CN1590583B - 三甲基铟的填充方法及填充容器 - Google Patents

三甲基铟的填充方法及填充容器 Download PDF

Info

Publication number
CN1590583B
CN1590583B CN2004100638127A CN200410063812A CN1590583B CN 1590583 B CN1590583 B CN 1590583B CN 2004100638127 A CN2004100638127 A CN 2004100638127A CN 200410063812 A CN200410063812 A CN 200410063812A CN 1590583 B CN1590583 B CN 1590583B
Authority
CN
China
Prior art keywords
vector gas
filling container
organometallic compound
trimethyl indium
solid organometallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2004100638127A
Other languages
English (en)
Chinese (zh)
Other versions
CN1590583A (zh
Inventor
富安静夫
德留功一
羽贺健一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOSO FINE CHEMICAL CO Ltd
Tosoh Finechem Corp
Original Assignee
TOSO FINE CHEMICAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOSO FINE CHEMICAL CO Ltd filed Critical TOSO FINE CHEMICAL CO Ltd
Publication of CN1590583A publication Critical patent/CN1590583A/zh
Application granted granted Critical
Publication of CN1590583B publication Critical patent/CN1590583B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0487—Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser
    • G06F3/0488—Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser using a touch-screen or digitiser, e.g. input of commands through traced gestures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/46—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with organic materials
    • C04B41/49—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes
    • C04B41/4905—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes containing silicon
    • C04B41/4922—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes containing silicon applied to the substrate as monomers, i.e. as organosilanes RnSiX4-n, e.g. alkyltrialkoxysilane, dialkyldialkoxysilane
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133311—Environmental protection, e.g. against dust or humidity

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
CN2004100638127A 2003-07-11 2004-07-09 三甲基铟的填充方法及填充容器 Expired - Fee Related CN1590583B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP273784/03 2003-07-11
JP273784/2003 2003-07-11
JP2003273784A JP4585182B2 (ja) 2003-07-11 2003-07-11 トリメチルインジウムの充填方法および充填容器

Publications (2)

Publication Number Publication Date
CN1590583A CN1590583A (zh) 2005-03-09
CN1590583B true CN1590583B (zh) 2010-04-28

Family

ID=34210922

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2004100638127A Expired - Fee Related CN1590583B (zh) 2003-07-11 2004-07-09 三甲基铟的填充方法及填充容器

Country Status (4)

Country Link
JP (1) JP4585182B2 (ja)
KR (2) KR101072108B1 (ja)
CN (1) CN1590583B (ja)
TW (1) TW200503080A (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655874B2 (ja) * 2006-03-15 2015-01-21 宇部興産株式会社 気相成長用担体担持有機金属化合物及びその製法、並びに当該化合物を充填した気相成長用有機金属化合物充填装置
JP5431649B2 (ja) * 2006-03-15 2014-03-05 宇部興産株式会社 気相成長用担体担持有機金属化合物充填装置、気相成長用担体担持有機金属化合物の製法および気相成長用担体担持有機金属化合物の供給方法
US20090159003A1 (en) * 2006-05-30 2009-06-25 Ube Industries Ltd Device for supplying organic metal compound
JP5045062B2 (ja) * 2006-10-30 2012-10-10 住友化学株式会社 固体有機金属化合物の供給方法
GB2444143B (en) * 2006-11-27 2009-10-28 Sumitomo Chemical Co Apparatus of supplying organometallic compound
CN105063570A (zh) * 2015-08-31 2015-11-18 清远先导材料有限公司 一种提高三甲基铟利用率的方法
TWI617764B (zh) * 2017-06-06 2018-03-11 江蘇南大光電材料股份有限公司 固體金屬有機化合物的封裝容器
KR102027179B1 (ko) * 2018-05-08 2019-10-02 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR102208303B1 (ko) * 2019-09-25 2021-01-28 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
CN114059038B (zh) * 2020-08-07 2024-02-09 吕宝源 固态金属有机化合物转态方法及其转态系统
JP6879607B1 (ja) 2020-10-30 2021-06-02 株式会社三秀 転造加工装置
KR102407768B1 (ko) * 2021-07-01 2022-06-10 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
FI130131B (en) 2021-09-07 2023-03-09 Picosun Oy Precursor container
KR20230061592A (ko) * 2021-10-28 2023-05-09 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR20230061591A (ko) * 2021-10-28 2023-05-09 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR20230061593A (ko) * 2021-10-28 2023-05-09 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989305A (en) * 1995-03-09 1999-11-23 Shin-Etsu Chemical Co., Ltd. Feeder of a solid organometallic compound
CN1300876A (zh) * 1999-08-20 2001-06-27 莫顿国际公司 双烧结扩散器
JP2003160865A (ja) * 2001-11-27 2003-06-06 Mitsubishi Materials Corp 有機金属化学蒸着法用ルテニウム化合物及び該化合物により得られたルテニウム含有薄膜

