CN104332375A - 离子源数字pid控制参数自整定系统及方法 - Google Patents
离子源数字pid控制参数自整定系统及方法 Download PDFInfo
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- CN104332375A CN104332375A CN201410453377.2A CN201410453377A CN104332375A CN 104332375 A CN104332375 A CN 104332375A CN 201410453377 A CN201410453377 A CN 201410453377A CN 104332375 A CN104332375 A CN 104332375A
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- ion source
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000005259 measurement Methods 0.000 claims description 20
- 238000001914 filtration Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 3
- 238000009499 grossing Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 2
- 230000010354 integration Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000026676 system process Effects 0.000 description 2
- 238000004422 calculation algorithm Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
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CN201410453377.2A CN104332375B (zh) | 2014-09-05 | 2014-09-05 | 离子源数字pid控制参数自整定系统及方法 |
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CN201410453377.2A CN104332375B (zh) | 2014-09-05 | 2014-09-05 | 离子源数字pid控制参数自整定系统及方法 |
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CN104332375A true CN104332375A (zh) | 2015-02-04 |
CN104332375B CN104332375B (zh) | 2016-12-28 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106406284A (zh) * | 2016-10-27 | 2017-02-15 | 北京新能源汽车股份有限公司 | 检测比例积分微分控制器的参数标定效果的方法及装置 |
CN109856961A (zh) * | 2019-03-11 | 2019-06-07 | 深圳市安健科技股份有限公司 | 一种球管电压控制方法、装置及计算机可读存储介质 |
CN111176356A (zh) * | 2019-12-31 | 2020-05-19 | 中山市博顿光电科技有限公司 | 离子源恒流控制装置、方法以及离子源系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5111053A (en) * | 1990-02-19 | 1992-05-05 | Seiko Instruments, Inc. | Controlling a liquid metal ion source by analog feedback and digital CPU control |
JPH10208653A (ja) * | 1997-01-27 | 1998-08-07 | Hitachi Ltd | イオン源装置及びこれを用いた集束イオンビーム装置 |
CN1503309A (zh) * | 2002-11-14 | 2004-06-09 | ���µ����ʽ���� | 预知离子源中灯丝寿命的方法和离子源装置 |
CN102445901A (zh) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | 一种离子源自动稳弧流的方法 |
CN102446685A (zh) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | 一种离子源坩埚控制方法 |
CN102709139A (zh) * | 2012-05-23 | 2012-10-03 | 四川大学 | 一种用于输出单原子氢离子束的场发射离子源 |
-
2014
- 2014-09-05 CN CN201410453377.2A patent/CN104332375B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5111053A (en) * | 1990-02-19 | 1992-05-05 | Seiko Instruments, Inc. | Controlling a liquid metal ion source by analog feedback and digital CPU control |
JPH10208653A (ja) * | 1997-01-27 | 1998-08-07 | Hitachi Ltd | イオン源装置及びこれを用いた集束イオンビーム装置 |
CN1503309A (zh) * | 2002-11-14 | 2004-06-09 | ���µ����ʽ���� | 预知离子源中灯丝寿命的方法和离子源装置 |
CN102445901A (zh) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | 一种离子源自动稳弧流的方法 |
CN102446685A (zh) * | 2010-10-13 | 2012-05-09 | 北京中科信电子装备有限公司 | 一种离子源坩埚控制方法 |
CN102709139A (zh) * | 2012-05-23 | 2012-10-03 | 四川大学 | 一种用于输出单原子氢离子束的场发射离子源 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106406284A (zh) * | 2016-10-27 | 2017-02-15 | 北京新能源汽车股份有限公司 | 检测比例积分微分控制器的参数标定效果的方法及装置 |
CN106406284B (zh) * | 2016-10-27 | 2018-11-02 | 北京新能源汽车股份有限公司 | 检测比例积分微分控制器的参数标定效果的方法及装置 |
CN109856961A (zh) * | 2019-03-11 | 2019-06-07 | 深圳市安健科技股份有限公司 | 一种球管电压控制方法、装置及计算机可读存储介质 |
CN109856961B (zh) * | 2019-03-11 | 2022-02-11 | 深圳市安健科技股份有限公司 | 一种球管电压控制方法、装置及计算机可读存储介质 |
CN111176356A (zh) * | 2019-12-31 | 2020-05-19 | 中山市博顿光电科技有限公司 | 离子源恒流控制装置、方法以及离子源系统 |
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CN104332375B (zh) | 2016-12-28 |
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Address after: 710061 Shaanxi province Xi'an Cuihua Road No. 254 Jialin building room 207 Applicant after: XI'AN AOHUA ELECTRONIC INSTRUMENT CO.,LTD. Address before: 710061 Shaanxi province Xi'an Cuihua Road No. 254 Jialin building room 207 Applicant before: XI'AN AOHUA ELECTRONIC INSTRUMENT Co.,Ltd. |
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Denomination of invention: Ion source digital PID control parameter self-setting system and method Effective date of registration: 20170621 Granted publication date: 20161228 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN AOHUA ELECTRONIC INSTRUMENT CO.,LTD. Registration number: 2017990000511 |
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Date of cancellation: 20211112 Granted publication date: 20161228 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN AOHUA ELECTRONIC INSTRUMENT CO.,LTD. Registration number: 2017990000511 |
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Denomination of invention: Digital PID control parameter self-tuning system and method of ion source Effective date of registration: 20211116 Granted publication date: 20161228 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN AOHUA ELECTRONIC INSTRUMENT CO.,LTD. Registration number: Y2021610000331 |
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Date of cancellation: 20230302 Granted publication date: 20161228 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: XI'AN AOHUA ELECTRONIC INSTRUMENT CO.,LTD. Registration number: Y2021610000331 |
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