TW200503080A - Solid organometallic compound-filled container and filling method thereof - Google Patents

Solid organometallic compound-filled container and filling method thereof

Info

Publication number
TW200503080A
TW200503080A TW093103076A TW93103076A TW200503080A TW 200503080 A TW200503080 A TW 200503080A TW 093103076 A TW093103076 A TW 093103076A TW 93103076 A TW93103076 A TW 93103076A TW 200503080 A TW200503080 A TW 200503080A
Authority
TW
Taiwan
Prior art keywords
organometallic compound
solid organometallic
filled container
filling method
filling
Prior art date
Application number
TW093103076A
Other languages
English (en)
Other versions
TWI345263B (zh
Inventor
Shizuo Tomiyasu
Kohichi Tokudome
Kenichi Haga
Original Assignee
Tosoh Finechem Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Finechem Corp filed Critical Tosoh Finechem Corp
Publication of TW200503080A publication Critical patent/TW200503080A/zh
Application granted granted Critical
Publication of TWI345263B publication Critical patent/TWI345263B/zh

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0487—Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser
    • G06F3/0488—Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser using a touch-screen or digitiser, e.g. input of commands through traced gestures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/46—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with organic materials
    • C04B41/49—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes
    • C04B41/4905—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes containing silicon
    • C04B41/4922—Compounds having one or more carbon-to-metal or carbon-to-silicon linkages ; Organo-clay compounds; Organo-silicates, i.e. ortho- or polysilicic acid esters ; Organo-phosphorus compounds; Organo-inorganic complexes containing silicon applied to the substrate as monomers, i.e. as organosilanes RnSiX4-n, e.g. alkyltrialkoxysilane, dialkyldialkoxysilane
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133311—Environmental protection, e.g. against dust or humidity

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Structural Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
TW093103076A 2003-07-11 2004-02-10 Solid organometallic compound-filled container and filling method thereof TW200503080A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003273784A JP4585182B2 (ja) 2003-07-11 2003-07-11 トリメチルインジウムの充填方法および充填容器

Publications (2)

Publication Number Publication Date
TW200503080A true TW200503080A (en) 2005-01-16
TWI345263B TWI345263B (zh) 2011-07-11

Family

ID=34210922

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093103076A TW200503080A (en) 2003-07-11 2004-02-10 Solid organometallic compound-filled container and filling method thereof

Country Status (4)

Country Link
JP (1) JP4585182B2 (zh)
KR (2) KR101072108B1 (zh)
CN (1) CN1590583B (zh)
TW (1) TW200503080A (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5431649B2 (ja) * 2006-03-15 2014-03-05 宇部興産株式会社 気相成長用担体担持有機金属化合物充填装置、気相成長用担体担持有機金属化合物の製法および気相成長用担体担持有機金属化合物の供給方法
JP5655874B2 (ja) * 2006-03-15 2015-01-21 宇部興産株式会社 気相成長用担体担持有機金属化合物及びその製法、並びに当該化合物を充填した気相成長用有機金属化合物充填装置
JP5509593B2 (ja) * 2006-05-30 2014-06-04 宇部興産株式会社 有機金属化合物の供給装置
JP5045062B2 (ja) * 2006-10-30 2012-10-10 住友化学株式会社 固体有機金属化合物の供給方法
GB2444143B (en) * 2006-11-27 2009-10-28 Sumitomo Chemical Co Apparatus of supplying organometallic compound
CN105063570A (zh) * 2015-08-31 2015-11-18 清远先导材料有限公司 一种提高三甲基铟利用率的方法
TWI617764B (zh) * 2017-06-06 2018-03-11 江蘇南大光電材料股份有限公司 固體金屬有機化合物的封裝容器
KR102027179B1 (ko) * 2018-05-08 2019-10-02 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR102208303B1 (ko) * 2019-09-25 2021-01-28 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
CN114059038B (zh) * 2020-08-07 2024-02-09 吕宝源 固态金属有机化合物转态方法及其转态系统
JP6879607B1 (ja) 2020-10-30 2021-06-02 株式会社三秀 転造加工装置
KR102407768B1 (ko) * 2021-07-01 2022-06-10 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
FI130131B (en) * 2021-09-07 2023-03-09 Picosun Oy Precursor container
KR102692081B1 (ko) * 2021-10-28 2024-08-06 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR102692082B1 (ko) * 2021-10-28 2024-08-06 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치
KR102692080B1 (ko) * 2021-10-28 2024-08-06 주식회사 레이크머티리얼즈 유기금속 화합물 공급 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4720561A (en) * 1984-03-26 1988-01-19 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Preparation of metal alkyls
JPS6464314A (en) * 1987-09-04 1989-03-10 Mitsubishi Electric Corp Sublimator
JPH01168331A (ja) * 1987-12-24 1989-07-03 Mitsui Toatsu Chem Inc 有機金属化合物の飽和方法
JP2651530B2 (ja) * 1988-04-15 1997-09-10 住友化学工業株式会社 気相成長用有機金属化合物供給装置
JPH0269389A (ja) * 1988-08-31 1990-03-08 Toyo Stauffer Chem Co 有機金属気相成長法における固体有機金属化合物の飽和蒸気生成方法
US5989305A (en) * 1995-03-09 1999-11-23 Shin-Etsu Chemical Co., Ltd. Feeder of a solid organometallic compound
JP2964313B2 (ja) * 1995-03-09 1999-10-18 信越化学工業株式会社 固体有機金属化合物供給装置及びその製造方法
JPH10223540A (ja) * 1997-02-03 1998-08-21 Sony Corp 有機金属気相成長装置
DE60020781T2 (de) * 1999-08-20 2006-05-11 Rohm And Haas Chemicals Llc Sprudelvorrichtung mit zwei Fritten
JP3932874B2 (ja) * 2001-11-27 2007-06-20 三菱マテリアル株式会社 有機金属化学蒸着法用ルテニウム化合物及び該化合物により得られたルテニウム含有薄膜

Also Published As

Publication number Publication date
TWI345263B (zh) 2011-07-11
KR101358204B1 (ko) 2014-02-05
JP4585182B2 (ja) 2010-11-24
KR20110099079A (ko) 2011-09-06
CN1590583A (zh) 2005-03-09
JP2005033146A (ja) 2005-02-03
KR101072108B1 (ko) 2011-10-10
CN1590583B (zh) 2010-04-28
KR20050008456A (ko) 2005-01-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees