CN1215578C - 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 - Google Patents
有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 Download PDFInfo
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- CN1215578C CN1215578C CN 02158209 CN02158209A CN1215578C CN 1215578 C CN1215578 C CN 1215578C CN 02158209 CN02158209 CN 02158209 CN 02158209 A CN02158209 A CN 02158209A CN 1215578 C CN1215578 C CN 1215578C
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- Prior art keywords
- humidity
- inorganic nano
- thin film
- sensitive element
- type thin
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- 239000010409 thin film Substances 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000002114 nanocomposite Substances 0.000 title abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000010931 gold Substances 0.000 claims abstract description 21
- 229910052737 gold Inorganic materials 0.000 claims abstract description 21
- 239000010408 film Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 14
- 229920000867 polyelectrolyte Polymers 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000002360 preparation method Methods 0.000 claims description 10
- 238000004132 cross linking Methods 0.000 claims description 8
- 229920000620 organic polymer Polymers 0.000 claims description 8
- 239000000084 colloidal system Substances 0.000 claims description 7
- 239000002105 nanoparticle Substances 0.000 claims description 6
- 239000000243 solution Substances 0.000 claims description 6
- 238000003618 dip coating Methods 0.000 claims description 4
- 230000002378 acidificating effect Effects 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 230000005494 condensation Effects 0.000 abstract 1
- 238000009833 condensation Methods 0.000 abstract 1
- 238000007654 immersion Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- -1 cationic quaternary ammonium salt Chemical class 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 229920000592 inorganic polymer Polymers 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02158209 CN1215578C (zh) | 2002-12-19 | 2002-12-19 | 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02158209 CN1215578C (zh) | 2002-12-19 | 2002-12-19 | 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1459876A CN1459876A (zh) | 2003-12-03 |
CN1215578C true CN1215578C (zh) | 2005-08-17 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 02158209 Expired - Fee Related CN1215578C (zh) | 2002-12-19 | 2002-12-19 | 有机高分子-无机纳米复合电阻型薄膜湿敏元件制作方法 |
Country Status (1)
Country | Link |
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CN (1) | CN1215578C (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1300575C (zh) * | 2004-12-29 | 2007-02-14 | 浙江大学 | 具有互穿网络结构的高分子电阻型薄膜湿敏元件及其制作方法 |
CN100385703C (zh) * | 2005-01-18 | 2008-04-30 | 黄德欢 | 含硅共聚物电阻型薄膜湿敏元件及其制作方法 |
CN101324539B (zh) * | 2008-07-22 | 2011-10-26 | 浙江大学 | 具有纳米纤维结构的高分子复合电阻型湿敏元件及其制作方法 |
CN102323300A (zh) * | 2011-07-18 | 2012-01-18 | 浙江大学 | 一种聚电解质和石墨烯复合电阻型湿敏元件及其制作方法 |
CN104914138A (zh) * | 2015-07-03 | 2015-09-16 | 深圳市共进电子股份有限公司 | 湿度传感器、湿度传感器阵列及其制备方法 |
CN105502583A (zh) * | 2016-01-29 | 2016-04-20 | 蔡权 | 一种高可靠性的污水过滤系统 |
CN106404038A (zh) * | 2016-08-31 | 2017-02-15 | 成都市和平科技有限责任公司 | 一种湿度传感器 |
CN113138210B (zh) * | 2021-06-22 | 2021-09-24 | 电子科技大学 | 一种智能气体传感器的自适应局部高斯温湿度补偿方法 |
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2002
- 2002-12-19 CN CN 02158209 patent/CN1215578C/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN1459876A (zh) | 2003-12-03 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUASHI NANO MATERIALS CO., LTD. Free format text: FORMER OWNER: LI YANG; HUANG DEHUAN; YANG MUJIE Effective date: 20070105 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20070105 Address after: 201108, A building, Xin Mei Industrial Zone, No. 260, Cao Cao Road, Shanghai, Minhang District Patentee after: Shanghai Huashi Nano Material Co., Ltd. Address before: 310027 Department of polymer, Yuquan campus, Zhejiang University, Hangzhou, Xihu District, Zhejiang Co-patentee before: Huang Dehuan Patentee before: Li Yang Co-patentee before: Yang Mujie |
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C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |