CN1242912C - 致动器单元 - Google Patents

致动器单元 Download PDF

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Publication number
CN1242912C
CN1242912C CNB008063664A CN00806366A CN1242912C CN 1242912 C CN1242912 C CN 1242912C CN B008063664 A CNB008063664 A CN B008063664A CN 00806366 A CN00806366 A CN 00806366A CN 1242912 C CN1242912 C CN 1242912C
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CN
China
Prior art keywords
arm
titanium
actuating unit
actuator element
synthetic
Prior art date
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Expired - Fee Related
Application number
CNB008063664A
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English (en)
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CN1347386A (zh
Inventor
K·西尔弗布鲁克
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Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
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Publication of CN1347386A publication Critical patent/CN1347386A/zh
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Publication of CN1242912C publication Critical patent/CN1242912C/zh
Anticipated expiration legal-status Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04573—Timing; Delays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04585—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Valve Device For Special Equipments (AREA)
  • Fluid-Damping Devices (AREA)
  • Reciprocating Pumps (AREA)
  • Pens And Brushes (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Prostheses (AREA)
  • External Artificial Organs (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

一种用于微机电装置的致动器单元，包括一个可移动臂，所述可移动臂包括第一臂，它与第二臂互连，并且设置成通过所述第一臂的电流使所述第一臂相对所述第二臂延伸，由此使所述可移动臂弯曲，其中所述第一臂至少部分地由钛铝氮化物合成物所构成。这种合成物有很高的氧化温度，使得能经受致动器单元在短时间内产生的高温。在一个实施例中，该致动器单元在喷墨打印机中构成热弯曲致动器部件。

Description

致动器单元
发明领域
本发明涉及一种构成微机电装置一部分的致动器单元。本发明在此被描述为一种喷墨打印机，但也适合应用在其它微机电装置上，如微机电泵。
发明背景
微机电装置越来越变得广为人知，并且，通常使用半导体制造技术制造。有关微机电装置的述评，可参考刊登在1998年12月出版的IEEE Spectrum第24页至第33页的S.Tom Picraux和Paul J.McWhorter所写的文章“The Broad Sweep of Integrated MicroSystems”。
微机电装置的一种类型是喷墨打印装置，墨水通过墨水喷射喷嘴腔从其喷出。已知有许多形式的喷墨打印装置。有关该领域的调查，请参考J.Moore的文章“Non-Impact Printing：Introduction andHistorical Perspective”，Output Hard Copy Devices，编辑R.Dubeck和S.Sherr，第207-220页(1988)。
本发明的申请人最近开发了一种新型喷墨打印机，被称为微机电喷墨(Micro Electro Mechanical Inkjet)(MEMJET)技术。在MEMJET技术的一个实施例中，墨水由叶片或活塞从喷射喷嘴腔中喷出，而机电致动器使叶片或活塞向喷射喷嘴腔方向移动，以使墨滴从喷墨喷嘴腔喷出。
本发明涉及一种致动器单元，用作MEMJET技术中和其它微机电装置中的集成部件。
发明概述
本发明可概括地定义为提供一种致动器单元，作为微机电装置的一部分，其中，致动器单元包括一个可移动臂，该臂在一端连接到基底，至少部分地由钛铝氮化物合成物所构成。铝的含量最好不超过整个铝钛组分的55％，并且，最优选铝含量为相当于整个钛铝组分的20％。
致动器单元的可移动臂最好通过阴极喷镀工艺作为半导体制造工艺中的一个步骤制成。更具体地说，致动器单元的可移动臂可以由钛铝合金的活性喷镀材料在氮气气氛下制成。
本发明由于使用了有很高氧化温度的铝氮化物合成物，使得能在短时间内在致动器单元内产生高温，因而改进了致动器单元的性能，提供了一种改进的致动器单元。
发明的详细说明
本发明的致动器单元以其优选形式而制造，是打印头喷墨器的一部分，墨水通过热致动器的启动而喷出。热致动器包括第一和第二臂，以这种方式互连：当电流通过第一臂时，使第一臂被加热并相对于第二臂延伸，从而导致它们弯曲。
第一和第二臂被耦合到一个像喷墨器喷嘴里的叶片这样的可移动元件，并且，臂的弯曲引起可移动元件的移动，结果使得从喷嘴喷墨。
上述结构的更具体的描述，可以参照本发明申请人2000年2月11日提交的国际专利申请PCT/AU00/00095。
已推荐钛氮化物作为一种材料，适用于制造臂，电(加热)流从该臂中流过的材料。众所周知，该材料适合在制造半导体装置中使用，并且，它有一个为产生所需弯曲特性所要求的热扩散系数。
然而，已经确定，为了使打印机达到最大工作效率，在短时间内-通常小于2微秒-在热致动器内应产生高温，而这就限制了钛氮化物的使用。众所周知，钛氮化物在600℃左右的温度氧化，这限制了该材料的使用。
在本发明中，钛铝氮化物合成物是适用的，其氧化温度在900℃这样的量级。
对于第一臂，铝的含量最好不超过整个铝钛组分的55％，并且，最优选铝含量为相当于整个钛铝组分的20％。

Claims (2)

1.一种构成微机电装置一部分的致动器单元，它包括一个在一端连接到基底的可移动臂，所述可移动臂包括第一臂，它与第二臂互连，并且设置成通过所述第一臂的电流使所述第一臂相对所述第二臂延伸，由此使所述可移动臂弯曲，其中所述第一臂至少部分地由钛铝氮化物合成物所构成，所述合成物中铝的含量为所述合成物的20％到55％。
2.如权利要求1的致动器单元，其中，所述第一臂由钛铝合金的活性喷镀材料在氮气气氛下制成。
CNB008063664A 1999-04-22 2000-04-20 致动器单元 Expired - Fee Related CN1242912C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP9930 1999-04-22
AUPP9930A AUPP993099A0 (en) 1999-04-22 1999-04-22 A micromechancial device and method(ij46p2b)

Publications (2)

Publication Number Publication Date
CN1347386A CN1347386A (zh) 2002-05-01
CN1242912C true CN1242912C (zh) 2006-02-22

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ID=3814129

Family Applications (3)

Application Number Title Priority Date Filing Date
CNB008063664A Expired - Fee Related CN1242912C (zh) 1999-04-22 2000-04-20 致动器单元
CNB2004100737993A Expired - Fee Related CN1318215C (zh) 1999-04-22 2000-04-20 使用微机电装置的液体喷射装置
CNB008064040A Expired - Fee Related CN1172799C (zh) 1999-04-22 2000-04-20 控制液体从液体喷射装置流入及流出的方法及其喷射装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
CNB2004100737993A Expired - Fee Related CN1318215C (zh) 1999-04-22 2000-04-20 使用微机电装置的液体喷射装置
CNB008064040A Expired - Fee Related CN1172799C (zh) 1999-04-22 2000-04-20 控制液体从液体喷射装置流入及流出的方法及其喷射装置

Country Status (12)

Country Link
US (1) US6457795B1 (zh)
EP (2) EP1175371A4 (zh)
JP (2) JP2002542949A (zh)
KR (2) KR100597470B1 (zh)
CN (3) CN1242912C (zh)
AT (1) ATE369250T1 (zh)
AU (1) AUPP993099A0 (zh)
CA (2) CA2370950C (zh)
DE (1) DE60035869T2 (zh)
IL (3) IL145973A (zh)
SG (1) SG129258A1 (zh)
WO (2) WO2000064805A1 (zh)

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US6457812B1 (en) * 2000-10-20 2002-10-01 Silverbrook Research Pty Ltd Bend actuator in an ink jet printhead
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JP4933629B2 (ja) * 2006-12-04 2012-05-16 シルバーブルック リサーチ ピーティワイ リミテッド アクティブビームでノズルチャンバルーフの要部を画成する熱曲げアクチュエータを有するインクジェットノズル組立体
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JP6999317B2 (ja) * 2017-07-21 2022-01-18 東芝テック株式会社 インクジェットヘッド及びインクジェットプリンタ

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Also Published As

Publication number Publication date
KR100639316B1 (ko) 2006-10-26
JP2002542949A (ja) 2002-12-17
WO2000064805A1 (en) 2000-11-02
JP2002542088A (ja) 2002-12-10
DE60035869T2 (de) 2008-04-24
CN1318215C (zh) 2007-05-30
EP1178888A1 (en) 2002-02-13
SG129258A1 (en) 2007-02-26
EP1178888A4 (en) 2002-07-17
IL145973A0 (en) 2002-07-25
KR100597470B1 (ko) 2006-07-05
CA2370950A1 (en) 2000-11-02
CN1618612A (zh) 2005-05-25
CA2370773C (en) 2008-09-02
KR20020012179A (ko) 2002-02-15
CN1347369A (zh) 2002-05-01
CA2370773A1 (en) 2000-11-02
IL168247A (en) 2011-11-30
EP1175371A4 (en) 2004-06-16
KR20020012177A (ko) 2002-02-15
IL145973A (en) 2005-09-25
CN1347386A (zh) 2002-05-01
US6457795B1 (en) 2002-10-01
CA2370950C (en) 2008-11-18
CN1172799C (zh) 2004-10-27
DE60035869D1 (de) 2007-09-20
JP4476495B2 (ja) 2010-06-09
AUPP993099A0 (en) 1999-05-20
IL145975A0 (en) 2002-07-25
EP1175371A1 (en) 2002-01-30
ATE369250T1 (de) 2007-08-15
EP1178888B1 (en) 2007-08-08
WO2000064678A1 (en) 2000-11-02

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