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0176537B1 (en) * 1984-03-26 1989-01-25 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and The preparation of metal alkyls
JPS6464314A (en) * 1987-09-04 1989-03-10 Mitsubishi Electric Corp Sublimator
JPH01168331A (ja) * 1987-12-24 1989-07-03 Mitsui Toatsu Chem Inc 有機金属化合物の飽和方法
JP2651530B2 (ja) * 1988-04-15 1997-09-10 住友化学工業株式会社 気相成長用有機金属化合物供給装置
JPH0269389A (ja) * 1988-08-31 1990-03-08 Toyo Stauffer Chem Co 有機金属気相成長法における固体有機金属化合物の飽和蒸気生成方法
JP2964313B2 (ja) * 1995-03-09 1999-10-18 信越化学工業株式会社 固体有機金属化合物供給装置及びその製造方法
JPH10223540A (ja) * 1997-02-03 1998-08-21 Sony Corp 有機金属気相成長装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989305A (en) * 1995-03-09 1999-11-23 Shin-Etsu Chemical Co., Ltd. Feeder of a solid organometallic compound
CN1300876A (zh) * 1999-08-20 2001-06-27 莫顿国际公司 双烧结扩散器
JP2003160865A (ja) * 2001-11-27 2003-06-06 Mitsubishi Materials Corp 有機金属化学蒸着法用ルテニウム化合物及び該化合物により得られたルテニウム含有薄膜

Also Published As

Publication number Publication date
JP2005033146A (ja) 2005-02-03
KR20110099079A (ko) 2011-09-06
CN1590583A (zh) 2005-03-09
JP4585182B2 (ja) 2010-11-24
KR101072108B1 (ko) 2011-10-10
KR20050008456A (ko) 2005-01-21
TW200503080A (en) 2005-01-16
KR101358204B1 (ko) 2014-02-05
TWI345263B (ja) 2011-07-11

Similar Documents

Publication Publication Date Title
CN1590583B (zh) 三甲基铟的填充方法及填充容器
US8673413B2 (en) Method for packing solid organometallic compound and packed container
US8092604B2 (en) Solid organometallic compound-filled container and filling method thereof
CN101405433B (zh) 用于减少沉积系统中粒子污染的方法和设备
TWI352745B (en) Delivery device
RU2384652C2 (ru) Барботер для постоянной доставки пара твердого химиката
CN101065516B (zh) 多盘膜前驱体蒸发系统和结合了该系统的薄膜沉积系统
CN102597310B (zh) 固态前体输送组件以及相关方法
EP2418300B1 (en) Delivery device and method of use thereof
CN108754428A (zh) 蒸镀坩埚及蒸镀装置
KR20140075019A (ko) 유기금속 화합물의 공급 장치
JP4571787B2 (ja) 固体有機金属化合物用充填容器およびその充填方法
KR100927456B1 (ko) 고체 유기 금속 화합물용 충전 용기 및 그 충전 방법
JP3909022B2 (ja) 固体有機金属化合物用充填容器
JP4748928B2 (ja) 固体有機金属化合物の充填方法および充填容器
JP2003160865A (ja) 有機金属化学蒸着法用ルテニウム化合物及び該化合物により得られたルテニウム含有薄膜
JPS60730A (ja) バブラ
CN106062244A (zh) 含有机金属化合物的气体的供给装置
JPH10151442A (ja) 真空脱気装置
JP2002159816A (ja) 集積化ガスパネル用フィルタユニット
KR20070113566A (ko) 미립자 아이스크림 도트 샌드위치

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100428

Termination date: 20200709