CN1654215A - 一种带有喷嘴组件阵列的喷墨打印头 - Google Patents
一种带有喷嘴组件阵列的喷墨打印头 Download PDFInfo
- Publication number
- CN1654215A CN1654215A CN200510053654.1A CN200510053654A CN1654215A CN 1654215 A CN1654215 A CN 1654215A CN 200510053654 A CN200510053654 A CN 200510053654A CN 1654215 A CN1654215 A CN 1654215A
- Authority
- CN
- China
- Prior art keywords
- nozzle
- ink
- pct
- controller
- nozzle assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007639 printing Methods 0.000 title abstract description 3
- 238000007641 inkjet printing Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract 10
- 239000012530 fluid Substances 0.000 claims abstract 4
- 239000000463 material Substances 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims 4
- 239000007924 injection Substances 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000005485 electric heating Methods 0.000 claims 1
- 238000007665 sagging Methods 0.000 claims 1
- 230000000712 assembly Effects 0.000 abstract description 7
- 238000000429 assembly Methods 0.000 abstract description 7
- 239000000976 ink Substances 0.000 description 46
- 238000011161 development Methods 0.000 description 14
- 239000004642 Polyimide Substances 0.000 description 12
- 229920001721 polyimide Polymers 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 238000001020 plasma etching Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 230000005499 meniscus Effects 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 241001573881 Corolla Species 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910020968 MoSi2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- -1 titanium nitrides Chemical class 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14435—Moving nozzle made of thermal bend detached actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
- B41J2002/14443—Nozzle guard
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
Abstract
一种喷墨打印头,其包括:一个带有驱动电路并确定多个墨水入口通道的晶片衬底。至少一对喷嘴组件排位于所述晶片衬底上。每个喷嘴组件包括一个墨水喷射喷嘴,该墨水喷射喷嘴确定一个与一墨水通道流体连通的喷嘴腔以及一个与所述喷嘴腔流体连通的喷嘴开口。一个长条形的控制器连接至所述驱动电路,并且可以运转以在收到来自所述驱动电路的电信号时移位所述喷嘴而从所述喷嘴开口喷墨。所述喷嘴组件被定向为使得所述喷嘴组件排中的一排的墨水喷射喷嘴邻近另一排喷嘴组件的墨水喷射喷嘴,同时各排的控制器在大体相反的方向延伸。
Description
技术领域
本发明与一种喷墨打印头有关,特别是关于一种喷墨打印头的喷嘴阵列。
共同待决的专利申请
与本发明有关的各种方法、系统和装置在下列同类专利申请中揭示。这些专利申请是由本发明的专利申请人或受让人与本发明同时申请的:PCT/AU00/00518,PCT/AU00/00519,PCT/AU00/00520,PCT/AU00/00521,PCT/AU00/00522,PCT/AU00/00523,PCT/AU00/00524,PCT/AU00/00525,PCT/AU00/00526,PCT/AU00/00527,PCT/AU00/00528,PCT/AU00/00529,PCT/AU00/00530,PCT/AU00/00531,PCT/AU00/00532,PCT/AU00/00533,PCT/AU00/00534,PCT/AU00/00535,PCT/AU00/00536,PCT/AU00/00537,PCT/AU00/00538,PCT/AU00/00539,PCT/AU00/00540,PCT/AU00/00541,PCT/AU00/00542,PCT/AU00/