CN1223613C - 具有直立室的等离子体聚合连续处理设备 - Google Patents

具有直立室的等离子体聚合连续处理设备 Download PDF

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Publication number
CN1223613C
CN1223613C CN01813566.8A CN01813566A CN1223613C CN 1223613 C CN1223613 C CN 1223613C CN 01813566 A CN01813566 A CN 01813566A CN 1223613 C CN1223613 C CN 1223613C
Authority
CN
China
Prior art keywords
chamber
electrode
vertical
polymerization
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN01813566.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN1444605A (zh
Inventor
河三喆
郑永万
赵石济
尹东植
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of CN1444605A publication Critical patent/CN1444605A/zh
Application granted granted Critical
Publication of CN1223613C publication Critical patent/CN1223613C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3382—Polymerising

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
CN01813566.8A 2001-05-30 2001-05-30 具有直立室的等离子体聚合连续处理设备 Expired - Fee Related CN1223613C (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2001/000907 WO2002096956A1 (fr) 2001-05-30 2001-05-30 Dispositif de traitement continu par polymerisation plasma comportant une chambre verticale

Publications (2)

Publication Number Publication Date
CN1444605A CN1444605A (zh) 2003-09-24
CN1223613C true CN1223613C (zh) 2005-10-19

Family

ID=19198390

Family Applications (1)

Application Number Title Priority Date Filing Date
CN01813566.8A Expired - Fee Related CN1223613C (zh) 2001-05-30 2001-05-30 具有直立室的等离子体聚合连续处理设备

Country Status (4)

Country Link
EP (1) EP1404722A1 (fr)
JP (1) JP2004520493A (fr)
CN (1) CN1223613C (fr)
WO (1) WO2002096956A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4553608B2 (ja) * 2004-03-11 2010-09-29 Ｊｆｅスチール株式会社 金属ストリップの連続式化学蒸着装置
CN103632917A (zh) * 2013-11-27 2014-03-12 苏州市奥普斯等离子体科技有限公司 一种连续材料表面常压等离子体处理装置
CN110331378B (zh) * 2019-07-18 2024-01-19 中国科学院金属研究所 金刚石薄膜连续制备使用的hfcvd设备及其镀膜方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57182302A (en) * 1981-05-06 1982-11-10 Shuzo Hattori Apparatus for forming polymer film by plasma polymerization
JPS58145540A (ja) * 1982-02-19 1983-08-30 Nippon Denso Co Ltd 車両用エンジン温度表示装置
JPS61112312A (ja) * 1984-11-07 1986-05-30 Hitachi Ltd 真空連続処理装置
JPH04110467A (ja) * 1990-08-31 1992-04-10 Terumo Corp 機能性膜の製造方法およびその製造装置
JPH04314349A (ja) * 1991-04-11 1992-11-05 Mitsutoyo Corp 真空リソグラフィ装置
JPH06136506A (ja) * 1992-10-21 1994-05-17 Nisshin Steel Co Ltd 金属帯材のプラズマ重合処理方法及び装置

Also Published As

Publication number Publication date
EP1404722A1 (fr) 2004-04-07
JP2004520493A (ja) 2004-07-08
WO2002096956A1 (fr) 2002-12-05
CN1444605A (zh) 2003-09-24

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20051019