CN1550578A - 分析方法 - Google Patents

分析方法 Download PDF

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Publication number
CN1550578A
CN1550578A CNA2004100346913A CN200410034691A CN1550578A CN 1550578 A CN1550578 A CN 1550578A CN A2004100346913 A CNA2004100346913 A CN A2004100346913A CN 200410034691 A CN200410034691 A CN 200410034691A CN 1550578 A CN1550578 A CN 1550578A
Authority
CN
China
Prior art keywords
plating bath
metal
plating
working electrode
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004100346913A
Other languages
English (en)
Chinese (zh)
Inventor
W�����ϲ���
W·索南伯格
̩
L·R·巴斯泰德
R·克鲁斯
G·哈姆
M·J·卡佩克斯
E·雷丁顿
K·普莱斯
T·巴克雷
T·古德里奇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Materials International LLC
Original Assignee
Rohm and Haas Electronic Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials LLC filed Critical Rohm and Haas Electronic Materials LLC
Publication of CN1550578A publication Critical patent/CN1550578A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G1/00—Thread cutting; Automatic machines specially designed therefor
    • B23G1/02—Thread cutting; Automatic machines specially designed therefor on an external or internal cylindrical or conical surface, e.g. on recesses
    • B23G1/04—Machines with one working-spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G1/00—Thread cutting; Automatic machines specially designed therefor
    • B23G1/44—Equipment or accessories specially designed for machines or devices for thread cutting
    • B23G1/50—Equipment or accessories specially designed for machines or devices for thread cutting for cutting thread by successive operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G5/00—Thread-cutting tools; Die-heads
    • B23G5/08—Thread-cutting tools; Die-heads with means for adjustment
    • B23G5/083—Adjustable dies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/42—Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/42—Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte
    • G01N27/423—Coulometry
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G2210/00—Details of threads produced
    • B23G2210/08—External threads

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
CNA2004100346913A 2003-04-25 2004-04-23 分析方法 Pending CN1550578A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46538803P 2003-04-25 2003-04-25
US60/465,388 2003-04-25

Publications (1)

Publication Number Publication Date
CN1550578A true CN1550578A (zh) 2004-12-01

Family

ID=32962779

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004100346913A Pending CN1550578A (zh) 2003-04-25 2004-04-23 分析方法

Country Status (6)

Country Link
US (1) US20060151327A1 (cg-RX-API-DMAC7.html)
EP (1) EP1471348A1 (cg-RX-API-DMAC7.html)
JP (1) JP2004325441A (cg-RX-API-DMAC7.html)
KR (1) KR20040092432A (cg-RX-API-DMAC7.html)
CN (1) CN1550578A (cg-RX-API-DMAC7.html)
TW (1) TWI275790B (cg-RX-API-DMAC7.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102272356A (zh) * 2008-11-07 2011-12-07 克斯塔里克公司 电沉积液、系统及方法
CN101470097B (zh) * 2007-12-25 2013-05-29 比亚迪股份有限公司 一种电镀液中有机添加剂浓度的测定方法
CN103698384A (zh) * 2013-12-17 2014-04-02 上海交通大学 深孔镀铜加速剂的测量方法
CN110872724A (zh) * 2018-09-03 2020-03-10 东莞市脉拓表面处理科技有限公司 调配电镀药水的方法及装置
CN114005759A (zh) * 2021-10-29 2022-02-01 华天科技(宝鸡)有限公司 一种引线框架及其制备方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004323971A (ja) * 2003-04-25 2004-11-18 Rohm & Haas Electronic Materials Llc 改良された浴分析
KR100649725B1 (ko) * 2005-08-31 2006-11-27 엘지전자 주식회사 플라즈마 디스플레이 패널의 에너지 회수장치 및 회수방법
AU2010302957A1 (en) * 2009-10-02 2012-05-03 Newcastle Innovation Limited Supercapacitor electrodes
JP5888152B2 (ja) * 2012-07-05 2016-03-16 住友金属鉱山株式会社 パラジウムめっき液の劣化状態評価方法、パラジウムめっき方法
WO2014066313A1 (en) * 2012-10-23 2014-05-01 Moses Lake Industries, Inc. Improvements in plating bath metrology
JP6426336B2 (ja) * 2013-10-25 2018-11-21 理研計器株式会社 定電位電解式ガスセンサ
EP2937686B1 (en) * 2014-04-22 2017-03-08 Rohm and Haas Electronic Materials LLC Electroplating bath analysis
KR101711293B1 (ko) * 2015-08-06 2017-03-03 서울대학교산학협력단 도금용액에 포함된 가속제 농도의 측정방법
KR102101941B1 (ko) 2018-03-23 2020-05-29 주식회사 마라나노텍코리아 바이오 센서 제조방법
WO2019183504A1 (en) * 2018-03-23 2019-09-26 Mara Nanotech Korea, Inc. Methods of manufacturing biosensor nanowells

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US4038161A (en) * 1976-03-05 1977-07-26 R. O. Hull & Company, Inc. Acid copper plating and additive composition therefor
US4132605A (en) * 1976-12-27 1979-01-02 Rockwell International Corporation Method for evaluating the quality of electroplating baths
US4666567A (en) * 1981-07-31 1987-05-19 The Boeing Company Automated alternating polarity pulse electrolytic processing of electrically conductive substances
US4479852A (en) * 1983-01-21 1984-10-30 International Business Machines Corporation Method for determination of concentration of organic additive in plating bath
US4631116A (en) * 1985-06-05 1986-12-23 Hughes Aircraft Company Method of monitoring trace constituents in plating baths
US4917774A (en) * 1986-04-24 1990-04-17 Shipley Company Inc. Method for analyzing additive concentration
US4917777A (en) * 1986-04-24 1990-04-17 Shipley Company Inc. Method for analyzing additive concentration
US4812210A (en) * 1987-10-16 1989-03-14 The United States Department Of Energy Measuring surfactant concentration in plating solutions
US5004525A (en) * 1988-08-23 1991-04-02 Shipley Company Inc. Copper electroplating composition
US5049246A (en) * 1989-06-20 1991-09-17 Hull Harry F Electrolytic processing apparatus and method with time multiplexed power supply
US5223118A (en) * 1991-03-08 1993-06-29 Shipley Company Inc. Method for analyzing organic additives in an electroplating bath
US5192403A (en) * 1991-05-16 1993-03-09 International Business Machines Corporation Cyclic voltammetric method for the measurement of concentrations of subcomponents of plating solution additive mixtures
US5252196A (en) * 1991-12-05 1993-10-12 Shipley Company Inc. Copper electroplating solutions and processes
US5298132A (en) * 1993-03-25 1994-03-29 Hughes Aircraft Company Method for monitoring purification treatment in plating baths
US5972192A (en) * 1997-07-23 1999-10-26 Advanced Micro Devices, Inc. Pulse electroplating copper or copper alloys
US6365033B1 (en) * 1999-05-03 2002-04-02 Semitoof, Inc. Methods for controlling and/or measuring additive concentration in an electroplating bath
US6471845B1 (en) * 1998-12-15 2002-10-29 International Business Machines Corporation Method of controlling chemical bath composition in a manufacturing environment
JP2001152398A (ja) * 1999-08-05 2001-06-05 Fujitsu Ltd 電気めっき方法、めっき液評価方法、めっき装置、半導体装置の製造方法
US6280602B1 (en) * 1999-10-20 2001-08-28 Advanced Technology Materials, Inc. Method and apparatus for determination of additives in metal plating baths
US6508924B1 (en) * 2000-05-31 2003-01-21 Shipley Company L.L.C. Control of breakdown products in electroplating baths
US6645364B2 (en) * 2000-10-20 2003-11-11 Shipley Company, L.L.C. Electroplating bath control
DE60113214T2 (de) * 2000-11-02 2006-06-08 Shipley Co., L.L.C., Marlborough Plattierungsbadanalyse
US20020125142A1 (en) * 2001-01-18 2002-09-12 Zhi-Wen Sun Plating bath organic additive analyzer
US6572753B2 (en) * 2001-10-01 2003-06-03 Eci Technology, Inc. Method for analysis of three organic additives in an acid copper plating bath
US20030201191A1 (en) * 2002-04-29 2003-10-30 Applied Materials, Inc. Electrochemical method for direct organic additives analysis in copper baths
US6773569B2 (en) * 2002-05-08 2004-08-10 Applied Materials Inc. Potential pulse-scan methods of analyzing organic additives in plating baths with multi-component additives
US6808611B2 (en) * 2002-06-27 2004-10-26 Applied Materials, Inc. Methods in electroanalytical techniques to analyze organic components in plating baths
US6749739B2 (en) * 2002-10-07 2004-06-15 Eci Technology, Inc. Detection of suppressor breakdown contaminants in a plating bath
US6709561B1 (en) * 2002-11-06 2004-03-23 Eci Technology, Inc. Measurement of the concentration of a reducing agent in an electroless plating bath
US6673226B1 (en) * 2002-12-20 2004-01-06 Eci Technology Voltammetric measurement of halide ion concentration

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101470097B (zh) * 2007-12-25 2013-05-29 比亚迪股份有限公司 一种电镀液中有机添加剂浓度的测定方法
CN102272356A (zh) * 2008-11-07 2011-12-07 克斯塔里克公司 电沉积液、系统及方法
CN103698384A (zh) * 2013-12-17 2014-04-02 上海交通大学 深孔镀铜加速剂的测量方法
CN103698384B (zh) * 2013-12-17 2016-02-10 上海交通大学 深孔镀铜加速剂的测量方法
CN110872724A (zh) * 2018-09-03 2020-03-10 东莞市脉拓表面处理科技有限公司 调配电镀药水的方法及装置
CN114005759A (zh) * 2021-10-29 2022-02-01 华天科技(宝鸡)有限公司 一种引线框架及其制备方法

Also Published As

Publication number Publication date
KR20040092432A (ko) 2004-11-03
EP1471348A1 (en) 2004-10-27
TWI275790B (en) 2007-03-11
US20060151327A1 (en) 2006-07-13
JP2004325441A (ja) 2004-11-18
TW200508605A (en) 2005-03-01

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Legal Events

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20041201