00543,PCT/AU00/00544,PCT/AU00/00545,PCT/AU00/00547,PCT/AU00/00546,PCT/AU00/00554,PCT/AU00/00556,PCT/AU00/00557,PCT/AU00/00558,PCT/AU00/00559,PCT/AU00/00560,PCT/AU00/00561,PCT/AU00/00562,PCT/AU00/00563,PCT/AU00/00564,PCT/AU00/00565,PCT/AU00/00566,PCT/AU00/00567,PCT/AU00/00568,PCT/AU00/00569,PCT/AU00/00570,PCT/AU00/00571,PCT/AU00/00572,PCT/AU00/00573,PCT/AU00/00574,PCT/AU00/00575,PCT/AU00/00576,PCT/AU00/00577,PCT/AU00/00578,PCT/AU00/00579,PCT/AU00/00581,PCT/AU00/00580,PCT/AU00/00582,PCT/AU00/00587,PCT/AU00/00588,PCT/AU00/00589,PCT/AU00/00583,PCT/AU00/00593,PCT/AU00/00590,PCT/AU00/00591,PCT/AU00/00592,PCT/AU00/00584,PCT/AU00/00585,PCT/AU00/00586,PCT/AU00/00594,PCT/AU00/00595,PCT/AU00/00596,PCT/AU00/00597,PCT/AU00/00598,PCT/AU00/00516,PCT/AU00/00517,PCT/AU00/00511,PCT/AU00/00501,PCT/AU00/00502,PCT/AU00/00503,PCT/AU00/00504,PCT/AU00/00505,PCT/AU00/00506,PCT/AU00/00507,PCT/AU00/00508,PCT/AU00/00509,PCT/AU00/00510,PCT/AU00/00512,PCT/AU00/00513,PCT/AU00/00514,PCT/AU00/00515
将这些共同待决的专利申请所揭示内容引入作为交叉参考。
背景技术
在喷墨打印头中,喷嘴阵列中的喷嘴排列得越紧凑,打印质量越高。
而且,如果喷嘴是固定的,而采用控制器来控制墨水从喷嘴的喷出,那么墨水可以正常地喷到打印媒质上。但是,如果喷嘴是移动型的,墨水从打印头喷出时将倾斜一个小角度。在这种情况下,如果阵列中的打印头直接排列在相对的位置上,即,相互镜像对称,那么从喷嘴喷出的墨滴会相对于垂直方向有较大的偏斜,从而使打印质量降低。
发明内容
本发明的目的在于提供一种具有高喷嘴排列密度的喷嘴阵列。
本发明的另一个目的在于提供一种邻近的喷嘴能够向相同的方向移位的喷嘴阵列。
本发明提供了一种喷墨打印头的喷嘴阵列,包括多个喷嘴组件,每个喷嘴组件进一步包括一个喷墨喷嘴,一个控制器和一个连接部件,该连接部件把喷嘴与其控制器互联,喷嘴组件以多排形式排列,第一排组件的喷嘴位于第二排中相邻喷嘴组件的连接部件之间,这两排组件的控制器位于所述两排的同一侧。
在本发明中,“喷嘴”一词应理解为带有一个开口的元件,而不是开口本身。
每个组件的喷嘴都可以移动,并且可以通过其对应的控制器实现位移,从而控制墨水的喷出。
每个组件的控制器可以是一种热弯曲性型控制器,连接部件为一臂结构,臂的一端与控制器相连并从控制器延伸出来,另一端与可移动喷嘴相连。
上述第二排的控制器可以在上述第一排的连接组件之间。
组件的喷嘴还可以采用特定的形状,使喷嘴排列更紧凑。例如,喷嘴可以为六边形的。
打印头可以是多色打印头,每种颜色对应着两排喷嘴组件,所有排中的控制器可以向同一个方向延伸。
附图说明
本发明将通过所附图纸和以下的描述进一步说明:
图1是根据本发明的喷墨打印头的喷嘴组件的立体示意图。
图2到图4是图1中的喷嘴组件的动作的立体示意图。
图5是构成喷墨打印头的喷嘴阵列的立体图。
图6是图5的喷嘴阵列的局部放大图。
图7是带有一个喷嘴保护帽的喷墨打印头的立体图。
图8a到8r是在喷墨打印头上制造喷嘴组件的步骤的立体图。
图9a到9r是制造步骤的侧面剖视图。
图10a到10k显示了在制造过程的各步骤中使用的模板布局。
图11a到11c是根据图8和图9的方法制造的喷嘴组件的动作的立体图。
图12a到12c是根据图8和图9制造的喷嘴组件的动作的侧面剖视图。
具体实施方式
图1显示了根据本发明实现的一个喷嘴组件10。一个喷墨打印头带有多个上述喷嘴组件10,该喷嘴组件在基层16上形成一个阵列14,见图5和图6。喷嘴阵列14将在下面详细说明。
组件10包括一块沉积有一电介质层18的硅片或基层16。在电介质层18上沉积有一CMOS钝化层20。
每个喷嘴组件10包含一个带有喷嘴开口的喷嘴22、一个杠杆臂26形式的连接部件,以及一个控制器28。杠杆臂26把控制器连接到喷嘴22上。
如图2到图4所示,喷嘴带有一个花冠部分30,从花冠部分30上延伸出一个裙边部分32。裙边部分32构成喷嘴腔34的外壁(见图2到图4)的一部分。喷嘴开口24与喷嘴腔34的液路相通。需要注意的是,喷嘴开口24有一圈凸缘36,该凸缘36使喷嘴腔34中的墨水40在凸缘上形成一个弯月面38(见图2)。
在喷嘴腔34的底板上带有一个墨水入口孔42(如图6中所示)。墨水入口孔42与通过基层16的墨水入口通道48相通。
墨水入口孔42的外圈有一圈围壁50,围壁从底部46向上延伸。上述的喷嘴22的裙边部分32构成喷嘴腔34外壁的第一部分,上述围壁50构成喷嘴腔34的外壁的第二部分。
围壁50的上一端具有向内翻转的唇边52,该唇边起密封墨水的作用,当喷嘴移动时,唇边52可以阻止墨水漏出。由于墨水40的粘度较高,而且唇边52与裙边部分32之间的间隙非常小,在墨水40的表面张力作用下,唇边52起到密封墨水的作用,防止墨水40从喷嘴腔34中漏出。
控制器28是一种热弯曲型调节装置,它与从基层16向上延伸的(更确切地说是从CMOS钝化层20向上延伸)的锚片54连接。锚片54安装在导电垫片56上,导电垫片56作为与控制器28连接的电力连接通路。
控制器28包括第一个梁58,主动梁和第二个梁60,被动梁,主动梁在被动梁的上面。在一个较佳实例中,梁58和梁60都由导电陶瓷材料构成或含有导电陶瓷材料(例如氮化钛TiN)。
梁58和梁60的第一端都固定到锚片54上,另一端与臂26连接。当电流通过主动梁58时,梁58会由于电阻生热效应发生热膨胀。而被动梁60上没有电流通过,所以不会与主动梁58一起同时膨胀,因此,梁58和梁60会产生弯曲运动,导致臂26和喷嘴22向下向基层16位移,如图3所示。此时,墨水会通过喷嘴开口24喷射出来,如图3中所示的62。当主动梁58上的热源消除后,即切断电流,喷嘴22将返回到其静态位置,如图4所示。当喷嘴22返回到其静态位置时,由于墨滴颈部被断开,会产生一滴墨64,如图4中所示的66。然后,墨滴64落到打印媒质上,例如一张纸。由于墨滴64的形成,会产生一个反向弯月面,如图4中所示的68。反向弯月面68导致墨水40流入喷嘴腔34,从而立即形成一个新的弯月面38(见图2),为从喷嘴组件10喷出下一滴墨水做好准备。
现在请看图5和图6,其中更详细地描绘了喷嘴阵列14。喷嘴阵列14用于四色打印头。所以,该喷嘴阵列14由4个喷嘴组件组70构成,每个组70提供一种颜色。每个组70的喷嘴组件10的喷嘴排成两排72和74。图6中更详细地显示了其中的一组70。
为了更紧密地排列排72和74中的喷嘴组件10,排74中的喷嘴组件10相对于排72中的喷嘴组件10错开一定距离或交错排列。而且,排72中的喷嘴组件10之间的距离很大,足以使排74中的喷嘴组件10的杠杆臂26通过排72中相邻的喷嘴组件10的喷嘴20。需要说明的是,每个喷嘴组件10都是哑铃形的,因此,排72中的喷嘴22嵌套于排74中的相邻喷嘴组件10的喷嘴22和控制器28之间,沿着排72的方向看,排72的喷嘴22的开口24嵌套在排74的连接部件之间,如图6所示。
而且,为了便于更紧凑地排列排72和74中的喷嘴22,每个喷嘴22都是六边形的。
本领域的技术人员很容易知道,在实际使用中,当喷嘴22向基层16移动时,由于喷嘴开口24与喷嘴腔34有一个小角度,所以墨水在喷出时会稍稍偏离垂直方向。而图5和图6中的设计克服了这个问题。在上述两个图中,排72和74中的喷嘴组件10的控制器28沿同一方向延伸到排72和排74的一侧。因此,从排72中的喷嘴22喷出的墨滴与从排74中的喷嘴22喷出的墨滴相互平行,从而提高了打印质量。
而且,如图5所示,基层16带有一些粘结垫76,这些粘结垫76提供了从垫片56向喷嘴组件10的控制器28的电连接。这些电力连接通过CMOS层(图中没有示出)形成。
请参考图7中显示的本发明的一个实例,同时参考前一图。两张图纸中的符号是相互对应的。
在本实例中,在喷嘴阵列14的基层16上安装了一个喷嘴保护帽80。喷嘴保护帽80带有一个主体部分82,该主体部分82具有多个通道84。通道84与阵列14中的喷嘴组件10的喷嘴开口24相对应,当墨水从任何一个喷嘴开口24喷出时,墨滴在打到打印媒质之前会通过相应的通道84。
主体部分82与喷嘴组件10有一定间隙,由支杆或支柱86支撑。支柱86带有一个进气开口88。
在使用时,当阵列14动作时,空气被从进气开口88吸入,并与墨水一起通过通道84。
由于空气通过通道84的速度与墨滴64的速度不同,所以墨滴64不会受空气的影响。例如,墨滴64从喷嘴喷出的速度大约为3米/秒,而空气通过通道84的速度大约为1米/秒。
空气的作用是使通道84不会夹杂异物颗粒。如果某些异物(例如灰尘颗粒)落入到喷嘴组件10中,会对喷嘴产生不良影响。采用由喷嘴保护帽80的进气开口88强制送气的方式,能够在很大程度上避免上述问题。
请参考图8到图10,其中示出了制造喷嘴组件10的工艺过程。
从晶片或基层16开始,在基层16的表面沉积一层电介质层18。该电介质层18是一层1.5微米厚的CVD氧化物。在电介质层18上加一层抗蚀剂,然后使用掩模100进行显影处理。
经过显影处理后,使用等离子刻蚀方法把电介质层18刻蚀到基层16,然后去掉抗蚀剂,清理电介质层18,经过上述步骤,墨水入口孔42就形成了。
在图8b中,在电介质层18上沉积0.8微米厚度的的铝层102,然后加一层抗蚀剂,使用掩模104进行显影处理。然后,采用等离子刻蚀方式把铝层102刻蚀到电介质层18,去掉抗蚀剂,对该层进行清理。此工艺步骤形成了粘结垫以及与喷墨控制器28的互连通道。互联通道连接到一个NMOS驱动晶体管和一个电源层,连接线路在CMOS层(图中没有示出)形成。
然后,在所得到的装置上再沉积0.5微米厚的PECVD氮化物,作为CMOS钝化层20。在钝化层20上加一层抗蚀剂,然后使用掩模106进行显影处理。经过显影处理后,使用等离子刻蚀方法把氮化物刻蚀到铝层102,在墨水入口孔42区域,应刻蚀到基层16。去掉抗蚀剂,然后对设备进行清理。
在钝化层20上旋敷一层牺牲层108。该层108是6微米厚的感光聚酰亚胺或4微米厚的高温抗蚀剂。把层108烘干,然后使用掩模110进行显影处理。显影处理后,如果层108由聚酰亚胺材料制成,那么应在400℃温度下对其烘烤1小时;如果层108由高温抗蚀剂构成,那么应在300℃以上的温度对其烘烤1小时。需要注意的是,在设计掩模110时,应考虑到由收缩所导致的聚酰亚胺层108的图案依赖扭曲(pattern-dependent distortion)。
下一步,如图8e所示,在产品上加第二层牺牲层112。层112可以是旋敷的2微米厚的感光聚酰亚胺,也可以是1.3微米厚的高温抗蚀剂。层112烘干后,使用掩模114进行显影处理。经过显影处理后,对于由聚酰亚胺构成的层112,应在400℃下硬烘烤约1小时;对于由高温抗蚀剂构成的层112,应在300℃以上的温度下硬烘烤1小时左右。
然后,在产品上沉积一层0.2微米厚的多层金属层116。该层116的一部分将构成控制器28的被动梁60。
层116的加工方法是:在300℃左右溅射1000厚的氮化钛(TiN),然后溅射50厚的氮化钽(TaN),最后再溅射1000厚的厚的氮化钛(TiN)。
也可以使用TiB2、MoSi2或(Ti,Al)N代替TiN。
然后,对层116使用掩模118进行显影处理并使用等离子刻蚀方法刻蚀到层112,下一步,湿剥离加在层116上的防蚀剂,注意不要伤及层108或112。
下一步,在层116上旋敷一层4微米厚的感光聚酰亚胺或2.6微米厚的高温抗蚀剂,形成第三层牺牲层120。层120经过烘干后,使用掩模122进行显影处理。然后进行热烘。对于聚酰亚胺,应在400℃下对层120硬烘烤1小时左右;对于高温抗蚀剂,应在300℃以上对层120硬烘烤1小时左右。
下一步,在层120上再沉积第二层多层金属层124。层124的成分与层116相同,工艺方式也相同。需要说明的是,层116和层124都是导电层。
然后,使用掩模对层124进行显影处理。下一步使用等离子刻蚀方法把层120刻蚀到层120(聚酰亚胺或高温抗蚀剂),然后,把加在层124上的抗蚀剂层小心地揭下来,注意不要伤及层108、112或120。需要说明的是,层124的剩余部分将构成控制器128的主动梁58。
下一步,在层124上旋敷一层4微米厚的感光聚酰亚胺或2.6微米厚的高温抗蚀剂,形成第四层牺牲层128。层128经过烘干后,使用掩模130进行显影处理,剩下图9k所示的孤立部分。然后,对于聚酰亚胺材料,应在400℃下对层128的剩余部分烘烤约1小时;对于高温抗蚀剂材料,应在300℃以上的温度下对层128的剩余部分烘烤1小时。
请参考图81。在上述产品上再沉积一层高杨氏模量的电介质层132。层132由1微米左右厚度的氮化硅或氧化铝构成。层132的沉积温度应低于牺牲层108、112、120、128的热烘温度。电介质层132应具有高弹性模数、化学惰性以及对TiN的良好粘接性。
下一步,在上述产品上在旋敷一层2微米厚的感光聚酰亚胺或1.3微米厚的高温抗蚀剂,形成第五个牺牲层134。层134经过烘干后,使用掩模136进行显影处理。然后,如果是聚酰亚胺材料,应在400℃下对层134的剩余部分烘烤1小时;如果是高温抗蚀剂,应在300℃以上的温度下对层134的剩余部分烘烤1小时左右。
然后,采用等离子刻蚀方法把电介质层132刻蚀到牺牲层128,注意不要伤及牺牲层134。
上述步骤形成喷嘴开口24、杠杆臂26、以及喷嘴组件10的锚片54。
下一步,在上述产品上沉积一层高杨氏模量的电介质层138。电介质层138的沉积方法是:在低于牺牲层108、112、120和128的热烘温度下,沉积一层0.2微米厚的氮化硅或氮化铝。
下一步,如图8p所示,使用具有方向性的等离子刻蚀方法对层138刻蚀0.35微米的深度。刻蚀的目的是从所有表面上清除电介质,仅留下电介质层132和牺牲层134的侧壁上的电介质。此步骤形成环绕喷嘴开口24的喷嘴凸缘36,该喷嘴凸缘36“别住”(pin)所述墨水弯月面。
然后,在产品上加一层紫外线分离带(ultraviolet release tape)140,在基层16背面旋敷一层4毫米后的抗蚀剂。然后使用掩模142进行背面刻蚀处理,形成墨水入口通道48。然后从基层16上去掉防蚀剂。
在基层16的背面贴一层紫外线分离带140(图中没有示出)。然后去掉胶带140。下一步,把牺牲层108、112、120、128和134在氧等离子中进行处理,形成图8r和图9r中显示的最终的喷嘴组件10。为了便于参考,上两张图纸中的零件编号与图1中的编号相同,以反映喷嘴组件10的相关部件。图11和12显示了按照上述工艺过程制造的喷嘴组件10的动作。这些图纸中的符号与图2到图4中的符号对应。
本领域技术人员容易了解,可以根据上述实例中的描述本发明进行各种等价的变化或修改。本发明的实例只用来阐明发明内容,不应限制发明的范围。任何根据本发明进行等价变化或修改的装置都在本发明的保护范围内。
Claims (7)
1.一种喷墨打印头,其包括:
一个晶片衬底,其带有驱动电路并确定多个墨水入口通道;以及
至少一对位于所述晶片衬底上的喷嘴组件排,每个喷嘴组件包括:
一个墨水喷射喷嘴,其确定一个与一墨水通道流体连通的喷嘴腔以及一个与所述喷嘴腔流体连通的喷嘴开口;以及
一个长条形的控制器,其连接至所述驱动电路并且可以运转以根据收到的来自所述驱动电路的电信号来移位所述喷嘴从而从所述喷嘴开口喷墨,
所述喷嘴组件被定向为使得所述喷嘴组件排中的一排的墨水喷射喷嘴邻近另一排喷嘴组件的墨水喷射喷嘴,同时各排的控制器在大体相反的方向延伸。
2.如权利要求1所述的喷墨打印头,其包括多对喷嘴组件排,同时一对喷嘴组件中一排的各控制器插在一邻近对喷嘴组件的一排的一对控制器之间。
3.如权利要求1或2所述的喷墨打印头,其中每个墨水喷射喷嘴具有大体为六边形的平面轮廓,各对中的一排的喷嘴与另一排的喷嘴嵌套。
4.如前述权利要求中任一项所述的喷墨打印头,其中各喷嘴包括一个确定所述喷嘴开口的冠部和一个从所述冠部朝着所述衬底下垂的裙部,所述确定所述喷嘴开口的冠部以及各喷嘴组件包括一个限界一个与所述喷嘴组件相配合的墨水入口通道的壁部,所述壁部与所述裙部围成所述喷嘴腔,使得当所述喷嘴朝所述衬底移位时,喷嘴腔的容积减小并且墨水被从所述喷嘴腔喷出。
5.如前述权利要求中任一项所述的喷墨打印头,其中各控制器是长条形的热弯曲控制器,其在一端连接至所述衬底并配置为使得相对端可以根据接受到所述电信号而移位。
6.如权利要求5所述的喷墨打印头,其中各控制器包括一个主动梁和一第二被动梁,至少所述主动梁确定一电加热电路并由在加热时膨胀而在接着的冷却时收缩的材料构成,所述梁彼此相关地定位使得所述主动梁的加热和冷却导致所述控制器移位。
7.如权利要求6所述的喷墨打印头,其中所述第二被动梁插在所述第一主动梁和所述衬底之间使得所述主动梁的受热并随之膨胀导致所述控制器朝所述衬底移位,所述主动梁的冷却并随后收缩导致所述控制器移位远离所述衬底。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/AU2000/000592 WO2001089844A1 (en) | 2000-05-24 | 2000-05-24 | Ink jet printhead nozzle array |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00819577.3A Division CN1205041C (zh) | 2000-05-24 | 2000-05-24 | 喷墨打印头的喷嘴阵列 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1654215A true CN1654215A (zh) | 2005-08-17 |
CN100480047C CN100480047C (zh) | 2009-04-22 |
Family
ID=3700811
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100536541A Expired - Fee Related CN100480047C (zh) | 2000-05-24 | 2000-05-24 | 一种带有喷嘴组件阵列的喷墨打印头 |
CN00819577.3A Expired - Fee Related CN1205041C (zh) | 2000-05-24 | 2000-05-24 | 喷墨打印头的喷嘴阵列 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00819577.3A Expired - Fee Related CN1205041C (zh) | 2000-05-24 | 2000-05-24 | 喷墨打印头的喷嘴阵列 |
Country Status (10)
Country | Link |
---|---|
US (3) | US7380905B1 (zh) |
EP (1) | EP1292450B1 (zh) |
JP (1) | JP4373638B2 (zh) |
CN (2) | CN100480047C (zh) |
AT (1) | ATE367267T1 (zh) |
AU (3) | AU4732700A (zh) |
DE (1) | DE60035617T2 (zh) |
IL (2) | IL153037A (zh) |
WO (1) | WO2001089844A1 (zh) |
ZA (1) | ZA200209793B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102307732A (zh) * | 2009-02-06 | 2012-01-04 | 佳能株式会社 | 液体喷射头和喷墨打印装置 |
CN106004049A (zh) * | 2015-03-31 | 2016-10-12 | 兄弟工业株式会社 | 液体排出装置和液体排出装置单元 |
CN107443897A (zh) * | 2016-05-30 | 2017-12-08 | 佳能株式会社 | 记录元件基板、液体喷出头和液体喷出设备 |
CN107685540A (zh) * | 2016-08-05 | 2018-02-13 | 意法半导体股份有限公司 | 用于热喷射液体的微流体设备 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001089844A1 (en) * | 2000-05-24 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Ink jet printhead nozzle array |
US6505916B1 (en) * | 2000-10-20 | 2003-01-14 | Silverbrook Research Pty Ltd | Nozzle poker for moving nozzle ink jet |
US6736484B2 (en) | 2001-12-14 | 2004-05-18 | Seiko Epson Corporation | Liquid drop discharge method and discharge device; electro optical device, method of manufacture thereof, and device for manufacture thereof; color filter method of manufacture thereof, and device for manufacturing thereof; and device incorporating backing, method of manufacturing thereof, and device for manufacture thereof |
JP4618789B2 (ja) * | 2005-03-24 | 2011-01-26 | キヤノン株式会社 | インクジェット記録装置およびインクジェット記録方法 |
US7654641B2 (en) * | 2006-12-04 | 2010-02-02 | Silverbrook Research Pty Ltd | Inkjet nozzle assembly having moving roof portion defined by a thermal bend actuator having a plurality of cantilever beams |
US7901046B2 (en) | 2006-12-04 | 2011-03-08 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising conduction pads |
US7735970B2 (en) * | 2006-12-04 | 2010-06-15 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising passive element having negative thermal expansion |
US7794056B2 (en) * | 2006-12-04 | 2010-09-14 | Silverbrook Research Pty Ltd | Inkjet nozzle assembly having thermal bend actuator with an active beam defining substantial part of nozzle chamber roof |
US7984973B2 (en) * | 2006-12-04 | 2011-07-26 | Silverbrook Research Pty Ltd | Thermal bend actuator comprising aluminium alloy |
PL2089229T3 (pl) * | 2006-12-04 | 2013-06-28 | Zamtec Ltd | Zespół dyszy atramentowej z termicznie zaginanym aktuatorem, którego aktywny człon stanowi indywidualną część sklepienia komory dyszy |
US7611225B2 (en) * | 2006-12-04 | 2009-11-03 | Silverbrook Research Pty Ltd | Inkjet nozzle assembly having thermal bend actuator with an active beam defining part of an exterior surface of a nozzle chamber roof |
US7938974B2 (en) * | 2007-03-12 | 2011-05-10 | Silverbrook Research Pty Ltd | Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face |
CN101342819B (zh) * | 2008-08-28 | 2010-06-02 | 旭丽电子(广州)有限公司 | 手持式打印装置 |
WO2015116051A2 (en) * | 2014-01-29 | 2015-08-06 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead |
US11033896B2 (en) | 2014-08-08 | 2021-06-15 | Ortho-Clinical Diagnostics, Inc. | Lateral-flow assay device with filtration flow control |
US10071373B2 (en) | 2014-08-08 | 2018-09-11 | Ortho-Clinical Diagnostics, Inc. | Lateral-flow assay device having flow constrictions |
CN114407357B (zh) * | 2022-03-03 | 2022-07-12 | 芯体素(杭州)科技发展有限公司 | 一种用于直写打印的阵列微喷头及其制备方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61120762A (ja) | 1984-11-16 | 1986-06-07 | Ricoh Co Ltd | オンデマンド型インクジエツトヘツド |
JPS62179948A (ja) | 1986-02-03 | 1987-08-07 | Ricoh Co Ltd | インクジエツト記録装置における振動ユニツト |
US4835554A (en) | 1987-09-09 | 1989-05-30 | Spectra, Inc. | Ink jet array |
JPH05338149A (ja) | 1992-06-12 | 1993-12-21 | Fujitsu Ltd | インクジェットヘッド |
US5790149A (en) | 1993-06-03 | 1998-08-04 | Seiko Epson Corporation | Ink jet recording head |
DE9404328U1 (de) | 1994-03-10 | 1994-05-19 | Francotyp Postalia Gmbh | Tintenstrahldruckkopf |
JPH10506068A (ja) | 1994-09-23 | 1998-06-16 | データプロダクツ コーポレイション | 複数のオリフィスを用いるインクジェットチャンバ付き印刷装置 |
JPH08156286A (ja) * | 1994-12-06 | 1996-06-18 | Olympus Optical Co Ltd | インクジェットプリンタ |
JP3987139B2 (ja) | 1995-06-27 | 2007-10-03 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
US5757400A (en) | 1996-02-01 | 1998-05-26 | Spectra, Inc. | High resolution matrix ink jet arrangement |
DE69801862T2 (de) | 1997-05-08 | 2002-05-02 | Seiko Epson Corp | Drucker mit beweglichem Papierführungsmechanismus |
US6682176B2 (en) * | 1997-07-15 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet printhead chip with nozzle arrangements incorporating spaced actuating arms |
US6557977B1 (en) | 1997-07-15 | 2003-05-06 | Silverbrook Research Pty Ltd | Shape memory alloy ink jet printing mechanism |
US6866290B2 (en) * | 2002-12-04 | 2005-03-15 | James Tsai | Apparatus of a collapsible handcart for turning a platform when operating a retractable handle |
