JP4748928B2 - 固体有機金属化合物の充填方法および充填容器 - Google Patents
固体有機金属化合物の充填方法および充填容器 Download PDFInfo
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- JP4748928B2 JP4748928B2 JP2003271743A JP2003271743A JP4748928B2 JP 4748928 B2 JP4748928 B2 JP 4748928B2 JP 2003271743 A JP2003271743 A JP 2003271743A JP 2003271743 A JP2003271743 A JP 2003271743A JP 4748928 B2 JP4748928 B2 JP 4748928B2
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- organometallic compound
- filling
- solid
- solid organometallic
- trimethylindium
- Prior art date
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Description
すなわち、本発明は、前記固体有機金属化合物に、さらに充填材を共存させることを特徴とする固体有機金属化合物用充填容器への固体有機金属化合物の充填方法に関するものである。
3:キャリアガス排出口
9:充填口
22:バルブ
26:接続部品
2a:キャリアガス導入口
3a:キャリアガス排出口
7a:下部開口部
8a:流路
9a:充填口
20a:ディフューザー
21a:固体有機金属化合物配置室
22a:バルブ
23a:カラム型容器
24a:フィルター
25a:インレットチャンバー
27a:多孔質部材
Claims (3)
- 固体有機金属化合物を固体有機金属化合物用充填容器に充填する方法において、粒径2.36mm未満の固体有機金属化合物の粒のみからなり、さらに粒径0.25mm未満の固体有機金属化合物の粒が固体有機金属化合物当たり15重量%以下(0重量%を除く)含むであることを特徴とする固体有機金属化合物用充填容器への固体有機金属化合物の充填方法。
- 請求項1記載の粒径2.36mm未満の固体有機金属化合物の粒のみからなり、さらに粒径0.25mm未満の固体有機金属化合物の粒が固体有機金属化合物当たり15重量%以下(0重量%を除く)である固体有機金属化合物に、さらに充填材を共存させることを特徴とする請求項1に記載の固体有機金属化合物用充填容器への固体有機金属化合物の充填方法。
- 固体有機金属化合物がトリメチルインジウムである請求項1または請求項2に記載の固体有機金属化合物用充填容器への固体有機金属化合物の充填方法。
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JP2003271743A JP4748928B2 (ja) | 2003-07-08 | 2003-07-08 | 固体有機金属化合物の充填方法および充填容器 |
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JP2003271743A JP4748928B2 (ja) | 2003-07-08 | 2003-07-08 | 固体有機金属化合物の充填方法および充填容器 |
Publications (2)
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JP2005033046A JP2005033046A (ja) | 2005-02-03 |
JP4748928B2 true JP4748928B2 (ja) | 2011-08-17 |
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JP2003271743A Expired - Fee Related JP4748928B2 (ja) | 2003-07-08 | 2003-07-08 | 固体有機金属化合物の充填方法および充填容器 |
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JP (1) | JP4748928B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5257197B2 (ja) * | 2008-03-31 | 2013-08-07 | 住友化学株式会社 | 有機金属化合物供給装置 |
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2003
- 2003-07-08 JP JP2003271743A patent/JP4748928B2/ja not_active Expired - Fee Related
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JP2005033046A (ja) | 2005-02-03 |
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