CN1568244A - 用于固定半导体片的组装体系及半导体片的制造方法 - Google Patents
用于固定半导体片的组装体系及半导体片的制造方法 Download PDFInfo
- Publication number
- CN1568244A CN1568244A CNA028200500A CN02820050A CN1568244A CN 1568244 A CN1568244 A CN 1568244A CN A028200500 A CNA028200500 A CN A028200500A CN 02820050 A CN02820050 A CN 02820050A CN 1568244 A CN1568244 A CN 1568244A
- Authority
- CN
- China
- Prior art keywords
- semiconductor chip
- assembly system
- methyl
- adhesive composition
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000012545 processing Methods 0.000 title claims abstract description 7
- 230000008569 process Effects 0.000 title abstract description 5
- 239000000853 adhesive Substances 0.000 claims abstract description 56
- 230000001070 adhesive effect Effects 0.000 claims abstract description 56
- 239000000203 mixture Substances 0.000 claims abstract description 56
- 229920005989 resin Polymers 0.000 claims abstract description 20
- 239000011347 resin Substances 0.000 claims abstract description 20
- 238000005498 polishing Methods 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 15
- 229920000642 polymer Polymers 0.000 claims description 31
- 125000000217 alkyl group Chemical group 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 24
- 229920001577 copolymer Polymers 0.000 claims description 24
- 239000004094 surface-active agent Substances 0.000 claims description 19
- 229920001223 polyethylene glycol Polymers 0.000 claims description 18
- CERQOIWHTDAKMF-UHFFFAOYSA-N alpha-methacrylic acid Natural products CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 17
- 239000002202 Polyethylene glycol Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 13
- 125000004432 carbon atom Chemical group C* 0.000 claims description 13
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 12
- 239000011737 fluorine Substances 0.000 claims description 12
- 229910052731 fluorine Inorganic materials 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 claims description 11
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 claims description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- WYNCHZVNFNFDNH-UHFFFAOYSA-N Oxazolidine Chemical compound C1COCN1 WYNCHZVNFNFDNH-UHFFFAOYSA-N 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 9
- YARNEMCKJLFQHG-UHFFFAOYSA-N prop-1-ene;styrene Chemical compound CC=C.C=CC1=CC=CC=C1 YARNEMCKJLFQHG-UHFFFAOYSA-N 0.000 claims description 9
- 150000005846 sugar alcohols Polymers 0.000 claims description 9
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000908 ammonium hydroxide Substances 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 230000000845 anti-microbial effect Effects 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- 239000002855 microbicide agent Substances 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 230000003641 microbiacidal effect Effects 0.000 claims description 2
- 229940124561 microbicide Drugs 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 19
- 150000001721 carbon Chemical group 0.000 description 13
- 229920002451 polyvinyl alcohol Polymers 0.000 description 9
- 125000001183 hydrocarbyl group Chemical group 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical class CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 5
- 229920002689 polyvinyl acetate Polymers 0.000 description 5
- 239000011118 polyvinyl acetate Substances 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- -1 sulfoxy Chemical group 0.000 description 5
- 238000000227 grinding Methods 0.000 description 4
- 230000007062 hydrolysis Effects 0.000 description 4
- 238000006460 hydrolysis reaction Methods 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000002723 alicyclic group Chemical group 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229920005692 JONCRYL® Polymers 0.000 description 2
- 229920002861 MOWIOL ® 3-83 Polymers 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 229920006026 co-polymeric resin Polymers 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000847 nonoxynol Polymers 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229940058020 2-amino-2-methyl-1-propanol Drugs 0.000 description 1
- NECRQCBKTGZNMH-UHFFFAOYSA-N 3,5-dimethylhex-1-yn-3-ol Chemical compound CC(C)CC(C)(O)C#C NECRQCBKTGZNMH-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229920001353 Dextrin Polymers 0.000 description 1
- 239000004375 Dextrin Substances 0.000 description 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical class CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 229920001800 Shellac Polymers 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- XOCUXOWLYLLJLV-UHFFFAOYSA-N [O].[S] Chemical compound [O].[S] XOCUXOWLYLLJLV-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 150000001356 alkyl thiols Chemical class 0.000 description 1
- CBTVGIZVANVGBH-UHFFFAOYSA-N aminomethyl propanol Chemical compound CC(C)(N)CO CBTVGIZVANVGBH-UHFFFAOYSA-N 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical class CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 125000000392 cycloalkenyl group Chemical group 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 235000019425 dextrin Nutrition 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- CALWOYBZYFNRDN-UHFFFAOYSA-N ethenol;ethenyl acetate Chemical compound OC=C.CC(=O)OC=C CALWOYBZYFNRDN-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000002541 furyl group Chemical group 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229930014626 natural product Natural products 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000000018 nitroso group Chemical group N(=O)* 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- XTUSEBKMEQERQV-UHFFFAOYSA-N propan-2-ol;hydrate Chemical compound O.CC(C)O XTUSEBKMEQERQV-UHFFFAOYSA-N 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N pyridine Substances C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229940113147 shellac Drugs 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- FVEFRICMTUKAML-UHFFFAOYSA-M sodium tetradecyl sulfate Chemical compound [Na+].CCCCC(CC)CCC(CC(C)C)OS([O-])(=O)=O FVEFRICMTUKAML-UHFFFAOYSA-M 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Bipolar Transistors (AREA)
Abstract
Description
样品编号 | Mowiol18-88 | Mowiol13-88 | Mowol13-83 | PEG2200 | PEG2300 | PEG210K | 水 | NH4OH | 异丙醇 | Blo-Ban-CS-11353 |
1 | - | - | 18.10 | 9.05 | - | - | 72.74 | - | 0.10 | |
2 | 1.75 | - | - | - | - | 2.30 | 95.95 | - | - | |
3 | 0.93 | - | - | - | 6.66 | 6.60 | 59.2 | - | 26.66 | |
4 | 19.00 | 5.00 | 76.00 | |||||||
5 | 19.50 | 2.50 | 78.00 | |||||||
6 | 19.75 | 5.00 | 75.25 | |||||||
7 | 20.00 | 80.00 | ||||||||
8 | 18.81 | 4.34 | 75.26 | 1.58 | ||||||
9 | 26.40 | 8.80 | 47.38(1%NH4OH) | 3.31 | ||||||
10 | 19.80 | 1.00 | 79.20 | |||||||
11 | 19.60 | 2.00 | 78.40 | |||||||
12 | 18.18 | 9.09 | 72.73 | |||||||
13 | 18.10 | 9.00 | 72.40 | 0.50 | ||||||
14 | 19.49 | 1.99 | 77.97 | 0.55 | ||||||
15 | 19.30 | 1.97 | 77.21 | 1.52 | ||||||
16 | 18.10 | 9.05 | 72.75 | 0.10 | ||||||
Mowiol5-72(18.10%) | Mowiol15-20 | |||||||||
17 | 14.89 | 7.72 | 77.72 | |||||||
18 | 60.00 | 8.67 | 31.33 |
样品编号 | Mowiol3-831 | MegafaceR-084 | F242T5 | TergtolNP-46 | 水 |
38 | 99.90 | 0.100 | - | - | - |
39 | 99.75 | 0.25 | - | - | - |
40 | 80.00 | 4.00 | - | - | 16.00 |
41 | 99.75 | - | 0.25 | - | - |
42 | 99.50 | - | 0.50 | - | - |
43 | 80.00 | - | 4.00 | - | 16.00 |
44 | 99.90 | - | - | 0.10 | - |
45 | 99.75 | - | - | 0.25 | - |
46 | 80.00 | - | - | 4.00 | 16.00 |
样品编号 | JoncrylEco847 | PEG2002 | FluoradFC-4306 | 水 |
19 | 41.86 | 6.98 | - | 51.16 |
20 | 41.69 | 6.95 | 0.40 | 50.95 |
21 | 41.41 | 6.91 | 1.06 | 50.62 |
PEG-1000 | ||||
22 | 42 | 14 | 44 | |
23 | 42 | 9.3 | 48.7 | |
24 | 42 | 4.7 | 53.3 |
样品编号 | JoncrylEco847 | MegafaceR-084 | 水 |
29 | 49.98 | 0.050 | 49.98 |
30 | 49.94 | 0.12 | 49.94 |
31 | 44.44 | 2.22 | 53.33 |
F-242T5 | |||
32 | 49.94 | 0.12 | 49.94 |
33 | 49.88 | 0.25 | 49.88 |
34 | 44.44 | 2.22 | 53.33 |
TergitolNP-46 | |||
35 | 49.98 | 0.05 | 49.98 |
36 | 49.94 | 0.12 | 49.94 |
37 | 44.44 | 2.22 | 53.33 |
样品编号 | PolyAcCo8 | PEG10K2 | PEG3002 | 水 | 异丙醇 |
25 | 3.80 | 9.60 | - | 48.10 | 38.50 |
26 | 2.20 | 5.40 | 43.50 | 27.30 | 21.70 |
27 | 6.25 | 6.25 | 12.50 | 25.00 | 50.00 |
28 | 48.90 | - | - | - | 32.52 |
Claims (23)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/975,437 | 2001-10-11 | ||
US09/975,437 US20030092246A1 (en) | 2001-10-11 | 2001-10-11 | Assembly system for stationing semiconductor wafer suitable for processing and process for manufacturing semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1568244A true CN1568244A (zh) | 2005-01-19 |
CN100420546C CN100420546C (zh) | 2008-09-24 |
Family
ID=25523031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028200500A Expired - Fee Related CN100420546C (zh) | 2001-10-11 | 2002-10-02 | 用于固定半导体片的组装体系及半导体片的制造方法 |
Country Status (10)
Country | Link |
---|---|
US (2) | US20030092246A1 (zh) |
EP (1) | EP1448340B1 (zh) |
JP (1) | JP2005505943A (zh) |
KR (1) | KR20040041666A (zh) |
CN (1) | CN100420546C (zh) |
AT (1) | ATE332211T1 (zh) |
DE (1) | DE60212992T2 (zh) |
MY (1) | MY132030A (zh) |
TW (1) | TW593613B (zh) |
WO (1) | WO2003033208A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101885613A (zh) * | 2010-07-29 | 2010-11-17 | 西安理工大学 | 电子陶瓷成型用粘合剂及其制备方法 |
CN101297010B (zh) * | 2005-10-28 | 2010-12-08 | 东京应化工业株式会社 | 粘接剂组合物以及粘接薄膜 |
CN106041739A (zh) * | 2016-05-27 | 2016-10-26 | 华侨大学 | 一种超硬磨料磨具的微生物修整方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6643507B1 (en) | 1998-12-31 | 2003-11-04 | At&T Corp. | Wireless centrex automatic callback |
US20050282961A1 (en) * | 2004-06-18 | 2005-12-22 | Hsienkun Tsai | Pressure-sensitive label laminates with improved convertability and broad temperature adhesion performance |
JP5345397B2 (ja) * | 2005-09-26 | 2013-11-20 | プラナー ソリューションズ エルエルシー | 化学機械研磨応用で使用するための超純度コロイド状シリカ |
NL1036215A1 (nl) * | 2007-12-11 | 2009-06-15 | Asml Netherlands Bv | Lithographic method and carrier substrate. |
FR3005895B1 (fr) * | 2013-05-27 | 2015-06-26 | Commissariat Energie Atomique | Procede d'assemblage de deux substrats de nature differente via une couche intermediaire ductile |
US10556317B2 (en) | 2016-03-03 | 2020-02-11 | P.R. Hoffman Machine Products Inc. | Polishing machine wafer holder |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4251400A (en) * | 1971-11-03 | 1981-02-17 | Borden, Inc. | Hot and cold water redispersible polyvinyl acetate adhesives |
US3905928A (en) * | 1974-02-15 | 1975-09-16 | Burlington Industries Inc | Hot melt size and yarn sized therewith |
US4073756A (en) * | 1976-04-26 | 1978-02-14 | Konishi Co., Ltd. | Solid adhesive compositions |
JPS608426Y2 (ja) * | 1976-12-08 | 1985-03-25 | シャープ株式会社 | 半導体ウエハ−の保持基板 |
US5714029A (en) * | 1984-03-12 | 1998-02-03 | Nitto Electric Industrial Co., Ltd. | Process for working a semiconductor wafer |
EP0185767B1 (en) * | 1984-05-29 | 1991-01-23 | MITSUI TOATSU CHEMICALS, Inc. | Film for machining wafers |
JP2807322B2 (ja) * | 1989-10-09 | 1998-10-08 | 三井化学株式会社 | 帯電防止性に優れた樹脂組成物 |
JPH0641504A (ja) * | 1991-07-12 | 1994-02-15 | Saiden Kagaku Kk | アルカリ可溶型粘着剤組成物 |
KR930006846A (ko) * | 1991-09-02 | 1993-04-22 | 사와무라 하루오 | 반도체 웨이퍼의 이면 연삭방법 및 그 방법에 이용하는 점착 테이프 |
US5196443A (en) * | 1991-09-25 | 1993-03-23 | Buckman Laboratories International, Inc. | Synergistic combinations of 2-(thiocyanomethylthio) benzothiazole with a mixture of 4,4-dimethyloxazolidine and 3,4,4-trimethyloxazolidine in controlling fungal and bacterial growth in aqueous fluids |
US5534053A (en) * | 1993-01-12 | 1996-07-09 | Rodel, Inc. | Composition for reducing or eliminating static charge in adhesive film |
JP3410202B2 (ja) * | 1993-04-28 | 2003-05-26 | 日本テキサス・インスツルメンツ株式会社 | ウェハ貼着用粘着シートおよびこれを用いた半導体装置の製造方法 |
IL113583A (en) * | 1994-05-26 | 1999-12-22 | Rohm & Haas | Acrylic pressure sensitive adhesive |
TW311927B (zh) * | 1995-07-11 | 1997-08-01 | Minnesota Mining & Mfg | |
IT1279051B1 (it) * | 1995-10-27 | 1997-12-04 | 3V Sigma Spa | Composizioni addensanti in forma solida costituite da polimeri o copolimeri e poliglicoli |
JP2741362B2 (ja) * | 1995-12-05 | 1998-04-15 | 日化精工株式会社 | ウエハ−の仮着用接着剤 |
JPH09260471A (ja) * | 1996-03-18 | 1997-10-03 | Kazuo Inoue | 焼結炭化硅素基体上に化学蒸着炭化硅素膜をコーティングした半導体ウエハ用真空チャック |
JP3620554B2 (ja) * | 1996-03-25 | 2005-02-16 | 信越半導体株式会社 | 半導体ウェーハ製造方法 |
US5700581A (en) * | 1996-06-26 | 1997-12-23 | International Business Machines Corporation | Solvent-free epoxy based adhesives for semiconductor chip attachment and process |
DE19756614A1 (de) * | 1997-12-18 | 1999-07-01 | Wacker Siltronic Halbleitermat | Verfahren zur Montage und Demontage einer Halbleiterscheibe, und Stoffmischung, die zur Durchführung des Verfahrens geeignet ist |
JP2000015573A (ja) | 1998-06-30 | 2000-01-18 | Ibiden Co Ltd | ウェハ研磨装置用ウェハ保持プレート及び半導体ウェハの研磨方法 |
JP4275221B2 (ja) * | 1998-07-06 | 2009-06-10 | リンテック株式会社 | 粘接着剤組成物および粘接着シート |
JP2001226650A (ja) * | 2000-02-16 | 2001-08-21 | Nitto Denko Corp | 放射線硬化型熱剥離性粘着シート、及びこれを用いた切断片の製造方法 |
AU6071501A (en) * | 2000-06-08 | 2001-12-17 | Showa Denko Kabushiki Kaisha | Semiconductor light-emitting device |
-
2001
- 2001-10-11 US US09/975,437 patent/US20030092246A1/en not_active Abandoned
-
2002
- 2002-10-02 KR KR10-2004-7005000A patent/KR20040041666A/ko not_active Application Discontinuation
- 2002-10-02 JP JP2003535983A patent/JP2005505943A/ja active Pending
- 2002-10-02 AT AT02782813T patent/ATE332211T1/de not_active IP Right Cessation
- 2002-10-02 CN CNB028200500A patent/CN100420546C/zh not_active Expired - Fee Related
- 2002-10-02 DE DE60212992T patent/DE60212992T2/de not_active Expired - Lifetime
- 2002-10-02 WO PCT/EP2002/011043 patent/WO2003033208A1/en active IP Right Grant
- 2002-10-02 EP EP02782813A patent/EP1448340B1/en not_active Expired - Lifetime
- 2002-10-09 MY MYPI20023763A patent/MY132030A/en unknown
- 2002-10-11 TW TW091123455A patent/TW593613B/zh not_active IP Right Cessation
-
2003
- 2003-03-24 US US10/395,747 patent/US6924016B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101297010B (zh) * | 2005-10-28 | 2010-12-08 | 东京应化工业株式会社 | 粘接剂组合物以及粘接薄膜 |
CN101885613A (zh) * | 2010-07-29 | 2010-11-17 | 西安理工大学 | 电子陶瓷成型用粘合剂及其制备方法 |
CN106041739A (zh) * | 2016-05-27 | 2016-10-26 | 华侨大学 | 一种超硬磨料磨具的微生物修整方法 |
US10576607B2 (en) | 2016-05-27 | 2020-03-03 | Huaqiao University | Method for microbially dressing a super abrasive tool |
Also Published As
Publication number | Publication date |
---|---|
ATE332211T1 (de) | 2006-07-15 |
WO2003033208A1 (en) | 2003-04-24 |
US6924016B2 (en) | 2005-08-02 |
JP2005505943A (ja) | 2005-02-24 |
TW593613B (en) | 2004-06-21 |
DE60212992D1 (de) | 2006-08-17 |
US20030190446A1 (en) | 2003-10-09 |
EP1448340A1 (en) | 2004-08-25 |
US20030092246A1 (en) | 2003-05-15 |
KR20040041666A (ko) | 2004-05-17 |
CN100420546C (zh) | 2008-09-24 |
MY132030A (en) | 2007-09-28 |
EP1448340B1 (en) | 2006-07-05 |
DE60212992T2 (de) | 2007-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102427541B1 (ko) | 웨이퍼의 가접착 방법 및 박형 웨이퍼의 제조 방법 | |
EP3121838B1 (en) | Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer | |
JP5846060B2 (ja) | ウエハ加工体、ウエハ加工用部材、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 | |
EP3037495B1 (en) | Wafer processing laminate, temporary adhesive material for wafer processing, and method for manufacturing thin wafer | |
JP5767159B2 (ja) | ウエハ加工体、ウエハ加工用部材、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 | |
EP2617793A1 (en) | Pressure-sensitive adhesive compound, pressure-sensitive adhesive tape, and wafer treatment method | |
KR102494875B1 (ko) | 웨이퍼 가공용 가접착재, 웨이퍼 가공체 및 박형 웨이퍼의 제조 방법 | |
JPWO2015115060A1 (ja) | ウエハ加工体、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 | |
JP6788549B2 (ja) | 基板加工用仮接着フィルムロール、薄型基板の製造方法 | |
CN1305670C (zh) | 防粘片材及其生产方法 | |
CN100420546C (zh) | 用于固定半导体片的组装体系及半导体片的制造方法 | |
WO2021065547A1 (ja) | ウエハ加工体、ウエハ加工用仮接着材、及び薄型ウエハの製造方法 | |
JPWO2020235605A1 (ja) | 洗浄剤組成物、基板の洗浄方法及び支持体又は基板の洗浄方法 | |
JP2023121788A (ja) | 基板加工用仮接着材料及び積層体の製造方法 | |
WO2021220929A1 (ja) | ウエハ加工用仮接着剤、ウエハ積層体及び薄型ウエハの製造方法 | |
EP3579267B1 (en) | Method for manufacturing thin substrate | |
CN111146133A (zh) | 层叠体的制造方法及基板的制造方法 | |
JP7351260B2 (ja) | デバイス基板用仮接着剤、デバイス基板積層体及びデバイス基板積層体の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: AZ ELECTRONIC MATERIALS JAPAN Free format text: FORMER OWNER: CLARIANT FINANCE (BVI) LTD. Effective date: 20050429 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20050429 Address after: Tokyo, Japan Applicant after: AZ Electronic Materials Japan Co., Ltd. Address before: The British Virgin Islands of Tortola Applicant before: Clariant Finance (BVI) Ltd. |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1069794 Country of ref document: HK |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080924 Termination date: 20091102 |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: WD Ref document number: 1069794 Country of ref document: HK |