CN1655375A - 含硅共聚物电阻型薄膜湿敏元件及其制作方法 - Google Patents
含硅共聚物电阻型薄膜湿敏元件及其制作方法 Download PDFInfo
- Publication number
- CN1655375A CN1655375A CN200510048930.5A CN200510048930A CN1655375A CN 1655375 A CN1655375 A CN 1655375A CN 200510048930 A CN200510048930 A CN 200510048930A CN 1655375 A CN1655375 A CN 1655375A
- Authority
- CN
- China
- Prior art keywords
- humidity
- interdigital
- sensitive
- gold electrode
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920001577 copolymer Polymers 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 38
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000010931 gold Substances 0.000 claims abstract description 35
- 229910052737 gold Inorganic materials 0.000 claims abstract description 35
- 239000010408 film Substances 0.000 claims abstract description 32
- 239000007788 liquid Substances 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 239000011159 matrix material Substances 0.000 claims description 16
- 125000002091 cationic group Chemical group 0.000 claims description 9
- 150000001412 amines Chemical group 0.000 claims description 8
- 229920000867 polyelectrolyte Polymers 0.000 claims description 8
- 125000005401 siloxanyl group Chemical group 0.000 claims description 7
- 230000032683 aging Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000007334 copolymerization reaction Methods 0.000 claims description 2
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 239000013081 microcrystal Substances 0.000 abstract 4
- 238000007598 dipping method Methods 0.000 abstract 2
- 239000003792 electrolyte Substances 0.000 abstract 1
- -1 siloxanes Chemical class 0.000 description 7
- 239000000178 monomer Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000007791 dehumidification Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000003618 dip coating Methods 0.000 description 4
- 238000012958 reprocessing Methods 0.000 description 4
- 239000003643 water by type Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000001953 sensory effect Effects 0.000 description 2
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 125000005373 siloxane group Chemical group [SiH2](O*)* 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100489305A CN100385703C (zh) | 2005-01-18 | 2005-01-18 | 含硅共聚物电阻型薄膜湿敏元件及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100489305A CN100385703C (zh) | 2005-01-18 | 2005-01-18 | 含硅共聚物电阻型薄膜湿敏元件及其制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1655375A true CN1655375A (zh) | 2005-08-17 |
CN100385703C CN100385703C (zh) | 2008-04-30 |
Family
ID=34894491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100489305A Expired - Fee Related CN100385703C (zh) | 2005-01-18 | 2005-01-18 | 含硅共聚物电阻型薄膜湿敏元件及其制作方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100385703C (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100439910C (zh) * | 2006-09-29 | 2008-12-03 | 浙江大学 | 高耐水特性的高分子电阻型薄膜湿敏元件及其制作方法 |
CN102304199A (zh) * | 2011-05-25 | 2012-01-04 | 广州海谷电子科技有限公司 | 耐湿热湿敏树脂与耐湿热高分子电阻型湿敏膜及其制备方法 |
CN101692329B (zh) * | 2009-09-10 | 2012-07-11 | 福建华映显示科技有限公司 | 显示器与显示器搭载结构的阻抗值检测方法 |
CN106896141A (zh) * | 2017-03-22 | 2017-06-27 | 吉林大学 | 一种基于可溶液加工聚合物修饰二氧化硅粒子的阻抗型湿敏元件及其制备方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61147142A (ja) * | 1984-12-20 | 1986-07-04 | Mitsubishi Electric Corp | 感湿材料 |
