CN1918319A - 溅射靶和光信息记录介质及其制造方法 - Google Patents
溅射靶和光信息记录介质及其制造方法 Download PDFInfo
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- CN1918319A CN1918319A CNA200480041806XA CN200480041806A CN1918319A CN 1918319 A CN1918319 A CN 1918319A CN A200480041806X A CNA200480041806X A CN A200480041806XA CN 200480041806 A CN200480041806 A CN 200480041806A CN 1918319 A CN1918319 A CN 1918319A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 46
- 238000005477 sputtering target Methods 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000002131 composite material Substances 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 32
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 22
- 150000001875 compounds Chemical class 0.000 claims description 20
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000010408 film Substances 0.000 abstract description 50
- 230000001681 protective effect Effects 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 238000002834 transmittance Methods 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 27
- 239000000843 powder Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 12
- 239000012528 membrane Substances 0.000 description 12
- 239000005864 Sulphur Substances 0.000 description 11
- 239000011241 protective layer Substances 0.000 description 11
- 238000004544 sputter deposition Methods 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 230000032683 aging Effects 0.000 description 6
- 238000001354 calcination Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000000470 constituent Substances 0.000 description 5
- 229910001316 Ag alloy Inorganic materials 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 3
- 150000003464 sulfur compounds Chemical class 0.000 description 3
- 229910017488 Cu K Inorganic materials 0.000 description 2
- 229910017541 Cu-K Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 201000008827 tuberculosis Diseases 0.000 description 2
- NEAPKZHDYMQZCB-UHFFFAOYSA-N N-[2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]ethyl]-2-oxo-3H-1,3-benzoxazole-6-carboxamide Chemical compound C1CN(CCN1CCNC(=O)C2=CC3=C(C=C2)NC(=O)O3)C4=CN=C(N=C4)NC5CC6=CC=CC=C6C5 NEAPKZHDYMQZCB-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 241001025261 Neoraja caerulea Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000009747 press moulding Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Classifications
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- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
- C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
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- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
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- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
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- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
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- G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
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Abstract
Description
例 | 构成成分 | 组成In/(In+Zn+Sn+Si)Zn/(In+Zn+Sn+Si)Sn/(In+Zn+Sn+Si)Si/(In+Zn+Sn+Si) | 透过率633nm(%) | 折射率633nm | 非晶态性 | 溅射方式 | 成膜速度(/sec) |
实施1 | In2O3ZnOSnO2SiO2 | 0.180.180.530.11 | 95 | 2.2 | 1.2 | RF | 3.2 |
实施2 | In2O3ZnOSnO2SiO2 | 0.050.100.510.34 | 98 | 1.9 | 1.0 | RF | 1.5 |
实施3 | In2O3ZnOSnO2SiO2 | 0.120.360.420.10 | 92 | 2.2 | 1.2 | RF | 2.1 |
比较1 | In2O3ZnOSnO2SiO2 | 0.030.080.860.03 | 84 | 2.3 | 3.4 | DC | 5.2 |
比较2 | In2O3ZnOSnO2SiO2 | 0.0080.0520.250.69 | 98 | 1.7 | 1.1 | RF | 0.3 |
比较3 | In2O3ZnOSnO2SiO2 | 0.530.130.270.07 | 91 | 1.9 | 4.2 | DC | 4.1 |
比较4 | ZnSSiO2 | 20mol%SiO2 | 98 | 2.1 | 1.1 | RF | 3.7 |
例 | 构成成分 | 组成In/(In+Zn+Sn+B)Zn/(In+Zn+Sn+B)Sn/(In+Zn+Sn+B)B/(In+Zn+Sn+B) | 透过率633nm(%) | 折射率633nm | 非晶态性 | 溅射方式 | 成膜速度(/sec) |
实施4 | In2O3ZnOSnO2B2O3 | 0.160.160.480.20 | 94 | 2.1 | 1.2 | RF | 1.9 |
实施5 | In2O3ZnOSnO2B2O3 | 0.100.100.300.50 | 98 | 1.9 | 1.0 | RF | 0.8 |
实施6 | In2O3ZnOSnO2B2O3 | 0.110.330.390.17 | 93 | 2.1 | 1.2 | RF | 1.8 |
比较5 | In2O3ZnOSnO2B2O3 | 0.190.190.560.06 | 84 | 2.3 | 3.4 | DC | 5.2 |
比较6 | In2O3ZnOSnO2B2O3 | 0.080.080.120.72 | 97 | 1.7 | 1.1 | RF | 0.4 |
比较7 | In2O3ZnOSnO2B2O3 | 0.100.010.820.07 | 83 | 2.4 | 3.1 | DC | 5.5 |
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JP (1) | JP4376868B2 (zh) |
KR (1) | KR100799074B1 (zh) |
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Cited By (2)
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CN102351528A (zh) * | 2011-09-28 | 2012-02-15 | 华南理工大学 | 硼化镧掺杂的氧化物半导体材料及其应用 |
CN114600190A (zh) * | 2019-11-01 | 2022-06-07 | 田中贵金属工业株式会社 | 热辅助磁记录介质用溅射靶 |
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JP4788463B2 (ja) * | 2006-04-25 | 2011-10-05 | 住友金属鉱山株式会社 | 酸化物焼結体、透明酸化物膜、ガスバリア性透明樹脂基板、ガスバリア性透明導電性樹脂基板およびフレキシブル表示素子 |
JP2008097791A (ja) * | 2006-09-11 | 2008-04-24 | Ricoh Co Ltd | 多層相変化型光記録媒体 |
JP4535080B2 (ja) * | 2007-03-23 | 2010-09-01 | ソニー株式会社 | 光記録媒体およびその製造方法 |
JP5440388B2 (ja) * | 2010-05-26 | 2014-03-12 | 三菱マテリアル株式会社 | 酸化物スパッタリングターゲットおよび光記録媒体用酸化物膜 |
GB2482544A (en) * | 2010-08-06 | 2012-02-08 | Advanced Tech Materials | Making high density indium tin oxide sputtering targets |
WO2012153507A1 (ja) | 2011-05-10 | 2012-11-15 | 出光興産株式会社 | In2O3-SnO2-ZnO系スパッタリングターゲット |
JP5965338B2 (ja) | 2012-07-17 | 2016-08-03 | 出光興産株式会社 | スパッタリングターゲット、酸化物半導体薄膜及びそれらの製造方法 |
JP6284710B2 (ja) | 2012-10-18 | 2018-02-28 | 出光興産株式会社 | スパッタリングターゲット、酸化物半導体薄膜及びそれらの製造方法 |
JP6059513B2 (ja) | 2012-11-14 | 2017-01-11 | 出光興産株式会社 | スパッタリングターゲット、酸化物半導体薄膜及びそれらの製造方法 |
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JP3636914B2 (ja) * | 1998-02-16 | 2005-04-06 | 株式会社日鉱マテリアルズ | 高抵抗透明導電膜及び高抵抗透明導電膜の製造方法並びに高抵抗透明導電膜形成用スパッタリングターゲット |
EP2610230A2 (en) * | 1998-08-31 | 2013-07-03 | Idemitsu Kosan Co., Ltd. | Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass, and transparent electroconductive film |
JP2000195101A (ja) * | 1998-12-28 | 2000-07-14 | Japan Energy Corp | 光ディスク保護膜及び同保護膜形成用スパッタリングタ―ゲット |
JP4560149B2 (ja) * | 1999-03-05 | 2010-10-13 | 出光興産株式会社 | 透明導電材料、透明導電ガラス及び透明導電フィルム |
JP4559553B2 (ja) | 1999-03-05 | 2010-10-06 | 出光興産株式会社 | スパッタリング、エレクトロンビーム、イオンプレーティング用焼結体、透明導電ガラス及び透明導電フィルム |
ATE307376T1 (de) * | 1999-08-12 | 2005-11-15 | Nikko Materials Co Ltd | Lichtdurchlassende schicht und sputtertarget zur herstellung dieser schicht |
JP4424889B2 (ja) * | 2001-06-26 | 2010-03-03 | 三井金属鉱業株式会社 | 高抵抗透明導電膜用スパッタリングターゲット及び高抵抗透明導電膜の製造方法 |
JP4448648B2 (ja) * | 2002-08-02 | 2010-04-14 | 出光興産株式会社 | スパッタリングターゲット及び焼結体それらを利用して製造した導電膜。 |
JP2004071079A (ja) * | 2002-08-08 | 2004-03-04 | Hitachi Ltd | 情報記録媒体 |
JP4793773B2 (ja) * | 2003-03-04 | 2011-10-12 | Jx日鉱日石金属株式会社 | スパッタリングターゲットの製造方法 |
CN1756857B (zh) * | 2003-03-04 | 2010-09-29 | 日矿金属株式会社 | 溅射靶、光信息记录介质用薄膜及其制造方法 |
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- 2004-07-29 EP EP08104904A patent/EP2022871B1/en not_active Expired - Lifetime
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351528A (zh) * | 2011-09-28 | 2012-02-15 | 华南理工大学 | 硼化镧掺杂的氧化物半导体材料及其应用 |
CN102351528B (zh) * | 2011-09-28 | 2013-07-10 | 华南理工大学 | 硼化镧掺杂的氧化物半导体材料及其应用 |
CN114600190A (zh) * | 2019-11-01 | 2022-06-07 | 田中贵金属工业株式会社 | 热辅助磁记录介质用溅射靶 |
Also Published As
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EP2022871A3 (en) | 2009-02-18 |
JPWO2005078153A1 (ja) | 2007-11-22 |
WO2005078153A1 (ja) | 2005-08-25 |
EP2022871B1 (en) | 2012-08-22 |
EP1717336A1 (en) | 2006-11-02 |
EP2022871A2 (en) | 2009-02-11 |
TW200528568A (en) | 2005-09-01 |
EP2028287A1 (en) | 2009-02-25 |
EP1985725A3 (en) | 2012-03-21 |
KR100799074B1 (ko) | 2008-01-29 |
JP4376868B2 (ja) | 2009-12-02 |
EP1985725B1 (en) | 2013-04-10 |
EP1717336A4 (en) | 2008-02-27 |
EP2028287B1 (en) | 2012-08-22 |
KR20060110371A (ko) | 2006-10-24 |
CN100567558C (zh) | 2009-12-09 |
TWI309679B (en) | 2009-05-11 |
EP1717336B1 (en) | 2012-09-26 |
EP1985725A2 (en) | 2008-10-29 |
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