CN1503309A - 预知离子源中灯丝寿命的方法和离子源装置 - Google Patents
预知离子源中灯丝寿命的方法和离子源装置 Download PDFInfo
- Publication number
- CN1503309A CN1503309A CNA2003101165342A CN200310116534A CN1503309A CN 1503309 A CN1503309 A CN 1503309A CN A2003101165342 A CNA2003101165342 A CN A2003101165342A CN 200310116534 A CN200310116534 A CN 200310116534A CN 1503309 A CN1503309 A CN 1503309A
- Authority
- CN
- China
- Prior art keywords
- filament
- ion source
- resistance value
- voltage
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/242—Filament heating power supply or regulation circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002330634A JP2004165034A (ja) | 2002-11-14 | 2002-11-14 | イオン源のフィラメント寿命予測方法およびイオン源装置 |
JP330634/02 | 2002-11-14 | ||
JP330634/2002 | 2002-11-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1503309A true CN1503309A (zh) | 2004-06-09 |
CN1302511C CN1302511C (zh) | 2007-02-28 |
Family
ID=29728569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2003101165342A Expired - Fee Related CN1302511C (zh) | 2002-11-14 | 2003-11-14 | 预知离子源中灯丝寿命的方法和离子源装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7034543B2 (zh) |
JP (1) | JP2004165034A (zh) |
KR (1) | KR20040042882A (zh) |
CN (1) | CN1302511C (zh) |
GB (1) | GB2395286B (zh) |
TW (1) | TWI294631B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103094019A (zh) * | 2013-01-21 | 2013-05-08 | 江苏达胜加速器制造有限公司 | 用于微电流电子枪的灯丝 |
CN104332375A (zh) * | 2014-09-05 | 2015-02-04 | 西安奥华电子仪器有限责任公司 | 离子源数字pid控制参数自整定系统及方法 |
CN109559963A (zh) * | 2017-09-27 | 2019-04-02 | 日新离子机器株式会社 | 离子源及离子源的运转方法 |
CN109738835A (zh) * | 2018-12-31 | 2019-05-10 | 聚光科技(杭州)股份有限公司 | 离子源灯丝的工作方法 |
CN112525419A (zh) * | 2019-09-19 | 2021-03-19 | 佳能安内华股份有限公司 | 电子生成装置和电离真空计 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4709664B2 (ja) * | 2006-03-09 | 2011-06-22 | 三井造船株式会社 | イオン源 |
KR100877825B1 (ko) | 2007-05-30 | 2009-01-08 | 한국원자력연구원 | 병렬 필라멘트 회로에서의 필라멘트 단선 검출회로 |
CN102375109B (zh) | 2010-07-09 | 2015-06-03 | 米沃奇电动工具公司 | 照明测试仪 |
EP2608713A4 (en) | 2010-08-27 | 2014-01-08 | Milwaukee Electric Tool Corp | THERMAL DETECTION SYSTEMS, METHODS AND DEVICES |
US8756021B2 (en) * | 2010-10-26 | 2014-06-17 | Varian Semiconductor Equipment Associates, Inc. | Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetime |
CN203705055U (zh) | 2011-03-15 | 2014-07-09 | 米沃奇电动工具公司 | 热像仪 |
DE102011112759A1 (de) * | 2011-09-08 | 2013-03-14 | Oerlikon Trading Ag, Trübbach | Plasmaquelle |
US10794769B2 (en) | 2012-08-02 | 2020-10-06 | Milwaukee Electric Tool Corporation | Thermal detection systems, methods, and devices |
US10854416B1 (en) * | 2019-09-10 | 2020-12-01 | Applied Materials, Inc. | Thermally isolated repeller and electrodes |
JP7356329B2 (ja) * | 2019-11-25 | 2023-10-04 | 株式会社ニューフレアテクノロジー | 電子ビーム照射装置、描画装置及び検査装置 |
US11127558B1 (en) | 2020-03-23 | 2021-09-21 | Applied Materials, Inc. | Thermally isolated captive features for ion implantation systems |
TWI805180B (zh) * | 2021-01-21 | 2023-06-11 | 日商紐富來科技股份有限公司 | 電子線描繪裝置及陰極壽命預測方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6412450A (en) * | 1987-07-06 | 1989-01-17 | Jeol Ltd | Temperature control device for thermoelectric field radiation gun |
US5057814A (en) * | 1989-07-24 | 1991-10-15 | Harley-Davidson, Inc. | Electrical malfunction detection system |
