CN1933107A - 多步骤低温间隔层制作方法 - Google Patents
多步骤低温间隔层制作方法 Download PDFInfo
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- CN1933107A CN1933107A CN 200510029705 CN200510029705A CN1933107A CN 1933107 A CN1933107 A CN 1933107A CN 200510029705 CN200510029705 CN 200510029705 CN 200510029705 A CN200510029705 A CN 200510029705A CN 1933107 A CN1933107 A CN 1933107A
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 200510029705 CN100499032C (zh) | 2005-09-15 | 2005-09-15 | 多步骤低温间隔层制作方法 |
Applications Claiming Priority (1)
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CN 200510029705 CN100499032C (zh) | 2005-09-15 | 2005-09-15 | 多步骤低温间隔层制作方法 |
Publications (2)
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CN1933107A true CN1933107A (zh) | 2007-03-21 |
CN100499032C CN100499032C (zh) | 2009-06-10 |
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CN 200510029705 Active CN100499032C (zh) | 2005-09-15 | 2005-09-15 | 多步骤低温间隔层制作方法 |
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CN100499032C (zh) | 2009-06-10 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111129 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111129 Address after: 201203 Shanghai Zhangjiang Road, Zhangjiang High Tech Park of Pudong New Area No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai Zhangjiang Road, Zhangjiang High Tech Park of Pudong New Area No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |