CN1905168A - 半导体器件及其制造方法以及在其中所使用的粘接材料及其制造方法 - Google Patents
半导体器件及其制造方法以及在其中所使用的粘接材料及其制造方法 Download PDFInfo
- Publication number
- CN1905168A CN1905168A CNA2006100773734A CN200610077373A CN1905168A CN 1905168 A CN1905168 A CN 1905168A CN A2006100773734 A CNA2006100773734 A CN A2006100773734A CN 200610077373 A CN200610077373 A CN 200610077373A CN 1905168 A CN1905168 A CN 1905168A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- particle
- adhesives
- semiconductor device
- encapsulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 184
- 238000000034 method Methods 0.000 title claims description 38
- 239000000463 material Substances 0.000 title abstract description 6
- 239000000853 adhesive Substances 0.000 claims abstract description 163
- 230000001070 adhesive effect Effects 0.000 claims abstract description 163
- 230000001133 acceleration Effects 0.000 claims abstract description 119
- 229920005989 resin Polymers 0.000 claims abstract description 42
- 239000011347 resin Substances 0.000 claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- 238000005538 encapsulation Methods 0.000 claims description 63
- 239000002245 particle Substances 0.000 claims description 53
- 229920002050 silicone resin Polymers 0.000 claims description 32
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 30
- 230000033228 biological regulation Effects 0.000 claims description 25
- 239000010949 copper Substances 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 15
- 239000004411 aluminium Substances 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 14
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 14
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- 229910003437 indium oxide Inorganic materials 0.000 claims description 14
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052759 nickel Inorganic materials 0.000 claims description 14
- 229910052709 silver Inorganic materials 0.000 claims description 14
- 239000004332 silver Substances 0.000 claims description 14
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 14
- 229910001887 tin oxide Inorganic materials 0.000 claims description 14
- 239000012798 spherical particle Substances 0.000 claims description 13
- -1 silicon ketone Chemical class 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims 9
- 230000000996 additive effect Effects 0.000 claims 9
- 238000002360 preparation method Methods 0.000 claims 6
- 238000003756 stirring Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000002923 metal particle Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 23
- 239000002184 metal Substances 0.000 description 23
- 239000003822 epoxy resin Substances 0.000 description 12
- 229920000647 polyepoxide Polymers 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000005755 formation reaction Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000004080 punching Methods 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- 244000287680 Garcinia dulcis Species 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/06—Containers; Seals characterised by the material of the container or its electrical properties
- H01L23/08—Containers; Seals characterised by the material of the container or its electrical properties the material being an electrical insulator, e.g. glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pressure Sensors (AREA)
- Die Bonding (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005217830A JP2007035965A (ja) | 2005-07-27 | 2005-07-27 | 半導体装置およびその製造方法、ならびにそれに使用される接着材料およびその製造方法 |
JP2005217830 | 2005-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1905168A true CN1905168A (zh) | 2007-01-31 |
CN100555607C CN100555607C (zh) | 2009-10-28 |
Family
ID=37674380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100773734A Expired - Fee Related CN100555607C (zh) | 2005-07-27 | 2006-04-29 | 半导体器件及其制造方法以及在其中所使用的粘接材料及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7554168B2 (zh) |
