CN1894526A - 故障保险气动致动阀 - Google Patents

故障保险气动致动阀 Download PDF

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Publication number
CN1894526A
CN1894526A CNA2004800377089A CN200480037708A CN1894526A CN 1894526 A CN1894526 A CN 1894526A CN A2004800377089 A CNA2004800377089 A CN A2004800377089A CN 200480037708 A CN200480037708 A CN 200480037708A CN 1894526 A CN1894526 A CN 1894526A
Authority
CN
China
Prior art keywords
valve
fluids
fluid
control valve
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004800377089A
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English (en)
Chinese (zh)
Inventor
奥弗·斯内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sondervo Tech Co
Original Assignee
Sondervo Tech Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sondervo Tech Co filed Critical Sondervo Tech Co
Publication of CN1894526A publication Critical patent/CN1894526A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/003—Actuating devices; Operating means; Releasing devices operated without a stable intermediate position, e.g. with snap action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87193—Pilot-actuated
    • Y10T137/87209—Electric

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
  • Emergency Lowering Means (AREA)
  • Earth Drilling (AREA)
CNA2004800377089A 2003-10-17 2004-10-18 故障保险气动致动阀 Pending CN1894526A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US51223603P 2003-10-17 2003-10-17
US60/512,236 2003-10-17

Publications (1)

Publication Number Publication Date
CN1894526A true CN1894526A (zh) 2007-01-10

Family

ID=34465331

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004800377089A Pending CN1894526A (zh) 2003-10-17 2004-10-18 故障保险气动致动阀

Country Status (8)

Country Link
US (2) US7744060B2 (https=)
EP (1) EP1676067B1 (https=)
JP (1) JP4926711B2 (https=)
CN (1) CN1894526A (https=)
AT (1) ATE462910T1 (https=)
DE (1) DE602004026334D1 (https=)
TW (1) TWI373583B (https=)
WO (1) WO2005038320A2 (https=)

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CN101776158B (zh) * 2009-01-14 2012-08-22 艾欧史密斯（上海）水处理产品有限公司 一种四面阀
WO2015161741A1 (zh) * 2014-04-24 2015-10-29 张未鸣 一种分导活塞式阀门
TWI567318B (zh) * 2015-03-24 2017-01-21 洪斐喆 流體控制閥的開關時間檢測方法
CN107636374A (zh) * 2015-05-07 2018-01-26 应用材料公司 腔室部件的腐蚀控制
CN108351640A (zh) * 2015-09-11 2018-07-31 阿尔法拉瓦尔股份有限公司 阀门监视
CN109196325A (zh) * 2016-03-18 2019-01-11 罗托克英国有限责任公司 逸散性排放物检测
CN109844649A (zh) * 2016-10-20 2019-06-04 Asml荷兰有限公司 压力控制阀、用于光刻设备的流体处理结构和光刻设备
CN110594428A (zh) * 2019-09-06 2019-12-20 中国航空工业集团公司沈阳飞机设计研究所 一种安全联锁操纵装置及具有其的气密舱门
CN112041600A (zh) * 2018-03-30 2020-12-04 卡莫齐自动化股份公司 压力调节器
CN114688275A (zh) * 2020-12-28 2022-07-01 株式会社不二工机 电动阀
CN115614526A (zh) * 2022-09-02 2023-01-17 国能浙江舟山发电有限责任公司 执行机构控制方法、装置、介质和电子设备
CN116816938A (zh) * 2022-03-18 2023-09-29 南京菡束环保设备有限公司 对接机构及阀装置

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JP3990567B2 (ja) * 2001-12-18 2007-10-17 大日本スクリーン製造株式会社 ダイヤフラムバルブ、基板処理ユニットおよび基板処理装置
JP3867995B2 (ja) * 2002-02-25 2007-01-17 シーケーディ株式会社 薬液制御弁
JP2004019792A (ja) * 2002-06-17 2004-01-22 Advance Denki Kogyo Kk ダイヤフラム弁の透過ガス排出構造
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JP2007509291A (ja) 2007-04-12
EP1676067B1 (en) 2010-03-31
TWI373583B (en) 2012-10-01
JP4926711B2 (ja) 2012-05-09
ATE462910T1 (de) 2010-04-15
US20070187634A1 (en) 2007-08-16
US20100224804A1 (en) 2010-09-09
WO2005038320A3 (en) 2005-07-07
TW200517613A (en) 2005-06-01
US7744060B2 (en) 2010-06-29
WO2005038320A2 (en) 2005-04-28
EP1676067A2 (en) 2006-07-05
DE602004026334D1 (de) 2010-05-12

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