projecting portion 58 and the light receiving portion 66 are integrally formed as a unit, the relative positioning of the light projecting portion and the light receiving portion on the flange cover 36 can be performed. It can be omitted, and the position of the blade 18 can be easily adjusted. In the present embodiment, the damage detection device 50 is
Although attached to the cover 40, it may be attached to the first cover 38.

[0018]

As described above, according to the dicing apparatus according to the present invention, the cover for covering the cutting blade is divided into two parts, and the divided first and second covers are parallel to the rotation axis of the cutting blade. Since it is rotatably connected via the shaft, the nozzle can be retracted from the cutting blade only by rotating the first cover or the second cover. Therefore, according to the present invention, the replacement of the cutting blade can be easily performed without trouble.

[Brief description of the drawings]

FIG. 1 is a perspective view of a dicing apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view of the dicing apparatus taken along line 2-2 in FIG. 1;

FIG. 3 is a front view of the dicing apparatus of FIG. 1;

FIG. 4 is an enlarged sectional view of a damage detection device attached to the dicing device of FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Dicing apparatus 18 ... Blade 20 ... Washing water injection nozzle 36 ... Flange cover 38 ... First cover 40 ... Second cover 50 ... Damage detecting device 52 ... LED 58 ... Light emitting part 60 ... Light receiving element 66 ... Light receiving part

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-66559 (JP, A) JP-A-7-299748 (JP, A) JP-A 5-72411 (JP, U) JP-A-60- 123210 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01L 21/301 B24B 55/02 B24B 55/04 B23D 47/00

Claims (2)

(57) [Claims] 1. A cutting blade is covered with a cover, and the cutting blade is rotated at a high speed to cut a workpiece into a predetermined shape, and a liquid is supplied from a nozzle provided on the cover to both surfaces of the cutting blade during cutting of the workpiece. In the dicing apparatus for jetting, the cover is divided into two parts, and the divided first cover and the second cover are rotatably connected to each other via an axis parallel to a rotation axis of the cutting blade. By rotating the second cover to retract the nozzle from the cutting blade,
A dicing apparatus characterized in that a cutting blade can be replaced. 2. The apparatus according to claim 1, wherein the first cover or the second cover is provided with a damage detecting means for detecting damage to the cutting blade, and the damage detecting means is provided with a light projecting unit and a light receiving unit integrally. The dicing apparatus according to claim 1, wherein the dicing apparatus is configured as: