CN1246429C - 用于二氧化碳的磷酸酯氟表面活性剂 - Google Patents

用于二氧化碳的磷酸酯氟表面活性剂 Download PDF

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Publication number
CN1246429C
CN1246429C CNB018162401A CN01816240A CN1246429C CN 1246429 C CN1246429 C CN 1246429C CN B018162401 A CNB018162401 A CN B018162401A CN 01816240 A CN01816240 A CN 01816240A CN 1246429 C CN1246429 C CN 1246429C
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CN
China
Prior art keywords
surfactant
composition
matter
carbon dioxide
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB018162401A
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English (en)
Chinese (zh)
Other versions
CN1466620A (zh
Inventor
J·M·德西莫尼
J·S·凯佩尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of North Carolina at Chapel Hill
North Carolina State University
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University of North Carolina at Chapel Hill
North Carolina State University
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Application filed by University of North Carolina at Chapel Hill, North Carolina State University filed Critical University of North Carolina at Chapel Hill
Publication of CN1466620A publication Critical patent/CN1466620A/zh
Application granted granted Critical
Publication of CN1246429C publication Critical patent/CN1246429C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/004—Surface-active compounds containing F
    • C11D1/006—Surface-active compounds containing fluorine and phosphorus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/34—Derivatives of acids of phosphorus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/906—Cleaning of wafer as interim step

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
  • Detergent Compositions (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
CNB018162401A 2000-09-26 2001-09-25 用于二氧化碳的磷酸酯氟表面活性剂 Expired - Fee Related CN1246429C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23551600P 2000-09-26 2000-09-26
US60/235,516 2000-09-26

Publications (2)

Publication Number Publication Date
CN1466620A CN1466620A (zh) 2004-01-07
CN1246429C true CN1246429C (zh) 2006-03-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB018162401A Expired - Fee Related CN1246429C (zh) 2000-09-26 2001-09-25 用于二氧化碳的磷酸酯氟表面活性剂

Country Status (9)

