CN1311226C - 用于实时测定加工过程中工件的原位发射率的系统和方法 - Google Patents

用于实时测定加工过程中工件的原位发射率的系统和方法 Download PDF

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Publication number
CN1311226C
CN1311226C CNB001179519A CN00117951A CN1311226C CN 1311226 C CN1311226 C CN 1311226C CN B001179519 A CNB001179519 A CN B001179519A CN 00117951 A CN00117951 A CN 00117951A CN 1311226 C CN1311226 C CN 1311226C
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CN
China
Prior art keywords
wafer
radiation
reflectivity
heating chamber
intensity
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Expired - Fee Related
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CNB001179519A
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English (en)
Chinese (zh)
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CN1272556A (zh
Inventor
J·P·赫布
A·沙基
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Axcelis Technologies Inc
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Eaton Corp
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Publication of CN1272556A publication Critical patent/CN1272556A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B65D43/0202—Removable lids or covers without integral tamper element
    • B65D43/0204—Removable lids or covers without integral tamper element secured by snapping over beads or projections
    • B65D43/021—Removable lids or covers without integral tamper element secured by snapping over beads or projections only on the inside, or a part turned to the inside, of the mouth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/50—Containers, packaging elements or packages, specially adapted for particular articles or materials for living organisms, articles or materials sensitive to changes of environment or atmospheric conditions, e.g. land animals, birds, fish, water plants, non-aquatic plants, flower bulbs, cut flowers or foliage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Marine Sciences & Fisheries (AREA)
  • General Health & Medical Sciences (AREA)
  • Evolutionary Biology (AREA)
  • Zoology (AREA)
  • Health & Medical Sciences (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CNB001179519A 1999-03-29 2000-03-29 用于实时测定加工过程中工件的原位发射率的系统和方法 Expired - Fee Related CN1311226C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/280,308 US6183127B1 (en) 1999-03-29 1999-03-29 System and method for the real time determination of the in situ emissivity of a workpiece during processing
US280,308 1999-03-29
US280308 1999-03-29

Publications (2)

Publication Number Publication Date
CN1272556A CN1272556A (zh) 2000-11-08
CN1311226C true CN1311226C (zh) 2007-04-18

Family

ID=23072533

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB001179519A Expired - Fee Related CN1311226C (zh) 1999-03-29 2000-03-29 用于实时测定加工过程中工件的原位发射率的系统和方法

Country Status (8)

Country Link
US (2) US6183127B1 (enExample)
EP (1) EP1041619B1 (enExample)
JP (1) JP4736007B2 (enExample)
KR (1) KR100483903B1 (enExample)
CN (1) CN1311226C (enExample)
DE (1) DE60040253D1 (enExample)
SG (2) SG109461A1 (enExample)
TW (1) TW452910B (enExample)

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US6461036B1 (en) * 1999-03-29 2002-10-08 Axcelis Technologies, Inc. System and method for determining stray light in a thermal processing system
WO2000058700A1 (fr) * 1999-03-30 2000-10-05 Tokyo Electron Limited Systeme de mesure de temperature
US6303411B1 (en) * 1999-05-03 2001-10-16 Vortek Industries Ltd. Spatially resolved temperature measurement and irradiance control
US6594446B2 (en) * 2000-12-04 2003-07-15 Vortek Industries Ltd. Heat-treating methods and systems
US6840671B2 (en) 2001-04-09 2005-01-11 William R. Barron, Jr. System and method for non-contact temperature sensing
US20060190211A1 (en) * 2001-07-23 2006-08-24 Schietinger Charles W In-situ wafer parameter measurement method employing a hot susceptor as radiation source for reflectance measurement
US20030036877A1 (en) * 2001-07-23 2003-02-20 Schietinger Charles W. In-situ wafer parameter measurement method employing a hot susceptor as a reflected light source
US6753506B2 (en) 2001-08-23 2004-06-22 Axcelis Technologies System and method of fast ambient switching for rapid thermal processing
WO2003034011A2 (en) * 2001-10-15 2003-04-24 Bezalel Urban Fire hazard prevention system
CN101324470B (zh) * 2001-12-26 2011-03-30 加拿大马特森技术有限公司 测量温度和热处理的方法及系统
JP2004020337A (ja) * 2002-06-14 2004-01-22 Komatsu Ltd 温度測定装置
US6695886B1 (en) 2002-08-22 2004-02-24 Axcelis Technologies, Inc. Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool
US6768084B2 (en) 2002-09-30 2004-07-27 Axcelis Technologies, Inc. Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
KR100512005B1 (ko) * 2002-11-28 2005-09-02 삼성전자주식회사 이온주입된 웨이퍼의 오염 탐지 방법 및 장치
JP4988202B2 (ja) 2002-12-20 2012-08-01 マトソン テクノロジー カナダ インコーポレイテッド 工作物の支持及び熱処理の方法とシステム
US6971793B2 (en) * 2003-03-21 2005-12-06 Asm Assembly Automation Ltd. Test handler temperature monitoring system
JP4618705B2 (ja) * 2003-09-18 2011-01-26 大日本スクリーン製造株式会社 熱処理装置
US7127367B2 (en) 2003-10-27 2006-10-24 Applied Materials, Inc. Tailored temperature uniformity
US8536492B2 (en) * 2003-10-27 2013-09-17 Applied Materials, Inc. Processing multilayer semiconductors with multiple heat sources
US20080090309A1 (en) * 2003-10-27 2008-04-17 Ranish Joseph M Controlled annealing method
US6855916B1 (en) 2003-12-10 2005-02-15 Axcelis Technologies, Inc. Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling
WO2005059991A1 (en) * 2003-12-19 2005-06-30 Mattson Technology Canada Inc. Apparatuses and methods for suppressing thermally induced motion of a workpiece
TWI255921B (en) * 2004-03-26 2006-06-01 Terry B J Kuo Biochip analyzing system and method thereof
US20050275880A1 (en) * 2004-06-09 2005-12-15 Roland Korst Apparatus and method for controlling and managing an RFID printer system
JP2006005148A (ja) * 2004-06-17 2006-01-05 Sharp Corp 半導体薄膜の製造方法および製造装置
US7205231B2 (en) * 2004-10-29 2007-04-17 Axcelis Technologies, Inc. Method for in-situ uniformity optimization in a rapid thermal processing system
US7275861B2 (en) * 2005-01-31 2007-10-02 Veeco Instruments Inc. Calibration wafer and method of calibrating in situ temperatures
WO2008058397A1 (en) * 2006-11-15 2008-05-22 Mattson Technology Canada, Inc. Systems and methods for supporting a workpiece during heat-treating
US8222574B2 (en) * 2007-01-15 2012-07-17 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
JP4263761B1 (ja) * 2008-01-17 2009-05-13 トヨタ自動車株式会社 減圧式加熱装置とその加熱方法および電子製品の製造方法
WO2009137940A1 (en) 2008-05-16 2009-11-19 Mattson Technology Canada, Inc. Workpiece breakage prevention method and apparatus
US8111978B2 (en) * 2008-07-11 2012-02-07 Applied Materials, Inc. Rapid thermal processing chamber with shower head
WO2012009636A1 (en) * 2010-07-15 2012-01-19 Despatch Industries Limited Partnership Firing furnace configuration for thermal processing system
DE102011116243B4 (de) * 2011-10-17 2014-04-17 Centrotherm Photovoltaics Ag Vorrichtung zum Bestimmen der Temperatur eines Substrats
TWI628730B (zh) * 2011-11-10 2018-07-01 應用材料股份有限公司 透過雷射繞射測量3d半導體結構之溫度的設備及方法
CN103898449B (zh) * 2012-12-27 2017-06-06 北京北方微电子基地设备工艺研究中心有限责任公司 用于调节托盘温度的腔室及半导体加工设备
CN104726837B (zh) * 2013-12-18 2018-05-25 北京北方华创微电子装备有限公司 反应腔室及等离子体加工设备
JP6164097B2 (ja) * 2014-01-20 2017-07-19 ウシオ電機株式会社 熱処理装置
JP6295674B2 (ja) * 2014-01-20 2018-03-20 ウシオ電機株式会社 熱処理装置およびランプ制御方法
CN114927395B (zh) * 2022-04-24 2023-05-19 电子科技大学 一种实时控制NEA GaN电子源反射率的方法

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US5326173A (en) * 1993-01-11 1994-07-05 Alcan International Limited Apparatus and method for remote temperature measurement
US5601366A (en) * 1994-10-25 1997-02-11 Texas Instruments Incorporated Method for temperature measurement in rapid thermal process systems
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
US5848842A (en) * 1994-12-19 1998-12-15 Applied Materials, Inc. Method of calibrating a temperature measurement system

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US5326173A (en) * 1993-01-11 1994-07-05 Alcan International Limited Apparatus and method for remote temperature measurement
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
US5601366A (en) * 1994-10-25 1997-02-11 Texas Instruments Incorporated Method for temperature measurement in rapid thermal process systems
US5848842A (en) * 1994-12-19 1998-12-15 Applied Materials, Inc. Method of calibrating a temperature measurement system

Also Published As

Publication number Publication date
JP4736007B2 (ja) 2011-07-27
KR20000071502A (ko) 2000-11-25
US6375348B1 (en) 2002-04-23
EP1041619B1 (en) 2008-09-17
US6183127B1 (en) 2001-02-06
SG101933A1 (en) 2004-02-27
DE60040253D1 (de) 2008-10-30
JP2000323544A (ja) 2000-11-24
CN1272556A (zh) 2000-11-08
KR100483903B1 (ko) 2005-04-15
EP1041619A3 (en) 2003-01-15
SG109461A1 (en) 2005-03-30
EP1041619A2 (en) 2000-10-04
TW452910B (en) 2001-09-01

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: AXCELIS TECH INC.

Free format text: FORMER OWNER: EATON CORP.

Effective date: 20070525

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20070525

Address after: Massachusetts, USA

Patentee after: Esselis Technologies Co.

Address before: ohio

Patentee before: Eaton Corp.

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20070418

Termination date: 20120329