EP0921003A1 (en) | 1997-12-03 | 1999-06-09 | Océ-Technologies B.V. | Ink-jet array printhead |
WO2000023279A1 (en) | 1998-10-16 | 2000-04-27 | Silverbrook Research Pty. Limited | Improvements relating to inkjet printers |
US6328417B1 (en) * | 2000-05-23 | 2001-12-11 | Silverbrook Research Pty Ltd | Ink jet printhead nozzle array |
WO2001089844A1 (en) * | 2000-05-24 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Ink jet printhead nozzle array |
-
2000
- 2000-05-24 WO PCT/AU2000/000592 patent/WO2001089844A1/en active IP Right Grant
- 2000-05-24 AT AT00929104T patent/ATE367267T1/de not_active IP Right Cessation
- 2000-05-24 US US10/296,534 patent/US7380905B1/en not_active Expired - Fee Related
- 2000-05-24 IL IL15303700A patent/IL153037A/xx not_active IP Right Cessation
- 2000-05-24 DE DE60035617T patent/DE60035617T2/de not_active Expired - Lifetime
- 2000-05-24 EP EP00929104A patent/EP1292450B1/en not_active Expired - Lifetime
- 2000-05-24 CN CNB2005100536541A patent/CN100480047C/zh not_active Expired - Fee Related
- 2000-05-24 AU AU4732700A patent/AU4732700A/xx active Pending
- 2000-05-24 AU AU2000247327A patent/AU2000247327C1/en not_active Ceased
- 2000-05-24 JP JP2001586061A patent/JP4373638B2/ja not_active Expired - Fee Related
- 2000-05-24 CN CN00819577.3A patent/CN1205041C/zh not_active Expired - Fee Related
-
2002
- 2002-12-03 ZA ZA200209793A patent/ZA200209793B/xx unknown
-
2004
- 2004-06-01 AU AU2004202405A patent/AU2004202405B2/en not_active Ceased
-
2005
- 2005-04-21 IL IL168176A patent/IL168176A/en not_active IP Right Cessation
-
2008
- 2008-05-07 US US12/116,904 patent/US7654643B2/en not_active Expired - Fee Related
-
2009
- 2009-12-29 US US12/649,063 patent/US7984968B2/en not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102307732A (zh) * | 2009-02-06 | 2012-01-04 | 佳能株式会社 | 液体喷射头和喷墨打印装置 |
US8523325B2 (en) | 2009-02-06 | 2013-09-03 | Canon Kabushiki Kaisha | Liquid ejection head and ink jet printing apparatus |
US8721047B2 (en) | 2009-02-06 | 2014-05-13 | Canon Kabushiki Kaisha | Liquid ejection head and ink jet printing apparatus |
CN102307732B (zh) * | 2009-02-06 | 2014-07-09 | 佳能株式会社 | 液体喷射头和喷墨打印装置 |
CN106004049A (zh) * | 2015-03-31 | 2016-10-12 | 兄弟工业株式会社 | 液体排出装置和液体排出装置单元 |
US10442199B2 (en) | 2015-03-31 | 2019-10-15 | Brother Kogyo Kabushiki Kaisha | Liquid discharge apparatus and liquid discharge apparatus unit |
US11155091B2 (en) | 2015-03-31 | 2021-10-26 | Brother Kogyo Kabushiki Kaisha | Liquid discharge apparatus and liquid discharge apparatus unit |