TW507073B (en) * | 2000-03-31 | 2002-10-21 | Tdk Corp | Humidity sensor and method for making |
CN1215578C (zh) * | 2002-12-19 | 2005-08-17 | 李扬 | 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 |
CN2788362Y (zh) * | 2005-01-18 | 2006-06-14 | 黄德欢 | 含硅共聚物电阻型薄膜湿敏元件 |
-
2005
- 2005-01-18 CN CNB2005100489305A patent/CN100385703C/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100439910C (zh) * | 2006-09-29 | 2008-12-03 | 浙江大学 | 高耐水特性的高分子电阻型薄膜湿敏元件及其制作方法 |
CN101692329B (zh) * | 2009-09-10 | 2012-07-11 | 福建华映显示科技有限公司 | 显示器与显示器搭载结构的阻抗值检测方法 |
CN102304199A (zh) * | 2011-05-25 | 2012-01-04 | 广州海谷电子科技有限公司 | 耐湿热湿敏树脂与耐湿热高分子电阻型湿敏膜及其制备方法 |
CN102304199B (zh) * | 2011-05-25 | 2014-06-18 | 广州海谷电子科技有限公司 | 耐湿热湿敏树脂与耐湿热高分子电阻型湿敏膜及其制备方法 |
CN106896141A (zh) * | 2017-03-22 | 2017-06-27 | 吉林大学 | 一种基于可溶液加工聚合物修饰二氧化硅粒子的阻抗型湿敏元件及其制备方法 |
CN106896141B (zh) * | 2017-03-22 | 2019-05-28 | 吉林大学 | 一种基于聚合物修饰二氧化硅粒子的湿敏元件及制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN100385703C (zh) | 2008-04-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Harsányi | Polymer films in sensor applications | |
JP3588146B2 (ja) | イオン選択性センサおよびその形成方法 | |
CN1845327A (zh) | 基于聚合物材料的单片集成温度、湿度、压力传感器芯片 | |
CN109374711B (zh) | 一种基于MXene纳米片修饰的全固态离子选择性电极及其制备方法 | |
CN101324539B (zh) | 具有纳米纤维结构的高分子复合电阻型湿敏元件及其制作方法 | |
CN102507660B (zh) | 一种基于氧化铝纳米线薄膜的湿敏传感器及其制备方法 | |
CN1655375A (zh) | 含硅共聚物电阻型薄膜湿敏元件及其制作方法 | |
CN1932498A (zh) | 高耐水特性的高分子电阻型薄膜湿敏元件及其制作方法 | |
CN108414583A (zh) | 湿度传感器及基于氧化石墨烯湿度传感器的改良和制备 | |
CN2788362Y (zh) | 含硅共聚物电阻型薄膜湿敏元件 | |
CN102297895A (zh) | 纳米聚苯胺复合声表面波型湿度传感器及其制作方法 | |
CN1217157C (zh) | 集成温湿度大气压力传感器芯片 | |
CN1215578C (zh) | 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 | |
CN201016949Y (zh) | 高耐水特性的高分子电阻型薄膜湿敏元件 | |
Tahir et al. | Interdigital MnO2/PEDOT Alternating Stacked Microelectrodes for High‐Performance On‐Chip Microsupercapacitor and Humidity Sensing | |
CN101059466A (zh) | 高分子电阻型湿度传感器元件及其制造方法 | |
US20070039385A1 (en) | Resistive thin film humidity sensitive device based on silicone-containing copolymer and its preparation method | |
CN2606353Y (zh) | 有机高分子-无机纳米复合电阻型薄膜湿敏元件 | |
CN2779396Y (zh) | 具有互穿网络结构的高分子电阻型薄膜湿敏元件 | |
CN1300575C (zh) | 具有互穿网络结构的高分子电阻型薄膜湿敏元件及其制作方法 | |
CN100485376C (zh) | 聚合物接枝碳黑复合电阻型薄膜气敏元件及其制作方法 | |
Saruwatari et al. | Humidity-Sensitive Electrical Conductivity of a Langmuir− Blodgett Film of Titania Nanosheets: Surface Modification as Induced by Light Irradiation under Humid Conditions | |
CN2543063Y (zh) | 复合高分子电阻型薄膜湿敏元件 | |
Lee et al. | Humidity-sensitive properties of self-assembled polyelectrolyte system | |
CN110132932B (zh) | 自供能呼气传感器及其制备方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUASHI NANO MATERIALS CO., LTD. Free format text: FORMER OWNER: HUANG DEHUAN Effective date: 20080822 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20080822 Address after: A building, Xin Mei Industrial Park, No. 260 Lian Cao Road, Shanghai, Minhang District Patentee after: Shanghai Huashi Nano Material Co., Ltd. Address before: Room 13, No. 288, Lane 301, Macao Road, Shanghai, Putuo District Patentee before: Huang Dehuan |
|
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |