CN1907631B - 激光加工头 - Google Patents

激光加工头 Download PDF

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CN1907631B
CN1907631B CN2005100910652A CN200510091065A CN1907631B CN 1907631 B CN1907631 B CN 1907631B CN 2005100910652 A CN2005100910652 A CN 2005100910652A CN 200510091065 A CN200510091065 A CN 200510091065A CN 1907631 B CN1907631 B CN 1907631B
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laser
machining head
diaphragm
speculum
laser machining
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CN1907631A (zh
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梅尔廷·兰贝特
于尔根-米夏埃多·魏克
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Trumpf Werkzeugmaschinen SE and Co KG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128Laser beam path enclosures

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

本发明涉及一种激光加工头(4),尤其是激光切割头,它包括一个配置给激光加工机(1)的光束导向部分的壳体区域(17)及一个配置给激光加工部分的壳体区域(18)。设有一个用于激光束(23)的光阑(25)作为这些壳体区域(17,18)之间的分隔装置。

Description

激光加工头
技术领域
本发明涉及一种激光加工头,尤其是激光切割头,它具有一个配置给激光加工机的光束导向部分的壳体区域及一个配置给激光加工部分的壳体区域。
背景技术
在普遍公知的、现在所使用的激光加工头的切割透镜光学系统中,透镜将光束导向部分与处理气体室彼此分开。在激光切割机中,光束导向部分用纯净气体净化及由此可防止来自环境的污染颗粒(例如切割烟气)及不希望的气态污物的污染。切割过程受到处理气体(通常为氧气或氮气)在机械上及化学上的支持。在加工期间,在处理气体室中具有若干巴(bar)的压力。
自二十多年来,在CO2激光焊接装置中一直使用聚焦反射镜,它与透射的透镜相比耐污染性好得多。但由于使用反射镜,失去了加工侧与光束导向侧之间的隔离。因此,光束导向部分中的偏转镜组被更快地-例如通过来自加工的焊接烟尘-污染。
使用更耐污染的反射镜镜组在激光切割中也是值得期望的,但由于在光束导向室与处理侧之间的压力差很高而难以实现。
已经公知了,通过附加的平面窗进行密封的分隔,或在一个聚焦镜前面安装一个ZnSe窗。该窗承担用于切割气体的压力建立的任务及由此也使光束导向部分与处理气体侧分隔。在这两种情况下,使用一个透射的元件,该元件相对污染来说是敏感的。ZnSe窗由于与温度相关的折射率而具有公知的弱点。这如同透镜一样限制了它的可使用性。
发明内容
本申请人所提出的任务是,开发一种激光加工头,尤其是激光切割头,它具有光束导向部分与激光加工区域的尽可能简单的结构分离,及在激光器功率上可使用直到超过10kW的激光器功率。
该任务将通过一种激光加工头、尤其是激光切割头来解决,它具有一个配置给激光加工机的光束导向部分的壳体区域及一个配置给激光加工部分的壳体区域,在该激光切割头中设有一个用于激光束的光阑作为这些壳体区域之间的分隔装置。该光阑被用作光束导向部分相对异物、如切割气体、周围环境气氛及切割烟尘的防护及密封装置。该光阑的任务是,在很小的气体损失的情况下,使得光束导向部分中有超压(超过压力),及由此有效地保护光束导向室以免来自周围环境的入流。本发明可使用在激光切割头及激光焊接头上。
如果为了偏转激光束及产生激光束的一个中间焦点,设有第一反射镜及第二反射镜,并且光阑被设置在中间焦点中或其附近,可使光阑孔径保持很小。
为了产生中间焦点,第一反射镜是一个抛物面反射镜及第二反射镜是一个椭球面反射镜。
入射在光阑上的激光器功率可能使其加热。因此一个直接的或间接的光阑冷却是有利的。
当在光阑上设有一个压力传感器时,则可监测流出的体积流量。
有利的是,这些反射镜可被冷却。
为了避免由于光阑与切割喷嘴之间的结构空间中的相应的超压使气体流从激光加工区进入光束导向部分,本发明提出,在一个环形缝隙式喷嘴与光阑之间设置一个卸载开口。这使得来自处理部分(例如冲孔喷溅器(Einstechspritzer))的颗粒不能到达光束导向部分中。在用氧气作为切割气体的情况下,由此可防止它集中在光束导向部分的气氛中。
附图说明
在附图中概要地表示出本发明的实施例及在下面参照附图对其进行详细说明。这些附图详尽地表示:
图1:一个激光加工机的侧视图;
图2:该激光加工机的俯视图;
图3:一个激光加工头的透视图;
图4:该激光加工头的纵截面图;
图5:该激光加工头的光阑的纵截面图。
具体实施方式
由图1可看到,激光加工机1包括一个激光发生器2及一个可相对该激光发生器在双箭头3的方向上运动的激光加工头4。一个由激光发生器2产生的激光束5从激光发生器2出发通过用一种纯净气体净化的光束导向室6被引导到加工头4,并且,激光束在该加工头上被转向到一个板材形式的待加工工件7上,该工件被放置在激光加工机1的工件支座8上。
光束导向室6中被充有纯净气体,例如氮气。光束导向室6由一个波纹管10或其它的气体密封的密封件(也可为管子,伸缩管等)来限定。波纹管10构成气体室壁及由彼此相继排列的柔性折褶11组成。
根据图2,激光加工头4是双轴的,即可在双箭头3的方向上及在与此垂直的一个双箭头12的方向上移动。激光束5由激光发生器出发通过第一光束偏转装置13及第二光束偏转装置14被导向加工头4及在那里被向着工件7偏转。
图3中示出了激光加工头4的壳体15。该壳体15可联接在激光加工机1上及也具有必要的接头。
激光束5在壳体15内偏转及聚焦,使得一个聚焦的激光束16对准到工件上。借助壳体15中的反射镜聚焦及一个光阑使配置给光束导向部分的壳体区域17与配置给激光加工部分的壳体区域18分开。光束导向部分被用稍微超压的一种纯净气体净化。壳体区域17也被充有该气体,而壳体区域18不再有气体净化。
为了能将处理气体侧与光束导向气氛分开,激光束5被引导通过一个中间焦点。激光加工头4的为此所使用的部件由一个聚焦的抛物面反射镜19及一个椭球面反射镜20构成。由光束导向部分在方向21上入射的激光束5通过反射镜19被偏转到方向22上及被聚焦。反射镜20将由所述焦点发散地到来的激光束23在方向24上投影到工作焦点,以致形成可用于激光加工的被聚焦的激光束16。激光加工头4的该基本原理可由图4中看出。在两个光学器件19及20之间的中间焦点28中设有一个光阑25,激光束23穿过该光阑。光阑25的直径被选择得这样地大,即激光束23不触及到其边缘,及又被选择得这样地小,以使得光束导向部分的净化气体的泄漏损失小。为了监测该泄漏-例如通过压力差的求值-可在光阑25上设置一个压力传感器(这里不可看到,但可设置在壳体位置26上)。为了冷却光阑25,设有一个冷却剂接头(不可看到,但可考虑在壳体位置27上)。
反射镜20将由焦点28发散地到来的激光束23投影到工作焦点,以致形成可用于激光加工的被聚焦的激光束16。两个反射镜19及20设有冷却剂接头29或30,以便可使反射镜19及20冷却。在壳体区域17内,由于光束导向部分的净化气体而存在一个很小的超压(与壳体区域18相比)。为了能使用该激光加工头4进行激光切割,在工作焦点上用一个环形缝隙式喷嘴31来建立切割气体的压力。因为这种结构形式的喷嘴也会有回流,通过光阑25与环形缝隙式喷嘴31之间的足够大的开口32形成了排流的可能性。这些开口32被这样地定尺寸,以使得在壳体15中不能形成大于光束导向部分中的压力的静压力。否则泄漏流的方向会向光束导向部分逆转。
图5中表示本发明的基本原理在普通的激光加工头4中的实施。激光束通过第一反射镜偏转及聚焦(焦点28)。一个插入的冷却体33位于相对激光束通过方向为旋转对称地构成的光阑25的内部,该冷却体吸收激光束23的热量并且被冷却。当光束导向部分中超压例如为1.5mbar时,当光阑孔径为2.5mm的情况下通过光阑25的体积流量34为3.5l/min(升/分钟)。
参考标号表
1激光加工机      19抛物面反射镜
2激光发生器      20椭球面反射镜
3双箭头          21方向
4激光加工头      22方向
5激光束          23激光束
6光束导向室      24方向
7工件            25光阑
8工件支座        26压力传感器
10波纹管         27冷却剂接头
11折叠           28焦点
12双箭头         29冷却剂接头
13光束偏转装置   30冷却剂接头
14光束偏转装置   31环形缝隙式喷嘴
15壳体           32开口
16激光束         33冷却体
17壳体区域       34体积流量
18壳体区域

Claims (8)

1.一种激光加工头(4),它包括一个配置给激光加工机(1)的光束导向部分的壳体区域(17)及一个配置给激光加工部分的壳体区域(18),其特征在于:设有一个用于激光束(23)的光阑(25)作为这些壳体区域(17,18)之间的分隔装置,在配置给光束导向部分的壳体区域(17)中由于光束导向部分的净化气体而与配置给激光加工部分的壳体区域(18)相比存在一个很小的超压,使得有效地保护光束导向部分以免来自周围环境的入流,其中,该配置给激光加工部分的壳体区域具有一个环形缝隙式喷嘴用于在工作焦点上建立切割气体的压力,并且其中,在该环形缝隙式喷嘴和该光阑之间设置有足够大的开口用于排流回流的切割气体,所述开口被这样地定尺寸,以使得在壳体中不能形成大于光束导向部分中的压力的静压力。
2.根据权利要求1的激光加工头,其特征在于:为了偏转激光束及产生激光束(23)的一个中间焦点(28),设有第一反射镜(19)及第二反射镜(20),该光阑(25)被设置在中间焦点(28)中或其附近。
3.根据权利要求2的激光加工头,其特征在于:第一反射镜是一个抛物面反射镜(19)及第二反射镜是一个椭球面反射镜(20)。
4.根据以上权利要求中一项的激光加工头,其特征在于:该光阑(25)能够被冷却。
5.根据权利要求4的激光加工头,其特征在于:一个冷却体(33)被插入在光阑(25)中。
6.根据权利要求1至3中任一项的激光加工头,其特征在于:在光阑(25)上设有一个压力传感器。
7.根据权利要求2或3的激光加工头,其特征在于:该第一反射镜(19)和该第二反射镜(20)能够被冷却。
8.根据权利要求1的激光加工头,其特征在于:所述激光加工头是激光切割头。
CN2005100910652A 2004-08-06 2005-08-05 激光加工头 Expired - Fee Related CN1907631B (zh)

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EP1623790B1 (de) 2008-12-10
CN1907631A (zh) 2007-02-07
US7605342B2 (en) 2009-10-20
ATE416878T1 (de) 2008-12-15
JP2006043775A (ja) 2006-02-16
JP5231711B2 (ja) 2013-07-10
EP1623790A1 (de) 2006-02-08
US20060027537A1 (en) 2006-02-09

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