Country Link
US (2) US6684525B2 (enExample)
EP (1) EP1328610B1 (enExample)
JP (1) JP2004509756A (enExample)
KR (1) KR20030051680A (enExample)
CN (1) CN1246429C (enExample)
AT (1) ATE399838T1 (enExample)
AU (1) AU2002211258A1 (enExample)
DE (1) DE60134657D1 (enExample)
WO (1) WO2002026921A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
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WO2002026921A1 (en) * 2000-09-26 2002-04-04 University Of North Carolina At Chapel Hill Phosphate fluorosurfactants for use in carbon dioxide
US20020123452A1 (en) * 2001-01-25 2002-09-05 Desimone Joseph M. Zwitterionic gemini surfactants for use in carbon dioxide
US7011716B2 (en) * 2003-04-29 2006-03-14 Advanced Technology Materials, Inc. Compositions and methods for drying patterned wafers during manufacture of integrated circuitry products
AU2003210997A1 (en) * 2003-02-13 2004-09-09 The Trustees Of Columbia University In The City Of New York Micropatterning of molecular surfaces via selective irradiation
WO2005060668A2 (en) * 2003-12-18 2005-07-07 The Trustees Of Columbia University In The City Ofnew York Methods of modifying surfaces
US7410820B2 (en) * 2004-01-05 2008-08-12 Texas Instruments Incorporated MEMS passivation with phosphonate surfactants
US20050183740A1 (en) * 2004-02-19 2005-08-25 Fulton John L. Process and apparatus for removing residues from semiconductor substrates
CN1960813A (zh) * 2004-05-07 2007-05-09 高级技术材料公司 在制备集成电路产品过程中用于干燥构图晶片的组合物和方法
GB0615743D0 (en) * 2006-08-09 2006-09-20 Reckitt Benckiser Uk Ltd Applicator,kit and process
US8263670B2 (en) * 2007-08-06 2012-09-11 E.I. Du Pont De Nemours And Company Mixed fluoroalkyl-alkyl surfactants
US7728163B2 (en) 2007-08-06 2010-06-01 E.I. Du Pont De Nemours And Company Mixed fluoroalkyl-alkyl surfactants
US20110092410A1 (en) * 2009-10-20 2011-04-21 E.I. Du Pont De Nemours And Company Fluoroalkyl phosphate compositions
US20110091408A1 (en) * 2009-10-20 2011-04-21 E. I. Du Pont De Nemours And Company Methods of using fluoroalkyl phosphate compositions
KR200451807Y1 (ko) * 2010-07-12 2011-01-13 윤근진 혈액비중 검사장치
PL3435472T3 (pl) * 2014-07-07 2021-11-08 Daikin Industries, Ltd. Ciekły elektrolit zawierający sól metalu alkalicznego związku fosforanowego
JP7369401B2 (ja) * 2019-03-29 2023-10-26 国立研究開発法人産業技術総合研究所 二酸化炭素吸収液、及び富二酸化炭素吸収液の調製方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0478686B1 (en) 1989-06-22 1993-08-11 Applications Et Transferts De Technologies Avancees Atta Fluorine and phosphorous-containing amphiphilic molecules with surfactant properties
FR2682110B1 (fr) 1991-10-02 1995-05-24 Atta Ligands amphiphiles perfluoroalkyles leurs complexes metalliques et leurs utilisations dans des preparations a usage therapeutique.
US5846516A (en) 1992-06-03 1998-12-08 Alliance Pharmaceutial Corp. Perfluoroalkylated amphiphilic phosphorus compounds: preparation and biomedical applications
FR2694559B1 (fr) 1992-08-06 1994-10-28 Atta Nouveaux dérivés amphiphiles d'aminoacides ou de peptides, leur procédé de préparation et leur utilisation dans des préparations à usage biomédical.
US5312882A (en) * 1993-07-30 1994-05-17 The University Of North Carolina At Chapel Hill Heterogeneous polymerization in carbon dioxide
US5377705A (en) * 1993-09-16 1995-01-03 Autoclave Engineers, Inc. Precision cleaning system
FR2710840B1 (fr) 1993-10-04 1995-12-01 Applic Transferts Technolo Compositions viscoélastiques hautement concentrées en composés fluorés, leur préparation et leurs utilisations dans le domaine médical et en cosmétique.
US5965258A (en) 1994-03-16 1999-10-12 Alliance Pharmaceutical Corp. Elongated microstructures from perfluoroalkylated amphiphiles
FR2720943B1 (fr) 1994-06-09 1996-08-23 Applic Transferts Technolo Emulsions inverses stables à forte concentration en composé(s) fluoré(s) et leur utilisation pour l'administration pulmonaire de médicaments et pour la fabrication d'émulsions multiples.
US5650705A (en) * 1995-02-13 1997-07-22 Hart; John Roger Apparatus and method for controlling currents in an inductor
FI973603A0 (fi) * 1995-03-06 1997-09-05 Unilever Nv Kuivapesujärjestelmä, jossa käytetään tiivistettyä hiilidioksidia ja pinta-aktiivista apuainetta
US5683977A (en) * 1995-03-06 1997-11-04 Lever Brothers Company, Division Of Conopco, Inc. Dry cleaning system using densified carbon dioxide and a surfactant adjunct
US5676705A (en) * 1995-03-06 1997-10-14 Lever Brothers Company, Division Of Conopco, Inc. Method of dry cleaning fabrics using densified carbon dioxide
FR2737135B1 (fr) 1995-07-24 1997-09-12 Atta Gels inverses a phase continue fluoree
US5783082A (en) * 1995-11-03 1998-07-21 University Of North Carolina Cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants
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US6001418A (en) * 1997-12-16 1999-12-14 The University Of North Carolina At Chapel Hill Spin coating method and apparatus for liquid carbon dioxide systems
US5977045A (en) 1998-05-06 1999-11-02 Lever Brothers Company Dry cleaning system using densified carbon dioxide and a surfactant adjunct
JP3035594B1 (ja) * 1999-03-11 2000-04-24 工業技術院長 二酸化炭素媒体中で用いる界面活性剤
AU4218200A (en) * 1999-04-08 2000-10-23 University Of North Carolina At Chapel Hill, The Polymerization of non-fluorinated monomers in carbon dioxide
WO2002026921A1 (en) * 2000-09-26 2002-04-04 University Of North Carolina At Chapel Hill Phosphate fluorosurfactants for use in carbon dioxide
US6562146B1 (en) * 2001-02-15 2003-05-13 Micell Technologies, Inc. Processes for cleaning and drying microelectronic structures using liquid or supercritical carbon dioxide
US6398875B1 (en) * 2001-06-27 2002-06-04 International Business Machines Corporation Process of drying semiconductor wafers using liquid or supercritical carbon dioxide
US6669785B2 (en) * 2002-05-15 2003-12-30 Micell Technologies, Inc. Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide
US6953041B2 (en) * 2002-10-09 2005-10-11 Micell Technologies, Inc. Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof
US6929904B2 (en) * 2002-11-14 2005-08-16 The University Of North Carolina At Chapel Hill Positive tone lithography with carbon dioxide development systems

Also Published As

Publication number Publication date
EP1328610B1 (en) 2008-07-02
EP1328610A4 (en) 2004-09-01
JP2004509756A (ja) 2004-04-02
EP1328610A1 (en) 2003-07-23
AU2002211258A1 (en) 2002-04-08
WO2002026921A1 (en) 2002-04-04
US20020107159A1 (en) 2002-08-08
KR20030051680A (ko) 2003-06-25
CN1466620A (zh) 2004-01-07
US20040138080A1 (en) 2004-07-15
DE60134657D1 (de) 2008-08-14
US6684525B2 (en) 2004-02-03
US7122060B2 (en) 2006-10-17
ATE399838T1 (de) 2008-07-15

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SE01 Entry into force of request for substantive examination
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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060322

Termination date: 20100925