JP (1) | JP2007035965A (zh) |
KR (1) | KR20070014003A (zh) |
CN (1) | CN100555607C (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104009725A (zh) * | 2013-02-22 | 2014-08-27 | 精工爱普生株式会社 | 电子装置、封装件、电子设备以及移动体 |
CN110023444A (zh) * | 2017-11-07 | 2019-07-16 | 古河电气工业株式会社 | 膜状粘接剂、使用了膜状粘接剂的半导体封装体的制造方法 |
CN110031136A (zh) * | 2019-03-14 | 2019-07-19 | 北京协同创新研究院 | 一种传感器及其制备方法 |
CN111735982A (zh) * | 2020-06-30 | 2020-10-02 | 上海矽睿科技有限公司 | 一种加速度计封装的方法 |
CN111739843A (zh) * | 2020-06-30 | 2020-10-02 | 上海矽睿科技有限公司 | 一种惯性测量仪封装结构 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005015454B4 (de) * | 2005-04-04 | 2010-02-18 | Infineon Technologies Ag | Halbleitersensorbauteil mit Hohlraumgehäuse und Sensorchip sowie Verfahren zur Herstellung desselben |
JP5118923B2 (ja) * | 2007-09-11 | 2013-01-16 | ローム株式会社 | 半導体装置 |
US20110067910A1 (en) * | 2009-09-18 | 2011-03-24 | International Business Machines Corporation | Component securing system and associated method |
JP5663906B2 (ja) * | 2010-03-09 | 2015-02-04 | 株式会社デンソー | 半導体装置 |
JP5742323B2 (ja) * | 2011-03-14 | 2015-07-01 | オムロン株式会社 | センサパッケージ |
JP5927434B2 (ja) | 2011-09-30 | 2016-06-01 | パナソニックIpマネジメント株式会社 | 慣性力センサ |
WO2014118833A1 (ja) * | 2013-01-30 | 2014-08-07 | パナソニック株式会社 | 積層型半導体装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2974700B2 (ja) * | 1989-11-30 | 1999-11-10 | 東レ・ダウコーニング・シリコーン株式会社 | 導電性接着剤 |
JP2874483B2 (ja) * | 1992-10-05 | 1999-03-24 | 松下電器産業株式会社 | 半導体装置 |
JPH06160423A (ja) * | 1992-11-20 | 1994-06-07 | Hitachi Ltd | 容量式加速度検出器 |
JP2974552B2 (ja) * | 1993-06-14 | 1999-11-10 | 株式会社東芝 | 半導体装置 |
JPH09316166A (ja) | 1996-05-31 | 1997-12-09 | Sumitomo Bakelite Co Ltd | 半導体素子接着用樹脂ペースト及び半導体装置 |
US5700581A (en) * | 1996-06-26 | 1997-12-23 | International Business Machines Corporation | Solvent-free epoxy based adhesives for semiconductor chip attachment and process |
JPH10253652A (ja) * | 1997-03-14 | 1998-09-25 | Denso Corp | センサ装置及びその製造方法並びにその製造に用いられるリードフレーム |
JP2003021647A (ja) * | 2001-07-06 | 2003-01-24 | Denso Corp | 電子装置 |
JP3928713B2 (ja) * | 2002-08-13 | 2007-06-13 | 信越化学工業株式会社 | 半導体装置の製造方法 |
JP4089961B2 (ja) * | 2003-01-06 | 2008-05-28 | 日立金属株式会社 | 加速度センサ |
JP2005049130A (ja) * | 2003-07-30 | 2005-02-24 | Oki Electric Ind Co Ltd | 加速度センサ及び加速度センサの製造方法 |
JP2005054157A (ja) * | 2003-08-07 | 2005-03-03 | Seiko Epson Corp | 導電性接着剤及びそれを用いて圧電素子を実装した圧電デバイス |
US20060094809A1 (en) * | 2004-11-02 | 2006-05-04 | Simone Davide L | Electrically and thermally conductive silicone adhesive compositions |
-
2005
- 2005-07-27 JP JP2005217830A patent/JP2007035965A/ja active Pending
-
2006
- 2006-04-29 CN CNB2006100773734A patent/CN100555607C/zh not_active Expired - Fee Related
- 2006-04-29 KR KR1020060039106A patent/KR20070014003A/ko not_active Application Discontinuation
- 2006-06-22 US US11/425,707 patent/US7554168B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104009725A (zh) * | 2013-02-22 | 2014-08-27 | 精工爱普生株式会社 | 电子装置、封装件、电子设备以及移动体 |
CN104009725B (zh) * | 2013-02-22 | 2018-04-24 | 精工爱普生株式会社 | 电子装置、封装件、电子设备以及移动体 |
CN110023444A (zh) * | 2017-11-07 | 2019-07-16 | 古河电气工业株式会社 | 膜状粘接剂、使用了膜状粘接剂的半导体封装体的制造方法 |
CN110023444B (zh) * | 2017-11-07 | 2021-07-06 | 古河电气工业株式会社 | 膜状粘接剂、使用了膜状粘接剂的半导体封装体的制造方法 |
US11139261B2 (en) | 2017-11-07 | 2021-10-05 | Furukawa Electric Co., Ltd. | Film-like adhesive and method for producing semiconductor package using film-like adhesive |
CN110031136A (zh) * | 2019-03-14 | 2019-07-19 | 北京协同创新研究院 | 一种传感器及其制备方法 |
CN111735982A (zh) * | 2020-06-30 | 2020-10-02 | 上海矽睿科技有限公司 | 一种加速度计封装的方法 |
CN111739843A (zh) * | 2020-06-30 | 2020-10-02 | 上海矽睿科技有限公司 | 一种惯性测量仪封装结构 |
Also Published As
Publication number | Publication date |
---|---|
KR20070014003A (ko) | 2007-01-31 |
US20070045787A1 (en) | 2007-03-01 |
JP2007035965A (ja) | 2007-02-08 |
US7554168B2 (en) | 2009-06-30 |
CN100555607C (zh) | 2009-10-28 |
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