JP2004520493A - 垂直チャンバを具備したプラズマ重合連続処理装置 - Google Patents

垂直チャンバを具備したプラズマ重合連続処理装置 Download PDF

Info

Publication number
JP2004520493A
JP2004520493A JP2003500135A JP2003500135A JP2004520493A JP 2004520493 A JP2004520493 A JP 2004520493A JP 2003500135 A JP2003500135 A JP 2003500135A JP 2003500135 A JP2003500135 A JP 2003500135A JP 2004520493 A JP2004520493 A JP 2004520493A
Authority
JP
Japan
Prior art keywords
chamber
vertical
substrate
plasma polymerization
polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003500135A
Other languages
English (en)
Japanese (ja)
Inventor
ハ，サム−チュル
ジョン，ヨウン−マン
ヨウン，ドン−シク
ジョ，ソク−ジェ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of JP2004520493A publication Critical patent/JP2004520493A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/338—Changing chemical properties of treated surfaces
    • H01J2237/3382—Polymerising

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP2003500135A 2001-05-30 2001-05-30 垂直チャンバを具備したプラズマ重合連続処理装置 Pending JP2004520493A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2001/000907 WO2002096956A1 (fr) 2001-05-30 2001-05-30 Dispositif de traitement continu par polymerisation plasma comportant une chambre verticale

Publications (1)

Publication Number Publication Date
JP2004520493A true JP2004520493A (ja) 2004-07-08

Family

ID=19198390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003500135A Pending JP2004520493A (ja) 2001-05-30 2001-05-30 垂直チャンバを具備したプラズマ重合連続処理装置

Country Status (4)

Country Link
EP (1) EP1404722A1 (fr)
JP (1) JP2004520493A (fr)
CN (1) CN1223613C (fr)
WO (1) WO2002096956A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4553608B2 (ja) * 2004-03-11 2010-09-29 Ｊｆｅスチール株式会社 金属ストリップの連続式化学蒸着装置
CN103632917A (zh) * 2013-11-27 2014-03-12 苏州市奥普斯等离子体科技有限公司 一种连续材料表面常压等离子体处理装置
CN110331378B (zh) * 2019-07-18 2024-01-19 中国科学院金属研究所 金刚石薄膜连续制备使用的hfcvd设备及其镀膜方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57182302A (en) * 1981-05-06 1982-11-10 Shuzo Hattori Apparatus for forming polymer film by plasma polymerization
JPS58145540A (ja) * 1982-02-19 1983-08-30 Nippon Denso Co Ltd 車両用エンジン温度表示装置
JPS61112312A (ja) * 1984-11-07 1986-05-30 Hitachi Ltd 真空連続処理装置
JPH04110467A (ja) * 1990-08-31 1992-04-10 Terumo Corp 機能性膜の製造方法およびその製造装置
JPH04314349A (ja) * 1991-04-11 1992-11-05 Mitsutoyo Corp 真空リソグラフィ装置
JPH06136506A (ja) * 1992-10-21 1994-05-17 Nisshin Steel Co Ltd 金属帯材のプラズマ重合処理方法及び装置

Also Published As

Publication number Publication date
CN1444605A (zh) 2003-09-24
WO2002096956A1 (fr) 2002-12-05
CN1223613C (zh) 2005-10-19
EP1404722A1 (fr) 2004-04-07

Similar Documents

Publication Publication Date Title
KR100492769B1 (ko) 수직챔버를 구비한 플라즈마중합 연속처리장치
US9803280B2 (en) Method and apparatus for depositing atomic layers on a substrate
JP6255341B2 (ja) 基板上に原子層を堆積させる方法および装置
JP4747658B2 (ja) 成膜装置及び成膜方法
US9133547B2 (en) Plasma CVD apparatus
EP2653586B1 (fr) Appareil de cvd assisté par plasma
JP4747665B2 (ja) 成膜装置及び成膜方法
JP2004520493A (ja) 垂直チャンバを具備したプラズマ重合連続処理装置
JP6080960B2 (ja) プラズマ化学気相蒸着装置
JP2006303265A (ja) 成膜装置及び成膜方法
US20180144910A1 (en) Method for treating the surface of a moving film, and facility for implementing said method
KR101413981B1 (ko) 플라즈마 발생장치 및 이를 포함하는 박막증착장치
KR20010086971A (ko) 플라즈마 중합처리장치의 급배기 시스템
KR100404468B1 (ko) 플라즈마를 이용한 고분자막 연속증착장비의가스막힘방지장치
KR20130143234A (ko) 플라즈마 발생장치 및 이를 포함하는 박막증착장치
KR101632398B1 (ko) 플라즈마 화학기상 장치
KR100438947B1 (ko) 플라즈마를 이용한 고분자막 연속증착장비의 세정방법
KR20010019014A (ko) 플라즈마중합처리장치
KR100386506B1 (ko) 플라즈마중합연속처리장치의 가스시스템
KR20060079715A (ko) Ｅｃｒ-ｃｖｄ 및 전자빔을 이용한 필름상 중합체금속박막 형성장치 및 방법
KR20010019015A (ko) 플라즈마중합처리장치
JP2004176119A (ja) 常圧プラズマｃｖｄによる薄膜形成方法及び常圧プラズマｃｖｄ装置
JPH02115363A (ja) プラスマ処理−真空蒸着装置
KR20010088078A (ko) 플라즈마중합시스템의 애쉬제거장치
KR20040026881A (ko) 플라즈마 챔버장치

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060907

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070206

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20070502

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20070511

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070523

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070925

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20071221

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080104

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20080701