US5256947A (en) * | 1990-10-10 | 1993-10-26 | Nec Electronics, Inc. | Multiple filament enhanced ion source |
JPH04306544A (ja) * | 1991-04-03 | 1992-10-29 | Rohm Co Ltd | イオン注入装置におけるエレクトロンシャワー用フィラメントの寿命検出装置 |
KR0158234B1 (ko) * | 1992-03-02 | 1999-02-18 | 이노우에 아키라 | 이온 주입 시스템 |
JP3368695B2 (ja) * | 1994-10-05 | 2003-01-20 | 日新電機株式会社 | イオン源 |
JPH08227677A (ja) * | 1995-02-21 | 1996-09-03 | Nissin Electric Co Ltd | イオン源のフィラメント電流の制御方法 |
US5578998A (en) * | 1995-03-20 | 1996-11-26 | Chivas Products Limited | Method and apparatus for predicting of lamp failure |
JPH09274866A (ja) * | 1996-04-02 | 1997-10-21 | Nissin Electric Co Ltd | フィラメント断線検出装置 |
US5943594A (en) * | 1997-04-30 | 1999-08-24 | International Business Machines Corporation | Method for extended ion implanter source lifetime with control mechanism |
US6875986B1 (en) * | 1999-04-28 | 2005-04-05 | Kabushiki Kaisha Toshiba | Ion generation method and filament for ion generation apparatus |
JP3716700B2 (ja) * | 2000-02-25 | 2005-11-16 | 日新電機株式会社 | イオン源およびその運転方法 |
JP3339492B2 (ja) * | 2000-05-10 | 2002-10-28 | 日新電機株式会社 | イオン源の運転方法およびイオンビーム照射装置 |
US6956489B2 (en) * | 2002-07-17 | 2005-10-18 | Mrl Industries | Heating element condition monitor |
-
2002
- 2002-11-14 JP JP2002330634A patent/JP2004165034A/ja active Pending
-
2003
- 2003-11-14 KR KR1020030080398A patent/KR20040042882A/ko active Search and Examination
- 2003-11-14 TW TW092131972A patent/TWI294631B/zh not_active IP Right Cessation
- 2003-11-14 US US10/712,344 patent/US7034543B2/en not_active Expired - Fee Related
- 2003-11-14 CN CNB2003101165342A patent/CN1302511C/zh not_active Expired - Fee Related
- 2003-11-14 GB GB0326531A patent/GB2395286B/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103094019A (zh) * | 2013-01-21 | 2013-05-08 | 江苏达胜加速器制造有限公司 | 用于微电流电子枪的灯丝 |
CN104332375A (zh) * | 2014-09-05 | 2015-02-04 | 西安奥华电子仪器有限责任公司 | 离子源数字pid控制参数自整定系统及方法 |
CN104332375B (zh) * | 2014-09-05 | 2016-12-28 | 西安奥华电子仪器股份有限公司 | 离子源数字pid控制参数自整定系统及方法 |
CN109559963A (zh) * | 2017-09-27 | 2019-04-02 | 日新离子机器株式会社 | 离子源及离子源的运转方法 |
TWI725323B (zh) * | 2017-09-27 | 2021-04-21 | 日商日新離子機器股份有限公司 | 離子源、離子源之運轉方法 |
CN109559963B (zh) * | 2017-09-27 | 2022-04-29 | 日新离子机器株式会社 | 离子源及离子源的运转方法 |
CN109738835A (zh) * | 2018-12-31 | 2019-05-10 | 聚光科技(杭州)股份有限公司 | 离子源灯丝的工作方法 |
CN112525419A (zh) * | 2019-09-19 | 2021-03-19 | 佳能安内华股份有限公司 | 电子生成装置和电离真空计 |
Also Published As
Publication number | Publication date |
---|---|
TW200419615A (en) | 2004-10-01 |
GB0326531D0 (en) | 2003-12-17 |
US7034543B2 (en) | 2006-04-25 |
GB2395286B (en) | 2006-01-18 |
GB2395286A (en) | 2004-05-19 |
KR20040042882A (ko) | 2004-05-20 |
US20040149927A1 (en) | 2004-08-05 |
TWI294631B (en) | 2008-03-11 |
CN1302511C (zh) | 2007-02-28 |
JP2004165034A (ja) | 2004-06-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: NISSIN ION EQUIPMENT CO LTD Free format text: FORMER OWNER: NISHIN DENKI CO., LTD. Effective date: 20060331 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20060331 Address after: Kyoto Japan Applicant after: Nissin Ion Equipment Co., Ltd. Address before: Kyoto Japan Applicant before: Nissin Electric Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070228 Termination date: 20121114 |