AU2264600A - Solicon-aluminium mixed oxide - Google Patents
Solicon-aluminium mixed oxide Download PDFInfo
- Publication number
- AU2264600A AU2264600A AU22646/00A AU2264600A AU2264600A AU 2264600 A AU2264600 A AU 2264600A AU 22646/00 A AU22646/00 A AU 22646/00A AU 2264600 A AU2264600 A AU 2264600A AU 2264600 A AU2264600 A AU 2264600A
- Authority
- AU
- Australia
- Prior art keywords
- silicon
- mixed oxide
- industry
- produced
- flame hydrolysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 4
- 239000004411 aluminium Substances 0.000 title claims description 3
- 239000000843 powder Substances 0.000 claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 13
- 239000003570 air Substances 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 230000007062 hydrolysis Effects 0.000 claims abstract description 9
- 238000006460 hydrolysis reaction Methods 0.000 claims abstract description 9
- -1 aluminum halides Chemical class 0.000 claims abstract description 7
- 239000011164 primary particle Substances 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 5
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000012159 carrier gas Substances 0.000 claims abstract description 3
- 150000004820 halides Chemical group 0.000 claims abstract description 3
- 238000002156 mixing Methods 0.000 claims abstract description 3
- 239000001301 oxygen Substances 0.000 claims abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 3
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- 239000007787 solid Substances 0.000 claims abstract description 3
- KMWBBMXGHHLDKL-UHFFFAOYSA-N [AlH3].[Si] Chemical compound [AlH3].[Si] KMWBBMXGHHLDKL-UHFFFAOYSA-N 0.000 claims description 13
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000002485 combustion reaction Methods 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 239000007858 starting material Substances 0.000 claims description 4
- 229920002799 BoPET Polymers 0.000 claims description 2
- 230000002745 absorbent Effects 0.000 claims description 2
- 239000002250 absorbent Substances 0.000 claims description 2
- 239000013543 active substance Substances 0.000 claims description 2
- 239000000654 additive Substances 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims description 2
- 239000012752 auxiliary agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000010276 construction Methods 0.000 claims description 2
- 239000002537 cosmetic Substances 0.000 claims description 2
- 239000007888 film coating Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims description 2
- 239000003365 glass fiber Substances 0.000 claims description 2
- 239000003112 inhibitor Substances 0.000 claims description 2
- 239000000976 ink Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000003973 paint Substances 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims description 2
- 229920002689 polyvinyl acetate Polymers 0.000 claims description 2
- 239000011118 polyvinyl acetate Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 238000000518 rheometry Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 230000006641 stabilisation Effects 0.000 claims description 2
- YAIQCYZCSGLAAN-UHFFFAOYSA-N [Si+4].[O-2].[Al+3] Chemical compound [Si+4].[O-2].[Al+3] YAIQCYZCSGLAAN-UHFFFAOYSA-N 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 238000001889 high-resolution electron micrograph Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/183—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/20—Silicates
- C01B33/26—Aluminium-containing silicates, i.e. silico-aluminates
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
- C01F7/30—Preparation of aluminium oxide or hydroxide by thermal decomposition or by hydrolysis or oxidation of aluminium compounds
- C01F7/302—Hydrolysis or oxidation of gaseous aluminium compounds in the gaseous phase
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/02—Amorphous compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/60—Compounds characterised by their crystallite size
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/50—Agglomerated particles
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/11—Powder tap density
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/22—Rheological behaviour as dispersion, e.g. viscosity, sedimentation stability
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Physics & Mathematics (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Composite Materials (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Silicon Compounds (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Pigments, Carbon Blacks, Or Wood Stains (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Inks, Pencil-Leads, Or Crayons (AREA)
- Filtering Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Catalysts (AREA)
Abstract
A mixed silicon-aluminum oxide powder, produced by flame hydrolysis and having an amorphous structure with primary particles containing nano-crystallites, is new. A mixed silicon-aluminum oxide powder, having the composition 1-99.999 wt.% Al2O3 and balance SiO2 and produced by flame hydrolysis, has an amorphous structure (as shown by x-ray diffraction), consists of co-grown primary particles containing crystallites of 1-200 nm size and has a specific surface of 5-300 m<2>/g. An Independent claim is also included for production of the mixed oxide by evaporating silicon and aluminum halides in a specific ratio, uniformly mixing with a carrier gas of air, oxygen and hydrogen, combusting the mixture in a burner and, after separating solids from the gas phase, removing any halide residues adhering to the product by treating with moist air at elevated temperatu
Description
S&F Ref: 499340
AUSTRALIA
PATENTS ACT 1990 COMPLETE SPECIFICATION FOR A STANDARD PATENT
ORIGINAL
a. a a Name and Address of Applicant: Actual Inventor(s): Address for Service: Degussa-Huls Aktiengesellschaft D-60287 Frankfurt am Main Germany Klaus Deller, Rainer Golchert, Dieter Kerner, Helmut Mangold Spruson Ferguson St Martins Tower 31 Market Street Sydney NSW 2000 Silicon-aluminium Mixed Oxide description of this invention, including the best method of Invention Title: The following statement is a full performing it known to me/us:- 5845c >l 990033 FH 1 Silicon-aluminium mixed oxide This invention relates to a silicon-aluminium mixed oxide, a process for the production thereof as well as the use as a polishing agent in dispersions which are used, for example, for polishing electronic components, in particular for CMP applications.
The patent specification EP-0 585 544 discloses pulverulent silicon-aluminium mixed oxides produced by flame hydrolysis which are of amorphous structure and have a composition of 1 0 from 65 to 72.1 wt.% A1 2 0 3 and from 27.9 to 35 wt.% SiO 2 and a BET surface area of between 20 and 200 m 2 /g.
The invention provides a silicon-aluminium mixed oxide powder produced by flame hydrolysis and having a composition of from 1 to 99.999 wt.% A1 2 0 3 preferably 15 to 80 wt.% A1 2 0 3 the remainder being SiO 2 wherein the powder exhibits an amorphous structure in the X-ray diffraction pattern and consists of intergrown primary particles, and in these primary particles crystallites are present, and these crystallites have sizes of between one and 200 nanometres and the specific surface of the powder is between 5 and 300 m 2 preferably between 50 and 150 m 2 /g.
The invention also provides a process for the production of the silicon-aluminium oxide powder produced by flame hydrolysis according to the invention, wherein silicon halide and aluminium halide are vaporised in a particular ratio to one another and are homogeneously mixed with air, oxygen and hydrogen in a mixing unit by means of a carrier gas, this mixture undergoes combustion in a burner of known construction and, after the separation of the solids from the vapour phase, any traces of halide possibly adhering to the product are separated off in a further processing step by means of moist air at elevated temperature.
990033 FH 2 It has now been found that silicon-aluminium mixed oxides according to the invention which are made into a dispersion exhibit outstanding properties as polishing agents.
These dispersions can be used in particular for polishing in the electronics industry (CMP).
The silicon-aluminium mixed oxide according to the invention can also be used as filler, as supporting material, as a catalytically active substance, as ceramic raw material, in the electronics industry, as filler for polymers, as starting material for the production of glass or glass coatings or glass fibres, as auxiliary separating agents, in the cosmetics industry, as absorbent material, as an additive in the silicone and rubber industry, for adjusting the rheology of liquid systems, for heat- 15 protective stabilisation, as heat-insulating material, as flow-control agents, in the dental industry, as auxiliary agents in the pharmaceutical industry, in the paint industry, in PET-film applications, in fluorescent tubes, as starting material for the production of filter ceramics 20 or filters, in powders for toners, as rust inhibitors, as agents for the film-coating of polyethylene (PET) and polyvinyl acetate, in inks and in battery separators.
Examples Corresponding to the known burner arrangement described in Example 1 of EP-0 585 544, the following quantities are specified for the production of the mixed oxide.
Example 1: 1.6 Nm 3 /h hydrogen from the burner or from the reaction together with 5 Nm3/h air and 1.70 kg/h of previously vaporised SiCl, are mixed together. Into this mixture, which is at a temperature of about 200 is fed in addition 2.5 kg/h gaseous AlCl 3 (which has previously been vaporised at about 300 0 This mixture undergoes 990033 FH 3 combustion in a flame tube, while in addition 12 Nm 3 /h air is fed into this flame tube.
After the material has passed through the flame tube, the resulting powder is separated, in a filter or cyclone, from the gases containing hydrochloric acid, and adhering traces of hydrochloric acid are separated from the resulting mixed oxide by treatment at elevated temperature.
The analytical data for the mixed oxide is as follows: Specific BET surface area 56 m2/g, pH of a 4 per cent 10 dispersion 4.52, bulk density 49 g/l, tamped density 59 g/l. Composition of the powder: 63.6 wt.% A1 2 36.3 wt.% SiO 2 Example 2: 1.2 Nm3/h hydrogen from the burner or from the reaction together with 6 Nm3/h air and 1.70 kg/h of previously vaporised SiC14 are mixed together. Into this mixture, which is at a temperature of about 200 is fed in addition 2.5 kg/h gaseous AlCl 3 (which has previously been vaporised at about 300 0 This mixture undergoes 20 combustion in a flame tube, while in addition 12 Nm 3 /h air is fed into this flame tube.
After the material has passed through the flame tube, the resulting powder is separated, in a filter or cyclone, from the gases containing hydrochloric acid, and adhering traces of hydrochloric acid are separated from the resulting mixed oxide by treatment at elevated temperature.
The analytical data for the mixed oxide is as follows: Specific BET surface area 99 m 2 pH of a 4 per cent dispersion 3.9, bulk density 39 g/l, tamped density 48 g/.
Composition of the powder: 64.3 wt.% A1 2 0 3 35.52 wt.% SiO,.
Additional characterisation of the powders: 990033 FH 4 The powders have the following special feature: The X-ray diffraction patterns of these powders (Figure 1 of Example 1) show that there are virtually no crystalline phases in the powder.
But at the same time a high-resolution electron micrograph shows that the primary particles of the powders contain partially crystalline regions, which are probably responsible for the good polishing performance of the dispersions prepared from these mixed oxides (Figure 2).
*e e e* eo e
Claims (6)
1.A silicon-aluminium mixed oxide powder produced by flame hydrolysis and having a composition of from 1 to 99.999 wt.% A1 2 0 3 the remainder being SiO 2 wherein the powder exhibits an amorphous structure in the X-ray diffraction pattern and consists of intergrown primary particles, and in these primary particles crystallites are present, and these crystallites have sizes of between one and 200 nanometres and the specific surface of the powder is between 5 and 300 m 2 /g.
2.A process for the production of the silicon-aluminium mixed oxide produced by flame hydrolysis as claimed in claim 1, wherein silicon halide and aluminium halide are vaporised in a particular ratio to one another and are 15 homogeneously mixed with air, oxygen and hydrogen in a mixing unit by means of a carrier gas, this mixture g undergoes combustion in a burner of known construction and, after the separation of the solids from the vapour phase, any traces of halide possibly adhering to the 20 product are separated off in a further processing step by means of moist air at elevated temperature.
3.The use of the silicon-aluminium mixed oxide produced by flame hydrolysis as claimed in claim 1 for the production of dispersions which are used for polishing, in particular in the electronics industry (CMP).
4.The use of the silicon-aluminium mixed oxide produced by flame hydrolysis as claimed in claim 1 as filler, as supporting material, as a catalytically active substance, as ceramic raw material, in the electronics industry, as filler for polymers, as starting material for the production of glass or glass coatings or glass fibres, as auxiliary separating agents, in the cosmetics industry, as absorbent material, as an additive in the silicone and rubber industry, for adjusting the rheology of liquid systems, for heat-protective stabilisation, as 6 heat-insulating material, as flow-control agents, in the dental industry, as auxiliary agents in the pharmaceutical industry, in the paint industry, in PET-film applications, in fluoroescent tubes, as starting material for the production of filter ceramics or filters, in powders for toners, as rust inhibitors, as agents for the film-coating of polyethylene (PET) and polyvinyl acetate, in inks and in battery separators.
A silicon-aluminium mixed oxide powder, substantially as hereinbefore described with reference to any one of the examples.
6. Silicon-aluminium mixed oxide, produced by the process according to claim 2. Dated 27 March, 2000 1 0 Degussa-Huls Aktiengesellshaft Patent Attorneys for the Applicant/Nominated Person SPRUSON FERGUSON e* *o •o* o* o* IR:\LIBUUjO2O82.doc. NCN
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19919635A DE19919635A1 (en) | 1999-04-30 | 1999-04-30 | Silicon-aluminum mixed oxide |
| DE199196354 | 1999-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2264600A true AU2264600A (en) | 2000-11-02 |
Family
ID=7906365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU22646/00A Abandoned AU2264600A (en) | 1999-04-30 | 2000-03-29 | Solicon-aluminium mixed oxide |
Country Status (9)
| Country | Link |
|---|---|
| EP (1) | EP1048617B1 (en) |
| JP (2) | JP2001010811A (en) |
| KR (1) | KR100669833B1 (en) |
| CN (1) | CN1272455A (en) |
| AT (1) | ATE312056T1 (en) |
| AU (1) | AU2264600A (en) |
| BR (1) | BR0002102A (en) |
| CA (1) | CA2307057A1 (en) |
| DE (2) | DE19919635A1 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10049971A1 (en) * | 2000-10-06 | 2002-04-11 | Wieland Edelmetalle | Ceramic dental articles such as crowns are made by electrophoretic deposition of a particle dispersion onto a shaped electrode and are strengthened by inclusion of ceramic fibers and/or nanocrystalline particles |
| EP1234800A1 (en) | 2001-02-22 | 2002-08-28 | Degussa Aktiengesellschaft | Aqueous dispersion, process for its production and use thereof |
| DE10135452A1 (en) | 2001-07-20 | 2003-02-06 | Degussa | Pyrogenically produced aluminum-silicon mixed oxides |
| DE50104223D1 (en) | 2001-08-08 | 2004-11-25 | Degussa | Metal oxide particles coated with silicon dioxide |
| DE10149130A1 (en) * | 2001-10-05 | 2003-04-10 | Degussa | Flame hydrolytic alumina doped with divalent metal oxide is used in aqueous dispersion for chemical-mechanical polishing of metallic and nonmetallic surfaces, coating paper or producing special glass |
| DE10205280C1 (en) * | 2002-02-07 | 2003-07-03 | Degussa | Aqueous dispersion used for chemical-mechanical polishing of oxide surface, preferably silica, contains pyrogenic silica powder doped with alumina from aerosol with specified particle size |
| US20030162398A1 (en) | 2002-02-11 | 2003-08-28 | Small Robert J. | Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
| DE10360087A1 (en) * | 2003-12-20 | 2005-07-21 | Degussa Ag | Flame hydrolysis produced, hochoberflächiges alumina powder |
| EP1805255A1 (en) | 2004-10-25 | 2007-07-11 | Ciba Specialty Chemicals Holding Inc. | Functionalized nanoparticles |
| CN100369803C (en) * | 2005-05-31 | 2008-02-20 | 昆明理工大学 | Method and apparatus for preparing fumed nano oxide |
| JP5345787B2 (en) * | 2008-02-04 | 2013-11-20 | 電気化学工業株式会社 | Method for producing silica-alumina composite oxide ultrafine powder for semiconductor encapsulant |
| JP5553749B2 (en) * | 2008-05-16 | 2014-07-16 | 電気化学工業株式会社 | Amorphous siliceous powder, production method and use thereof |
| DE102010002356A1 (en) | 2010-02-25 | 2011-08-25 | Evonik Degussa GmbH, 45128 | Compositions of metal oxides functionalized with oligomeric siloxanols and their use |
| CN112028097B (en) * | 2020-08-19 | 2023-10-17 | 南通江山农药化工股份有限公司 | Method for preparing nano alumina-silicon dioxide composite powder and product thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2931585A1 (en) * | 1979-08-03 | 1981-02-12 | Degussa | TEMPERATURE-STABILIZED, PYROGEN-PRODUCED ALUMINUM OXIDE MIXED OXIDE, THE METHOD FOR THE PRODUCTION AND USE THEREOF |
| JPH01119559A (en) * | 1987-11-02 | 1989-05-11 | Kureha Chem Ind Co Ltd | Mullite-alumina composite sintered compact and its production |
| AU650382B2 (en) * | 1992-02-05 | 1994-06-16 | Norton Company | Nano-sized alpha alumina particles |
| DE4214724C2 (en) * | 1992-05-04 | 1995-05-18 | Starck H C Gmbh Co Kg | Fine-particle oxide ceramic powder |
| DE4228711A1 (en) * | 1992-08-28 | 1994-03-03 | Degussa | Silicon-aluminum mixed oxide |
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1999
- 1999-04-30 DE DE19919635A patent/DE19919635A1/en not_active Ceased
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2000
- 2000-03-03 EP EP00104675A patent/EP1048617B1/en not_active Expired - Lifetime
- 2000-03-03 AT AT00104675T patent/ATE312056T1/en not_active IP Right Cessation
- 2000-03-03 DE DE50011789T patent/DE50011789D1/en not_active Expired - Lifetime
- 2000-03-21 CN CN00105417A patent/CN1272455A/en active Pending
- 2000-03-29 AU AU22646/00A patent/AU2264600A/en not_active Abandoned
- 2000-04-27 JP JP2000127975A patent/JP2001010811A/en not_active Withdrawn
- 2000-04-28 BR BR0002102-4A patent/BR0002102A/en not_active IP Right Cessation
- 2000-04-28 CA CA002307057A patent/CA2307057A1/en not_active Abandoned
- 2000-04-28 KR KR1020000022705A patent/KR100669833B1/en not_active IP Right Cessation
-
2009
- 2009-06-10 JP JP2009139220A patent/JP2009196891A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP1048617B1 (en) | 2005-12-07 |
| JP2001010811A (en) | 2001-01-16 |
| DE50011789D1 (en) | 2006-01-12 |
| KR20010049302A (en) | 2001-06-15 |
| CA2307057A1 (en) | 2000-10-30 |
| BR0002102A (en) | 2000-10-31 |
| EP1048617A1 (en) | 2000-11-02 |
| CN1272455A (en) | 2000-11-08 |
| JP2009196891A (en) | 2009-09-03 |
| KR100669833B1 (en) | 2007-01-18 |
| ATE312056T1 (en) | 2005-12-15 |
| DE19919635A1 (en) | 2000-11-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK1 | Application lapsed section 142(2)(a) - no request for examination in relevant period |