US11654682B2 (en) | 2015-03-31 | 2023-05-23 | Brother Kogyo Kabushiki Kaisha | Liquid discharge head |
CN107443897A (zh) * | 2016-05-30 | 2017-12-08 | 佳能株式会社 | 记录元件基板、液体喷出头和液体喷出设备 |
CN107443897B (zh) * | 2016-05-30 | 2019-09-20 | 佳能株式会社 | 记录元件基板、液体喷出头和液体喷出设备 |
US10668719B2 (en) | 2016-05-30 | 2020-06-02 | Canon Kabushiki Kaisha | Recording element substrate, liquid ejection head, and liquid ejection apparatus |
CN107685540A (zh) * | 2016-08-05 | 2018-02-13 | 意法半导体股份有限公司 | 用于热喷射液体的微流体设备 |
Also Published As
Publication number | Publication date |
---|---|
US7654643B2 (en) | 2010-02-02 |
IL168176A (en) | 2007-09-20 |
IL153037A (en) | 2005-08-31 |
ATE367267T1 (de) | 2007-08-15 |
JP2003534170A (ja) | 2003-11-18 |
ZA200209793B (en) | 2003-07-30 |
CN1452556A (zh) | 2003-10-29 |
US7380905B1 (en) | 2008-06-03 |
WO2001089844A1 (en) | 2001-11-29 |
US20080239005A1 (en) | 2008-10-02 |
EP1292450A4 (en) | 2005-11-30 |
EP1292450B1 (en) | 2007-07-18 |
CN100480047C (zh) | 2009-04-22 |
JP4373638B2 (ja) | 2009-11-25 |
DE60035617T2 (de) | 2008-04-10 |
IL153037A0 (en) | 2003-06-24 |
US20100097430A1 (en) | 2010-04-22 |
AU2004202405B2 (en) | 2005-05-19 |
DE60035617D1 (de) | 2007-08-30 |
AU2004202405A1 (en) | 2004-06-17 |
WO2001089844A9 (en) | 2006-08-31 |
AU2000247327C1 (en) | 2004-10-07 |
AU2000247327B2 (en) | 2004-03-25 |
EP1292450A1 (en) | 2003-03-19 |
CN1205041C (zh) | 2005-06-08 |
AU4732700A (en) | 2001-12-03 |
US7984968B2 (en) | 2011-07-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1205035C (zh) | 带有外装控制器的移动喷嘴的喷墨打印头 | |
CN1654215A (zh) | 一种带有喷嘴组件阵列的喷墨打印头 | |
US6890063B2 (en) | Ink-jet printhead and method of manufacturing the ink-jet printhead | |
CN1198726C (zh) | 具有外装控制器的移动喷嘴的喷墨打印头的制造方法 | |
JP2004017654A (ja) | インクジェットプリントヘッドおよびインクジェットプリントヘッドの製造方法 | |
US20100079551A1 (en) | Substrate for liquid discharge head, method of manufacturing the same, and liquid discharge head using such substrate | |
CN1642741A (zh) | 喷墨嘴装置构形 | |
CN1287987C (zh) | 喷墨准直器 | |
CN1274504C (zh) | 制造用于喷墨打印机的具有带孔喷嘴防护的打印头的方法 | |
CN1238192C (zh) | 墨水喷嘴组件 | |
CN1270899C (zh) | 可清除残留物质的喷墨打印头的喷嘴防护装置 | |
CN1289305C (zh) | 用于喷墨打印头喷嘴组的残留物质的保护器 | |
CN100344454C (zh) | 喷墨打印头的喷嘴保护帽 | |
CN100335286C (zh) | 用于喷墨打印机的打印头 | |
JP2004520200A (ja) | インクジェット印字ヘッドのノズルガードアライメント | |
CN100352654C (zh) | 一种喷墨打印头 | |
CN1625482A (zh) | 喷墨打印头的喷嘴防护装置 | |
CN1657290A (zh) | 带有隔离的喷嘴控制器的喷墨打印头 | |
CN1246149C (zh) | 具有喷嘴溢流隔离装置的喷墨打印头 | |
CN1491163A (zh) | 淹没喷嘴检测 | |
CN100341699C (zh) | 单石化流体喷射装置及其制造方法 | |
JP2002172781A (ja) | インクジェットヘッド | |
JP2002001968A (ja) | インクジェットプリンタヘッドの製造方法 | |
KR20030024672A (ko) | 외부에 배열된 엑츄에이터를 가진 이동 노즐을 구비한잉크젯 프린트헤드의 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090422 Termination date: 20140524 |