CN1828914A - 薄膜晶体管阵列面板及其制造方法 - Google Patents
薄膜晶体管阵列面板及其制造方法 Download PDFInfo
- Publication number
- CN1828914A CN1828914A CNA2006100577531A CN200610057753A CN1828914A CN 1828914 A CN1828914 A CN 1828914A CN A2006100577531 A CNA2006100577531 A CN A2006100577531A CN 200610057753 A CN200610057753 A CN 200610057753A CN 1828914 A CN1828914 A CN 1828914A
- Authority
- CN
- China
- Prior art keywords
- electrode
- film transistor
- thin
- pixel electrode
- display panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000003860 storage Methods 0.000 claims abstract description 97
- 238000002161 passivation Methods 0.000 claims description 94
- 239000004065 semiconductor Substances 0.000 claims description 49
- 239000004020 conductor Substances 0.000 claims description 40
- 239000010408 film Substances 0.000 claims description 36
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 30
- 239000012212 insulator Substances 0.000 claims description 30
- 229920002120 photoresistant polymer Polymers 0.000 claims description 25
- 230000008878 coupling Effects 0.000 claims description 23
- 238000010168 coupling process Methods 0.000 claims description 23
- 238000005859 coupling reaction Methods 0.000 claims description 23
- 230000004888 barrier function Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 14
- 239000011368 organic material Substances 0.000 claims description 9
- 238000001259 photo etching Methods 0.000 claims description 9
- 229910010272 inorganic material Inorganic materials 0.000 claims description 7
- 239000011147 inorganic material Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 59
- 239000003990 capacitor Substances 0.000 description 46
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 230000005684 electric field Effects 0.000 description 14
- 239000012528 membrane Substances 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 229910052750 molybdenum Inorganic materials 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 229910001182 Mo alloy Inorganic materials 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 206010047571 Visual impairment Diseases 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910001362 Ta alloys Inorganic materials 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910000667 (NH4)2Ce(NO3)6 Inorganic materials 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910000583 Nd alloy Inorganic materials 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000013039 cover film Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G7/00—Pivoted suspension arms; Accessories thereof
- B60G7/04—Buffer means for limiting movement of arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2204/00—Indexing codes related to suspensions per se or to auxiliary parts
- B60G2204/40—Auxiliary suspension parts; Adjustment of suspensions
- B60G2204/41—Elastic mounts, e.g. bushings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60G—VEHICLE SUSPENSION ARRANGEMENTS
- B60G2800/00—Indexing codes relating to the type of movement or to the condition of the vehicle and to the end result to be achieved by the control action
- B60G2800/22—Braking, stopping
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F1/00—Springs
- F16F1/36—Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers
- F16F1/38—Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers with a sleeve of elastic material between a rigid outer sleeve and a rigid inner sleeve or pin, i.e. bushing-type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (28)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050015914A KR101251993B1 (ko) | 2005-02-25 | 2005-02-25 | 박막 트랜지스터 표시판 |
KR10-2005-0015914 | 2005-02-25 | ||
KR1020050015914 | 2005-02-25 | ||
KR10-2005-0034964 | 2005-04-27 | ||
KR1020050034964 | 2005-04-27 | ||
KR1020050034964A KR101143000B1 (ko) | 2005-04-27 | 2005-04-27 | 박막 트랜지스터 표시판 및 그 제조 방법 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010210445.4A Division CN101881914B (zh) | 2005-02-25 | 2006-02-27 | 薄膜晶体管阵列面板 |
CN2012104347604A Division CN103034004A (zh) | 2005-02-25 | 2006-02-27 | 薄膜晶体管阵列面板 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1828914A true CN1828914A (zh) | 2006-09-06 |
CN1828914B CN1828914B (zh) | 2010-07-14 |
Family
ID=36947160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006100577531A Active CN1828914B (zh) | 2005-02-25 | 2006-02-27 | 薄膜晶体管阵列面板及其制造方法 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101251993B1 (zh) |
CN (1) | CN1828914B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102593050A (zh) * | 2012-03-09 | 2012-07-18 | 深超光电(深圳)有限公司 | 一种液晶显示面板阵列基板的制作方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101909139B1 (ko) * | 2011-02-07 | 2018-12-19 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
KR102471130B1 (ko) * | 2016-02-17 | 2022-11-29 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10325961A (ja) * | 1994-03-17 | 1998-12-08 | Hitachi Ltd | アクティブマトリクス型液晶表示装置 |
JP3980156B2 (ja) * | 1998-02-26 | 2007-09-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型表示装置 |
JP4700156B2 (ja) * | 1999-09-27 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US7242021B2 (en) * | 2002-04-23 | 2007-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display element using semiconductor device |
KR100960457B1 (ko) * | 2003-04-28 | 2010-05-28 | 엘지디스플레이 주식회사 | 메탈 쉴드 라인을 포함하는 액정표시소자와 그 제조방법 |
KR20040105934A (ko) * | 2003-06-10 | 2004-12-17 | 삼성전자주식회사 | 다중 도메인 액정 표시 장치 및 그에 사용되는 표시판 |
KR20050001707A (ko) * | 2003-06-26 | 2005-01-07 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 |
KR100961948B1 (ko) * | 2003-07-15 | 2010-06-08 | 삼성전자주식회사 | 박막 트랜지스터 표시판, 그 제조 방법 및 이를 포함하는액정 표시 장치 |
KR100981632B1 (ko) * | 2003-08-11 | 2010-09-10 | 삼성전자주식회사 | 어레이 기판, 이의 제조방법 및 이를 갖는 액정 표시 장치 |
-
2005
- 2005-02-25 KR KR1020050015914A patent/KR101251993B1/ko active IP Right Grant
-
2006
- 2006-02-27 CN CN2006100577531A patent/CN1828914B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102593050A (zh) * | 2012-03-09 | 2012-07-18 | 深超光电(深圳)有限公司 | 一种液晶显示面板阵列基板的制作方法 |
CN102593050B (zh) * | 2012-03-09 | 2014-08-20 | 深超光电(深圳)有限公司 | 一种液晶显示面板阵列基板的制作方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20060095043A (ko) | 2006-08-30 |
CN1828914B (zh) | 2010-07-14 |
KR101251993B1 (ko) | 2013-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
CI02 | Correction of invention patent application |
Correction item: Priority Correct: 2005.04.27 KR 10-2005-0034964 False: Lack of priority second Number: 36 Page: The title page Volume: 22 |
|
COR | Change of bibliographic data |
Free format text: CORRECT: PRIORITY; FROM: MISSING THE SECOND ARTICLE OF PRIORITY TO: 2005.4.27 KR 10-2005-0034964 |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD. Effective date: 20121220 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121220 Address after: Gyeonggi Do, South Korea Patentee after: SAMSUNG DISPLAY Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Electronics Co.,Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20220804 Address after: 9-2, Guangdong Province, Shenzhen Guangming Tang Ming Road Patentee after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: SAMSUNG DISPLAY Co.,Ltd. |
|
TR01 | Transfer of patent right |