CN1272455A - 硅铝混合氧化物 - Google Patents
硅铝混合氧化物 Download PDFInfo
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 11
- 239000000843 powder Substances 0.000 claims abstract description 22
- 239000000203 mixture Substances 0.000 claims abstract description 8
- 239000011164 primary particle Substances 0.000 claims abstract description 7
- -1 silicon halide Chemical class 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 239000003570 air Substances 0.000 claims description 8
- 238000002485 combustion reaction Methods 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 8
- 230000003301 hydrolyzing effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 239000000654 additive Substances 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 238000002309 gasification Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 239000007858 starting material Substances 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 claims description 3
- 239000011358 absorbing material Substances 0.000 claims description 2
- 239000013543 active substance Substances 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000012752 auxiliary agent Substances 0.000 claims description 2
- 239000012159 carrier gas Substances 0.000 claims description 2
- 230000003197 catalytic effect Effects 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000002537 cosmetic Substances 0.000 claims description 2
- 239000007888 film coating Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims description 2
- 239000003365 glass fiber Substances 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000003973 paint Substances 0.000 claims description 2
- 239000011118 polyvinyl acetate Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000005498 polishing Methods 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- YAIQCYZCSGLAAN-UHFFFAOYSA-N [Si+4].[O-2].[Al+3] Chemical compound [Si+4].[O-2].[Al+3] YAIQCYZCSGLAAN-UHFFFAOYSA-N 0.000 abstract 2
- 230000007062 hydrolysis Effects 0.000 abstract 2
- 238000006460 hydrolysis reaction Methods 0.000 abstract 2
- 238000002441 X-ray diffraction Methods 0.000 abstract 1
- KMWBBMXGHHLDKL-UHFFFAOYSA-N [AlH3].[Si] Chemical compound [AlH3].[Si] KMWBBMXGHHLDKL-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 230000001464 adherent effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
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Abstract
一种由燃烧水解法制备的硅铝混合氧化物粉末,其组成为:1—99.999wt.%Al2O3,其余为SiO2,该硅铝混合氧化物在X－射线衍射图谱中呈现为无定形结构并由共生的初级粒子组成,而在这些初级粒子中存有晶粒,并且这些晶粒具有1—200纳米的尺寸,所述粉末的比表面积为5—300m2/g。所述粉末通过燃烧水解法制备。所述硅铝混合氧化物在制备在电子工业中用于抛光的悬浮分散体中的应用。
Description
本发明涉及一种硅铝混合氧化物，其制备方法以及其在用于抛光电子元件、特别是用于CMP用途的悬浮分散体中作为抛光剂的应用。
专利说明书EP-0585544中公开了通过燃烧水解法制备的粉末状硅铝混合氧化物，其具有无定形结构且组成为：65-72.1wt.％Al2O3和27.9-35wt.％SiO2并具有20-200m2/g的BET表面积。
本发明提供一种由燃烧水解法制得的硅铝混合氧化物粉末，其组成为：1-99.999wt.％Al2O3，优选40-80wt.％Al2O3，其余为SiO2，其中该粉末在X-射线衍射图谱中呈现为无定形结构并由共生的初级粒子组成，而在这些初级粒子中存有晶粒，并且这些晶粒具有1-200纳米的尺寸，所述粉末的比表面积为5-300m2/g，优选为50-150m2/g。
本发明也提供一种制备由本发明的燃烧水解法制得的硅铝氧化物粉末的方法，其中将卤化硅和卤化铝以指定的相互比率气化并在一混合设备中通过载体气而与空气、氧气和氢气均匀混合，该混合物在一已知结构的燃烧器中进行燃烧，当从气相中分离出固体以后，在另一处理步骤中于高温下利用湿空气将可能粘附在所述产物上的任何微量的卤化物除去。
现已发现，将制成悬浮分散体的本发明的硅铝混合氧化物作为抛光剂具有极佳的性能。
这些悬浮分散体特别是可在电子工业(CMP)中用于抛光。
本发明的硅铝混合氧化物也可在电子工业中用作填料、载体材料、催化活性物质、陶瓷原材料，用作聚合物的填料，用作制备玻璃或玻璃涂料或玻璃纤维的原材料，在化妆品工业中用作隔离助剂，在硅氧烷和橡胶工业中用作吸收材料、添加剂，用于调节液体体系的流变性，用于防热稳定化，在牙科工业中用作隔热材料、流动控制剂，在制药工业、涂料工业、聚乙烯薄膜应用、荧光管中用作助剂，用于制备过滤器陶瓷或过滤器原材料，在墨水和电池隔板中以粉末形式用作调色剂、除锈剂，用作聚乙烯和聚醋酸乙烯酯薄膜涂层的添加剂。
实施例
相应于在EP-0585544的实施例1中介绍的已知燃烧器装置，指定将下述用量用于制备混合氧化物。实施例1
将从燃烧器或从反应中得到的1.6Nm3/h氢气与5Nm3/h空气和1.70kg/h已气化的SiCl4混合到一起。此外，将2.5kg/h气态AlCl3(其已在约300℃下气化)加入至温度约为200℃的所述混合物中。在一燃烧管中燃烧该混合物，另外同时将12Nm3/h空气加入至该燃烧管。
在所述材料穿过燃烧管后，将所得的粉末在一过滤器或旋流器中从含有盐酸的气体中分离出来，且所粘附的微量盐酸通过在高温下处理而从所得的混合氧化物中分离出来。
所述混合氧化物的分析数据如下：
BET比表面积为56m2/g，4％的悬浮分散体的PH值为4.52，堆积密度49g/l，填实密度为59g/l。所述粉末的组成为：63.6wt.％Al2O3，36.3wt.％SiO2。实施例2
将从燃烧器或从反应中得到的1.2Nm3/h氢气与6Nm3/h空气和1.70kg/h已气化的SiCl4混合在一起。此外，将2.5kg/h气态AlCl3(其已在约300℃下气化)加入至温度约为200℃的所述混合物中。在一燃烧管中燃烧该混合物，另外同时将12Nm3/h空气加入至该燃烧管。
当所述材料穿过燃烧管后，将所得的粉末在一过滤器或旋流器中从含有盐酸的气体中分离出来，且所粘附的微量盐酸通过在高温下处理而从所得的混合氧化物中分离出来。
所述混合氧化物的分析数据如下：
BET比表面积为99m2/g，4％的悬浮分散体的PH值为3.9，堆积密度39g/l，填实密度为48g/l。所述粉末的组成为：64.4wt.％Al2O3，35.52wt.％SiO2。粉末的其它特征
所述粉末具有下述特征：这些粉末的X-衍射图谱(实施例1的图1)表明，在所述粉末中实际上没有晶体相。
但同时，高分辨率电子显微镜表明，所述粉末的初级粒子包含部分晶体区域，这可能决定了用这些混合氧化物制备的分散体具有好的抛光性能(图2)。
Claims (4)
1、一种由燃烧水解法制得的硅铝混合氧化物粉末，其组成为：1-99.999wt.％Al2O3，优选40-80wt.％Al2O3，其余为SiO2，其中该粉末在X-射线衍射图谱中呈现为无定形结构并由共生的初级粒子组成，而在这些初级粒子中存有晶粒，并且这些晶粒具有1-200纳米的尺寸，所述粉末的比表面积为5-300m2/g。
2、制备如权利要求1所述的由燃烧水解法制得的硅铝氧化物粉末的方法，其中将卤化硅和卤化铝以指定的相互比率气化并在一混合设备中通过载体气而与空气、氧气和氢气均匀混合，该混合物在一已知结构的燃烧器中进行燃烧，当从气相中分离出固体以后，在另一处理步骤中于高温下利用湿空气将可能粘附在所述产物上的任何微量的卤化物除去。
3、如权利要求1所述的由燃烧水解法制得的硅铝混合氧化物在制备特别是在电子工业中用于抛光的悬浮分散体的应用。
4、如权利要求1所述的由燃烧水解法制得的硅铝混合氧化物的应用：在电子工业中用作填料、载体材料、催化活性物质、陶瓷原材料，用作聚合物的填料，用作制备玻璃或玻璃涂料或玻璃纤维的原材料，在化妆品工业中用作隔离助剂，在硅氧烷和橡胶工业中用作吸收材料、添加剂，用于调节液体体系的流变性，用于防热稳定化，在牙科工业中用作隔热材料、流动控制剂，在制药工业、涂料工业、聚乙烯薄膜应用、荧光管中用作助剂，用于制备过滤器陶瓷或过滤器原材料，在墨水和电池隔板中以粉末形式用作调色剂、除锈剂，用作聚乙烯和聚醋酸乙烯酯薄膜涂层的添加剂。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19919635A DE19919635A1 (de) | 1999-04-30 | 1999-04-30 | Silicium-Aluminium-Mischoxid |
| DE19919635.4 | 1999-04-30 |
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| CN1272455A true CN1272455A (zh) | 2000-11-08 |
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| CN00105417A Pending CN1272455A (zh) | 1999-04-30 | 2000-03-21 | 硅铝混合氧化物 |
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|---|---|
| EP (1) | EP1048617B1 (zh) |
| JP (2) | JP2001010811A (zh) |
| KR (1) | KR100669833B1 (zh) |
| CN (1) | CN1272455A (zh) |
| AT (1) | ATE312056T1 (zh) |
| AU (1) | AU2264600A (zh) |
| BR (1) | BR0002102A (zh) |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100369803C (zh) * | 2005-05-31 | 2008-02-20 | 昆明理工大学 | 一种制备气相法纳米氧化物的方法和装置 |
| CN102015531A (zh) * | 2008-05-16 | 2011-04-13 | 电气化学工业株式会社 | 无定形二氧化硅质粉末、其制造方法以及用途 |
| CN112028097A (zh) * | 2020-08-19 | 2020-12-04 | 南通江山农药化工股份有限公司 | 一种制备纳米氧化铝-二氧化硅复合粉体的方法及其制品 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10049971A1 (de) * | 2000-10-06 | 2002-04-11 | Wieland Edelmetalle | Dentales Formteil und Verfahren zu dessen Herstellung |
| EP1234800A1 (de) * | 2001-02-22 | 2002-08-28 | Degussa Aktiengesellschaft | Wässrige Dispersion, Verfahren zu ihrer Herstellung und Verwendung |
| DE10135452A1 (de) | 2001-07-20 | 2003-02-06 | Degussa | Pyrogen hergestellte Aluminium-Silicium-Mischoxide |
| ES2225366T3 (es) | 2001-08-08 | 2005-03-16 | Degussa Aktiengesellschaft | Particulas de oxido metalico recubiertas con dioxido de silicio. |
| DE10149130A1 (de) * | 2001-10-05 | 2003-04-10 | Degussa | Flammenhydrolytisch hergestelltes, mit zweiwertigen Metalloxiden dotiertes Aluminiumoxid und wässerige Dispersion hiervon |
| DE10205280C1 (de) | 2002-02-07 | 2003-07-03 | Degussa | Dispersion zum chemisch-mechanischen Polieren |
| US20030162398A1 (en) | 2002-02-11 | 2003-08-28 | Small Robert J. | Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
| DE10360087A1 (de) * | 2003-12-20 | 2005-07-21 | Degussa Ag | Flammenhydrolytisch hergestelltes, hochoberflächiges Aluminiumoxidpulver |
| EP2028228B1 (en) | 2004-10-25 | 2018-12-12 | IGM Group B.V. | Functionalized nanoparticles |
| JP5345787B2 (ja) * | 2008-02-04 | 2013-11-20 | 電気化学工業株式会社 | 半導体封止材用シリカ・アルミナ複合酸化物超微粉末の製造方法 |
| DE102010002356A1 (de) | 2010-02-25 | 2011-08-25 | Evonik Degussa GmbH, 45128 | Zusammensetzungen von mit oligomeren Siloxanolen funktionalisierten Metalloxiden und deren Verwendung |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE2931585A1 (de) * | 1979-08-03 | 1981-02-12 | Degussa | Temperaturstabilisiertes, pyrogen hergestelltes aluminiumoxid-mischoxid, das verfahren zu seiner herstellung und verwendung |
| JPH01119559A (ja) * | 1987-11-02 | 1989-05-11 | Kureha Chem Ind Co Ltd | ムライト−アルミナ複合焼結体及びその製造方法 |
| AU650382B2 (en) * | 1992-02-05 | 1994-06-16 | Norton Company | Nano-sized alpha alumina particles |
| DE4214724C2 (de) * | 1992-05-04 | 1995-05-18 | Starck H C Gmbh Co Kg | Feinteiliges Oxid-Keramikpulver |
| DE4228711A1 (de) * | 1992-08-28 | 1994-03-03 | Degussa | Silicium-Aluminium-Mischoxid |
-
1999
- 1999-04-30 DE DE19919635A patent/DE19919635A1/de not_active Ceased
-
2000
- 2000-03-03 AT AT00104675T patent/ATE312056T1/de not_active IP Right Cessation
- 2000-03-03 EP EP00104675A patent/EP1048617B1/de not_active Expired - Lifetime
- 2000-03-03 DE DE50011789T patent/DE50011789D1/de not_active Expired - Lifetime
- 2000-03-21 CN CN00105417A patent/CN1272455A/zh active Pending
- 2000-03-29 AU AU22646/00A patent/AU2264600A/en not_active Abandoned
- 2000-04-27 JP JP2000127975A patent/JP2001010811A/ja not_active Withdrawn
- 2000-04-28 KR KR1020000022705A patent/KR100669833B1/ko not_active IP Right Cessation
- 2000-04-28 CA CA002307057A patent/CA2307057A1/en not_active Abandoned
- 2000-04-28 BR BR0002102-4A patent/BR0002102A/pt not_active IP Right Cessation
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2009
- 2009-06-10 JP JP2009139220A patent/JP2009196891A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100369803C (zh) * | 2005-05-31 | 2008-02-20 | 昆明理工大学 | 一种制备气相法纳米氧化物的方法和装置 |
| CN102015531A (zh) * | 2008-05-16 | 2011-04-13 | 电气化学工业株式会社 | 无定形二氧化硅质粉末、其制造方法以及用途 |
| CN102015531B (zh) * | 2008-05-16 | 2013-10-16 | 电气化学工业株式会社 | 无定形二氧化硅质粉末、其制造方法以及用途 |
| CN112028097A (zh) * | 2020-08-19 | 2020-12-04 | 南通江山农药化工股份有限公司 | 一种制备纳米氧化铝-二氧化硅复合粉体的方法及其制品 |
| CN112028097B (zh) * | 2020-08-19 | 2023-10-17 | 南通江山农药化工股份有限公司 | 一种制备纳米氧化铝-二氧化硅复合粉体的方法及其制品 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1048617A1 (de) | 2000-11-02 |
| JP2009196891A (ja) | 2009-09-03 |
| KR100669833B1 (ko) | 2007-01-18 |
| ATE312056T1 (de) | 2005-12-15 |
| EP1048617B1 (de) | 2005-12-07 |
| AU2264600A (en) | 2000-11-02 |
| DE19919635A1 (de) | 2000-11-23 |
| CA2307057A1 (en) | 2000-10-30 |
| KR20010049302A (ko) | 2001-06-15 |
| BR0002102A (pt) | 2000-10-31 |
| DE50011789D1 (de) | 2006-01-12 |
| JP2001010811A (ja) | 2001-01-16 |
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